DE69725245D1 - Verfahren zur Ätzung von Substraten - Google Patents

Verfahren zur Ätzung von Substraten

Info

Publication number
DE69725245D1
DE69725245D1 DE69725245T DE69725245T DE69725245D1 DE 69725245 D1 DE69725245 D1 DE 69725245D1 DE 69725245 T DE69725245 T DE 69725245T DE 69725245 T DE69725245 T DE 69725245T DE 69725245 D1 DE69725245 D1 DE 69725245D1
Authority
DE
Germany
Prior art keywords
etching
etching substrates
trench
depositing
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69725245T
Other languages
English (en)
Other versions
DE69725245T2 (de
Inventor
Jyoti Kiron Bhardwaj
Huma Ashraf
Babak Khamsehpour
Janet Hopkins
Alan Michael Hynes
Martin Edward Ryan
David Mark Haynes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9616223.5A external-priority patent/GB9616223D0/en
Priority claimed from GBGB9616224.3A external-priority patent/GB9616224D0/en
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Application granted granted Critical
Publication of DE69725245D1 publication Critical patent/DE69725245D1/de
Publication of DE69725245T2 publication Critical patent/DE69725245T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3065—Plasma etching; Reactive-ion etching
    • H01L21/30655—Plasma etching; Reactive-ion etching comprising alternated and repeated etching and passivation steps, e.g. Bosch process
DE69725245T 1996-08-01 1997-07-28 Verfahren zur Ätzung von Substraten Expired - Lifetime DE69725245T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB9616223.5A GB9616223D0 (en) 1996-08-01 1996-08-01 Method of surface treatment of semiconductor substrates
GBGB9616224.3A GB9616224D0 (en) 1996-08-01 1996-08-01 Method of surface treatment of semiconductor substrates
GB9616224 1996-08-01
GB9616223 1996-08-01

Publications (2)

Publication Number Publication Date
DE69725245D1 true DE69725245D1 (de) 2003-11-06
DE69725245T2 DE69725245T2 (de) 2004-08-12

Family

ID=26309796

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69725245T Expired - Lifetime DE69725245T2 (de) 1996-08-01 1997-07-28 Verfahren zur Ätzung von Substraten

Country Status (5)

Country Link
US (1) US6051503A (de)
EP (2) EP0822582B1 (de)
JP (2) JP3540129B2 (de)
AT (1) ATE251341T1 (de)
DE (1) DE69725245T2 (de)

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* Cited by examiner, † Cited by third party
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US6051503A (en) 2000-04-18
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