DE69716272T2 - Breitbandiges spektroellipsometer mit rotierendem kompensator - Google Patents

Breitbandiges spektroellipsometer mit rotierendem kompensator

Info

Publication number
DE69716272T2
DE69716272T2 DE69716272T DE69716272T DE69716272T2 DE 69716272 T2 DE69716272 T2 DE 69716272T2 DE 69716272 T DE69716272 T DE 69716272T DE 69716272 T DE69716272 T DE 69716272T DE 69716272 T2 DE69716272 T2 DE 69716272T2
Authority
DE
Germany
Prior art keywords
spectroellipsometer
broadband
rotating compensator
compensator
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69716272T
Other languages
English (en)
Other versions
DE69716272D1 (de
Inventor
E Aspnes
Jon Opsal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Wave Inc
Original Assignee
Therma Wave Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Wave Inc filed Critical Therma Wave Inc
Publication of DE69716272D1 publication Critical patent/DE69716272D1/de
Application granted granted Critical
Publication of DE69716272T2 publication Critical patent/DE69716272T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0232—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
DE69716272T 1996-07-24 1997-07-22 Breitbandiges spektroellipsometer mit rotierendem kompensator Expired - Lifetime DE69716272T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/685,606 US5877859A (en) 1996-07-24 1996-07-24 Broadband spectroscopic rotating compensator ellipsometer
PCT/US1997/013313 WO1998003853A1 (en) 1996-07-24 1997-07-22 Broadband spectroscopic rotating compensator ellipsometer

Publications (2)

Publication Number Publication Date
DE69716272D1 DE69716272D1 (de) 2002-11-14
DE69716272T2 true DE69716272T2 (de) 2003-06-26

Family

ID=24752935

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69716272T Expired - Lifetime DE69716272T2 (de) 1996-07-24 1997-07-22 Breitbandiges spektroellipsometer mit rotierendem kompensator

Country Status (6)

Country Link
US (7) US5877859A (de)
EP (2) EP0914600B1 (de)
JP (1) JP4140737B2 (de)
DE (1) DE69716272T2 (de)
ES (1) ES2185038T3 (de)
WO (1) WO1998003853A1 (de)

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US6320657B1 (en) 2001-11-20
ES2185038T3 (es) 2003-04-16
EP0914600B1 (de) 2002-10-09
US6449043B2 (en) 2002-09-10
EP1197741A3 (de) 2002-08-07
US20020018205A1 (en) 2002-02-14
US6134012A (en) 2000-10-17
WO1998003853A1 (en) 1998-01-29
US5877859A (en) 1999-03-02
EP1197741A2 (de) 2002-04-17
US6831743B2 (en) 2004-12-14
DE69716272D1 (de) 2002-11-14
US20020191186A1 (en) 2002-12-19
US6650415B2 (en) 2003-11-18
JP4140737B2 (ja) 2008-08-27
US5973787A (en) 1999-10-26
EP0914600A1 (de) 1999-05-12
JP2000515247A (ja) 2000-11-14
US20040042009A1 (en) 2004-03-04

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