DE69637994D1 - Ablationsverfahren durch laser-darstellung - Google Patents

Ablationsverfahren durch laser-darstellung

Info

Publication number
DE69637994D1
DE69637994D1 DE69637994T DE69637994T DE69637994D1 DE 69637994 D1 DE69637994 D1 DE 69637994D1 DE 69637994 T DE69637994 T DE 69637994T DE 69637994 T DE69637994 T DE 69637994T DE 69637994 D1 DE69637994 D1 DE 69637994D1
Authority
DE
Germany
Prior art keywords
ablation procedure
presentation
laser
laser presentation
ablation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69637994T
Other languages
English (en)
Inventor
Patrick R Fleming
Andrew J Ouderkirk
Eric J Borchers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of DE69637994D1 publication Critical patent/DE69637994D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
DE69637994T 1995-04-26 1996-03-29 Ablationsverfahren durch laser-darstellung Expired - Lifetime DE69637994D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US42930295A 1995-04-26 1995-04-26
PCT/US1996/004322 WO1996033839A1 (en) 1995-04-26 1996-03-29 Method and apparatus for step and repeat exposures

Publications (1)

Publication Number Publication Date
DE69637994D1 true DE69637994D1 (de) 2009-09-24

Family

ID=23702662

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69637994T Expired - Lifetime DE69637994D1 (de) 1995-04-26 1996-03-29 Ablationsverfahren durch laser-darstellung

Country Status (8)

Country Link
US (1) US6285001B1 (de)
EP (1) EP0822881B1 (de)
JP (1) JP4180654B2 (de)
KR (1) KR19990007929A (de)
AU (1) AU5325596A (de)
CA (1) CA2217018C (de)
DE (1) DE69637994D1 (de)
WO (1) WO1996033839A1 (de)

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JPH11504264A (ja) 1999-04-20
JP4180654B2 (ja) 2008-11-12
EP0822881A1 (de) 1998-02-11
AU5325596A (en) 1996-11-18
CA2217018C (en) 2006-10-17
WO1996033839A1 (en) 1996-10-31
KR19990007929A (ko) 1999-01-25
CA2217018A1 (en) 1996-10-31
EP0822881B1 (de) 2009-08-12

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