DE69628990T2 - Tintenstrahldruckkopf und Verfahren zu dessen Herstellung - Google Patents

Tintenstrahldruckkopf und Verfahren zu dessen Herstellung Download PDF

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Publication number
DE69628990T2
DE69628990T2 DE69628990T DE69628990T DE69628990T2 DE 69628990 T2 DE69628990 T2 DE 69628990T2 DE 69628990 T DE69628990 T DE 69628990T DE 69628990 T DE69628990 T DE 69628990T DE 69628990 T2 DE69628990 T2 DE 69628990T2
Authority
DE
Germany
Prior art keywords
manufacture
inkjet printhead
printhead
inkjet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69628990T
Other languages
English (en)
Other versions
DE69628990D1 (de
Inventor
Masato Shimada
Tetsushi Takahashi
Tsutomu Nishiwaki
Tsutomu Hashizume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69628990D1 publication Critical patent/DE69628990D1/de
Application granted granted Critical
Publication of DE69628990T2 publication Critical patent/DE69628990T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
DE69628990T 1995-11-24 1996-11-25 Tintenstrahldruckkopf und Verfahren zu dessen Herstellung Expired - Lifetime DE69628990T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP30619895 1995-11-24
JP5795096 1996-03-14
JP28448796 1996-10-25
JP30637396A JP3460218B2 (ja) 1995-11-24 1996-11-18 インクジェットプリンタヘッドおよびその製造方法

Publications (2)

Publication Number Publication Date
DE69628990D1 DE69628990D1 (de) 2003-08-14
DE69628990T2 true DE69628990T2 (de) 2004-01-15

Family

ID=27463593

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69636021T Expired - Lifetime DE69636021T2 (de) 1995-11-24 1996-11-25 Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE69628990T Expired - Lifetime DE69628990T2 (de) 1995-11-24 1996-11-25 Tintenstrahldruckkopf und Verfahren zu dessen Herstellung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69636021T Expired - Lifetime DE69636021T2 (de) 1995-11-24 1996-11-25 Tintenstrahldruckkopf und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (2) US6019458A (de)
EP (2) EP0775581B1 (de)
JP (1) JP3460218B2 (de)
DE (2) DE69636021T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3503386B2 (ja) * 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
JP3416467B2 (ja) 1997-06-20 2003-06-16 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットプリント装置
JP3521708B2 (ja) * 1997-09-30 2004-04-19 セイコーエプソン株式会社 インクジェット式記録ヘッドおよびその製造方法
JP2000079686A (ja) * 1998-06-18 2000-03-21 Seiko Epson Corp 圧電体薄膜素子、圧電体薄膜素子を製造するための原盤、インクジェット式記録ヘッド及びこれらの製造方法
EP1067609B1 (de) * 1999-01-22 2010-09-29 Canon Kabushiki Kaisha Piezoelektrische dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf
KR100474832B1 (ko) * 1999-03-19 2005-03-08 삼성전자주식회사 압전 효과를 이용한 잉크젯 프린터 헤드 및 그 제조방법
EP1046506A1 (de) * 1999-04-19 2000-10-25 Océ-Technologies B.V. Tintenstrahldruckkopf
DE69935462T2 (de) * 1999-12-24 2007-11-08 Fujifilm Corp. Verfahren zur Herstellung eines Tintenstrahl-Aufzeichnungskopfs
US6604817B2 (en) * 2000-03-07 2003-08-12 Brother Kogyo Kabushiki Kaisha Print head for piezoelectric ink jet printer, piezoelectric actuator therefor, and process for producing piezoelectric actuator
US6474785B1 (en) 2000-09-05 2002-11-05 Hewlett-Packard Company Flextensional transducer and method for fabrication of a flextensional transducer
US6629756B2 (en) * 2001-02-20 2003-10-07 Lexmark International, Inc. Ink jet printheads and methods therefor
US6613687B2 (en) 2001-03-28 2003-09-02 Lexmark International, Inc. Reverse reactive ion patterning of metal oxide films
JP3998254B2 (ja) * 2003-02-07 2007-10-24 キヤノン株式会社 インクジェットヘッドの製造方法
JP3820589B2 (ja) * 2003-09-26 2006-09-13 富士写真フイルム株式会社 液体吐出ヘッドとその製造方法及びインクジェット記録装置
US7634855B2 (en) * 2004-08-06 2009-12-22 Canon Kabushiki Kaisha Method for producing ink jet recording head
JP2006069152A (ja) * 2004-09-06 2006-03-16 Canon Inc インクジェットヘッド及びその製造方法
US7549223B2 (en) * 2004-09-28 2009-06-23 Fujifilm Corporation Method for manufacturing a liquid ejection head
JP5241017B2 (ja) * 2009-02-10 2013-07-17 富士フイルム株式会社 液体吐出ヘッド及び液体吐出装置並びに画像形成装置
US8061820B2 (en) 2009-02-19 2011-11-22 Fujifilm Corporation Ring electrode for fluid ejection
KR101026758B1 (ko) * 2009-02-27 2011-04-08 삼성전기주식회사 잉크젯 헤드 및 그 제조방법
KR101163514B1 (ko) 2010-12-21 2012-07-06 재단법인 포항산업과학연구원 전단모드 압전에너지 수확장치
US8450213B2 (en) 2011-04-13 2013-05-28 Fujifilm Corporation Forming a membrane having curved features
JP2018167576A (ja) * 2017-03-29 2018-11-01 セイコーエプソン株式会社 圧電デバイス、液体噴射ヘッド、及び、液体噴射装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4312008A (en) * 1979-11-02 1982-01-19 Dataproducts Corporation Impulse jet head using etched silicon
JPS57201665A (en) * 1981-06-05 1982-12-10 Hitachi Ltd Ink jet device
JPH0649373B2 (ja) * 1984-12-06 1994-06-29 キヤノン株式会社 インクジェット記録ヘッドの製造方法
GB2232933B (en) * 1986-07-30 1991-04-03 Pitney Bowes Inc Ink jet print head
JP2952994B2 (ja) * 1990-08-20 1999-09-27 セイコーエプソン株式会社 インクジェットヘッド
US5534900A (en) * 1990-09-21 1996-07-09 Seiko Epson Corporation Ink-jet recording apparatus
JP3134305B2 (ja) * 1990-11-02 2001-02-13 セイコーエプソン株式会社 インクジェットヘッド
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head
US5465108A (en) * 1991-06-21 1995-11-07 Rohm Co., Ltd. Ink jet print head and ink jet printer
JPH05169666A (ja) * 1991-12-25 1993-07-09 Rohm Co Ltd インクジェットプリントヘッドの製造方法
JPH05177831A (ja) * 1991-12-27 1993-07-20 Rohm Co Ltd インクジェットプリントヘッド及びそれを備える電子機器
JP3239274B2 (ja) * 1992-02-26 2001-12-17 富士通株式会社 インクジェットヘッドの製造方法
JP3108959B2 (ja) * 1992-07-08 2000-11-13 セイコーエプソン株式会社 インクジェットヘッド
JPH0671894A (ja) * 1992-08-27 1994-03-15 Fujitsu Ltd インクジェットヘッドの製造方法
JP3171958B2 (ja) * 1992-10-23 2001-06-04 富士通株式会社 インクジェットヘッド
US5896150A (en) * 1992-11-25 1999-04-20 Seiko Epson Corporation Ink-jet type recording head
JPH06171098A (ja) * 1992-12-09 1994-06-21 Matsushita Electric Ind Co Ltd インクジェット記録ヘッドの製造方法
JP3235311B2 (ja) * 1993-12-24 2001-12-04 セイコーエプソン株式会社 インクジェット式記録ヘッド
DE69627045T2 (de) * 1995-04-19 2003-09-25 Seiko Epson Corp Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
US6019458A (en) 2000-02-01
EP1245391A2 (de) 2002-10-02
EP0775581A3 (de) 1999-06-23
EP0775581B1 (de) 2003-07-09
EP0775581A2 (de) 1997-05-28
US6126279A (en) 2000-10-03
DE69636021T2 (de) 2006-08-24
JP3460218B2 (ja) 2003-10-27
EP1245391A3 (de) 2002-11-27
JPH10181010A (ja) 1998-07-07
EP1245391B1 (de) 2006-04-05
DE69636021D1 (de) 2006-05-18
DE69628990D1 (de) 2003-08-14

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