DE69628990D1 - Tintenstrahldruckkopf und Verfahren zu dessen Herstellung - Google Patents
Tintenstrahldruckkopf und Verfahren zu dessen HerstellungInfo
- Publication number
- DE69628990D1 DE69628990D1 DE69628990T DE69628990T DE69628990D1 DE 69628990 D1 DE69628990 D1 DE 69628990D1 DE 69628990 T DE69628990 T DE 69628990T DE 69628990 T DE69628990 T DE 69628990T DE 69628990 D1 DE69628990 D1 DE 69628990D1
- Authority
- DE
- Germany
- Prior art keywords
- making
- same
- ink jet
- jet printhead
- printhead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30619895 | 1995-11-24 | ||
JP5795096 | 1996-03-14 | ||
JP28448796 | 1996-10-25 | ||
JP30637396A JP3460218B2 (ja) | 1995-11-24 | 1996-11-18 | インクジェットプリンタヘッドおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69628990D1 true DE69628990D1 (de) | 2003-08-14 |
DE69628990T2 DE69628990T2 (de) | 2004-01-15 |
Family
ID=27463593
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69628990T Expired - Lifetime DE69628990T2 (de) | 1995-11-24 | 1996-11-25 | Tintenstrahldruckkopf und Verfahren zu dessen Herstellung |
DE69636021T Expired - Lifetime DE69636021T2 (de) | 1995-11-24 | 1996-11-25 | Tintenstrahldruckkopf und Verfahren zu seiner Herstellung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69636021T Expired - Lifetime DE69636021T2 (de) | 1995-11-24 | 1996-11-25 | Tintenstrahldruckkopf und Verfahren zu seiner Herstellung |
Country Status (4)
Country | Link |
---|---|
US (2) | US6019458A (de) |
EP (2) | EP0775581B1 (de) |
JP (1) | JP3460218B2 (de) |
DE (2) | DE69628990T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3503386B2 (ja) * | 1996-01-26 | 2004-03-02 | セイコーエプソン株式会社 | インクジェット式記録ヘッド及びその製造方法 |
JP3416467B2 (ja) | 1997-06-20 | 2003-06-16 | キヤノン株式会社 | インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットプリント装置 |
JP3521708B2 (ja) * | 1997-09-30 | 2004-04-19 | セイコーエプソン株式会社 | インクジェット式記録ヘッドおよびその製造方法 |
JP2000079686A (ja) * | 1998-06-18 | 2000-03-21 | Seiko Epson Corp | 圧電体薄膜素子、圧電体薄膜素子を製造するための原盤、インクジェット式記録ヘッド及びこれらの製造方法 |
WO2000044054A1 (fr) * | 1999-01-22 | 2000-07-27 | Kansai Research Institute | Dispositif a film mince piezoelectrique, procede de production associe et tete d'enregistrement a jet d'encre |
KR100474832B1 (ko) * | 1999-03-19 | 2005-03-08 | 삼성전자주식회사 | 압전 효과를 이용한 잉크젯 프린터 헤드 및 그 제조방법 |
EP1046506A1 (de) * | 1999-04-19 | 2000-10-25 | Océ-Technologies B.V. | Tintenstrahldruckkopf |
KR100566846B1 (ko) * | 1999-12-24 | 2006-04-03 | 후지 샤신 필름 가부시기가이샤 | 잉크젯 기록 헤드의 제조 방법 |
US6604817B2 (en) * | 2000-03-07 | 2003-08-12 | Brother Kogyo Kabushiki Kaisha | Print head for piezoelectric ink jet printer, piezoelectric actuator therefor, and process for producing piezoelectric actuator |
US6474785B1 (en) | 2000-09-05 | 2002-11-05 | Hewlett-Packard Company | Flextensional transducer and method for fabrication of a flextensional transducer |
US6629756B2 (en) * | 2001-02-20 | 2003-10-07 | Lexmark International, Inc. | Ink jet printheads and methods therefor |
US6613687B2 (en) | 2001-03-28 | 2003-09-02 | Lexmark International, Inc. | Reverse reactive ion patterning of metal oxide films |
JP3998254B2 (ja) * | 2003-02-07 | 2007-10-24 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
JP3820589B2 (ja) * | 2003-09-26 | 2006-09-13 | 富士写真フイルム株式会社 | 液体吐出ヘッドとその製造方法及びインクジェット記録装置 |
US7634855B2 (en) * | 2004-08-06 | 2009-12-22 | Canon Kabushiki Kaisha | Method for producing ink jet recording head |
JP2006069152A (ja) * | 2004-09-06 | 2006-03-16 | Canon Inc | インクジェットヘッド及びその製造方法 |
US7549223B2 (en) * | 2004-09-28 | 2009-06-23 | Fujifilm Corporation | Method for manufacturing a liquid ejection head |
JP5241017B2 (ja) * | 2009-02-10 | 2013-07-17 | 富士フイルム株式会社 | 液体吐出ヘッド及び液体吐出装置並びに画像形成装置 |
US8061820B2 (en) | 2009-02-19 | 2011-11-22 | Fujifilm Corporation | Ring electrode for fluid ejection |
KR101026758B1 (ko) * | 2009-02-27 | 2011-04-08 | 삼성전기주식회사 | 잉크젯 헤드 및 그 제조방법 |
KR101163514B1 (ko) | 2010-12-21 | 2012-07-06 | 재단법인 포항산업과학연구원 | 전단모드 압전에너지 수확장치 |
US8450213B2 (en) | 2011-04-13 | 2013-05-28 | Fujifilm Corporation | Forming a membrane having curved features |
JP2018167576A (ja) * | 2017-03-29 | 2018-11-01 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッド、及び、液体噴射装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4312008A (en) * | 1979-11-02 | 1982-01-19 | Dataproducts Corporation | Impulse jet head using etched silicon |
JPS57201665A (en) * | 1981-06-05 | 1982-12-10 | Hitachi Ltd | Ink jet device |
JPH0649373B2 (ja) * | 1984-12-06 | 1994-06-29 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
GB2232933B (en) * | 1986-07-30 | 1991-04-03 | Pitney Bowes Inc | Ink jet print head |
JP2952994B2 (ja) * | 1990-08-20 | 1999-09-27 | セイコーエプソン株式会社 | インクジェットヘッド |
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
JP3134305B2 (ja) * | 1990-11-02 | 2001-02-13 | セイコーエプソン株式会社 | インクジェットヘッド |
US5265315A (en) * | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
US5465108A (en) * | 1991-06-21 | 1995-11-07 | Rohm Co., Ltd. | Ink jet print head and ink jet printer |
JPH05169666A (ja) * | 1991-12-25 | 1993-07-09 | Rohm Co Ltd | インクジェットプリントヘッドの製造方法 |
JPH05177831A (ja) * | 1991-12-27 | 1993-07-20 | Rohm Co Ltd | インクジェットプリントヘッド及びそれを備える電子機器 |
JP3239274B2 (ja) * | 1992-02-26 | 2001-12-17 | 富士通株式会社 | インクジェットヘッドの製造方法 |
JP3108959B2 (ja) * | 1992-07-08 | 2000-11-13 | セイコーエプソン株式会社 | インクジェットヘッド |
JPH0671894A (ja) * | 1992-08-27 | 1994-03-15 | Fujitsu Ltd | インクジェットヘッドの製造方法 |
JP3171958B2 (ja) * | 1992-10-23 | 2001-06-04 | 富士通株式会社 | インクジェットヘッド |
US5896150A (en) * | 1992-11-25 | 1999-04-20 | Seiko Epson Corporation | Ink-jet type recording head |
JPH06171098A (ja) * | 1992-12-09 | 1994-06-21 | Matsushita Electric Ind Co Ltd | インクジェット記録ヘッドの製造方法 |
JP3235311B2 (ja) * | 1993-12-24 | 2001-12-04 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
EP0738599B1 (de) * | 1995-04-19 | 2002-10-16 | Seiko Epson Corporation | Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung |
-
1996
- 1996-11-18 JP JP30637396A patent/JP3460218B2/ja not_active Expired - Fee Related
- 1996-11-25 EP EP96118849A patent/EP0775581B1/de not_active Expired - Lifetime
- 1996-11-25 EP EP02014251A patent/EP1245391B1/de not_active Expired - Lifetime
- 1996-11-25 DE DE69628990T patent/DE69628990T2/de not_active Expired - Lifetime
- 1996-11-25 US US08/756,254 patent/US6019458A/en not_active Expired - Lifetime
- 1996-11-25 DE DE69636021T patent/DE69636021T2/de not_active Expired - Lifetime
-
1998
- 1998-06-30 US US09/107,276 patent/US6126279A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US6019458A (en) | 2000-02-01 |
DE69636021D1 (de) | 2006-05-18 |
EP0775581A3 (de) | 1999-06-23 |
JPH10181010A (ja) | 1998-07-07 |
JP3460218B2 (ja) | 2003-10-27 |
EP1245391A3 (de) | 2002-11-27 |
EP0775581B1 (de) | 2003-07-09 |
DE69636021T2 (de) | 2006-08-24 |
EP1245391A2 (de) | 2002-10-02 |
EP1245391B1 (de) | 2006-04-05 |
US6126279A (en) | 2000-10-03 |
EP0775581A2 (de) | 1997-05-28 |
DE69628990T2 (de) | 2004-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |