DE69624274D1 - Verbundene Gegenstände, korrosionsbeständiges Verbindungsmaterial und Herstellungsverfahren dieser Gegenstände - Google Patents

Verbundene Gegenstände, korrosionsbeständiges Verbindungsmaterial und Herstellungsverfahren dieser Gegenstände

Info

Publication number
DE69624274D1
DE69624274D1 DE69624274T DE69624274T DE69624274D1 DE 69624274 D1 DE69624274 D1 DE 69624274D1 DE 69624274 T DE69624274 T DE 69624274T DE 69624274 T DE69624274 T DE 69624274T DE 69624274 D1 DE69624274 D1 DE 69624274D1
Authority
DE
Germany
Prior art keywords
items
corrosion
manufacturing process
connecting material
resistant connecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69624274T
Other languages
English (en)
Other versions
DE69624274T2 (de
Inventor
Tomoyuki Fuji
Ryusuke Ushikoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69624274D1 publication Critical patent/DE69624274D1/de
Publication of DE69624274T2 publication Critical patent/DE69624274T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/28—Selection of soldering or welding materials proper with the principal constituent melting at less than 950 degrees C
    • B23K35/286—Al as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302—Cu as the principal constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3033—Ni as the principal constituent
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/121—Metallic interlayers based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/123—Metallic interlayers based on iron group metals, e.g. steel
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/124—Metallic interlayers based on copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C04B2237/127—The active component for bonding being a refractory metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/402—Aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/405—Iron metal group, e.g. Co or Ni
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/59—Aspects relating to the structure of the interlayer
    • C04B2237/595—Aspects relating to the structure of the interlayer whereby the interlayer is continuous, but heterogeneous on macro-scale, e.g. one part of the interlayer being a joining material, another part being an electrode material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/78—Side-way connecting, e.g. connecting two plates through their sides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/80—Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736—Al-base component
    • Y10T428/1275—Next to Group VIII or IB metal-base component
DE69624274T 1995-02-09 1996-02-07 Verbundene Gegenstände, korrosionsbeständiges Verbindungsmaterial und Herstellungsverfahren dieser Gegenstände Expired - Lifetime DE69624274T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2165795 1995-02-09
JP02483596A JP3866320B2 (ja) 1995-02-09 1996-01-19 接合体、および接合体の製造方法

Publications (2)

Publication Number Publication Date
DE69624274D1 true DE69624274D1 (de) 2002-11-21
DE69624274T2 DE69624274T2 (de) 2003-08-07

Family

ID=26358754

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69624274T Expired - Lifetime DE69624274T2 (de) 1995-02-09 1996-02-07 Verbundene Gegenstände, korrosionsbeständiges Verbindungsmaterial und Herstellungsverfahren dieser Gegenstände

Country Status (6)

Country Link
US (1) US6106960A (de)
EP (1) EP0726238B1 (de)
JP (1) JP3866320B2 (de)
KR (1) KR0162969B1 (de)
DE (1) DE69624274T2 (de)
TW (1) TW407140B (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3954177B2 (ja) * 1997-01-29 2007-08-08 日本碍子株式会社 金属部材とセラミックス部材との接合構造およびその製造方法
JP3746594B2 (ja) 1997-06-20 2006-02-15 日本碍子株式会社 セラミックスの接合構造およびその製造方法
JP3892965B2 (ja) 1998-03-27 2007-03-14 日本碍子株式会社 接合体の製造方法および接合体
JP4021575B2 (ja) 1999-01-28 2007-12-12 日本碍子株式会社 セラミックス部材と金属部材との接合体およびその製造方法
JP2001130976A (ja) * 1999-11-01 2001-05-15 Mitsubishi Electric Corp セラミックスと金属の接合方法及びその方法により接合されたセラミックスと金属の接合体
US6642654B2 (en) * 2000-07-03 2003-11-04 Ngk Insulators, Ltd. Joined body and a high pressure discharge lamp
US6703136B1 (en) 2000-07-03 2004-03-09 Ngk Insulators, Ltd. Joined body and high-pressure discharge lamp
US6812642B1 (en) 2000-07-03 2004-11-02 Ngk Insulators, Ltd. Joined body and a high-pressure discharge lamp
JP4252231B2 (ja) * 2001-09-05 2009-04-08 日本碍子株式会社 半導体ウェハー支持部材接合体の製造方法および半導体ウェハー支持部材接合体
DE10163171A1 (de) * 2001-12-21 2003-07-03 Solvay Fluor & Derivate Neue Verwendung für Legierungen
US20050106794A1 (en) * 2002-03-26 2005-05-19 Fuji Electric Holdings Co., Ltd. Method of manufacturing a semiconductor device
DE10239416B4 (de) * 2002-08-28 2005-03-03 Robert Bosch Gmbh Verfahren zur Herstellung eines aus Keramikschichten bestehenden Verbundkörpers
JP4008401B2 (ja) * 2003-09-22 2007-11-14 日本碍子株式会社 基板載置台の製造方法
TW200633947A (en) 2005-02-16 2006-10-01 Ngk Insulators Ltd Joined body and manufacturing method for the same
US7611595B2 (en) * 2006-02-01 2009-11-03 Lockheed Martin Corporation System, method, and apparatus for metallic-composite joint with compliant, non-corrosive interface
JP4162094B2 (ja) * 2006-05-30 2008-10-08 三菱重工業株式会社 常温接合によるデバイス、デバイス製造方法ならびに常温接合装置
JP4172806B2 (ja) * 2006-09-06 2008-10-29 三菱重工業株式会社 常温接合方法及び常温接合装置
JP4471004B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP4471003B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP4471002B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
EP2390037A1 (de) * 2009-06-15 2011-11-30 Schneider Electric Industries SAS Verfahren zum Zusammenbau durch reaktives Löten und Vakuumlampe, die nach diesem Verfahren zusammengebaut wurde
JP5669472B2 (ja) * 2010-07-27 2015-02-12 三井金属鉱業株式会社 セラミックス接合体の製造方法
RU2495001C2 (ru) * 2011-03-16 2013-10-10 Открытое акционерное общество "Научно-производственный центр "Полюс" Способ создания электрических металлокерамических гермовводов
US9556074B2 (en) * 2011-11-30 2017-01-31 Component Re-Engineering Company, Inc. Method for manufacture of a multi-layer plate device
US8932690B2 (en) 2011-11-30 2015-01-13 Component Re-Engineering Company, Inc. Plate and shaft device
US10105795B2 (en) * 2012-05-25 2018-10-23 General Electric Company Braze compositions, and related devices
DE102012110152A1 (de) * 2012-07-11 2014-05-15 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle
US20140356681A1 (en) * 2013-05-31 2014-12-04 General Electric Company Brazing structure, and related processes and devices
JP6323128B2 (ja) * 2014-04-03 2018-05-16 新日鐵住金株式会社 回路基板の製造方法
JP6256176B2 (ja) * 2014-04-25 2018-01-10 三菱マテリアル株式会社 接合体の製造方法、パワーモジュール用基板の製造方法
US9548518B2 (en) * 2014-12-16 2017-01-17 General Electric Company Methods for joining ceramic and metallic structures
US9909197B2 (en) * 2014-12-22 2018-03-06 Semes Co., Ltd. Supporting unit and substrate treating apparatus including the same
US10668574B2 (en) * 2017-02-02 2020-06-02 Mhi Health Devices, Llc High temperature devices and applications employing pure aluminum braze for joining components of said devices
JP6965768B2 (ja) * 2017-02-28 2021-11-10 三菱マテリアル株式会社 銅／セラミックス接合体、絶縁回路基板、及び、銅／セラミックス接合体の製造方法、絶縁回路基板の製造方法
WO2018159590A1 (ja) * 2017-02-28 2018-09-07 三菱マテリアル株式会社 銅／セラミックス接合体、絶縁回路基板、及び、銅／セラミックス接合体の製造方法、絶縁回路基板の製造方法
US11648620B2 (en) * 2017-11-29 2023-05-16 Watlow Electric Manufacturing Company Semiconductor processing equipment with high temperature resistant nickel alloy joints and methods for making same
JP7192451B2 (ja) * 2018-01-25 2022-12-20 三菱マテリアル株式会社 銅／セラミックス接合体、絶縁回路基板、及び、銅／セラミックス接合体の製造方法、絶縁回路基板の製造方法
WO2020044594A1 (ja) * 2018-08-28 2020-03-05 三菱マテリアル株式会社 銅／セラミックス接合体、絶縁回路基板、及び、銅／セラミックス接合体の製造方法、及び、絶縁回路基板の製造方法
DE102019126954A1 (de) * 2019-10-08 2021-04-08 Rogers Germany Gmbh Verfahren zur Herstellung eines Metall-Keramik-Substrats, Lötsystem und Metall-Keramik-Substrat, hergestellt mit einem solchen Verfahren
US11638350B2 (en) 2019-12-02 2023-04-25 Mitsubishi Materials Corporation Copper/ceramic bonded body, insulating circuit board, method for producing copper/ceramic bonded body, and method for producing insulating circuit board
WO2021206394A1 (ko) * 2020-04-07 2021-10-14 주식회사 아모센스 폴딩 플레이트 및 그 제조방법
CN116751070B (zh) * 2023-07-03 2023-11-17 江苏富乐华功率半导体研究院有限公司 一种陶瓷覆铝基板的制备方法及其制备的陶瓷覆铝基板

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428450A (en) * 1965-05-12 1969-02-18 Mallory & Co Inc P R Alloys for brazing silicon nitride material
FR2327017A1 (fr) * 1973-04-27 1977-05-06 Commissariat Energie Atomique Procede de fonction de deux pieces en metaux susceptibles de former des aluminiures
US4426033A (en) * 1982-09-20 1984-01-17 Gte Products Corporation Ductile titanium-copper brazing alloy
US4606980A (en) * 1982-09-20 1986-08-19 Gte Products Corporation Ductile aluminum based brazing foil containing reactive metals and copper
JPH0810710B2 (ja) * 1984-02-24 1996-01-31 株式会社東芝 良熱伝導性基板の製造方法
JPH0788262B2 (ja) * 1985-04-01 1995-09-27 株式会社日立製作所 窒化ケイ素と金属との接合方法
US4596354A (en) * 1985-07-03 1986-06-24 The United States Of America As Represented By The United States Department Of Energy Oxidation resistant filler metals for direct brazing of structural ceramics
US4854495A (en) * 1986-06-20 1989-08-08 Hitachi, Ltd. Sealing structure, method of soldering and process for preparing sealing structure
DE68904214T2 (de) * 1988-03-04 1993-05-19 Toshiba Kawasaki Kk Hartloetpaste zum verbinden von metalle und keramische materialien.
GB8821044D0 (en) * 1988-09-08 1988-10-05 Metal Box Plc Method of bonding tool material to holder & tools made by method
US4897243A (en) * 1988-11-07 1990-01-30 Gte Products Corporation Ductile brazing alloy of copper-nickel-silicon-titanium
DE69031039T2 (de) * 1990-04-16 1997-11-06 Denki Kagaku Kogyo Kk Keramische leiterplatte
EP0455229B1 (de) * 1990-05-02 1997-10-15 Mitsubishi Materials Corporation Keramisches Substrat verwendet für eine elektrische oder elektronische Schaltung
US5213877A (en) * 1991-05-02 1993-05-25 Mitsubishi Materials Corporation Ceramic substrate used for fabricating electric or electronic circuit
US5372298A (en) * 1992-01-07 1994-12-13 The Regents Of The University Of California Transient liquid phase ceramic bonding
JPH05194054A (ja) * 1992-01-20 1993-08-03 Murata Mfg Co Ltd 窒化アルミニウム基板と金属板の接合方法
JPH0775717B2 (ja) * 1992-09-22 1995-08-16 日本碍子株式会社 有機性汚泥の嫌気性消化処理方法
KR950701575A (ko) * 1992-05-12 1995-04-28 마이클 씨. 퍼비스 질소화 알루미늄의 박막 금속화 및 브레이징(thin film metallization and brazing of aluminum nitride)
US5600530A (en) * 1992-08-04 1997-02-04 The Morgan Crucible Company Plc Electrostatic chuck
US5629559A (en) * 1993-04-06 1997-05-13 Tokuyama Corporation Package for semiconductor device
DE4319533A1 (de) * 1993-06-12 1994-12-15 Hoechst Ceram Tec Ag Innenlötung bei Metall-Keramik-Verbunden
JP3505212B2 (ja) * 1994-03-09 2004-03-08 株式会社東芝 接合体および接合体の製造方法
DE69517248T2 (de) * 1994-07-15 2000-10-12 Mitsubishi Materials Corp Keramik-Gehäuse mit hoher Wärmeabstrahlung
US5633073A (en) * 1995-07-14 1997-05-27 Applied Materials, Inc. Ceramic susceptor with embedded metal electrode and eutectic connection

Also Published As

Publication number Publication date
US6106960A (en) 2000-08-22
KR0162969B1 (ko) 1998-11-16
JP3866320B2 (ja) 2007-01-10
KR960031401A (ko) 1996-09-17
TW407140B (en) 2000-10-01
EP0726238A2 (de) 1996-08-14
DE69624274T2 (de) 2003-08-07
EP0726238B1 (de) 2002-10-16
EP0726238A3 (de) 1997-08-06
JPH08277171A (ja) 1996-10-22

Similar Documents

Publication Publication Date Title
DE69624274T2 (de) Verbundene Gegenstände, korrosionsbeständiges Verbindungsmaterial und Herstellungsverfahren dieser Gegenstände
DE69514772D1 (de) Membrananordnung und ihr Herstellungsverfahren
DE69415068T2 (de) Mikromotor und Herstellungsverfahren desselben
DE69429493D1 (de) Verbinder und dessen Herstellungsverfahren
DE69637728D1 (de) Halbleiterbauteil und Herstellung desselben
DE69527316T2 (de) Turbomaschine und ihr herstellungsverfahren
DE69417346T2 (de) Bildaufnehmer und Herstellungsverfahren
DE69808499D1 (de) Widerstand und herstellungsverfahren
DE69725326D1 (de) Herstellung von fugizides chinazolinonen und nützliche zwischenprodukte
DE69613640D1 (de) Flächenhaftverschluss und Herstellungsverfahren
DE69421172D1 (de) Synthetises detergensstueck und herstellung davon
ATE275347T1 (de) Dragier-produkte und herstellungsverfahren
DE69633857D1 (de) Gentechnologisch hergestelltes milbenantigen und herstellungsverfahren
DE69632190T2 (de) Polyesterharz und dessen herstellungsverfahren
DE69501635T2 (de) Elektrorheologe Flüssigkeiten und ihr Herstellungsverfahren
TR199500800A2 (tr) Sekil verilmis esyalarin üretilmesi.
DE69506006D1 (de) Herstellung von keramischen gegenständen
DE69529760D1 (de) Riemenkonstruktion und herstellungsverfahren dieser riemenkonstruktion
ATE225413T1 (de) Korrosionsbeständige legierung, herstellungsverfahren und gegenstände aus dieser legierung
DE69622789D1 (de) Düse und Düsenherstellungsverfahren
NO972318L (no) Fremgangsmåte for fremstilling av kompositt-produkter og anlegg for utförelse derav
ATE191219T1 (de) Zwischenprodukte und ihre anwendung für die herstellung von n,n'-überbrückten bisindolylmaleimiden
DE59606492D1 (de) Herstellung von Poly-o-hydroxyamiden und Poly-o-mercaptoamiden
DE69605068T2 (de) Klebezusammensetzung und Herstellungsverfahren
DE69821916D1 (de) Modifizierte seidenmaterialen und herstellungsverfahren

Legal Events

Date Code Title Description
8364 No opposition during term of opposition