DE69623169D1 - Steuersystem für Werkzeuge zur Halbleitersprühbehandlung - Google Patents

Steuersystem für Werkzeuge zur Halbleitersprühbehandlung

Info

Publication number
DE69623169D1
DE69623169D1 DE69623169T DE69623169T DE69623169D1 DE 69623169 D1 DE69623169 D1 DE 69623169D1 DE 69623169 T DE69623169 T DE 69623169T DE 69623169 T DE69623169 T DE 69623169T DE 69623169 D1 DE69623169 D1 DE 69623169D1
Authority
DE
Germany
Prior art keywords
computer
spray
supervisor
computers
host system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69623169T
Other languages
English (en)
Other versions
DE69623169T2 (de
Inventor
Jay J Seaton
Michael Allen
Donald Landis
Patrick Lee
David Linzy
Susan B Luca
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of DE69623169D1 publication Critical patent/DE69623169D1/de
Application granted granted Critical
Publication of DE69623169T2 publication Critical patent/DE69623169T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31145—Ethernet
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31151—Lan local area network
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31207—Master sends global files to autonomous controllers, feedback of process status
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31288—Archive collected data into history file
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31402—Keep log book, for activities of a station, equipment
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31443—Keep track of nc program, recipe program
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32095—Text, menu driven editor for batch programming, phase sequence, parameters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32404—Scada supervisory control and data acquisition
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32412—One engineering, workstation can supervise several processes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/36—Nc in input of data, input key till input tape
    • G05B2219/36116—Harddisk
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45026—Circuit board, pcb
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning
DE69623169T 1995-04-28 1996-04-22 Steuersystem für Werkzeuge zur Halbleitersprühbehandlung Expired - Lifetime DE69623169T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/430,329 US5591299A (en) 1995-04-28 1995-04-28 System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools

Publications (2)

Publication Number Publication Date
DE69623169D1 true DE69623169D1 (de) 2002-10-02
DE69623169T2 DE69623169T2 (de) 2003-04-30

Family

ID=23707063

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69623169T Expired - Lifetime DE69623169T2 (de) 1995-04-28 1996-04-22 Steuersystem für Werkzeuge zur Halbleitersprühbehandlung

Country Status (5)

Country Link
US (1) US5591299A (de)
EP (1) EP0740241B1 (de)
JP (1) JPH09115876A (de)
AT (1) ATE223078T1 (de)
DE (1) DE69623169T2 (de)

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US6269279B1 (en) * 1997-06-20 2001-07-31 Tokyo Electron Limited Control system
US5965465A (en) * 1997-09-18 1999-10-12 International Business Machines Corporation Etching of silicon nitride
US6150282A (en) * 1997-11-13 2000-11-21 International Business Machines Corporation Selective removal of etching residues
US6033996A (en) * 1997-11-13 2000-03-07 International Business Machines Corporation Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide
KR19990065483A (ko) * 1998-01-14 1999-08-05 윤종용 반도체 제조설비 관리시스템의 설비 유닛상태 관리방법
US6292708B1 (en) * 1998-06-11 2001-09-18 Speedfam-Ipec Corporation Distributed control system for a semiconductor wafer processing machine
US6200891B1 (en) 1998-08-13 2001-03-13 International Business Machines Corporation Removal of dielectric oxides
US6117796A (en) * 1998-08-13 2000-09-12 International Business Machines Corporation Removal of silicon oxide
JP2000066706A (ja) * 1998-08-21 2000-03-03 Matsushita Electric Ind Co Ltd ロボット制御装置とその制御方法
JP2000075907A (ja) * 1998-09-01 2000-03-14 Yokogawa Electric Corp 生産システム
US6732053B1 (en) * 1998-09-30 2004-05-04 Intel Corporation Method and apparatus for controlling a test cell
US6629003B1 (en) * 1998-12-04 2003-09-30 Vector Corporation Batch processing control system recipe management and batch information system
WO2000036479A1 (en) * 1998-12-16 2000-06-22 Speedfam-Ipec Corporation An equipment virtual controller
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US6768930B2 (en) 1998-12-31 2004-07-27 Asml Holding N.V. Method and apparatus for resolving conflicts in a substrate processing system
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US6678572B1 (en) 1998-12-31 2004-01-13 Asml Holdings, N.V. Recipe cascading in a wafer processing system
US6573141B1 (en) * 1999-03-12 2003-06-03 Zilog, Inc. In-situ etch and pre-clean for high quality thin oxides
KR100303322B1 (ko) * 1999-05-20 2001-09-26 박종섭 반도체 라인 관리를 위한 통합 자동화 시스템 및 그 방법
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US6834370B1 (en) * 1999-07-08 2004-12-21 Osi Software, Inc. Method for creating master recipes
US6826439B1 (en) * 2000-05-23 2004-11-30 Advanced Micro Devices, Inc. Broadband distribution of SECS-II data
FR2810432B1 (fr) * 2000-06-15 2002-11-22 Bull Sa Procede de gestion de controle de coherence de parametres associes a des ressources physiques et/ou logiques dans un systeme informatique
US6461878B1 (en) * 2000-07-12 2002-10-08 Advanced Micro Devices, Inc. Feedback control of strip time to reduce post strip critical dimension variation in a transistor gate electrode
JP2002027567A (ja) * 2000-07-12 2002-01-25 Hitachi Kokusai Electric Inc 半導体製造装置のリモート操作システム、半導体製造装置および遠隔操作装置
JP2002041115A (ja) * 2000-07-25 2002-02-08 Fuji Photo Film Co Ltd 工程管理システムおよび工程管理プログラム記憶媒体
IT1320637B1 (it) 2000-09-12 2003-12-10 Bottero Spa Supervisore per una linea per la fabbricazione di articoli di vetrocavo.
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US7280883B2 (en) * 2001-09-06 2007-10-09 Dainippon Screen Mfg. Co., Ltd. Substrate processing system managing apparatus information of substrate processing apparatus
US7152068B2 (en) 2001-12-21 2006-12-19 Honeywell International Inc. Method and apparatus for retrieving time series data related to an activity
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JP5224744B2 (ja) * 2006-10-04 2013-07-03 株式会社日立国際電気 基板処理装置
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Also Published As

Publication number Publication date
JPH09115876A (ja) 1997-05-02
ATE223078T1 (de) 2002-09-15
EP0740241A3 (de) 1998-08-12
DE69623169T2 (de) 2003-04-30
EP0740241A2 (de) 1996-10-30
EP0740241B1 (de) 2002-08-28
US5591299A (en) 1997-01-07

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