DE69621335D1 - Verfahren zur herstellung einer membranhaltenden mikrostruktur - Google Patents

Verfahren zur herstellung einer membranhaltenden mikrostruktur

Info

Publication number
DE69621335D1
DE69621335D1 DE69621335T DE69621335T DE69621335D1 DE 69621335 D1 DE69621335 D1 DE 69621335D1 DE 69621335 T DE69621335 T DE 69621335T DE 69621335 T DE69621335 T DE 69621335T DE 69621335 D1 DE69621335 D1 DE 69621335D1
Authority
DE
Germany
Prior art keywords
microstructure
membrane
holding
producing
holding microstructure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69621335T
Other languages
English (en)
Inventor
Ove Oehman
Christian Vieider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gyros Protein Technologies AB
Original Assignee
Gyros AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gyros AB filed Critical Gyros AB
Application granted granted Critical
Publication of DE69621335D1 publication Critical patent/DE69621335D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
DE69621335T 1995-06-21 1996-06-17 Verfahren zur herstellung einer membranhaltenden mikrostruktur Expired - Lifetime DE69621335D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9502258A SE9502258D0 (sv) 1995-06-21 1995-06-21 Method for the manufacture of a membrane-containing microstructure
PCT/SE1996/000789 WO1997001055A1 (en) 1995-06-21 1996-06-17 Method for the manufacture of a membrane-containing microstructure

Publications (1)

Publication Number Publication Date
DE69621335D1 true DE69621335D1 (de) 2002-06-27

Family

ID=20398698

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621335T Expired - Lifetime DE69621335D1 (de) 1995-06-21 1996-06-17 Verfahren zur herstellung einer membranhaltenden mikrostruktur

Country Status (6)

Country Link
US (1) US5962081A (de)
EP (1) EP0838005B1 (de)
JP (1) JPH11508347A (de)
DE (1) DE69621335D1 (de)
SE (1) SE9502258D0 (de)
WO (1) WO1997001055A1 (de)

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Also Published As

Publication number Publication date
JPH11508347A (ja) 1999-07-21
SE9502258D0 (sv) 1995-06-21
EP0838005B1 (de) 2002-05-22
WO1997001055A1 (en) 1997-01-09
EP0838005A1 (de) 1998-04-29
US5962081A (en) 1999-10-05

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