DE69610758D1 - Piezoelektrisches/Elektrostriktives Element vom Dünnschicht-Typ und Verfahren zu seiner Herstellung - Google Patents

Piezoelektrisches/Elektrostriktives Element vom Dünnschicht-Typ und Verfahren zu seiner Herstellung

Info

Publication number
DE69610758D1
DE69610758D1 DE69610758T DE69610758T DE69610758D1 DE 69610758 D1 DE69610758 D1 DE 69610758D1 DE 69610758 T DE69610758 T DE 69610758T DE 69610758 T DE69610758 T DE 69610758T DE 69610758 D1 DE69610758 D1 DE 69610758D1
Authority
DE
Germany
Prior art keywords
manufacturing
thin film
same
film type
type piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69610758T
Other languages
English (en)
Other versions
DE69610758T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Koji Kimura
Nobuo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69610758D1 publication Critical patent/DE69610758D1/de
Application granted granted Critical
Publication of DE69610758T2 publication Critical patent/DE69610758T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead based oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE1996610758 1995-12-28 1996-12-24 Piezoelektrisches/Elektrostriktives Element vom Dünnschicht-Typ und Verfahren zu seiner Herstellung Expired - Lifetime DE69610758T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34241495A JP3344888B2 (ja) 1995-12-28 1995-12-28 圧電／電歪膜型素子及びその製造方法

Publications (2)

Publication Number Publication Date
DE69610758D1 true DE69610758D1 (de) 2000-11-30
DE69610758T2 DE69610758T2 (de) 2001-05-10

Family

ID=18353552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996610758 Expired - Lifetime DE69610758T2 (de) 1995-12-28 1996-12-24 Piezoelektrisches/Elektrostriktives Element vom Dünnschicht-Typ und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (3) US5814920A (de)
EP (1) EP0782203B1 (de)
JP (1) JP3344888B2 (de)
DE (1) DE69610758T2 (de)

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US7555824B2 (en) 2006-08-09 2009-07-07 Hrl Laboratories, Llc Method for large scale integration of quartz-based devices
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US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
US7836765B2 (en) * 2007-07-31 2010-11-23 The Boeing Company Disc resonator integral inertial measurement unit
JP5287722B2 (ja) * 2007-09-13 2013-09-11 パナソニック株式会社 角速度センサ
US8151640B1 (en) 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
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US8322028B2 (en) 2009-04-01 2012-12-04 The Boeing Company Method of producing an isolator for a microelectromechanical system (MEMS) die
US8327526B2 (en) 2009-05-27 2012-12-11 The Boeing Company Isolated active temperature regulator for vacuum packaging of a disc resonator gyroscope
US7911113B1 (en) * 2009-09-02 2011-03-22 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and method of manufacturing piezoelectric/electrostrictive element
CN102484201B (zh) * 2009-09-07 2014-11-26 日本碍子株式会社 压电/电致伸缩膜型元件的制造方法
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FR2958029B1 (fr) * 2010-03-23 2012-04-20 Sagem Defense Securite Procede de mesure angulaire au moyen d'un capteur vibrant auquel sont appliquees des commandes modulees
US8912711B1 (en) 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
US9250074B1 (en) 2013-04-12 2016-02-02 Hrl Laboratories, Llc Resonator assembly comprising a silicon resonator and a quartz resonator
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
US10110198B1 (en) 2015-12-17 2018-10-23 Hrl Laboratories, Llc Integrated quartz MEMS tuning fork resonator/oscillator
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
US11237000B1 (en) 2018-05-09 2022-02-01 Hrl Laboratories, Llc Disk resonator gyroscope with out-of-plane electrodes
CN111069864A (zh) * 2019-12-31 2020-04-28 泰州市创新电子有限公司 显示器立柱的生产方法、显示器立柱和显示器

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Also Published As

Publication number Publication date
US6088893A (en) 2000-07-18
EP0782203A3 (de) 1998-08-26
DE69610758T2 (de) 2001-05-10
EP0782203B1 (de) 2000-10-25
US6263552B1 (en) 2001-07-24
EP0782203A2 (de) 1997-07-02
JPH09186372A (ja) 1997-07-15
US5814920A (en) 1998-09-29
JP3344888B2 (ja) 2002-11-18

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