DE69608850T2 - Halbleiterlaser - Google Patents

Halbleiterlaser

Info

Publication number
DE69608850T2
DE69608850T2 DE69608850T DE69608850T DE69608850T2 DE 69608850 T2 DE69608850 T2 DE 69608850T2 DE 69608850 T DE69608850 T DE 69608850T DE 69608850 T DE69608850 T DE 69608850T DE 69608850 T2 DE69608850 T2 DE 69608850T2
Authority
DE
Germany
Prior art keywords
semiconductor laser
laser
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69608850T
Other languages
English (en)
Other versions
DE69608850D1 (de
Inventor
Romuald Houdre
Claude Weisbuch
Vincent Berger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of DE69608850D1 publication Critical patent/DE69608850D1/de
Application granted granted Critical
Publication of DE69608850T2 publication Critical patent/DE69608850T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1028—Coupling to elements in the cavity, e.g. coupling to waveguides adjacent the active region, e.g. forward coupled [DFC] structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/11—Comprising a photonic bandgap structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/125—Distributed Bragg reflector [DBR] lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
DE69608850T 1995-05-12 1996-04-26 Halbleiterlaser Expired - Lifetime DE69608850T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9505660A FR2734097B1 (fr) 1995-05-12 1995-05-12 Laser a semiconducteurs

Publications (2)

Publication Number Publication Date
DE69608850D1 DE69608850D1 (de) 2000-07-20
DE69608850T2 true DE69608850T2 (de) 2001-01-18

Family

ID=9478928

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69608850T Expired - Lifetime DE69608850T2 (de) 1995-05-12 1996-04-26 Halbleiterlaser

Country Status (4)

Country Link
US (1) US5684817A (de)
EP (1) EP0742620B1 (de)
DE (1) DE69608850T2 (de)
FR (1) FR2734097B1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10119618A1 (de) * 2001-04-21 2002-10-24 Univ Konstanz Optischer Mikro-Gassensor

Families Citing this family (123)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6002522A (en) * 1996-06-11 1999-12-14 Kabushiki Kaisha Toshiba Optical functional element comprising photonic crystal
FR2757684B1 (fr) * 1996-12-20 1999-03-26 Thomson Csf Detecteur infrarouge a structure quantique, non refroidie
FR2760574B1 (fr) * 1997-03-04 1999-05-28 Thomson Csf Laser unipolaire multi-longueurs d'ondes
US5973823A (en) * 1997-07-22 1999-10-26 Deutsche Telekom Ag Method for the mechanical stabilization and for tuning a filter having a photonic crystal structure
US5999308A (en) * 1998-04-01 1999-12-07 Massachusetts Institute Of Technology Methods and systems for introducing electromagnetic radiation into photonic crystals
US5998298A (en) * 1998-04-28 1999-12-07 Sandia Corporation Use of chemical-mechanical polishing for fabricating photonic bandgap structures
JP3456143B2 (ja) * 1998-05-01 2003-10-14 信越半導体株式会社 積層材料および光機能素子
FR2780203B1 (fr) 1998-06-23 2003-07-04 Thomson Csf Detecteur a puits quantique avec couche de stockage des electrons photoexcites
US6134043A (en) * 1998-08-11 2000-10-17 Massachusetts Institute Of Technology Composite photonic crystals
US6175671B1 (en) * 1998-10-01 2001-01-16 Nortel Networks Limited Photonic crystal waveguide arrays
FR2784514B1 (fr) 1998-10-13 2001-04-27 Thomson Csf Procede de controle d'un laser semiconducteur unipolaire
US6409907B1 (en) 1999-02-11 2002-06-25 Lucent Technologies Inc. Electrochemical process for fabricating article exhibiting substantial three-dimensional order and resultant article
FR2793499B1 (fr) * 1999-05-11 2001-07-06 Agence Spatiale Europeenne Structure dielectrique periodique du type a bande interdite photonique tridimensionnelle et son procede de fabrication
GB2354110A (en) * 1999-09-08 2001-03-14 Univ Bristol Ridge waveguide lasers
FR2799314B1 (fr) 1999-10-01 2002-10-25 Thomson Csf Laser a generations parametriques
JP3667188B2 (ja) * 2000-03-03 2005-07-06 キヤノン株式会社 電子線励起レーザー装置及びマルチ電子線励起レーザー装置
AU2001278446A1 (en) * 2000-06-15 2001-12-24 Merck Patent G.M.B.H A method for producing sphere-based crystals
US6684008B2 (en) * 2000-09-01 2004-01-27 The University Of British Columbia Planar photonic bandgap structures for controlling radiation loss
US6532326B1 (en) * 2000-09-21 2003-03-11 Ut-Battelle, Llc Transverse-longitudinal integrated resonator
WO2002044301A2 (en) 2000-11-30 2002-06-06 Merck Patent Gmbh Particles with opalescent effect
US6788847B2 (en) * 2001-04-05 2004-09-07 Luxtera, Inc. Photonic input/output port
US6936854B2 (en) * 2001-05-10 2005-08-30 Canon Kabushiki Kaisha Optoelectronic substrate
WO2003023473A1 (en) * 2001-09-10 2003-03-20 California Institute Of Technology Structure and method for coupling light between dissimilar waveguides
WO2003023824A2 (en) 2001-09-10 2003-03-20 California Institute Of Technology Modulator based on tunable resonant cavity
US6834152B2 (en) 2001-09-10 2004-12-21 California Institute Of Technology Strip loaded waveguide with low-index transition layer
US6674778B1 (en) * 2002-01-09 2004-01-06 Sandia Corporation Electrically pumped edge-emitting photonic bandgap semiconductor laser
US7254149B2 (en) 2002-03-19 2007-08-07 Finisar Corporation Submount, pedestal, and bond wire assembly for a transistor outline package with reduced bond wire inductance
US7042067B2 (en) * 2002-03-19 2006-05-09 Finisar Corporation Transmission line with integrated connection pads for circuit elements
US7044657B2 (en) * 2002-03-19 2006-05-16 Finisar Corporation Transistor outline package with exteriorly mounted resistors
US6932518B2 (en) * 2002-03-19 2005-08-23 Finisar Corporation Circuit board having traces with distinct transmission impedances
JP2004012780A (ja) * 2002-06-06 2004-01-15 Seiko Epson Corp 光合分波器、光通信用装置及び光通信システム
US6829281B2 (en) 2002-06-19 2004-12-07 Finisar Corporation Vertical cavity surface emitting laser using photonic crystals
FR2842037B1 (fr) * 2002-07-08 2004-10-01 Cit Alcatel Laser dfb a reflecteur distribue a bande photonique interdite
US6744804B2 (en) 2002-07-18 2004-06-01 Finisar Corporation Edge emitting lasers using photonic crystals
US6704343B2 (en) 2002-07-18 2004-03-09 Finisar Corporation High power single mode vertical cavity surface emitting laser
US7319709B2 (en) 2002-07-23 2008-01-15 Massachusetts Institute Of Technology Creating photon atoms
GB0218548D0 (en) 2002-08-09 2002-09-18 Intense Photonics Ltd Multi-section laser with photonic crystal mirrors
JP2004093787A (ja) * 2002-08-30 2004-03-25 Seiko Epson Corp 光スイッチ、光通信用装置及び光通信システム
US6778581B1 (en) 2002-09-24 2004-08-17 Finisar Corporation Tunable vertical cavity surface emitting laser
US6810056B1 (en) * 2002-09-26 2004-10-26 Finisar Corporation Single mode vertical cavity surface emitting laser using photonic crystals with a central defect
FR2845833A1 (fr) * 2002-10-15 2004-04-16 Cit Alcatel Amplificateur optique a semiconducteurs a stabilisation de gain laterale et distribuee
JP2004172506A (ja) * 2002-11-22 2004-06-17 Sony Corp 半導体レーザ素子
DE10254909B4 (de) * 2002-11-25 2004-10-07 Infineon Technologies Ag Abstimmbarer Halbleiterlaser und Herstellungsverfahren
US6853669B2 (en) * 2002-12-10 2005-02-08 Ut-Battelle, Llc Nanocrystal waveguide (NOW) laser
CA2513214A1 (en) * 2003-01-24 2004-08-12 California Institute Of Technology Traverse bragg resonance lasers and amplifiers and method of operating the same
JP2004266280A (ja) * 2003-02-28 2004-09-24 Osram Opto Semiconductors Gmbh 半導体レーザおよび光ポンピングされる半導体装置
DE10321246B4 (de) * 2003-02-28 2009-10-22 Osram Opto Semiconductors Gmbh Optisch gepumpte Halbleitervorrichtung
US6826223B1 (en) * 2003-05-28 2004-11-30 The United States Of America As Represented By The Secretary Of The Navy Surface-emitting photonic crystal distributed feedback laser systems and methods
US20070010040A1 (en) * 2003-06-26 2007-01-11 Rj Mears, Llc Method for Making a Semiconductor Device Including a Strained Superlattice Layer Above a Stress Layer
US7659539B2 (en) 2003-06-26 2010-02-09 Mears Technologies, Inc. Semiconductor device including a floating gate memory cell with a superlattice channel
US20060011905A1 (en) * 2003-06-26 2006-01-19 Rj Mears, Llc Semiconductor device comprising a superlattice dielectric interface layer
US20060289049A1 (en) * 2003-06-26 2006-12-28 Rj Mears, Llc Semiconductor Device Having a Semiconductor-on-Insulator (SOI) Configuration and Including a Superlattice on a Thin Semiconductor Layer
US7531828B2 (en) * 2003-06-26 2009-05-12 Mears Technologies, Inc. Semiconductor device including a strained superlattice between at least one pair of spaced apart stress regions
US20060267130A1 (en) * 2003-06-26 2006-11-30 Rj Mears, Llc Semiconductor Device Including Shallow Trench Isolation (STI) Regions with a Superlattice Therebetween
US20060273299A1 (en) * 2003-06-26 2006-12-07 Rj Mears, Llc Method for making a semiconductor device including a dopant blocking superlattice
US20070015344A1 (en) * 2003-06-26 2007-01-18 Rj Mears, Llc Method for Making a Semiconductor Device Including a Strained Superlattice Between at Least One Pair of Spaced Apart Stress Regions
US20060292765A1 (en) * 2003-06-26 2006-12-28 Rj Mears, Llc Method for Making a FINFET Including a Superlattice
US20060243964A1 (en) * 2003-06-26 2006-11-02 Rj Mears, Llc Method for making a semiconductor device having a semiconductor-on-insulator configuration and a superlattice
US7586116B2 (en) * 2003-06-26 2009-09-08 Mears Technologies, Inc. Semiconductor device having a semiconductor-on-insulator configuration and a superlattice
US7045813B2 (en) * 2003-06-26 2006-05-16 Rj Mears, Llc Semiconductor device including a superlattice with regions defining a semiconductor junction
US20040266116A1 (en) * 2003-06-26 2004-12-30 Rj Mears, Llc Methods of fabricating semiconductor structures having improved conductivity effective mass
US20060220118A1 (en) * 2003-06-26 2006-10-05 Rj Mears, Llc Semiconductor device including a dopant blocking superlattice
US20070020860A1 (en) * 2003-06-26 2007-01-25 Rj Mears, Llc Method for Making Semiconductor Device Including a Strained Superlattice and Overlying Stress Layer and Related Methods
US20060231857A1 (en) * 2003-06-26 2006-10-19 Rj Mears, Llc Method for making a semiconductor device including a memory cell with a negative differential resistance (ndr) device
US7531850B2 (en) * 2003-06-26 2009-05-12 Mears Technologies, Inc. Semiconductor device including a memory cell with a negative differential resistance (NDR) device
US6878576B1 (en) 2003-06-26 2005-04-12 Rj Mears, Llc Method for making semiconductor device including band-engineered superlattice
US7535041B2 (en) * 2003-06-26 2009-05-19 Mears Technologies, Inc. Method for making a semiconductor device including regions of band-engineered semiconductor superlattice to reduce device-on resistance
US7491587B2 (en) * 2003-06-26 2009-02-17 Mears Technologies, Inc. Method for making a semiconductor device having a semiconductor-on-insulator (SOI) configuration and including a superlattice on a thin semiconductor layer
US7153763B2 (en) 2003-06-26 2006-12-26 Rj Mears, Llc Method for making a semiconductor device including band-engineered superlattice using intermediate annealing
US7514328B2 (en) * 2003-06-26 2009-04-07 Mears Technologies, Inc. Method for making a semiconductor device including shallow trench isolation (STI) regions with a superlattice therebetween
US20050279991A1 (en) * 2003-06-26 2005-12-22 Rj Mears, Llc Semiconductor device including a superlattice having at least one group of substantially undoped layers
US7446002B2 (en) * 2003-06-26 2008-11-04 Mears Technologies, Inc. Method for making a semiconductor device comprising a superlattice dielectric interface layer
US7586165B2 (en) * 2003-06-26 2009-09-08 Mears Technologies, Inc. Microelectromechanical systems (MEMS) device including a superlattice
US20070063185A1 (en) * 2003-06-26 2007-03-22 Rj Mears, Llc Semiconductor device including a front side strained superlattice layer and a back side stress layer
US20070063186A1 (en) * 2003-06-26 2007-03-22 Rj Mears, Llc Method for making a semiconductor device including a front side strained superlattice layer and a back side stress layer
US20070020833A1 (en) * 2003-06-26 2007-01-25 Rj Mears, Llc Method for Making a Semiconductor Device Including a Channel with a Non-Semiconductor Layer Monolayer
US7202494B2 (en) * 2003-06-26 2007-04-10 Rj Mears, Llc FINFET including a superlattice
WO2005018005A1 (en) * 2003-06-26 2005-02-24 Rj Mears, Llc Semiconductor device including mosfet having band-engineered superlattice
US7612366B2 (en) * 2003-06-26 2009-11-03 Mears Technologies, Inc. Semiconductor device including a strained superlattice layer above a stress layer
US20050282330A1 (en) * 2003-06-26 2005-12-22 Rj Mears, Llc Method for making a semiconductor device including a superlattice having at least one group of substantially undoped layers
US7531829B2 (en) * 2003-06-26 2009-05-12 Mears Technologies, Inc. Semiconductor device including regions of band-engineered semiconductor superlattice to reduce device-on resistance
US7229902B2 (en) * 2003-06-26 2007-06-12 Rj Mears, Llc Method for making a semiconductor device including a superlattice with regions defining a semiconductor junction
US20040262594A1 (en) * 2003-06-26 2004-12-30 Rj Mears, Llc Semiconductor structures having improved conductivity effective mass and methods for fabricating same
US7227174B2 (en) * 2003-06-26 2007-06-05 Rj Mears, Llc Semiconductor device including a superlattice and adjacent semiconductor layer with doped regions defining a semiconductor junction
US7045377B2 (en) * 2003-06-26 2006-05-16 Rj Mears, Llc Method for making a semiconductor device including a superlattice and adjacent semiconductor layer with doped regions defining a semiconductor junction
US6897472B2 (en) * 2003-06-26 2005-05-24 Rj Mears, Llc Semiconductor device including MOSFET having band-engineered superlattice
US7598515B2 (en) * 2003-06-26 2009-10-06 Mears Technologies, Inc. Semiconductor device including a strained superlattice and overlying stress layer and related methods
JP2005045162A (ja) * 2003-07-25 2005-02-17 Mitsubishi Electric Corp 半導体素子およびその製造方法
US20050152424A1 (en) * 2003-08-20 2005-07-14 Khalfin Viktor B. Low voltage defect super high efficiency diode sources
EP1722265A4 (de) * 2004-02-17 2008-07-02 Furukawa Electric Co Ltd Photonischer-kristall-halbleiterbauelement und herstellungsverfahren dafür
US7315679B2 (en) 2004-06-07 2008-01-01 California Institute Of Technology Segmented waveguide structures
US20060039433A1 (en) * 2004-08-20 2006-02-23 Simpson John T Silicon nanocrystal/erbium doped waveguide (SNEW) laser
US7177021B2 (en) * 2004-09-14 2007-02-13 Hewlett-Packard Development Company, L.P. Integrated radiation sources and amplifying structures, and methods of using the same
US7339666B2 (en) * 2004-09-14 2008-03-04 Hewlett-Packard Development Company, L.P. Light-amplifying structures and methods for surface-enhanced Raman spectroscopy
US7307719B2 (en) * 2004-09-14 2007-12-11 Hewlett-Packard Development Company, L.P. Wavelength-tunable excitation radiation amplifying structure and method
US7368870B2 (en) * 2004-10-06 2008-05-06 Hewlett-Packard Development Company, L.P. Radiation emitting structures including photonic crystals
US20070030873A1 (en) * 2005-08-03 2007-02-08 Finisar Corporation Polarization control in VCSELs using photonics crystals
US7826688B1 (en) 2005-10-21 2010-11-02 Luxtera, Inc. Enhancing the sensitivity of resonant optical modulating and switching devices
US7517702B2 (en) * 2005-12-22 2009-04-14 Mears Technologies, Inc. Method for making an electronic device including a poled superlattice having a net electrical dipole moment
US20070187667A1 (en) * 2005-12-22 2007-08-16 Rj Mears, Llc Electronic device including a selectively polable superlattice
WO2007098138A2 (en) * 2006-02-21 2007-08-30 Mears Technologies, Inc. Semiconductor device comprising a lattice matching layer and associated methods
US7511808B2 (en) * 2006-04-27 2009-03-31 Hewlett-Packard Development Company, L.P. Analyte stages including tunable resonant cavities and Raman signal-enhancing structures
JP5147041B2 (ja) * 2006-09-21 2013-02-20 古河電気工業株式会社 フォトニック結晶光素子
US20080149946A1 (en) * 2006-12-22 2008-06-26 Philips Lumileds Lighting Company, Llc Semiconductor Light Emitting Device Configured To Emit Multiple Wavelengths Of Light
US7781827B2 (en) 2007-01-24 2010-08-24 Mears Technologies, Inc. Semiconductor device with a vertical MOSFET including a superlattice and related methods
US7928425B2 (en) * 2007-01-25 2011-04-19 Mears Technologies, Inc. Semiconductor device including a metal-to-semiconductor superlattice interface layer and related methods
US7863066B2 (en) * 2007-02-16 2011-01-04 Mears Technologies, Inc. Method for making a multiple-wavelength opto-electronic device including a superlattice
US7880161B2 (en) 2007-02-16 2011-02-01 Mears Technologies, Inc. Multiple-wavelength opto-electronic device including a superlattice
US7728333B2 (en) * 2007-03-09 2010-06-01 Nano-Electronic And Photonic Devices And Circuits, Llc Nanotube array ballistic light emitting devices
US7812339B2 (en) * 2007-04-23 2010-10-12 Mears Technologies, Inc. Method for making a semiconductor device including shallow trench isolation (STI) regions with maskless superlattice deposition following STI formation and related structures
KR101423721B1 (ko) * 2007-10-09 2014-07-31 서울바이오시스 주식회사 나노 패턴들을 갖는 레이저 다이오드 및 그것을 제조하는방법
CN101546949B (zh) * 2008-03-24 2012-08-29 鸿富锦精密工业（深圳）有限公司 弹片及音圈马达致动器
FR2934712B1 (fr) * 2008-08-01 2010-08-27 Thales Sa Procede de fabrication d'un dispositif optique d'analyse comportant un laser a cascades quantiques et un detecteur quantique.
US7782920B2 (en) * 2008-12-08 2010-08-24 Coherent, Inc. Edge-emitting semiconductor laser with photonic-bandgap structure formed by intermixing
US8682129B2 (en) * 2012-01-20 2014-03-25 Micron Technology, Inc. Photonic device and methods of formation
JP6052665B2 (ja) * 2012-10-15 2016-12-27 国立大学法人京都大学 半導体レーザ素子の駆動方法
CN105900241B (zh) 2013-11-22 2020-07-24 阿托梅拉公司 包括超晶格耗尽层堆叠的半导体装置和相关方法
KR101855023B1 (ko) 2013-11-22 2018-05-04 아토메라 인코포레이티드 정지층을 통한 초격자 펀치를 포함하는 수직 반도체 디바이스 및 관련된 방법
WO2015191561A1 (en) 2014-06-09 2015-12-17 Mears Technologies, Inc. Semiconductor devices with enhanced deterministic doping and related methods
US9722046B2 (en) 2014-11-25 2017-08-01 Atomera Incorporated Semiconductor device including a superlattice and replacement metal gate structure and related methods
US9899479B2 (en) 2015-05-15 2018-02-20 Atomera Incorporated Semiconductor devices with superlattice layers providing halo implant peak confinement and related methods
WO2016196600A1 (en) 2015-06-02 2016-12-08 Atomera Incorporated Method for making enhanced semiconductor structures in single wafer processing chamber with desired uniformity control
US9558939B1 (en) 2016-01-15 2017-01-31 Atomera Incorporated Methods for making a semiconductor device including atomic layer structures using N2O as an oxygen source

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4503447A (en) * 1982-07-16 1985-03-05 The United States Of America As Represented By The Secretary Of The Army Multi-dimensional quantum well device
EP0236713A3 (de) * 1986-02-10 1988-06-29 Siemens Aktiengesellschaft Laserdiode
JPS6316690A (ja) * 1986-07-09 1988-01-23 Fujitsu Ltd 半導体発光装置
JPS6332983A (ja) * 1986-07-25 1988-02-12 Mitsubishi Electric Corp 半導体レ−ザ
FR2640438B1 (fr) * 1988-12-09 1991-01-25 Thomson Csf Procede de realisation de lasers semi-conducteurs et lasers obtenus par le procede
FR2649549B1 (fr) * 1989-07-04 1991-09-20 Thomson Csf Laser semiconducteur a puits quantique
FR2655434B1 (fr) * 1989-12-05 1992-02-28 Thomson Csf Dispositif optique a puits quantiques et procede de realisation.
US5365541A (en) * 1992-01-29 1994-11-15 Trw Inc. Mirror with photonic band structure
US5332681A (en) * 1992-06-12 1994-07-26 The United States Of America As Represented By The Secretary Of The Navy Method of making a semiconductor device by forming a nanochannel mask
WO1994016345A1 (en) * 1993-01-08 1994-07-21 Massachusetts Institute Of Technology Low-loss optical and optoelectronic integrated circuits

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10119618A1 (de) * 2001-04-21 2002-10-24 Univ Konstanz Optischer Mikro-Gassensor

Also Published As

Publication number Publication date
FR2734097B1 (fr) 1997-06-06
EP0742620B1 (de) 2000-06-14
US5684817A (en) 1997-11-04
FR2734097A1 (fr) 1996-11-15
DE69608850D1 (de) 2000-07-20
EP0742620A1 (de) 1996-11-13

Similar Documents

Publication Publication Date Title
DE69608850T2 (de) Halbleiterlaser
DE69606812T2 (de) Halbleiterlaser
DE69633203D1 (de) Halbleiterlaser-Vorrichtungen
DE69510590D1 (de) Unipolarer Halbleiterlaser
DE69533127D1 (de) Kühlkörper
DE69407455D1 (de) Halbleiterlaser
DE69411364D1 (de) Halbleiterlaser
DE69801974D1 (de) Halbleiterlaser
DE69603015T2 (de) Laser
DE69630748D1 (de) Halbleiterlasermodul
DE69500600D1 (de) Halbleiterlaservorrichtung
DE69605245D1 (de) Laser
DE69617254D1 (de) Laservorrichtung
DE69500371D1 (de) Multi-Quantumwell-Halbleiterlaser
DE69725783D1 (de) Halbleiterlaser
DE69624209T2 (de) Halbleiterlaserquelle
DE69521719D1 (de) Halbleiter-laserelement
DE69728503D1 (de) Halbleiterlaser
DE69517044D1 (de) Halbleiterlaservorrichtung
DE69519719T2 (de) Laservorrichtung
DE69630568D1 (de) Halbleiterlaser-Modul
DE69407374T2 (de) Halbleiterlaser
DE69614169T2 (de) Laserdrucker
DE69700830T2 (de) Halbleiterlaser
DE69726412D1 (de) Halbleiterlaser

Legal Events

Date Code Title Description
8364 No opposition during term of opposition