DE69607450T2 - Verfahren und Vorrichtung zur Behandlung von Laserfacetten - Google Patents
Verfahren und Vorrichtung zur Behandlung von LaserfacettenInfo
- Publication number
- DE69607450T2 DE69607450T2 DE69607450T DE69607450T DE69607450T2 DE 69607450 T2 DE69607450 T2 DE 69607450T2 DE 69607450 T DE69607450 T DE 69607450T DE 69607450 T DE69607450 T DE 69607450T DE 69607450 T2 DE69607450 T2 DE 69607450T2
- Authority
- DE
- Germany
- Prior art keywords
- laser facets
- treating laser
- treating
- facets
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0201—Separation of the wafer into individual elements, e.g. by dicing, cleaving, etching or directly during growth
- H01S5/0202—Cleaving
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
- H01S5/0282—Passivation layers or treatments
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9515397A FR2742926B1 (fr) | 1995-12-22 | 1995-12-22 | Procede et dispositif de preparation de faces de laser |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69607450D1 DE69607450D1 (de) | 2000-05-04 |
DE69607450T2 true DE69607450T2 (de) | 2000-10-19 |
Family
ID=9485884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69607450T Expired - Fee Related DE69607450T2 (de) | 1995-12-22 | 1996-12-19 | Verfahren und Vorrichtung zur Behandlung von Laserfacetten |
Country Status (5)
Country | Link |
---|---|
US (1) | US5780120A (de) |
EP (1) | EP0783191B1 (de) |
JP (1) | JPH09199809A (de) |
DE (1) | DE69607450T2 (de) |
FR (1) | FR2742926B1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU747260B2 (en) | 1997-07-25 | 2002-05-09 | Nichia Chemical Industries, Ltd. | Nitride semiconductor device |
EP0898345A3 (de) | 1997-08-13 | 2004-01-02 | Mitsubishi Chemical Corporation | Lichtemittierende Halbleitervorrichtung und Herstellungsverfahren |
CN1135839C (zh) * | 1997-12-22 | 2004-01-21 | 皇家菲利浦电子有限公司 | 输出时基校正器、校正方法及具有该校正器的显示设备 |
DE19802298C2 (de) * | 1998-01-22 | 2000-11-23 | Daimler Chrysler Ag | Verfahren zur Erzielung funktioneller Metall-, Keramik- oder Keramik/Metall-Schichten auf der Innenwand von Hohlkörpern |
JP3814432B2 (ja) * | 1998-12-04 | 2006-08-30 | 三菱化学株式会社 | 化合物半導体発光素子 |
JP3770014B2 (ja) | 1999-02-09 | 2006-04-26 | 日亜化学工業株式会社 | 窒化物半導体素子 |
EP1168539B1 (de) | 1999-03-04 | 2009-12-16 | Nichia Corporation | Nitridhalbleiterlaserelement |
US7112545B1 (en) * | 1999-09-10 | 2006-09-26 | The Board Of Trustees Of The University Of Arkansas | Passivation of material using ultra-fast pulsed laser |
US6744796B1 (en) | 2000-03-30 | 2004-06-01 | Triquint Technology Holding Co. | Passivated optical device and method of forming the same |
CN1206782C (zh) * | 2000-08-22 | 2005-06-15 | 三井化学株式会社 | 半导体激光装置的制造方法 |
US6812152B2 (en) * | 2001-08-09 | 2004-11-02 | Comlase Ab | Method to obtain contamination free laser mirrors and passivation of these |
US6734111B2 (en) * | 2001-08-09 | 2004-05-11 | Comlase Ab | Method to GaAs based lasers and a GaAs based laser |
JP4006226B2 (ja) * | 2001-11-26 | 2007-11-14 | キヤノン株式会社 | 光学素子の製造方法、光学素子、露光装置及びデバイス製造方法及びデバイス |
US7767272B2 (en) * | 2007-05-25 | 2010-08-03 | Imra America, Inc. | Method of producing compound nanorods and thin films |
DE102007062050B4 (de) | 2007-09-28 | 2019-06-27 | Osram Opto Semiconductors Gmbh | Halbleiterlaser und Verfahren zum Herstellen des Halbleiterlasers |
TWI362769B (en) | 2008-05-09 | 2012-04-21 | Univ Nat Chiao Tung | Light emitting device and fabrication method therefor |
DE102009054912A1 (de) | 2009-08-28 | 2011-03-10 | M2K-Laser Gmbh | Hochleistungs-Diodenlaser und Verfahren zum Herstellen eines Hochleistungs-Diodenlasers |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994892A (ja) * | 1982-11-22 | 1984-05-31 | Sanyo Electric Co Ltd | 半導体レ−ザ |
US4987007A (en) * | 1988-04-18 | 1991-01-22 | Board Of Regents, The University Of Texas System | Method and apparatus for producing a layer of material from a laser ion source |
DE68915763T2 (de) * | 1989-09-07 | 1994-12-08 | Ibm | Verfahren zur Spiegelpassivierung bei Halbleiterlaserdioden. |
JPH05311429A (ja) * | 1991-09-13 | 1993-11-22 | Nec Corp | 薄膜形成装置 |
JP3255469B2 (ja) * | 1992-11-30 | 2002-02-12 | 三菱電機株式会社 | レーザ薄膜形成装置 |
-
1995
- 1995-12-22 FR FR9515397A patent/FR2742926B1/fr not_active Expired - Fee Related
-
1996
- 1996-12-11 JP JP8331193A patent/JPH09199809A/ja active Pending
- 1996-12-18 US US08/769,137 patent/US5780120A/en not_active Expired - Lifetime
- 1996-12-19 DE DE69607450T patent/DE69607450T2/de not_active Expired - Fee Related
- 1996-12-19 EP EP96402817A patent/EP0783191B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5780120A (en) | 1998-07-14 |
EP0783191A1 (de) | 1997-07-09 |
FR2742926A1 (fr) | 1997-06-27 |
DE69607450D1 (de) | 2000-05-04 |
EP0783191B1 (de) | 2000-03-29 |
FR2742926B1 (fr) | 1998-02-06 |
JPH09199809A (ja) | 1997-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AVANEX CORP., FREMONT, CALIF., US |
|
8339 | Ceased/non-payment of the annual fee |