DE69607264T2 - Surface-Skimming-Bulk-Welle-Substrat, und diese enthaltende Vorrichtung - Google Patents

Surface-Skimming-Bulk-Welle-Substrat, und diese enthaltende Vorrichtung

Info

Publication number
DE69607264T2
DE69607264T2 DE69607264T DE69607264T DE69607264T2 DE 69607264 T2 DE69607264 T2 DE 69607264T2 DE 69607264 T DE69607264 T DE 69607264T DE 69607264 T DE69607264 T DE 69607264T DE 69607264 T2 DE69607264 T2 DE 69607264T2
Authority
DE
Germany
Prior art keywords
same
device containing
bulk wave
wave substrate
surface skimming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69607264T
Other languages
English (en)
Other versions
DE69607264D1 (de
Inventor
David Penunuri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CTS Corp
Original Assignee
CTS Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24051201&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69607264(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by CTS Corp filed Critical CTS Corp
Application granted granted Critical
Publication of DE69607264D1 publication Critical patent/DE69607264D1/de
Publication of DE69607264T2 publication Critical patent/DE69607264T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE69607264T 1995-08-15 1996-07-25 Surface-Skimming-Bulk-Welle-Substrat, und diese enthaltende Vorrichtung Revoked DE69607264T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51539995A 1995-08-15 1995-08-15

Publications (2)

Publication Number Publication Date
DE69607264D1 DE69607264D1 (de) 2000-04-27
DE69607264T2 true DE69607264T2 (de) 2000-10-26

Family

ID=24051201

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69607264T Revoked DE69607264T2 (de) 1995-08-15 1996-07-25 Surface-Skimming-Bulk-Welle-Substrat, und diese enthaltende Vorrichtung

Country Status (5)

Country Link
US (2) US5777419A (de)
EP (1) EP0758818B1 (de)
JP (1) JPH09238039A (de)
DE (1) DE69607264T2 (de)
DK (1) DK0758818T3 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3358688B2 (ja) * 1995-04-10 2002-12-24 三洋電機株式会社 弾性表面波素子
DE19638398C2 (de) * 1996-09-19 1999-12-30 Siemens Matsushita Components Oberflächenwellen-Bauelement
US6937283B1 (en) * 1996-12-03 2005-08-30 Eastman Kodak Company Anti-aliasing low-pass blur filter for reducing artifacts in imaging apparatus
US6495398B1 (en) * 2001-01-05 2002-12-17 Clarisay, Incorporated Wafer-scale package for surface acoustic wave circuit and method of manufacturing the same
US6507097B1 (en) 2001-11-29 2003-01-14 Clarisay, Inc. Hermetic package for pyroelectric-sensitive electronic device and method of manufacturing the same
US6649446B1 (en) 2001-11-29 2003-11-18 Clarisay, Inc. Hermetic package for multiple contact-sensitive electronic devices and methods of manufacturing thereof
US6621379B1 (en) 2001-11-29 2003-09-16 Clarisay, Incorporated Hermetic package for surface acoustic wave device and method of manufacturing the same
US6639150B1 (en) 2002-04-23 2003-10-28 Clarisay, Inc. Hermetic package for surface acoustic wave device having exposed device substrate contacts and method of manufacturing the same
US7105980B2 (en) * 2002-07-03 2006-09-12 Sawtek, Inc. Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics
US10868576B2 (en) * 2018-04-27 2020-12-15 Board Of Trustees Of The University Of Illinois Frequency independence for synthesis within programmable non-reciprocal network circuit

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699364A (en) * 1971-06-04 1972-10-17 Hughes Aircraft Co Acoustic surface wave device having improved transducer structure
US3725827A (en) * 1972-05-17 1973-04-03 Us Air Force High coupling low diffraction acoustic surface wave delay line
US3771072A (en) * 1972-12-15 1973-11-06 Us Air Force Low velocity zero temperature coefficient acoustic surface wave delay line having group and phase velocity vector coincidence
GB1474180A (en) * 1973-10-12 1977-05-18 Mullard Ltd Acoustic surface wave devices
US3867012A (en) * 1974-04-29 1975-02-18 Rca Corp Novel lithium niobate single crystal film structure
US4006435A (en) * 1974-12-23 1977-02-01 Hazeltine Corporation Method for fabricating a temperature compensated surface wave device
US4001767A (en) * 1975-11-18 1977-01-04 The United States Of America As Represented By The Secretary Of The Air Force Low diffraction loss-low spurious response LiTaO3 substrate for surface acoustic wave devices
GB1591624A (en) * 1977-01-24 1981-06-24 Secr Defence Acoustic wave devices
US4130813A (en) * 1977-05-23 1978-12-19 Raytheon Company Surface wave device having enhanced reflectivity gratings
JPS55115711A (en) * 1979-03-01 1980-09-05 Seiko Instr & Electronics Ltd Bending vibrator
US4634913B1 (en) * 1980-06-11 1997-05-13 Plessey Co Ltd Application of lithium tetraborate to electronic devices
US4523119A (en) * 1980-06-11 1985-06-11 Plessey Overseas Limited Application of lithium tetraborate to saw devices
JPS594310A (ja) * 1982-06-30 1984-01-11 Toshiba Corp 弾性表面波装置
FR2534243B1 (fr) * 1982-10-11 1986-02-14 Saint Gobain Vitrage Procede pour le transport de feuilles de verre portees a leur temperature de deformation, son application au bombage et dispositif pour sa mise en oeuvre
JPS59156013A (ja) * 1983-02-25 1984-09-05 Hiroshi Shimizu 高結合弾性表面波圧電基板
US4511817A (en) * 1983-10-28 1985-04-16 Allied Corporation Temperature compensated orientation of berlinite for surface acoustic wave devices
US4525643A (en) * 1983-10-28 1985-06-25 Allied Corporation Temperature compensated orientations of berlinite for surface acoustic wave devices
JPS6182513A (ja) * 1984-05-18 1986-04-26 Hitachi Ltd 弾性表面波装置
DE3575248D1 (de) * 1984-06-05 1990-02-08 Toshiba Kawasaki Kk Akustische oberflaechen-wellen-anordnung.
JPS6153200A (ja) * 1984-08-21 1986-03-17 Hamamatsu Photonics Kk ニオブ酸リチウム単結晶板の製造方法
JPS6173409A (ja) * 1984-09-18 1986-04-15 Nec Kansai Ltd 弾性表面波装置
US4910839A (en) * 1984-12-03 1990-03-27 R.F. Monolithics, Inc. Method of making a single phase unidirectional surface acoustic wave transducer
US4670680A (en) * 1986-07-29 1987-06-02 R. F. Monolithics, Inc. Doubly rotated orientations of cut angles for quartz crystal for novel surface acoustic wave devices
US5081389A (en) * 1990-11-30 1992-01-14 Ascom Zelcom Ag. Crystal cut angles for lithium tantalate crystal for novel surface acoustic wave devices
US5270606A (en) * 1991-07-22 1993-12-14 Motorola, Inc. Processing robust acoustic reflectors
JP3244094B2 (ja) * 1992-03-13 2002-01-07 キンセキ株式会社 弾性表面波装置
JPH0685597A (ja) * 1992-09-02 1994-03-25 Mitsubishi Electric Corp 弾性表面波装置
JP3016664B2 (ja) * 1992-09-24 2000-03-06 富士通テン株式会社 映像表示装置の同期信号処理回路
JPH06164287A (ja) * 1992-09-25 1994-06-10 Seiko Epson Corp 弾性表面波素子の周波数調整方法および弾性表面波素子の電極パターン
US5434466A (en) * 1994-05-31 1995-07-18 Motorola, Inc. Acoustic wave filter with reduced bulk-wave scattering loss and method

Also Published As

Publication number Publication date
EP0758818B1 (de) 2000-03-22
US5777419A (en) 1998-07-07
EP0758818A1 (de) 1997-02-19
JPH09238039A (ja) 1997-09-09
US5896636A (en) 1999-04-27
DK0758818T3 (da) 2000-07-24
DE69607264D1 (de) 2000-04-27

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation