DE69532853D1 - Verfahren und vorrichtung zur mikrowellen-plasmaerzeugung - Google Patents

Verfahren und vorrichtung zur mikrowellen-plasmaerzeugung

Info

Publication number
DE69532853D1
DE69532853D1 DE69532853T DE69532853T DE69532853D1 DE 69532853 D1 DE69532853 D1 DE 69532853D1 DE 69532853 T DE69532853 T DE 69532853T DE 69532853 T DE69532853 T DE 69532853T DE 69532853 D1 DE69532853 D1 DE 69532853D1
Authority
DE
Germany
Prior art keywords
microwave plasma
plasma production
production
microwave
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69532853T
Other languages
English (en)
Other versions
DE69532853T2 (de
Inventor
Xiaoming Duan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EA Technology Ltd
Original Assignee
EA Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EA Technology Ltd filed Critical EA Technology Ltd
Publication of DE69532853D1 publication Critical patent/DE69532853D1/de
Application granted granted Critical
Publication of DE69532853T2 publication Critical patent/DE69532853T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32605—Removable or replaceable electrodes or electrode systems
DE69532853T 1994-07-19 1995-07-11 Verfahren und vorrichtung zur mikrowellen-plasmaerzeugung Expired - Fee Related DE69532853T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9414561 1994-07-19
GB9414561A GB9414561D0 (en) 1994-07-19 1994-07-19 Method of and apparatus for microwave-plasma production
PCT/GB1995/001628 WO1996002934A1 (en) 1994-07-19 1995-07-11 Method of and apparatus for microwave-plasma production

Publications (2)

Publication Number Publication Date
DE69532853D1 true DE69532853D1 (de) 2004-05-13
DE69532853T2 DE69532853T2 (de) 2005-04-28

Family

ID=10758562

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69532853T Expired - Fee Related DE69532853T2 (de) 1994-07-19 1995-07-11 Verfahren und vorrichtung zur mikrowellen-plasmaerzeugung

Country Status (6)

Country Link
US (1) US5874705A (de)
EP (1) EP0771469B1 (de)
JP (1) JPH10503049A (de)
DE (1) DE69532853T2 (de)
GB (2) GB9414561D0 (de)
WO (1) WO1996002934A1 (de)

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US6444087B2 (en) 1999-01-20 2002-09-03 Hitachi, Ltd. Plasma etching system
US6422002B1 (en) * 1999-07-23 2002-07-23 The United States Of America As Represented By The United States Department Of Energy Method for generating a highly reactive plasma for exhaust gas aftertreatment and enhanced catalyst reactivity
WO2002009141A2 (en) * 2000-07-20 2002-01-31 Tokyo Electron Limited Automated electrode replacement apparatus for a plasma processing system
US6753498B2 (en) 2000-07-20 2004-06-22 Tokyo Electron Limited Automated electrode replacement apparatus for a plasma processing system
GB0126419D0 (en) * 2001-11-03 2002-01-02 Accentus Plc Microwave plasma generator
EP1361437A1 (de) * 2002-05-07 2003-11-12 Centre National De La Recherche Scientifique (Cnrs) Ein neuer biologischer Tumormarker und Methoden für die Detektion des krebsartigen oder nicht krebsartigen Phenotyps von Zellen
US20060237398A1 (en) * 2002-05-08 2006-10-26 Dougherty Mike L Sr Plasma-assisted processing in a manufacturing line
CN1304103C (zh) * 2002-05-08 2007-03-14 达纳公司 等离子体辅助碳结构的形成
US7497922B2 (en) * 2002-05-08 2009-03-03 Btu International, Inc. Plasma-assisted gas production
US7638727B2 (en) * 2002-05-08 2009-12-29 Btu International Inc. Plasma-assisted heat treatment
US7498066B2 (en) * 2002-05-08 2009-03-03 Btu International Inc. Plasma-assisted enhanced coating
US7494904B2 (en) * 2002-05-08 2009-02-24 Btu International, Inc. Plasma-assisted doping
US20060057016A1 (en) * 2002-05-08 2006-03-16 Devendra Kumar Plasma-assisted sintering
US20050233091A1 (en) * 2002-05-08 2005-10-20 Devendra Kumar Plasma-assisted coating
US20060233682A1 (en) * 2002-05-08 2006-10-19 Cherian Kuruvilla A Plasma-assisted engine exhaust treatment
US7445817B2 (en) * 2002-05-08 2008-11-04 Btu International Inc. Plasma-assisted formation of carbon structures
US20060228497A1 (en) * 2002-05-08 2006-10-12 Satyendra Kumar Plasma-assisted coating
US20060062930A1 (en) * 2002-05-08 2006-03-23 Devendra Kumar Plasma-assisted carburizing
US7560657B2 (en) * 2002-05-08 2009-07-14 Btu International Inc. Plasma-assisted processing in a manufacturing line
US7504061B2 (en) * 2002-05-08 2009-03-17 Leonhard Kurz Gmbh & Co., Kg Method of decorating large plastic 3D objects
US7465362B2 (en) * 2002-05-08 2008-12-16 Btu International, Inc. Plasma-assisted nitrogen surface-treatment
US7189940B2 (en) * 2002-12-04 2007-03-13 Btu International Inc. Plasma-assisted melting
FR2858333B1 (fr) * 2003-07-31 2006-12-08 Cit Alcatel Procede et dispositif pour le depot peu agressif de films dielectriques en phase vapeur assiste par plasma
GB2442990A (en) * 2004-10-04 2008-04-23 C Tech Innovation Ltd Microwave plasma apparatus
US20080129208A1 (en) * 2004-11-05 2008-06-05 Satyendra Kumar Atmospheric Processing Using Microwave-Generated Plasmas
CN101091420B (zh) * 2005-04-26 2011-02-23 株式会社岛津制作所 表面波激发等离子体产生装置以及表面波激发等离子体处理装置
GB0516695D0 (en) * 2005-08-15 2005-09-21 Boc Group Plc Microwave plasma reactor
US20080289494A1 (en) * 2005-08-19 2008-11-27 Atlantic Hydrogen Inc. Decomposition of natural gas or methane using cold arc discharge
CA2516499A1 (en) * 2005-08-19 2007-02-19 Atlantic Hydrogen Inc. Decomposition of natural gas or methane using cold arc discharge
JP5531240B2 (ja) * 2005-09-20 2014-06-25 イマジニアリング株式会社 点火装置、内燃機関、点火プラグ、及びプラズマ装置
JP5567327B2 (ja) * 2006-04-03 2014-08-06 インテグリス・インコーポレーテッド 常圧マイクロ波プラズマ処理多孔性膜
KR20140104440A (ko) * 2011-12-19 2014-08-28 도쿄엘렉트론가부시키가이샤 플라즈마 생성 장치 및 플라즈마 처리 장치
US9812295B1 (en) 2016-11-15 2017-11-07 Lyten, Inc. Microwave chemical processing
US9767992B1 (en) 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
US9997334B1 (en) 2017-02-09 2018-06-12 Lyten, Inc. Seedless particles with carbon allotropes
CN110418816B (zh) 2017-03-16 2022-05-31 利腾股份有限公司 碳和弹性体整合
US10920035B2 (en) 2017-03-16 2021-02-16 Lyten, Inc. Tuning deformation hysteresis in tires using graphene
US10756334B2 (en) 2017-12-22 2020-08-25 Lyten, Inc. Structured composite materials
EP3735582A4 (de) 2018-01-04 2021-11-10 Lyten, Inc. Resonanter gassensor
US10644368B2 (en) 2018-01-16 2020-05-05 Lyten, Inc. Pressure barrier comprising a transparent microwave window providing a pressure difference on opposite sides of the window
WO2020041597A1 (en) 2018-08-23 2020-02-27 Transform Materials Llc Systems and methods for processing gases
US11633710B2 (en) 2018-08-23 2023-04-25 Transform Materials Llc Systems and methods for processing gases

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SU810055A1 (ru) * 1979-10-24 1984-11-15 Предприятие П/Я В-2058 СВЧ-плазматрон
FR2480552A1 (fr) * 1980-04-10 1981-10-16 Anvar Generateur de plasmaŸ
EP0267513B1 (de) * 1986-11-10 1998-08-12 Semiconductor Energy Laboratory Co., Ltd. Durch Mikrowellen gesteigertes CVD-Verfahren und -Gerät
US4883570A (en) * 1987-06-08 1989-11-28 Research-Cottrell, Inc. Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves
JPH01183432A (ja) * 1988-01-18 1989-07-21 Sumitomo Electric Ind Ltd 石英ガラス管の加熱方法
JPH0831417B2 (ja) * 1988-12-02 1996-03-27 工業技術院長 プラズマ加工堆積装置
US5205912A (en) * 1989-12-27 1993-04-27 Exxon Research & Engineering Company Conversion of methane using pulsed microwave radiation
US5023056A (en) * 1989-12-27 1991-06-11 The United States Of America As Represented By The Secretary Of The Navy Plasma generator utilizing dielectric member for carrying microwave energy
CA2031358C (en) * 1990-01-03 2002-02-12 Charles John Matson Method and apparatus for the aerosol administration of medication
US5270515A (en) * 1990-04-02 1993-12-14 Long Raymond E Microwave plasma detoxification reactor and process for hazardous wastes
US5316739A (en) * 1991-08-20 1994-05-31 Bridgestone Corporation Method and apparatus for surface treatment
US5273587A (en) * 1992-09-04 1993-12-28 United Solar Systems Corporation Igniter for microwave energized plasma processing apparatus
GB2274947B (en) * 1993-02-02 1996-10-02 Atomic Energy Authority Uk Gas activation
US5468296A (en) * 1993-12-17 1995-11-21 Lsi Logic Corporation Apparatus for igniting low pressure inductively coupled plasma
US5565118A (en) * 1994-04-04 1996-10-15 Asquith; Joseph G. Self starting plasma plume igniter for aircraft jet engine

Also Published As

Publication number Publication date
US5874705A (en) 1999-02-23
GB2307099A (en) 1997-05-14
GB9701072D0 (en) 1997-03-12
EP0771469B1 (de) 2004-04-07
WO1996002934A1 (en) 1996-02-01
GB2307099B (en) 1997-11-26
GB9414561D0 (en) 1994-09-07
EP0771469A1 (de) 1997-05-07
DE69532853T2 (de) 2005-04-28
JPH10503049A (ja) 1998-03-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee