DE69530225D1 - Mikro-detektor mit fabry-perot-filter - Google Patents

Mikro-detektor mit fabry-perot-filter

Info

Publication number
DE69530225D1
DE69530225D1 DE69530225T DE69530225T DE69530225D1 DE 69530225 D1 DE69530225 D1 DE 69530225D1 DE 69530225 T DE69530225 T DE 69530225T DE 69530225 T DE69530225 T DE 69530225T DE 69530225 D1 DE69530225 D1 DE 69530225D1
Authority
DE
Germany
Prior art keywords
perot filter
fabry perot
micro detector
micro
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530225T
Other languages
English (en)
Other versions
DE69530225T2 (de
Inventor
E Cole
S Fritz
D Horning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of DE69530225D1 publication Critical patent/DE69530225D1/de
Application granted granted Critical
Publication of DE69530225T2 publication Critical patent/DE69530225T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
DE69530225T 1994-12-30 1995-12-20 Mikro-detektor mit fabry-perot-filter Expired - Lifetime DE69530225T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/367,491 US5550373A (en) 1994-12-30 1994-12-30 Fabry-Perot micro filter-detector
US367491 1994-12-30
PCT/US1995/016505 WO1996021140A1 (en) 1994-12-30 1995-12-20 Fabry-perot micro filter-detector

Publications (2)

Publication Number Publication Date
DE69530225D1 true DE69530225D1 (de) 2003-05-08
DE69530225T2 DE69530225T2 (de) 2004-02-19

Family

ID=23447390

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530225T Expired - Lifetime DE69530225T2 (de) 1994-12-30 1995-12-20 Mikro-detektor mit fabry-perot-filter

Country Status (6)

Country Link
US (1) US5550373A (de)
EP (1) EP0800643B1 (de)
JP (1) JPH10511772A (de)
CA (1) CA2205875A1 (de)
DE (1) DE69530225T2 (de)
WO (1) WO1996021140A1 (de)

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FI96450C (fi) * 1993-01-13 1996-06-25 Vaisala Oy Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto
DE4334578C2 (de) * 1993-10-11 1999-10-07 Dirk Winfried Rossberg Spektral abstimmbarer Infrarot-Sensor

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WO1996021140A1 (en) 1996-07-11
EP0800643A1 (de) 1997-10-15
CA2205875A1 (en) 1996-07-11
JPH10511772A (ja) 1998-11-10
DE69530225T2 (de) 2004-02-19
US5550373A (en) 1996-08-27
EP0800643B1 (de) 2003-04-02

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