DE69528836T2 - Vorrichtung und verfahren zur herstellung von gleichen dünnen beschichtungen auf breiten substraten - Google Patents

Vorrichtung und verfahren zur herstellung von gleichen dünnen beschichtungen auf breiten substraten

Info

Publication number
DE69528836T2
DE69528836T2 DE69528836T DE69528836T DE69528836T2 DE 69528836 T2 DE69528836 T2 DE 69528836T2 DE 69528836 T DE69528836 T DE 69528836T DE 69528836 T DE69528836 T DE 69528836T DE 69528836 T2 DE69528836 T2 DE 69528836T2
Authority
DE
Germany
Prior art keywords
producing
thin coatings
same thin
wide substrates
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69528836T
Other languages
English (en)
Other versions
DE69528836D1 (de
Inventor
Erich Muehlberger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Metco AG
Original Assignee
Sulzer Metco AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sulzer Metco AG filed Critical Sulzer Metco AG
Publication of DE69528836D1 publication Critical patent/DE69528836D1/de
Application granted granted Critical
Publication of DE69528836T2 publication Critical patent/DE69528836T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41NPRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N3/00Preparing for use and conserving printing surfaces
    • B41N3/03Chemical or electrical pretreatment
    • B41N3/032Graining by laser, arc or plasma means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134Plasma spraying
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/137Spraying in vacuum or in an inert atmosphere
DE69528836T 1994-08-18 1995-08-08 Vorrichtung und verfahren zur herstellung von gleichen dünnen beschichtungen auf breiten substraten Expired - Lifetime DE69528836T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/292,399 US5679167A (en) 1994-08-18 1994-08-18 Plasma gun apparatus for forming dense, uniform coatings on large substrates
PCT/US1995/010131 WO1996006517A1 (en) 1994-08-18 1995-08-08 Apparatus for and method of forming uniform thin coatings on large substrates

Publications (2)

Publication Number Publication Date
DE69528836D1 DE69528836D1 (de) 2002-12-19
DE69528836T2 true DE69528836T2 (de) 2003-08-28

Family

ID=23124504

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69528836T Expired - Lifetime DE69528836T2 (de) 1994-08-18 1995-08-08 Vorrichtung und verfahren zur herstellung von gleichen dünnen beschichtungen auf breiten substraten

Country Status (6)

Country Link
US (2) US5679167A (de)
EP (1) EP0776594B1 (de)
JP (1) JPH10507227A (de)
DE (1) DE69528836T2 (de)
GB (1) GB9422917D0 (de)
WO (1) WO1996006517A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004029466A1 (de) * 2004-06-18 2006-01-05 Leybold Optics Gmbh Medieninjektor
DE102008016041A1 (de) 2008-03-28 2009-01-02 Daimler Ag Vorrichtung
EP1801256B2 (de) 2005-12-21 2015-07-01 Sulzer Metco (US) Inc. Hybridplasmakaltgasspritzenverfahren und Vorrichtung

Families Citing this family (108)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0950992A (ja) * 1995-08-04 1997-02-18 Sharp Corp 成膜装置
US6388381B2 (en) * 1996-09-10 2002-05-14 The Regents Of The University Of California Constricted glow discharge plasma source
US6213049B1 (en) 1997-06-26 2001-04-10 General Electric Company Nozzle-injector for arc plasma deposition apparatus
US6110544A (en) * 1997-06-26 2000-08-29 General Electric Company Protective coating by high rate arc plasma deposition
DE19810848A1 (de) * 1998-02-06 1999-08-12 Heinz Zorn Spiegelheizeinrichtung
JP2963993B1 (ja) * 1998-07-24 1999-10-18 工業技術院長 超微粒子成膜法
EP1034843A1 (de) * 1999-03-10 2000-09-13 Sulzer Metco AG Verfahren zur Herstellung einer beschichteten Struktur, die sich zum Durchführen von heterogenen Katalysen eignet
US7091605B2 (en) * 2001-09-21 2006-08-15 Eastman Kodak Company Highly moisture-sensitive electronic device element and method for fabrication
DE29921694U1 (de) * 1999-12-09 2001-04-19 Agrodyn Hochspannungstechnik G Plasmadüse
WO2002019455A2 (de) 2000-08-30 2002-03-07 Siemens Aktiengesellschaft Verfahren zum herstellen einer festkeramischen brennstoffzelle
US6641673B2 (en) * 2000-12-20 2003-11-04 General Electric Company Fluid injector for and method of prolonged delivery and distribution of reagents into plasma
DE10104613A1 (de) * 2001-02-02 2002-08-22 Bosch Gmbh Robert Plasmaanlage und Verfahren zur Erzeugung einer Funktionsbeschichtung
CN1246122C (zh) * 2001-04-11 2006-03-22 斯泰纳曼技术股份公司 支承体以及用于改善磨床支承体磨损状况的方法
CH695689A5 (de) * 2001-05-23 2006-07-31 Sulzer Metco Ag Verfahren zum Erzeugen eines wärmedämmenden Schichtsystems auf einem metallischen Substrat.
WO2003087422A1 (de) * 2002-04-12 2003-10-23 Sulzer Metco Ag Plasmaspritzverfahren
DE10224780A1 (de) * 2002-06-04 2003-12-18 Linde Ag Verfahren und Vorrichtung zum Kaltgasspritzen
WO2004070819A1 (ja) * 2003-02-05 2004-08-19 Semiconductor Energy Laboratory Co., Ltd. 表示装置の製造方法
WO2004070823A1 (ja) * 2003-02-05 2004-08-19 Semiconductor Energy Laboratory Co., Ltd. 表示装置の作製方法
CN100459060C (zh) * 2003-02-05 2009-02-04 株式会社半导体能源研究所 显示装置的制造方法
CN100472731C (zh) * 2003-02-06 2009-03-25 株式会社半导体能源研究所 半导体制造装置
JP4526951B2 (ja) * 2003-02-06 2010-08-18 株式会社半導体エネルギー研究所 表示装置の作製方法
WO2004070822A1 (ja) * 2003-02-06 2004-08-19 Semiconductor Energy Laboratory Co., Ltd. 半導体装置及び表示装置の製造方法
CA2460296C (en) * 2003-05-23 2012-02-14 Sulzer Metco Ag A hybrid method for the coating of a substrate by a thermal application of the coating
EP1479788B1 (de) * 2003-05-23 2007-11-28 Sulzer Metco AG Hybrides Verfahren zum Beschichten eines Substrats durch ein thermisches Aufbringen der Beschichtung
US7164095B2 (en) * 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US20060052883A1 (en) * 2004-09-08 2006-03-09 Lee Sang H System and method for optimizing data acquisition of plasma using a feedback control module
CN101076716B (zh) 2004-10-08 2011-04-13 Sdc材料有限责任公司 采样和收集在气流中流动的粉末的装置和方法
SE529058C2 (sv) 2005-07-08 2007-04-17 Plasma Surgical Invest Ltd Plasmaalstrande anordning, plasmakirurgisk anordning, användning av en plasmakirurgisk anordning och förfarande för att bilda ett plasma
SE529053C2 (sv) 2005-07-08 2007-04-17 Plasma Surgical Invest Ltd Plasmaalstrande anordning, plasmakirurgisk anordning och användning av en plasmakirurgisk anordning
SE529056C2 (sv) 2005-07-08 2007-04-17 Plasma Surgical Invest Ltd Plasmaalstrande anordning, plasmakirurgisk anordning och användning av en plasmakirurgisk anordning
CA2560030C (en) * 2005-11-24 2013-11-12 Sulzer Metco Ag A thermal spraying material, a thermally sprayed coating, a thermal spraying method an also a thermally coated workpiece
TW200742506A (en) * 2006-02-17 2007-11-01 Noritsu Koki Co Ltd Plasma generation apparatus and work process apparatus
FR2897748B1 (fr) * 2006-02-20 2008-05-16 Snecma Services Sa Procede de depot de barriere thermique par torche plasma
US8203095B2 (en) * 2006-04-20 2012-06-19 Materials & Electrochemical Research Corp. Method of using a thermal plasma to produce a functionally graded composite surface layer on metals
EP1852519B1 (de) 2006-05-05 2013-08-28 Sulzer Metco AG (Switzerland) Verfahren zum Herstellen einer Beschichtung
CA2582312C (en) * 2006-05-05 2014-05-13 Sulzer Metco Ag A method for the manufacture of a coating
US20080095953A1 (en) * 2006-10-24 2008-04-24 Samsung Electronics Co., Ltd. Apparatus for depositing thin film and method of depositing the same
US7928338B2 (en) 2007-02-02 2011-04-19 Plasma Surgical Investments Ltd. Plasma spraying device and method
US20080220558A1 (en) * 2007-03-08 2008-09-11 Integrated Photovoltaics, Inc. Plasma spraying for semiconductor grade silicon
JP2010526986A (ja) 2007-05-11 2010-08-05 エスディーシー マテリアルズ インコーポレイテッド 熱交換器、冷却装置及び冷却方法
US8735766B2 (en) 2007-08-06 2014-05-27 Plasma Surgical Investments Limited Cathode assembly and method for pulsed plasma generation
US7589473B2 (en) * 2007-08-06 2009-09-15 Plasma Surgical Investments, Ltd. Pulsed plasma device and method for generating pulsed plasma
EP2030669B1 (de) 2007-08-16 2014-04-02 Sulzer Metco AG Verfahren zum Herstellen einer wasserstoffpermeablen Membran sowie wasserstoffpermeable Membran
EP2025772A1 (de) 2007-08-16 2009-02-18 Sulzer Metco AG Verfahren zum Herstellen einer funktionalen Schicht
US8481449B1 (en) 2007-10-15 2013-07-09 SDCmaterials, Inc. Method and system for forming plug and play oxide catalysts
CA2658210A1 (en) * 2008-04-04 2009-10-04 Sulzer Metco Ag Method and apparatus for the coating and for the surface treatment of substrates by means of a plasma beam
USD627900S1 (en) 2008-05-07 2010-11-23 SDCmaterials, Inc. Glove box
US8197909B2 (en) * 2008-08-26 2012-06-12 Ford Global Technologies, Llc Plasma coatings and method of making the same
US20100074810A1 (en) * 2008-09-23 2010-03-25 Sang Hun Lee Plasma generating system having tunable plasma nozzle
US9439277B2 (en) 2008-10-23 2016-09-06 Baker Hughes Incorporated Robotically applied hardfacing with pre-heat
US8450637B2 (en) 2008-10-23 2013-05-28 Baker Hughes Incorporated Apparatus for automated application of hardfacing material to drill bits
WO2010053710A2 (en) * 2008-10-29 2010-05-14 Baker Hughes Incorporated Method and apparatus for robotic welding of drill bits
US7921804B2 (en) * 2008-12-08 2011-04-12 Amarante Technologies, Inc. Plasma generating nozzle having impedance control mechanism
US20100201272A1 (en) * 2009-02-09 2010-08-12 Sang Hun Lee Plasma generating system having nozzle with electrical biasing
US8253058B2 (en) * 2009-03-19 2012-08-28 Integrated Photovoltaics, Incorporated Hybrid nozzle for plasma spraying silicon
US8931431B2 (en) * 2009-03-25 2015-01-13 The Regents Of The University Of Michigan Nozzle geometry for organic vapor jet printing
US20100254853A1 (en) * 2009-04-06 2010-10-07 Sang Hun Lee Method of sterilization using plasma generated sterilant gas
US8815006B2 (en) 2009-05-08 2014-08-26 Rajiv J. Damani Method for coating a substrate and substrate with a coating
US9683282B2 (en) * 2009-06-22 2017-06-20 Oerlikon Metco (Us) Inc. Symmetrical multi-port powder injection ring
US9111729B2 (en) * 2009-12-03 2015-08-18 Lam Research Corporation Small plasma chamber systems and methods
US9039916B1 (en) 2009-12-15 2015-05-26 SDCmaterials, Inc. In situ oxide removal, dispersal and drying for copper copper-oxide
US8803025B2 (en) 2009-12-15 2014-08-12 SDCmaterials, Inc. Non-plugging D.C. plasma gun
US8652992B2 (en) 2009-12-15 2014-02-18 SDCmaterials, Inc. Pinning and affixing nano-active material
US9126191B2 (en) 2009-12-15 2015-09-08 SDCmaterials, Inc. Advanced catalysts for automotive applications
US8470112B1 (en) 2009-12-15 2013-06-25 SDCmaterials, Inc. Workflow for novel composite materials
US9149797B2 (en) 2009-12-15 2015-10-06 SDCmaterials, Inc. Catalyst production method and system
US8557727B2 (en) 2009-12-15 2013-10-15 SDCmaterials, Inc. Method of forming a catalyst with inhibited mobility of nano-active material
US8545652B1 (en) 2009-12-15 2013-10-01 SDCmaterials, Inc. Impact resistant material
US8613742B2 (en) 2010-01-29 2013-12-24 Plasma Surgical Investments Limited Methods of sealing vessels using plasma
EP2354267A1 (de) 2010-02-09 2011-08-10 Sulzer Metco AG Verfahren zur Herstellung einer funktionalen strukturierten Schicht auf einem Substrat, sowie Beschichtungsvorrichtung und Substratteller für eine Beschichtungsvorrichtung
US9089319B2 (en) 2010-07-22 2015-07-28 Plasma Surgical Investments Limited Volumetrically oscillating plasma flows
EP2431995A1 (de) * 2010-09-17 2012-03-21 Asociacion de la Industria Navarra (AIN) Ionisierungsvorrichtung
CA2754458A1 (en) * 2010-10-11 2012-04-11 Sulzer Metco Ag Method of manufacturing a thermal barrier coating structure
US8669202B2 (en) 2011-02-23 2014-03-11 SDCmaterials, Inc. Wet chemical and plasma methods of forming stable PtPd catalysts
SG184626A1 (en) 2011-03-17 2012-10-30 Sulzer Metco Ag Component manipulator for the dynamic positioning of a substrate, coating method, as well as use of a component manipulator
EP2503018B8 (de) 2011-03-23 2018-11-21 Oerlikon Metco AG, Wohlen Plasmaspritzverfahren zum Herstellen einer ionenleitenden Membran
JP5815967B2 (ja) * 2011-03-31 2015-11-17 東京エレクトロン株式会社 基板洗浄装置及び真空処理システム
EP2726643A1 (de) 2011-07-01 2014-05-07 Reinhausen Plasma GmbH Plasmabehandlung von hohlkörpern
KR20140071364A (ko) 2011-08-19 2014-06-11 에스디씨머티리얼스, 인코포레이티드 촉매작용에 사용하기 위한 코팅 기판 및 촉매 변환기 및 기판을 워시코트 조성물로 코팅하는 방법
CN103094038B (zh) * 2011-10-27 2017-01-11 松下知识产权经营株式会社 等离子体处理装置以及等离子体处理方法
EP2788520A1 (de) 2011-12-09 2014-10-15 Georg Fischer Automotive (Suzhou) Co. Ltd Verfahren zum beschichten eines substrats
WO2013105613A1 (ja) * 2012-01-13 2013-07-18 株式会社中山製鋼所 アモルファス皮膜の形成装置および形成方法
DE102012107282A1 (de) 2012-01-17 2013-07-18 Reinhausen Plasma Gmbh Vorrichtung und verfahren zur plasmabehandlung von oberflächen
US9034199B2 (en) 2012-02-21 2015-05-19 Applied Materials, Inc. Ceramic article with reduced surface defect density and process for producing a ceramic article
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
EP2644738B1 (de) 2012-03-28 2018-01-10 Oerlikon Metco AG, Wohlen Plasmaspritzverfahren zum Herstellen einer ionenleitenden Membran und ionenleitende Membran
US9090046B2 (en) 2012-04-16 2015-07-28 Applied Materials, Inc. Ceramic coated article and process for applying ceramic coating
DE102012103498A1 (de) * 2012-04-20 2013-10-24 Reinhausen Plasma Gmbh Vorrichtung und Verfahren zum Kennzeichnen eines Substrats sowie Kennzeichnung hierfür
DE102012106078A1 (de) 2012-07-06 2014-05-08 Reinhausen Plasma Gmbh Beschichtungsvorrichtung und Verfahren zur Beschichtung eines Substrats
US9604249B2 (en) 2012-07-26 2017-03-28 Applied Materials, Inc. Innovative top-coat approach for advanced device on-wafer particle performance
US9343289B2 (en) 2012-07-27 2016-05-17 Applied Materials, Inc. Chemistry compatible coating material for advanced device on-wafer particle performance
DE102012108919A1 (de) 2012-09-21 2014-05-15 Reinhausen Plasma Gmbh Vorrichtung und Verfahren zur Erzeugung eines Schichtsystems
US9511352B2 (en) 2012-11-21 2016-12-06 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9156025B2 (en) 2012-11-21 2015-10-13 SDCmaterials, Inc. Three-way catalytic converter using nanoparticles
US9865434B2 (en) 2013-06-05 2018-01-09 Applied Materials, Inc. Rare-earth oxide based erosion resistant coatings for semiconductor application
US9850568B2 (en) 2013-06-20 2017-12-26 Applied Materials, Inc. Plasma erosion resistant rare-earth oxide based thin film coatings
US9586179B2 (en) 2013-07-25 2017-03-07 SDCmaterials, Inc. Washcoats and coated substrates for catalytic converters and methods of making and using same
US10468235B2 (en) 2013-09-18 2019-11-05 Applied Materials, Inc. Plasma spray coating enhancement using plasma flame heat treatment
MX2016004991A (es) 2013-10-22 2016-08-01 Sdcmaterials Inc Diseño de catalizador para motores de combustion diesel de servicio pesado.
MX2016004759A (es) 2013-10-22 2016-07-26 Sdcmaterials Inc Composiciones para trampas de oxidos de nitrogeno (nox) pobres.
US11414759B2 (en) * 2013-11-29 2022-08-16 Taiwan Semiconductor Manufacturing Co., Ltd Mechanisms for supplying process gas into wafer process apparatus
EP3119500A4 (de) 2014-03-21 2017-12-13 SDC Materials, Inc. Zusammensetzungen für passive nox-adsorptionssysteme
EP3262209B1 (de) 2015-02-24 2022-01-26 Oerlikon Surface Solutions AG, Pfäffikon Methode zur beschichtung von motorkolben
ITUB20159465A1 (it) * 2015-12-16 2017-06-16 Turbocoating S P A Metodo di deposizione thermal spray di un ricoprimento su una superficie e apparato
US11047035B2 (en) 2018-02-23 2021-06-29 Applied Materials, Inc. Protective yttria coating for semiconductor equipment parts
EP3640359B1 (de) * 2018-10-18 2021-06-16 Rolls-Royce Corporation Ps-pvd innerhalb eines inneren hohlraums
CA3191050A1 (en) 2020-08-28 2022-03-03 Nikolay Suslov Systems, methods, and devices for generating predominantly radially expanded plasma flow
CN114086107B (zh) * 2021-12-28 2023-07-14 河北复朗施纳米科技有限公司 一种纳米抑菌涂层装置

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3311735A (en) * 1964-05-21 1967-03-28 Giannini Scient Corp Apparatus and method for generating heat
US3839618A (en) * 1972-01-03 1974-10-01 Geotel Inc Method and apparatus for effecting high-energy dynamic coating of substrates
US4028085A (en) * 1976-02-03 1977-06-07 Owens-Illinois, Inc. Method for manufacturing silicate glasses from alkoxides
US4328257A (en) * 1979-11-26 1982-05-04 Electro-Plasma, Inc. System and method for plasma coating
US4439239A (en) * 1982-06-02 1984-03-27 Ppg Industries, Inc. Pigmented coating composition containing a mixture of alkoxysilanes
JPS59213660A (ja) * 1983-05-13 1984-12-03 鐘淵化学工業株式会社 多孔性セラミツクス薄膜およびその製造法
DE3422718A1 (de) * 1984-06-19 1986-01-09 Plasmainvent AG, Zug Vakuum-plasma-beschichtungsanlage
DE3538390A1 (de) * 1985-10-29 1987-04-30 Deutsche Forsch Luft Raumfahrt Beschichtung fuer ein substrat und verfahren zu dessen herstellung
US4689468A (en) * 1986-02-10 1987-08-25 Electro-Plasma, Inc. Method of and apparatus providing oxide reduction in a plasma environment
JPS62273272A (ja) * 1986-05-20 1987-11-27 Nippon Oil & Fats Co Ltd 防錆塗料組成物
US4897282A (en) * 1986-09-08 1990-01-30 Iowa State University Reserach Foundation, Inc. Thin film coating process using an inductively coupled plasma
JPS6380968A (ja) * 1986-09-22 1988-04-11 Toyota Central Res & Dev Lab Inc プラズマア−クの発生方法及び発生装置
US4920917A (en) * 1987-03-18 1990-05-01 Teijin Limited Reactor for depositing a layer on a moving substrate
US4929278A (en) * 1988-01-26 1990-05-29 United States Department Of Energy Sol-gel antireflective coating on plastics
JPH01252781A (ja) * 1988-03-31 1989-10-09 Joshin Uramoto 圧力勾配型放電によるプラズマcvd装置
US4912361A (en) * 1988-07-18 1990-03-27 Electro-Plasma, Inc. Plasma gun having improved anode cooling system
FR2635623B1 (fr) * 1988-08-19 1990-11-09 Philips Nv Dispositif de synchronisation sur des paquets de donnees numeriques et lecteur le comprenant
US5041486A (en) * 1989-04-28 1991-08-20 Union Oil Company Of California Sol/gel polymer surface coatings and gloss enhancement
US5166248A (en) * 1989-02-01 1992-11-24 Union Oil Company Of California Sol/gel-containing surface coating polymer compositions
US5004563A (en) * 1989-02-01 1991-04-02 Union Oil Company Of California Antistatic textile compositions and sol/gel/polymer compositions
US5004562A (en) * 1989-02-01 1991-04-02 Union Oil Company Of California Latex/sol or gel systems
US5028489A (en) * 1989-02-01 1991-07-02 Union Oil Of California Sol/gel polymer surface coatings and corrosion protection enhancement
US5041487A (en) * 1989-06-30 1991-08-20 Union Oil Company Of California Sol/gel polymer surface coatings and tannin block enhancement
US5158605A (en) * 1989-02-01 1992-10-27 Union Oil Company Of California Sol/gel polymer surface coatings and corrosion protection enhancement
DE69005938T2 (de) * 1989-07-31 1994-05-19 Matsushita Electric Ind Co Ltd Vorrichtung zur Herstellung von einer dünnen diamantartigen Kohlenstoffschicht.
US5175027A (en) * 1990-02-23 1992-12-29 Lord Corporation Ultra-thin, uniform sol-gel coatings
CA2010887C (en) * 1990-02-26 1996-07-02 Peter George Tsantrizos Reactive spray forming process
JP2595365B2 (ja) * 1990-03-22 1997-04-02 松下電器産業株式会社 熱プラズマジェット発生装置
US5235160A (en) * 1990-03-22 1993-08-10 Matsushita Electric Industrial Co., Ltd. Heat-plasma-jet generator capable of conducting plasma spray or heat-plasma cvd coating in a relatively wide area
US5260106A (en) * 1990-08-03 1993-11-09 Fujitsu Limited Method for forming diamond films by plasma jet CVD
FR2674450B1 (fr) * 1991-03-26 1994-01-21 Agence Spatiale Europeenne Procede pour deposer un revetement sur un substrat par projection au plasma, et dispositif pour la mise en óoeuvre du procede.
GB9115153D0 (en) * 1991-07-12 1991-08-28 Patel Bipin C M Sol-gel composition for producing glassy coatings
JPH05251038A (ja) * 1992-03-04 1993-09-28 Hitachi Ltd プラズマイオン質量分析装置
FI209U1 (fi) * 1992-03-31 1992-08-05 Rotaweld Oy Doseringsmunstycke foer pulverformigt svetsningstillsatsaemne
US5565249A (en) * 1992-05-07 1996-10-15 Fujitsu Limited Method for producing diamond by a DC plasma jet
CA2134891C (en) * 1992-05-13 1999-08-03 Stephan E. Muehlberger High temperature plasma gun assembly
US5261955A (en) * 1992-05-22 1993-11-16 Alcan International Limited Coloring aluminum flakes
GB9300261D0 (en) * 1993-01-08 1993-03-03 British Tech Group Sol-gel composition for producing glassy coatings
FR2703073B1 (fr) * 1993-03-26 1995-05-05 Lorraine Laminage Procédé et dispositif pour le revêtement en continu d'un matériau métallique en défilement par un dépôt de polymère à gradient de composition, et produit obtenu par ce procédé.
US5560779A (en) * 1993-07-12 1996-10-01 Olin Corporation Apparatus for synthesizing diamond films utilizing an arc plasma
US5464667A (en) * 1994-08-16 1995-11-07 Minnesota Mining And Manufacturing Company Jet plasma process and apparatus
US5573682A (en) * 1995-04-20 1996-11-12 Plasma Processes Plasma spray nozzle with low overspray and collimated flow

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004029466A1 (de) * 2004-06-18 2006-01-05 Leybold Optics Gmbh Medieninjektor
EP1801256B2 (de) 2005-12-21 2015-07-01 Sulzer Metco (US) Inc. Hybridplasmakaltgasspritzenverfahren und Vorrichtung
DE102008016041A1 (de) 2008-03-28 2009-01-02 Daimler Ag Vorrichtung

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DE69528836D1 (de) 2002-12-19
WO1996006517A1 (en) 1996-02-29
US5679167A (en) 1997-10-21
JPH10507227A (ja) 1998-07-14
EP0776594B1 (de) 2002-11-13
US5853815A (en) 1998-12-29
GB9422917D0 (en) 1995-01-04
EP0776594A1 (de) 1997-06-04
EP0776594A4 (de) 1998-10-07

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