DE69520340T2 - Apparat und Methode zur Chipausbeuteermittlung - Google Patents
Apparat und Methode zur ChipausbeuteermittlungInfo
- Publication number
- DE69520340T2 DE69520340T2 DE69520340T DE69520340T DE69520340T2 DE 69520340 T2 DE69520340 T2 DE 69520340T2 DE 69520340 T DE69520340 T DE 69520340T DE 69520340 T DE69520340 T DE 69520340T DE 69520340 T2 DE69520340 T2 DE 69520340T2
- Authority
- DE
- Germany
- Prior art keywords
- chip yield
- determining chip
- determining
- yield
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30603594A JP3986571B2 (ja) | 1994-12-09 | 1994-12-09 | 歩留り予測装置とその方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69520340D1 DE69520340D1 (de) | 2001-04-19 |
DE69520340T2 true DE69520340T2 (de) | 2001-07-12 |
Family
ID=17952288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69520340T Expired - Lifetime DE69520340T2 (de) | 1994-12-09 | 1995-12-11 | Apparat und Methode zur Chipausbeuteermittlung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5754432A (de) |
EP (1) | EP0718880B1 (de) |
JP (1) | JP3986571B2 (de) |
KR (1) | KR100359599B1 (de) |
DE (1) | DE69520340T2 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3364109B2 (ja) * | 1997-04-18 | 2003-01-08 | 松下電器産業株式会社 | 集積回路装置の歩留まり推定方法 |
US6070004A (en) * | 1997-09-25 | 2000-05-30 | Siemens Aktiengesellschaft | Method of maximizing chip yield for semiconductor wafers |
US6044208A (en) * | 1998-04-30 | 2000-03-28 | International Business Machines Corporation | Incremental critical area computation for VLSI yield prediction |
US6247853B1 (en) * | 1998-05-26 | 2001-06-19 | International Business Machines Corporation | Incremental method for critical area and critical region computation of via blocks |
US6367040B1 (en) * | 1999-01-11 | 2002-04-02 | Siemens Aktiengesellschaft | System and method for determining yield impact for semiconductor devices |
JP4080087B2 (ja) | 1999-02-01 | 2008-04-23 | 株式会社日立製作所 | 分析方法,分析システム及び分析装置 |
US6707936B1 (en) | 1999-04-16 | 2004-03-16 | Texas Instruments Incorporated | Method and apparatus for predicting device yield from a semiconductor wafer |
US6449749B1 (en) * | 1999-11-18 | 2002-09-10 | Pdf Solutions, Inc. | System and method for product yield prediction |
JP4170569B2 (ja) * | 2000-06-02 | 2008-10-22 | 大日本印刷株式会社 | 基板選択装置 |
JP4357134B2 (ja) | 2001-03-29 | 2009-11-04 | 株式会社日立製作所 | 検査システムと検査装置と半導体デバイスの製造方法及び検査プログラム |
JP4126189B2 (ja) * | 2002-04-10 | 2008-07-30 | 株式会社日立ハイテクノロジーズ | 検査条件設定プログラム、検査装置および検査システム |
US6909931B2 (en) * | 2002-06-04 | 2005-06-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for estimating microelectronic fabrication product yield |
US6996790B2 (en) * | 2003-01-30 | 2006-02-07 | Synopsys, Inc. | System and method for generating a two-dimensional yield map for a full layout |
US9002497B2 (en) | 2003-07-03 | 2015-04-07 | Kla-Tencor Technologies Corp. | Methods and systems for inspection of wafers and reticles using designer intent data |
CN101014955B (zh) * | 2004-10-01 | 2010-09-08 | 明导公司 | 特征故障相关 |
JP4718914B2 (ja) * | 2005-06-28 | 2011-07-06 | 株式会社東芝 | 半導体集積回路の設計支援システム、半導体集積回路の設計方法、半導体集積回路の設計支援プログラム、半導体集積回路の製造方法 |
US7544578B2 (en) | 2007-01-03 | 2009-06-09 | International Business Machines Corporation | Structure and method for stochastic integrated circuit personalization |
US7752580B2 (en) * | 2007-07-26 | 2010-07-06 | International Business Machines Corporation | Method and system for analyzing an integrated circuit based on sample windows selected using an open deterministic sequencing technique |
JP4893778B2 (ja) * | 2009-05-21 | 2012-03-07 | 大日本印刷株式会社 | 描画用基板の供給方法および基板選択装置 |
US8276102B2 (en) | 2010-03-05 | 2012-09-25 | International Business Machines Corporation | Spatial correlation-based estimation of yield of integrated circuits |
US20130218518A1 (en) * | 2012-02-21 | 2013-08-22 | International Business Machines Corporation | Automated, three dimensional mappable environmental sampling system and methods of use |
KR20200122673A (ko) * | 2019-04-18 | 2020-10-28 | 삼성전자주식회사 | 패턴 디자인 및 상기 패턴 디자인을 검사하기 위한 방법 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840376B1 (de) | 1969-01-09 | 1973-11-30 | ||
US3751647A (en) * | 1971-09-22 | 1973-08-07 | Ibm | Semiconductor and integrated circuit device yield modeling |
DE2240654A1 (de) * | 1971-09-22 | 1973-03-29 | Ibm | Verfahren in einem herstellungsprozess fuer monolithisch integrierte schaltungen |
US3983479A (en) * | 1975-07-23 | 1976-09-28 | International Business Machines Corporation | Electrical defect monitor structure |
EP0054596B1 (de) * | 1980-12-18 | 1985-05-29 | International Business Machines Corporation | Verfahren für die Inspektion und die automatische Sortierung von Objekten, die Konfigurationen mit dimensionellen Toleranzen aufweisen und platzabhängige Kriterien für die Verwerfung, Anlage und Schaltung dafür |
US4763289A (en) * | 1985-12-31 | 1988-08-09 | International Business Machines Corporation | Method for the modeling and fault simulation of complementary metal oxide semiconductor circuits |
US4835466A (en) * | 1987-02-06 | 1989-05-30 | Fairchild Semiconductor Corporation | Apparatus and method for detecting spot defects in integrated circuits |
US5287290A (en) * | 1989-03-10 | 1994-02-15 | Fujitsu Limited | Method and apparatus for checking a mask pattern |
US5051938A (en) * | 1989-06-23 | 1991-09-24 | Hyduke Stanley M | Simulation of selected logic circuit designs |
JP2679500B2 (ja) * | 1990-12-17 | 1997-11-19 | モトローラ・インコーポレイテッド | 総合的なシステム歩留りを計算するための方法 |
US5282140A (en) * | 1992-06-24 | 1994-01-25 | Intel Corporation | Particle flux shadowing for three-dimensional topography simulation |
US5497381A (en) * | 1993-10-15 | 1996-03-05 | Analog Devices, Inc. | Bitstream defect analysis method for integrated circuits |
JPH07306848A (ja) * | 1994-05-16 | 1995-11-21 | Matsushita Electron Corp | 歩留まり推定装置 |
US5539652A (en) * | 1995-02-07 | 1996-07-23 | Hewlett-Packard Company | Method for manufacturing test simulation in electronic circuit design |
US5598341A (en) * | 1995-03-10 | 1997-01-28 | Advanced Micro Devices, Inc. | Real-time in-line defect disposition and yield forecasting system |
US5649169A (en) * | 1995-06-20 | 1997-07-15 | Advanced Micro Devices, Inc. | Method and system for declustering semiconductor defect data |
-
1994
- 1994-12-09 JP JP30603594A patent/JP3986571B2/ja not_active Expired - Fee Related
-
1995
- 1995-12-07 US US08/568,909 patent/US5754432A/en not_active Expired - Lifetime
- 1995-12-09 KR KR1019950048136A patent/KR100359599B1/ko not_active IP Right Cessation
- 1995-12-11 DE DE69520340T patent/DE69520340T2/de not_active Expired - Lifetime
- 1995-12-11 EP EP95308971A patent/EP0718880B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP3986571B2 (ja) | 2007-10-03 |
EP0718880B1 (de) | 2001-03-14 |
KR960026522A (ko) | 1996-07-22 |
US5754432A (en) | 1998-05-19 |
JPH08162510A (ja) | 1996-06-21 |
KR100359599B1 (ko) | 2003-01-24 |
DE69520340D1 (de) | 2001-04-19 |
EP0718880A3 (de) | 1997-02-05 |
EP0718880A2 (de) | 1996-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |