DE69518787T2 - Statischer Induktionsthyristor und dessen Herstellungsverfahren - Google Patents
Statischer Induktionsthyristor und dessen HerstellungsverfahrenInfo
- Publication number
- DE69518787T2 DE69518787T2 DE69518787T DE69518787T DE69518787T2 DE 69518787 T2 DE69518787 T2 DE 69518787T2 DE 69518787 T DE69518787 T DE 69518787T DE 69518787 T DE69518787 T DE 69518787T DE 69518787 T2 DE69518787 T2 DE 69518787T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- static induction
- induction thyristor
- thyristor
- static
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000006698 induction Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000003068 static effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66356—Gated diodes, e.g. field controlled diodes [FCD], static induction thyristors [SITh], field controlled thyristors [FCTh]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7391—Gated diode structures
- H01L29/7392—Gated diode structures with PN junction gate, e.g. field controlled thyristors (FCTh), static induction thyristors (SITh)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9247894 | 1994-04-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69518787D1 DE69518787D1 (de) | 2000-10-19 |
DE69518787T2 true DE69518787T2 (de) | 2001-03-22 |
Family
ID=14055423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69518787T Expired - Fee Related DE69518787T2 (de) | 1994-04-28 | 1995-04-28 | Statischer Induktionsthyristor und dessen Herstellungsverfahren |
Country Status (3)
Country | Link |
---|---|
US (2) | US5648665A (de) |
EP (1) | EP0680093B1 (de) |
DE (1) | DE69518787T2 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2801127B2 (ja) * | 1993-07-28 | 1998-09-21 | 日本碍子株式会社 | 半導体装置およびその製造方法 |
US5648665A (en) * | 1994-04-28 | 1997-07-15 | Ngk Insulators, Ltd. | Semiconductor device having a plurality of cavity defined gating regions and a fabrication method therefor |
JPH0855978A (ja) * | 1994-06-09 | 1996-02-27 | Ngk Insulators Ltd | 半導体装置およびその製造方法 |
JP3277075B2 (ja) * | 1994-09-07 | 2002-04-22 | 日本碍子株式会社 | 半導体装置およびその製造方法 |
US6143583A (en) * | 1998-06-08 | 2000-11-07 | Honeywell, Inc. | Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas |
TW447046B (en) * | 2000-04-19 | 2001-07-21 | United Microelectronics Corp | CMOS sensing area structure having surrounding silicon oxide and method for manufacturing the same |
JP3957038B2 (ja) * | 2000-11-28 | 2007-08-08 | シャープ株式会社 | 半導体基板及びその作製方法 |
US6746890B2 (en) * | 2002-07-17 | 2004-06-08 | Tini Alloy Company | Three dimensional thin film devices and methods of fabrication |
US7040323B1 (en) * | 2002-08-08 | 2006-05-09 | Tini Alloy Company | Thin film intrauterine device |
US7422403B1 (en) | 2003-10-23 | 2008-09-09 | Tini Alloy Company | Non-explosive releasable coupling device |
US7632361B2 (en) * | 2004-05-06 | 2009-12-15 | Tini Alloy Company | Single crystal shape memory alloy devices and methods |
US7763342B2 (en) * | 2005-03-31 | 2010-07-27 | Tini Alloy Company | Tear-resistant thin film methods of fabrication |
US7441888B1 (en) | 2005-05-09 | 2008-10-28 | Tini Alloy Company | Eyeglass frame |
US7629209B2 (en) * | 2005-10-17 | 2009-12-08 | Chunghwa Picture Tubes, Ltd. | Methods for fabricating polysilicon film and thin film transistors |
US8349099B1 (en) | 2006-12-01 | 2013-01-08 | Ormco Corporation | Method of alloying reactive components |
US8684101B2 (en) | 2007-01-25 | 2014-04-01 | Tini Alloy Company | Frangible shape memory alloy fire sprinkler valve actuator |
US8584767B2 (en) | 2007-01-25 | 2013-11-19 | Tini Alloy Company | Sprinkler valve with active actuation |
US8007674B2 (en) | 2007-07-30 | 2011-08-30 | Tini Alloy Company | Method and devices for preventing restenosis in cardiovascular stents |
WO2009073609A1 (en) | 2007-11-30 | 2009-06-11 | Tini Alloy Company | Biocompatible copper-based single-crystal shape memory alloys |
US8382917B2 (en) | 2007-12-03 | 2013-02-26 | Ormco Corporation | Hyperelastic shape setting devices and fabrication methods |
US7842143B2 (en) | 2007-12-03 | 2010-11-30 | Tini Alloy Company | Hyperelastic shape setting devices and fabrication methods |
JP5305731B2 (ja) * | 2008-05-12 | 2013-10-02 | キヤノン株式会社 | 半導体素子の閾値電圧の制御方法 |
US10124197B2 (en) | 2012-08-31 | 2018-11-13 | TiNi Allot Company | Fire sprinkler valve actuator |
US11040230B2 (en) | 2012-08-31 | 2021-06-22 | Tini Alloy Company | Fire sprinkler valve actuator |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2926741C2 (de) * | 1979-07-03 | 1982-09-09 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Feldeffekt-Transistor und Verfahren zu seiner Herstellung |
JPS579226A (en) * | 1980-06-19 | 1982-01-18 | Ricoh Kk | Safety device for capacitor |
US4528745A (en) * | 1982-07-13 | 1985-07-16 | Toyo Denki Seizo Kabushiki Kaisha | Method for the formation of buried gates of a semiconductor device utilizing etch and refill techniques |
JPS5917547A (ja) * | 1982-07-20 | 1984-01-28 | Shimadzu Corp | X線透視撮影台 |
JPS605064A (ja) * | 1983-06-20 | 1985-01-11 | 株式会社東芝 | 窒化系セラミツクス成形用バインダ |
DE3617977A1 (de) * | 1985-12-05 | 1987-06-11 | Bayer Ag | 5-dichloracetamido-4-nitro-1-aryl-pyrazole |
CH670333A5 (de) * | 1986-04-30 | 1989-05-31 | Bbc Brown Boveri & Cie | |
JPH07109882B2 (ja) * | 1988-02-26 | 1995-11-22 | 三菱電機株式会社 | バイポーラ型半導体スイッチング装置 |
JPS6426187A (en) * | 1988-07-08 | 1989-01-27 | Hitachi Ltd | Core structure of nuclear reactor |
GB2237929A (en) * | 1989-10-23 | 1991-05-15 | Philips Electronic Associated | A method of manufacturing a semiconductor device |
US5352909A (en) * | 1991-12-19 | 1994-10-04 | Nec Corporation | Field effect transistor and method for manufacturing the same |
JP2811526B2 (ja) * | 1993-04-19 | 1998-10-15 | 東洋電機製造株式会社 | 静電誘導ショットキー短絡構造を有する静電誘導型半導体素子 |
JP2801127B2 (ja) * | 1993-07-28 | 1998-09-21 | 日本碍子株式会社 | 半導体装置およびその製造方法 |
US5648665A (en) * | 1994-04-28 | 1997-07-15 | Ngk Insulators, Ltd. | Semiconductor device having a plurality of cavity defined gating regions and a fabrication method therefor |
US5424231A (en) * | 1994-08-09 | 1995-06-13 | United Microelectronics Corp. | Method for manufacturing a VDMOS transistor |
-
1995
- 1995-04-26 US US08/430,805 patent/US5648665A/en not_active Expired - Fee Related
- 1995-04-28 EP EP95302909A patent/EP0680093B1/de not_active Expired - Lifetime
- 1995-04-28 DE DE69518787T patent/DE69518787T2/de not_active Expired - Fee Related
-
1997
- 1997-03-10 US US08/814,787 patent/US5930651A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0680093B1 (de) | 2000-09-13 |
US5930651A (en) | 1999-07-27 |
US5648665A (en) | 1997-07-15 |
DE69518787D1 (de) | 2000-10-19 |
EP0680093A2 (de) | 1995-11-02 |
EP0680093A3 (de) | 1997-07-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |