DE69517985D1 - Reflektiver lichtventilmodulator - Google Patents

Reflektiver lichtventilmodulator

Info

Publication number
DE69517985D1
DE69517985D1 DE69517985T DE69517985T DE69517985D1 DE 69517985 D1 DE69517985 D1 DE 69517985D1 DE 69517985 T DE69517985 T DE 69517985T DE 69517985 T DE69517985 T DE 69517985T DE 69517985 D1 DE69517985 D1 DE 69517985D1
Authority
DE
Germany
Prior art keywords
layer
pct
dielectric
date
deformable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69517985T
Other languages
English (en)
Other versions
DE69517985T2 (de
Inventor
Rad H Dabbaj
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB9417756A external-priority patent/GB9417756D0/en
Priority claimed from GBGB9507306.0A external-priority patent/GB9507306D0/en
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE69517985D1 publication Critical patent/DE69517985D1/de
Publication of DE69517985T2 publication Critical patent/DE69517985T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7425—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being a dielectric deformable layer controlled by an electron beam, e.g. eidophor projector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/12—Screens on or from which an image or pattern is formed, picked up, converted or stored acting as light valves by shutter operation, e.g. for eidophor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Liquid Crystal (AREA)
  • Transforming Electric Information Into Light Information (AREA)
DE69517985T 1994-09-02 1995-09-01 Reflektiver lichtventilmodulator Expired - Fee Related DE69517985T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9417756A GB9417756D0 (en) 1994-09-02 1994-09-02 Electronic display devices
GBGB9507306.0A GB9507306D0 (en) 1995-04-07 1995-04-07 Electronic display devices
PCT/GB1995/002061 WO1996008031A1 (en) 1994-09-02 1995-09-01 Reflective light valve modulator

Publications (2)

Publication Number Publication Date
DE69517985D1 true DE69517985D1 (de) 2000-08-17
DE69517985T2 DE69517985T2 (de) 2001-02-22

Family

ID=26305562

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69517985T Expired - Fee Related DE69517985T2 (de) 1994-09-02 1995-09-01 Reflektiver lichtventilmodulator

Country Status (13)

Country Link
US (1) US5822110C1 (de)
EP (1) EP0778982B1 (de)
JP (1) JPH10505193A (de)
CN (1) CN1157668A (de)
AT (1) ATE194725T1 (de)
AU (1) AU686874B2 (de)
CA (1) CA2198105A1 (de)
DE (1) DE69517985T2 (de)
DK (1) DK0778982T3 (de)
ES (1) ES2149373T3 (de)
PT (1) PT778982E (de)
RU (1) RU2143127C1 (de)
WO (1) WO1996008031A1 (de)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US6046840A (en) 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6147789A (en) * 1998-05-04 2000-11-14 Gelbart; Daniel High speed deformable mirror light valve
US5991066A (en) * 1998-10-15 1999-11-23 Memsolutions, Inc. Membrane-actuated charge controlled mirror
US6031657A (en) * 1998-10-15 2000-02-29 Memsolutions, Inc. Membrane-actuated charge controlled mirror (CCM) projection display
FR2794251B1 (fr) * 1999-05-27 2002-08-02 Sfim Ind Miroir a membrane deformable
US6268948B1 (en) * 1999-06-11 2001-07-31 Creo Products Inc. Micromachined reflective light valve
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6369498B1 (en) 1999-11-03 2002-04-09 Intel Corporation Electron gun for addressing secondary emission targets
US6597461B1 (en) 2000-03-20 2003-07-22 Parvenu, Inc. Tunable fabry-perot interferometer using entropic materials
US6678084B2 (en) 2000-03-20 2004-01-13 Np Photonics, Inc. Methods of making mechanisms in which relative locations of elements are maintained during manufacturing
US6747784B2 (en) 2000-03-20 2004-06-08 Np Photonics, Inc. Compliant mechanism and method of forming same
US6665109B2 (en) 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
US6747775B2 (en) * 2000-03-20 2004-06-08 Np Photonics, Inc. Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
WO2001071277A1 (en) 2000-03-20 2001-09-27 Solus Micro Technologies, Inc. Electrostatically-actuated tunable optical components using entropic materials
US6346776B1 (en) 2000-07-10 2002-02-12 Memsolutions, Inc. Field emission array (FEA) addressed deformable light valve modulator
US6611377B1 (en) 2000-07-10 2003-08-26 Intel Corporation Micromechanical diffraction phase grating
US6411425B1 (en) * 2000-09-27 2002-06-25 Eastman Kodak Company Electromechanical grating display system with spatially separated light beams
US6531332B1 (en) 2001-01-10 2003-03-11 Parvenu, Inc. Surface micromachining using a thick release process
US6639722B2 (en) 2001-08-15 2003-10-28 Silicon Light Machines Stress tuned blazed grating light valve
US6785001B2 (en) 2001-08-21 2004-08-31 Silicon Light Machines, Inc. Method and apparatus for measuring wavelength jitter of light signal
US6639710B2 (en) * 2001-09-19 2003-10-28 Lucent Technologies Inc. Method and apparatus for the correction of optical signal wave front distortion using adaptive optics
RU2231859C2 (ru) * 2002-02-18 2004-06-27 ООО "Высокие технологии" Электронная пушка
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
RU2230348C1 (ru) * 2002-12-27 2004-06-10 Гущо Юрий Петрович Электрооптический преобразователь, гелеобразный слой для электрооптического преобразователя, способ приготовления гелеобразного слоя (варианты) и композиция для осуществления способа
US6747777B1 (en) 2003-02-24 2004-06-08 Cymscape Incorporated Reflective microfluidics display particularly suited for large format applications
US7075593B2 (en) * 2003-03-26 2006-07-11 Video Display Corporation Electron-beam-addressed active-matrix spatial light modulator
US6956692B2 (en) * 2003-04-24 2005-10-18 Micronic Laser Systems, Ab Method and apparatus for controlling exposure of a surface of a substrate
US6930817B2 (en) * 2003-04-25 2005-08-16 Palo Alto Research Center Incorporated Configurable grating based on surface relief pattern for use as a variable optical attenuator
US6853476B2 (en) * 2003-04-30 2005-02-08 Hewlett-Packard Development Company, L.P. Charge control circuit for a micro-electromechanical device
TW570896B (en) * 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) * 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US6943933B2 (en) * 2003-12-21 2005-09-13 Hewlett-Packard Development Company, L.P. MEM devices having charge induced via focused beam to enter different states
US7268933B2 (en) 2003-12-21 2007-09-11 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states
KR101255691B1 (ko) 2004-07-29 2013-04-17 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
KR101233422B1 (ko) * 2005-03-03 2013-02-13 유리 페트로비치 구스쵸 광 방사선의 변조방법, 전기광학 변조기(변형) 및전기광학장치(변형)
US7535619B2 (en) * 2005-04-27 2009-05-19 Hewlett-Packard Development Company, L.P. Discharge of MEM devices having charge induced via focused beam to enter different states
KR101423321B1 (ko) 2005-07-22 2014-07-30 퀄컴 엠이엠에스 테크놀로지스, 인크. 지지 구조물들을 가지는 전자기계 장치들 및 그 제조방법들
EP2495212A3 (de) 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
KR20080040715A (ko) 2005-07-22 2008-05-08 콸콤 인코포레이티드 Ｍｅｍｓ 장치를 위한 지지 구조물 및 그 방법들
NO326468B1 (no) * 2005-12-06 2008-12-08 Ignis Display As Modulator med innstillbart diffraksjonsgitter (TDG) med total intern refleksjon (TIR), fremgangsmate for fremstilling av en elastomer for anvedelse deri samt anvendelse av elastomeren.
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
JP4327183B2 (ja) * 2006-07-31 2009-09-09 株式会社日立製作所 内燃機関の高圧燃料ポンプ制御装置
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7535621B2 (en) 2006-12-27 2009-05-19 Qualcomm Mems Technologies, Inc. Aluminum fluoride films for microelectromechanical system applications
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7625825B2 (en) 2007-06-14 2009-12-01 Qualcomm Mems Technologies, Inc. Method of patterning mechanical layer for MEMS structures
US7569488B2 (en) 2007-06-22 2009-08-04 Qualcomm Mems Technologies, Inc. Methods of making a MEMS device by monitoring a process parameter
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US7851239B2 (en) 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US7990604B2 (en) * 2009-06-15 2011-08-02 Qualcomm Mems Technologies, Inc. Analog interferometric modulator
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US20140039361A1 (en) * 2012-08-06 2014-02-06 The Hong Kong Polytechnic University Methods and viewing systems for inhibiting ocular refractive disorders from progressing
US20150093500A1 (en) * 2013-09-30 2015-04-02 Intermolecular, Inc. Corrosion-Resistant Silver Coatings with Improved Adhesion to III-V Materials

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3001447A (en) * 1957-08-29 1961-09-26 Zeiss Ikon A G Stuttgart Image reproducing device for visible and invisible radiation images
US3626084A (en) * 1970-06-12 1971-12-07 Ibm Deformographic storage display tube
US3990783A (en) * 1972-09-11 1976-11-09 Matsushita Electric Industrial Co., Ltd. Light modulating device
US3858080A (en) * 1973-09-17 1974-12-31 Ibm Target assemblies especially for single chamber deformographic storage display tubes
US3879630A (en) * 1974-04-01 1975-04-22 Ibm Reflective deformographic target assembly
US4035061A (en) * 1976-03-26 1977-07-12 Xerox Corporation Honeycomb display devices
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US5287215A (en) * 1991-07-17 1994-02-15 Optron Systems, Inc. Membrane light modulation systems

Also Published As

Publication number Publication date
CN1157668A (zh) 1997-08-20
ATE194725T1 (de) 2000-07-15
US5822110C1 (en) 2001-06-26
JPH10505193A (ja) 1998-05-19
PT778982E (pt) 2000-12-29
DK0778982T3 (da) 2000-11-06
CA2198105A1 (en) 1996-03-14
WO1996008031A1 (en) 1996-03-14
ES2149373T3 (es) 2000-11-01
EP0778982B1 (de) 2000-07-12
EP0778982A1 (de) 1997-06-18
US5822110A (en) 1998-10-13
DE69517985T2 (de) 2001-02-22
AU3392795A (en) 1996-03-27
AU686874B2 (en) 1998-02-12
RU2143127C1 (ru) 1999-12-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee