DE69517248D1 - Keramik-Gehäuse mit hoher Wärmeabstrahlung - Google Patents
Keramik-Gehäuse mit hoher WärmeabstrahlungInfo
- Publication number
- DE69517248D1 DE69517248D1 DE69517248T DE69517248T DE69517248D1 DE 69517248 D1 DE69517248 D1 DE 69517248D1 DE 69517248 T DE69517248 T DE 69517248T DE 69517248 T DE69517248 T DE 69517248T DE 69517248 D1 DE69517248 D1 DE 69517248D1
- Authority
- DE
- Germany
- Prior art keywords
- heat radiation
- high heat
- ceramic housing
- ceramic
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3675—Cooling facilitated by shape of device characterised by the shape of the housing
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4037—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink
- H01L2023/405—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink heatsink to package
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4037—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink
- H01L2023/4056—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink heatsink to additional heatsink
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32153—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate
- H01L2224/32175—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being metallic
- H01L2224/32188—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being metallic the layer connector connecting to a bonding area protruding from the surface of the item
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
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- H01L2924/01079—Gold [Au]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1517—Multilayer substrate
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15312—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16372494 | 1994-07-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69517248D1 true DE69517248D1 (de) | 2000-07-06 |
DE69517248T2 DE69517248T2 (de) | 2000-10-12 |
Family
ID=15779464
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69517248T Expired - Lifetime DE69517248T2 (de) | 1994-07-15 | 1995-07-01 | Keramik-Gehäuse mit hoher Wärmeabstrahlung |
Country Status (3)
Country | Link |
---|---|
US (1) | US5675474A (de) |
EP (1) | EP0693776B1 (de) |
DE (1) | DE69517248T2 (de) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3866320B2 (ja) * | 1995-02-09 | 2007-01-10 | 日本碍子株式会社 | 接合体、および接合体の製造方法 |
EP0746022B1 (de) * | 1995-05-30 | 1999-08-11 | Motorola, Inc. | Hybrid-Multichip-Modul und Verfahren zur seiner Herstellung |
US5854511A (en) * | 1995-11-17 | 1998-12-29 | Anam Semiconductor, Inc. | Semiconductor package including heat sink with layered conductive plate and non-conductive tape bonding to leads |
CN1160784C (zh) * | 1996-03-06 | 2004-08-04 | 松下电器产业株式会社 | 射频功率放大模块 |
US5986340A (en) * | 1996-05-02 | 1999-11-16 | National Semiconductor Corporation | Ball grid array package with enhanced thermal and electrical characteristics and electronic device incorporating same |
JPH09329395A (ja) * | 1996-06-06 | 1997-12-22 | Furukawa Electric Co Ltd:The | ヒートシンク |
DE19626227C2 (de) * | 1996-06-29 | 1998-07-02 | Bosch Gmbh Robert | Anordnung zur Wärmeableitung bei Chipmodulen auf Mehrschicht-Keramikträgern, insbesondere für Multichipmodule, und Verfahren zu ihrer Herstellung |
US6033787A (en) * | 1996-08-22 | 2000-03-07 | Mitsubishi Materials Corporation | Ceramic circuit board with heat sink |
US6035101A (en) * | 1997-02-12 | 2000-03-07 | Applied Materials, Inc. | High temperature multi-layered alloy heater assembly and related methods |
EP0899795A3 (de) * | 1997-08-27 | 1999-05-12 | Sumitomo Electric Industries, Ltd. | Behälter für optisches Halbleiterelement |
US6683384B1 (en) * | 1997-10-08 | 2004-01-27 | Agere Systems Inc | Air isolated crossovers |
US6073684A (en) | 1998-02-23 | 2000-06-13 | Applied Thermal Technology | Clad casting for laptop computers and the like |
US6201701B1 (en) * | 1998-03-11 | 2001-03-13 | Kimball International, Inc. | Integrated substrate with enhanced thermal characteristics |
US6299053B1 (en) * | 1998-08-19 | 2001-10-09 | Kulicke & Soffa Holdings, Inc. | Isolated flip chip or BGA to minimize interconnect stress due to thermal mismatch |
US6329065B1 (en) * | 1998-08-31 | 2001-12-11 | Kyocera Corporation | Wire board and method of producing the same |
JP3864282B2 (ja) | 1998-09-22 | 2006-12-27 | 三菱マテリアル株式会社 | パワーモジュール用基板及びその製造方法並びにこの基板を用いた半導体装置 |
US6031727A (en) * | 1998-10-26 | 2000-02-29 | Micron Technology, Inc. | Printed circuit board with integrated heat sink |
US6518515B2 (en) * | 1999-02-10 | 2003-02-11 | Matsushita Electric Industrial Co, Ltd. | Printed wiring board, and method and apparatus for manufacturing the same |
JP2001148451A (ja) | 1999-03-24 | 2001-05-29 | Mitsubishi Materials Corp | パワーモジュール用基板 |
JP2000331835A (ja) * | 1999-05-21 | 2000-11-30 | Taiyo Yuden Co Ltd | 積層電子部品及び回路モジュール |
JP4649027B2 (ja) * | 1999-09-28 | 2011-03-09 | 株式会社東芝 | セラミックス回路基板 |
US6288900B1 (en) * | 1999-12-02 | 2001-09-11 | International Business Machines Corporation | Warpage compensating heat spreader |
JP4231610B2 (ja) * | 2000-02-09 | 2009-03-04 | サンデン株式会社 | 熱交換器用フィンの製造方法 |
US6763881B1 (en) * | 2000-02-18 | 2004-07-20 | Agilent Technologies, Inc. | Thermally matched gradient heat sink |
KR100378051B1 (ko) * | 2001-03-31 | 2003-03-29 | 만도공조 주식회사 | 집적회로의 방열수단 접합방법과 그 접합재 |
JP2003163315A (ja) | 2001-11-29 | 2003-06-06 | Denki Kagaku Kogyo Kk | モジュール |
US6449158B1 (en) * | 2001-12-20 | 2002-09-10 | Motorola, Inc. | Method and apparatus for securing an electronic power device to a heat spreader |
US6727193B2 (en) * | 2002-03-08 | 2004-04-27 | Sun Microsystems, Inc. | Apparatus and methods for enhancing thermal performance of integrated circuit packages |
US6637506B2 (en) * | 2002-03-08 | 2003-10-28 | Sun Microsystems, Inc. | Multi-material heat spreader |
US7274094B2 (en) * | 2002-08-28 | 2007-09-25 | Micron Technology, Inc. | Leadless packaging for image sensor devices |
US20040120117A1 (en) * | 2002-12-20 | 2004-06-24 | Cheng-Why Tan | Electronic package with improved thermal performance |
US7482685B2 (en) * | 2003-09-25 | 2009-01-27 | Kabushiki Kaisha Toshiba | Ceramic circuit board, method for making the same, and power module |
DE10352705A1 (de) * | 2003-11-12 | 2005-06-23 | Diehl Bgt Defence Gmbh & Co. Kg | Schaltungsanordnung |
WO2005098942A1 (ja) * | 2004-04-05 | 2005-10-20 | Mitsubishi Materials Corporation | Ai/ain接合体、パワーモジュール用基板及びパワーモジュール並びにai/ain接合体の製造方法 |
TWI246760B (en) * | 2004-12-22 | 2006-01-01 | Siliconware Precision Industries Co Ltd | Heat dissipating semiconductor package and fabrication method thereof |
EP1858078A4 (de) * | 2005-01-20 | 2009-03-04 | Almt Corp | Element für ein halbleiterbauteil und herstellungsverfahren dafür |
KR101384426B1 (ko) * | 2006-03-13 | 2014-04-10 | 쇼와 덴코 가부시키가이샤 | 파워 모듈용 베이스 |
TWI340010B (en) * | 2006-08-04 | 2011-04-01 | Everlight Electronics Co Ltd | Circuit board with cooling functionality |
JP4747315B2 (ja) * | 2007-11-19 | 2011-08-17 | 三菱マテリアル株式会社 | パワーモジュール用基板及びパワーモジュール |
DE102008009510B3 (de) | 2008-02-15 | 2009-07-16 | Danfoss Silicon Power Gmbh | Verfahren zum Niedertemperatur-Drucksintern |
US9076755B2 (en) * | 2009-09-09 | 2015-07-07 | Mitsubishi Materials Corporation | Method for producing substrate for power module with heat sink, substrate for power module with heat sink, and power module |
DE102015217231A1 (de) * | 2014-09-09 | 2016-03-10 | Ceramtec Gmbh | Mehrlagenkühler |
WO2023282598A1 (ko) * | 2021-07-09 | 2023-01-12 | 주식회사 아모센스 | 세라믹 기판 및 그 제조방법 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61230343A (ja) * | 1985-04-05 | 1986-10-14 | Matsushita Electric Ind Co Ltd | 半導体素子用セラミツクパツケ−ジ |
JPH02208033A (ja) * | 1989-02-08 | 1990-08-17 | Kawasaki Steel Corp | 回路基板用セラミックス板 |
DE69127927T2 (de) * | 1990-05-02 | 1998-06-04 | Mitsubishi Materials Corp | Keramisches Substrat verwendet für eine elektrische oder elektronische Schaltung |
DE4031733A1 (de) * | 1990-10-06 | 1992-04-09 | Bosch Gmbh Robert | Mehrlagenhybride mit leistungsbauelementen |
JPH0548000A (ja) * | 1991-08-13 | 1993-02-26 | Fujitsu Ltd | 半導体装置 |
US5455382A (en) * | 1991-10-31 | 1995-10-03 | Sumitomo Metal Industries, Ltd. | IC package heat sink fin |
JPH0669367A (ja) | 1992-08-18 | 1994-03-11 | Sumitomo Kinzoku Ceramics:Kk | 高放熱性セラミックパッケージ |
US5513070A (en) * | 1994-12-16 | 1996-04-30 | Intel Corporation | Dissipation of heat through keyboard using a heat pipe |
-
1995
- 1995-07-01 DE DE69517248T patent/DE69517248T2/de not_active Expired - Lifetime
- 1995-07-01 EP EP95110273A patent/EP0693776B1/de not_active Expired - Lifetime
- 1995-07-17 US US08/503,243 patent/US5675474A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5675474A (en) | 1997-10-07 |
EP0693776A3 (de) | 1996-04-03 |
EP0693776B1 (de) | 2000-05-31 |
DE69517248T2 (de) | 2000-10-12 |
EP0693776A2 (de) | 1996-01-24 |
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