DE69510758T2 - Piezoelektrische betätigungseinrichtung - Google Patents

Piezoelektrische betätigungseinrichtung

Info

Publication number
DE69510758T2
DE69510758T2 DE69510758T DE69510758T DE69510758T2 DE 69510758 T2 DE69510758 T2 DE 69510758T2 DE 69510758 T DE69510758 T DE 69510758T DE 69510758 T DE69510758 T DE 69510758T DE 69510758 T2 DE69510758 T2 DE 69510758T2
Authority
DE
Germany
Prior art keywords
piezoelectric actuator
piezoelectric
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69510758T
Other languages
English (en)
Other versions
DE69510758D1 (de
Inventor
Pelt Engelbert Van
Wouter Taen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Morgan Electro Ceramics Bv Hoorn Nl
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Application granted granted Critical
Publication of DE69510758D1 publication Critical patent/DE69510758D1/de
Publication of DE69510758T2 publication Critical patent/DE69510758T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
DE69510758T 1994-06-14 1995-04-21 Piezoelektrische betätigungseinrichtung Expired - Fee Related DE69510758T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6155366A JPH07335951A (ja) 1994-06-14 1994-06-14 圧電アクチュエータ
PCT/IB1995/000284 WO1995034944A1 (en) 1994-06-14 1995-04-21 Piezoelectric actuator device

Publications (2)

Publication Number Publication Date
DE69510758D1 DE69510758D1 (de) 1999-08-19
DE69510758T2 true DE69510758T2 (de) 2000-02-17

Family

ID=15604358

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69510758T Expired - Fee Related DE69510758T2 (de) 1994-06-14 1995-04-21 Piezoelektrische betätigungseinrichtung

Country Status (6)

Country Link
US (1) US5517074A (de)
EP (1) EP0719472B1 (de)
JP (1) JPH07335951A (de)
DE (1) DE69510758T2 (de)
TW (1) TW331043B (de)
WO (1) WO1995034944A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729077A (en) * 1995-12-15 1998-03-17 The Penn State Research Foundation Metal-electroactive ceramic composite transducer
AU5707796A (en) * 1996-03-26 1997-10-17 Mats Bexell An actuator motor and a method for fabrication of such an actuator
GB2319698B (en) * 1996-11-21 2001-08-08 Motorola Inc Method for communicating with a plurality of contactless data carriers and contactless data carrier for use therein
DE19653555C2 (de) * 1996-12-20 2002-10-31 Siemens Ag Piezoelektrischer Aktor
US6070779A (en) * 1997-02-06 2000-06-06 U.S. Philips Corporation Liquid dosing device
KR100540644B1 (ko) * 1998-02-19 2006-02-28 삼성전자주식회사 마이크로 엑츄에이터 제조방법
US6586889B1 (en) 2000-06-21 2003-07-01 Si Diamond Technology, Inc. MEMS field emission device
JP2002021715A (ja) * 2000-07-10 2002-01-23 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法
KR100485596B1 (ko) * 2002-06-04 2005-04-27 한국과학기술연구원 밴더형 적층 액츄에이터
US7387374B2 (en) * 2003-12-05 2008-06-17 Fujifilm Corporation Droplet ejection head and image recording apparatus
CN102691165A (zh) * 2012-06-18 2012-09-26 芮国林 电极位于压电陶瓷片同一面上的压电陶瓷驱动片

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3115588A (en) * 1958-02-05 1963-12-24 Raytheon Co Electroacoustical apparatus
JPS5841272A (ja) * 1981-08-10 1983-03-10 Kenzo Saegusa 回「てん」する物体の構造
JPS6077684A (ja) * 1983-09-30 1985-05-02 Asahi Okuma Ind Co Ltd アクチユエ−タ−
JPS6084978A (ja) * 1983-10-14 1985-05-14 Asahi Okuma Ind Co Ltd アクチュエ−タ−
US5023503A (en) * 1990-01-03 1991-06-11 Motorola, Inc. Super high frequency oscillator/resonator
US5089739A (en) * 1990-03-19 1992-02-18 Brother Kogyo Kabushiki Kaisha Laminate type piezoelectric actuator element
US5068567A (en) * 1990-10-26 1991-11-26 General Electric Company Apparatus for increasing the recoverable energy of a piezoelectric bender
JPH04264784A (ja) * 1991-02-20 1992-09-21 Nec Corp 電歪効果素子およびその製造方法
US5262696A (en) * 1991-07-05 1993-11-16 Rockwell International Corporation Biaxial transducer
EP0528484B1 (de) * 1991-08-14 1995-11-08 Koninklijke Philips Electronics N.V. Verfahren zum Anbringen einer Paste für einen keramischen Mehrschicht-Aktuator
JPH0567819A (ja) * 1991-09-10 1993-03-19 Nec Corp 圧電セラミツクトランス
DE4133000C2 (de) * 1991-10-04 1993-11-18 Siegfried Dipl Ing Kipke Piezohydraulisches Modul zur Umsetzung taktiler Information

Also Published As

Publication number Publication date
JPH07335951A (ja) 1995-12-22
EP0719472A1 (de) 1996-07-03
US5517074A (en) 1996-05-14
TW331043B (en) 1998-05-01
DE69510758D1 (de) 1999-08-19
EP0719472B1 (de) 1999-07-14
WO1995034944A1 (en) 1995-12-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MORGAN ELECTRO CERAMICS BV, HOORN, NL

8339 Ceased/non-payment of the annual fee