US6219015B1
(en)
|
1992-04-28 |
2001-04-17 |
The Board Of Directors Of The Leland Stanford, Junior University |
Method and apparatus for using an array of grating light valves to produce multicolor optical images
|
US6674562B1
(en)
|
1994-05-05 |
2004-01-06 |
Iridigm Display Corporation |
Interferometric modulation of radiation
|
US6044705A
(en)
*
|
1993-10-18 |
2000-04-04 |
Xros, Inc. |
Micromachined members coupled for relative rotation by torsion bars
|
US6467345B1
(en)
|
1993-10-18 |
2002-10-22 |
Xros, Inc. |
Method of operating micromachined members coupled for relative rotation
|
US6426013B1
(en)
|
1993-10-18 |
2002-07-30 |
Xros, Inc. |
Method for fabricating micromachined members coupled for relative rotation
|
US20020053734A1
(en)
*
|
1993-11-16 |
2002-05-09 |
Formfactor, Inc. |
Probe card assembly and kit, and methods of making same
|
US20030199179A1
(en)
*
|
1993-11-16 |
2003-10-23 |
Formfactor, Inc. |
Contact tip structure for microelectronic interconnection elements and method of making same
|
US7073254B2
(en)
*
|
1993-11-16 |
2006-07-11 |
Formfactor, Inc. |
Method for mounting a plurality of spring contact elements
|
US7776631B2
(en)
*
|
1994-05-05 |
2010-08-17 |
Qualcomm Mems Technologies, Inc. |
MEMS device and method of forming a MEMS device
|
US7297471B1
(en)
|
2003-04-15 |
2007-11-20 |
Idc, Llc |
Method for manufacturing an array of interferometric modulators
|
US7808694B2
(en)
*
|
1994-05-05 |
2010-10-05 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US7550794B2
(en)
*
|
2002-09-20 |
2009-06-23 |
Idc, Llc |
Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
|
US7460291B2
(en)
*
|
1994-05-05 |
2008-12-02 |
Idc, Llc |
Separable modulator
|
US8014059B2
(en)
|
1994-05-05 |
2011-09-06 |
Qualcomm Mems Technologies, Inc. |
System and method for charge control in a MEMS device
|
US7852545B2
(en)
|
1994-05-05 |
2010-12-14 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
KR100209401B1
(ko)
*
|
1994-07-21 |
1999-07-15 |
전주범 |
광로조절장치의 제조방법
|
US5703728A
(en)
*
|
1994-11-02 |
1997-12-30 |
Texas Instruments Incorporated |
Support post architecture for micromechanical devices
|
US5650881A
(en)
*
|
1994-11-02 |
1997-07-22 |
Texas Instruments Incorporated |
Support post architecture for micromechanical devices
|
US7898722B2
(en)
*
|
1995-05-01 |
2011-03-01 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with restoring electrode
|
US5841579A
(en)
|
1995-06-07 |
1998-11-24 |
Silicon Light Machines |
Flat diffraction grating light valve
|
KR100213026B1
(ko)
*
|
1995-07-27 |
1999-08-02 |
윤종용 |
디엠디 및 그 제조공정
|
US5757536A
(en)
*
|
1995-08-30 |
1998-05-26 |
Sandia Corporation |
Electrically-programmable diffraction grating
|
US5907425A
(en)
*
|
1995-12-19 |
1999-05-25 |
The Board Of Trustees Of The Leland Stanford Junior University |
Miniature scanning confocal microscope
|
US8033838B2
(en)
*
|
1996-02-21 |
2011-10-11 |
Formfactor, Inc. |
Microelectronic contact structure
|
US7929197B2
(en)
*
|
1996-11-05 |
2011-04-19 |
Qualcomm Mems Technologies, Inc. |
System and method for a MEMS device
|
US7830588B2
(en)
*
|
1996-12-19 |
2010-11-09 |
Qualcomm Mems Technologies, Inc. |
Method of making a light modulating display device and associated transistor circuitry and structures thereof
|
US6028689A
(en)
*
|
1997-01-24 |
2000-02-22 |
The United States Of America As Represented By The Secretary Of The Air Force |
Multi-motion micromirror
|
US5851302A
(en)
*
|
1997-02-19 |
1998-12-22 |
Vlsi Technology, Inc. |
Method for dry etching sidewall polymer
|
US5925577A
(en)
*
|
1997-02-19 |
1999-07-20 |
Vlsi Technology, Inc. |
Method for forming via contact hole in a semiconductor device
|
US5982553A
(en)
|
1997-03-20 |
1999-11-09 |
Silicon Light Machines |
Display device incorporating one-dimensional grating light-valve array
|
EP0877272B1
(de)
*
|
1997-05-08 |
2002-07-31 |
Texas Instruments Incorporated |
Verbesserungen für räumliche Lichtmodulatoren
|
US6088102A
(en)
|
1997-10-31 |
2000-07-11 |
Silicon Light Machines |
Display apparatus including grating light-valve array and interferometric optical system
|
KR100703140B1
(ko)
*
|
1998-04-08 |
2007-04-05 |
이리다임 디스플레이 코포레이션 |
간섭 변조기 및 그 제조 방법
|
US8928967B2
(en)
|
1998-04-08 |
2015-01-06 |
Qualcomm Mems Technologies, Inc. |
Method and device for modulating light
|
US6271808B1
(en)
|
1998-06-05 |
2001-08-07 |
Silicon Light Machines |
Stereo head mounted display using a single display device
|
US6130770A
(en)
|
1998-06-23 |
2000-10-10 |
Silicon Light Machines |
Electron gun activated grating light valve
|
US6101036A
(en)
|
1998-06-23 |
2000-08-08 |
Silicon Light Machines |
Embossed diffraction grating alone and in combination with changeable image display
|
US6215579B1
(en)
|
1998-06-24 |
2001-04-10 |
Silicon Light Machines |
Method and apparatus for modulating an incident light beam for forming a two-dimensional image
|
US6303986B1
(en)
|
1998-07-29 |
2001-10-16 |
Silicon Light Machines |
Method of and apparatus for sealing an hermetic lid to a semiconductor die
|
US6859299B1
(en)
|
1999-06-11 |
2005-02-22 |
Jung-Chih Chiao |
MEMS optical components
|
AU5480500A
(en)
*
|
1999-06-11 |
2001-01-02 |
University Of Hawaii |
Mems optical components
|
US6850353B1
(en)
|
1999-06-11 |
2005-02-01 |
University Of Hawaii |
MEMS optical components
|
US6198180B1
(en)
*
|
1999-06-30 |
2001-03-06 |
Sandia Corporation |
Micromechanisms with floating pivot
|
US6220561B1
(en)
*
|
1999-06-30 |
2001-04-24 |
Sandia Corporation |
Compound floating pivot micromechanisms
|
WO2003007049A1
(en)
|
1999-10-05 |
2003-01-23 |
Iridigm Display Corporation |
Photonic mems and structures
|
US6813053B1
(en)
*
|
2000-05-19 |
2004-11-02 |
The Regents Of The University Of California |
Apparatus and method for controlled cantilever motion through torsional beams and a counterweight
|
EP1180848B1
(de)
*
|
2000-08-09 |
2010-01-20 |
STMicroelectronics S.r.l. |
Mikroelektromechanische Struktur mit unterschiedlichen Teilen, die durch eine Vorrichtung zur Umwandlung von translatorischen in rotatorische Bewegungen miteinander mechanisch verbunden sind
|
US6522454B2
(en)
*
|
2000-09-29 |
2003-02-18 |
Texas Instruments Incorporated |
Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio
|
US6962771B1
(en)
*
|
2000-10-13 |
2005-11-08 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Dual damascene process
|
US6647164B1
(en)
|
2000-10-31 |
2003-11-11 |
3M Innovative Properties Company |
Gimbaled micro-mirror positionable by thermal actuators
|
US6711318B2
(en)
|
2001-01-29 |
2004-03-23 |
3M Innovative Properties Company |
Optical switch based on rotating vertical micro-mirror
|
FR2820834B1
(fr)
*
|
2001-02-15 |
2004-06-25 |
Teem Photonics |
Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede
|
FR2820833B1
(fr)
*
|
2001-02-15 |
2004-05-28 |
Teem Photonics |
Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir
|
US6429033B1
(en)
*
|
2001-02-20 |
2002-08-06 |
Nayna Networks, Inc. |
Process for manufacturing mirror devices using semiconductor technology
|
US6707591B2
(en)
|
2001-04-10 |
2004-03-16 |
Silicon Light Machines |
Angled illumination for a single order light modulator based projection system
|
US6608712B2
(en)
|
2001-05-15 |
2003-08-19 |
Network Photonics, Inc. |
Hidden flexure ultra planar optical routing element
|
US7209274B2
(en)
*
|
2001-06-02 |
2007-04-24 |
Capella Photonics, Inc. |
High fill-factor bulk silicon mirrors
|
US6782205B2
(en)
|
2001-06-25 |
2004-08-24 |
Silicon Light Machines |
Method and apparatus for dynamic equalization in wavelength division multiplexing
|
US6747781B2
(en)
|
2001-06-25 |
2004-06-08 |
Silicon Light Machines, Inc. |
Method, apparatus, and diffuser for reducing laser speckle
|
US6639722B2
(en)
|
2001-08-15 |
2003-10-28 |
Silicon Light Machines |
Stress tuned blazed grating light valve
|
US6829092B2
(en)
|
2001-08-15 |
2004-12-07 |
Silicon Light Machines, Inc. |
Blazed grating light valve
|
US6785001B2
(en)
*
|
2001-08-21 |
2004-08-31 |
Silicon Light Machines, Inc. |
Method and apparatus for measuring wavelength jitter of light signal
|
US6800238B1
(en)
|
2002-01-15 |
2004-10-05 |
Silicon Light Machines, Inc. |
Method for domain patterning in low coercive field ferroelectrics
|
US6574033B1
(en)
|
2002-02-27 |
2003-06-03 |
Iridigm Display Corporation |
Microelectromechanical systems device and method for fabricating same
|
KR100431581B1
(ko)
*
|
2002-05-28 |
2004-05-17 |
한국과학기술원 |
미소거울 구동기
|
US6728023B1
(en)
|
2002-05-28 |
2004-04-27 |
Silicon Light Machines |
Optical device arrays with optimized image resolution
|
US6767751B2
(en)
|
2002-05-28 |
2004-07-27 |
Silicon Light Machines, Inc. |
Integrated driver process flow
|
US6822797B1
(en)
|
2002-05-31 |
2004-11-23 |
Silicon Light Machines, Inc. |
Light modulator structure for producing high-contrast operation using zero-order light
|
US6829258B1
(en)
|
2002-06-26 |
2004-12-07 |
Silicon Light Machines, Inc. |
Rapidly tunable external cavity laser
|
US6813059B2
(en)
|
2002-06-28 |
2004-11-02 |
Silicon Light Machines, Inc. |
Reduced formation of asperities in contact micro-structures
|
US6714337B1
(en)
|
2002-06-28 |
2004-03-30 |
Silicon Light Machines |
Method and device for modulating a light beam and having an improved gamma response
|
US7057795B2
(en)
*
|
2002-08-20 |
2006-06-06 |
Silicon Light Machines Corporation |
Micro-structures with individually addressable ribbon pairs
|
US6801354B1
(en)
|
2002-08-20 |
2004-10-05 |
Silicon Light Machines, Inc. |
2-D diffraction grating for substantially eliminating polarization dependent losses
|
US7781850B2
(en)
|
2002-09-20 |
2010-08-24 |
Qualcomm Mems Technologies, Inc. |
Controlling electromechanical behavior of structures within a microelectromechanical systems device
|
US6712480B1
(en)
|
2002-09-27 |
2004-03-30 |
Silicon Light Machines |
Controlled curvature of stressed micro-structures
|
US6806997B1
(en)
|
2003-02-28 |
2004-10-19 |
Silicon Light Machines, Inc. |
Patterned diffractive light modulator ribbon for PDL reduction
|
US6829077B1
(en)
|
2003-02-28 |
2004-12-07 |
Silicon Light Machines, Inc. |
Diffractive light modulator with dynamically rotatable diffraction plane
|
TW570896B
(en)
|
2003-05-26 |
2004-01-11 |
Prime View Int Co Ltd |
A method for fabricating an interference display cell
|
TWI223855B
(en)
*
|
2003-06-09 |
2004-11-11 |
Taiwan Semiconductor Mfg |
Method for manufacturing reflective spatial light modulator mirror devices
|
US7221495B2
(en)
*
|
2003-06-24 |
2007-05-22 |
Idc Llc |
Thin film precursor stack for MEMS manufacturing
|
TW593126B
(en)
*
|
2003-09-30 |
2004-06-21 |
Prime View Int Co Ltd |
A structure of a micro electro mechanical system and manufacturing the same
|
US6861277B1
(en)
|
2003-10-02 |
2005-03-01 |
Hewlett-Packard Development Company, L.P. |
Method of forming MEMS device
|
US6914709B2
(en)
*
|
2003-10-02 |
2005-07-05 |
Hewlett-Packard Development Company, L.P. |
MEMS device and method of forming MEMS device
|
US7352053B2
(en)
*
|
2003-10-29 |
2008-04-01 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Insulating layer having decreased dielectric constant and increased hardness
|
US7755830B2
(en)
*
|
2003-11-01 |
2010-07-13 |
Silicon Quest Kabushiki-Kaisha |
Micro mirror device
|
US7643195B2
(en)
*
|
2003-11-01 |
2010-01-05 |
Silicon Quest Kabushiki-Kaisha |
Mirror device
|
US7760415B2
(en)
*
|
2003-11-01 |
2010-07-20 |
Silicon Quest Kabushiki-Kaisha |
Micro mirror device
|
US7876488B2
(en)
|
2003-11-01 |
2011-01-25 |
Silicon Quest Kabushiki-Kaisha |
Mirror device having vertical hinge
|
US7933060B2
(en)
*
|
2003-11-01 |
2011-04-26 |
Silicon Quest Kabushiki-Kaisha |
Three states of micro mirror device
|
US7706050B2
(en)
|
2004-03-05 |
2010-04-27 |
Qualcomm Mems Technologies, Inc. |
Integrated modulator illumination
|
US7720148B2
(en)
*
|
2004-03-26 |
2010-05-18 |
The Hong Kong University Of Science And Technology |
Efficient multi-frame motion estimation for video compression
|
US7476327B2
(en)
|
2004-05-04 |
2009-01-13 |
Idc, Llc |
Method of manufacture for microelectromechanical devices
|
US7164520B2
(en)
|
2004-05-12 |
2007-01-16 |
Idc, Llc |
Packaging for an interferometric modulator
|
US6974219B1
(en)
*
|
2004-07-09 |
2005-12-13 |
Bae Systems Information And Electronic Systems Integration Inc |
Zero reflectance design for tilted devices
|
KR101255691B1
(ko)
*
|
2004-07-29 |
2013-04-17 |
퀄컴 엠이엠에스 테크놀로지스, 인크. |
간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
|
US7408179B2
(en)
*
|
2004-08-10 |
2008-08-05 |
Intel Corporation |
Transition radiation apparatus and method therefor
|
US7560299B2
(en)
*
|
2004-08-27 |
2009-07-14 |
Idc, Llc |
Systems and methods of actuating MEMS display elements
|
US7889163B2
(en)
|
2004-08-27 |
2011-02-15 |
Qualcomm Mems Technologies, Inc. |
Drive method for MEMS devices
|
US7602375B2
(en)
*
|
2004-09-27 |
2009-10-13 |
Idc, Llc |
Method and system for writing data to MEMS display elements
|
US7724993B2
(en)
|
2004-09-27 |
2010-05-25 |
Qualcomm Mems Technologies, Inc. |
MEMS switches with deforming membranes
|
US7701631B2
(en)
|
2004-09-27 |
2010-04-20 |
Qualcomm Mems Technologies, Inc. |
Device having patterned spacers for backplates and method of making the same
|
US7936497B2
(en)
|
2004-09-27 |
2011-05-03 |
Qualcomm Mems Technologies, Inc. |
MEMS device having deformable membrane characterized by mechanical persistence
|
US7130104B2
(en)
*
|
2004-09-27 |
2006-10-31 |
Idc, Llc |
Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
|
US7653371B2
(en)
|
2004-09-27 |
2010-01-26 |
Qualcomm Mems Technologies, Inc. |
Selectable capacitance circuit
|
US7813026B2
(en)
|
2004-09-27 |
2010-10-12 |
Qualcomm Mems Technologies, Inc. |
System and method of reducing color shift in a display
|
US7920135B2
(en)
|
2004-09-27 |
2011-04-05 |
Qualcomm Mems Technologies, Inc. |
Method and system for driving a bi-stable display
|
US7668415B2
(en)
|
2004-09-27 |
2010-02-23 |
Qualcomm Mems Technologies, Inc. |
Method and device for providing electronic circuitry on a backplate
|
US7692839B2
(en)
|
2004-09-27 |
2010-04-06 |
Qualcomm Mems Technologies, Inc. |
System and method of providing MEMS device with anti-stiction coating
|
US7679627B2
(en)
|
2004-09-27 |
2010-03-16 |
Qualcomm Mems Technologies, Inc. |
Controller and driver features for bi-stable display
|
US7355780B2
(en)
|
2004-09-27 |
2008-04-08 |
Idc, Llc |
System and method of illuminating interferometric modulators using backlighting
|
US7136213B2
(en)
|
2004-09-27 |
2006-11-14 |
Idc, Llc |
Interferometric modulators having charge persistence
|
US7893919B2
(en)
|
2004-09-27 |
2011-02-22 |
Qualcomm Mems Technologies, Inc. |
Display region architectures
|
US7310179B2
(en)
*
|
2004-09-27 |
2007-12-18 |
Idc, Llc |
Method and device for selective adjustment of hysteresis window
|
US7710629B2
(en)
|
2004-09-27 |
2010-05-04 |
Qualcomm Mems Technologies, Inc. |
System and method for display device with reinforcing substance
|
US7583429B2
(en)
|
2004-09-27 |
2009-09-01 |
Idc, Llc |
Ornamental display device
|
US8008736B2
(en)
|
2004-09-27 |
2011-08-30 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device
|
US8124434B2
(en)
|
2004-09-27 |
2012-02-28 |
Qualcomm Mems Technologies, Inc. |
Method and system for packaging a display
|
US7564612B2
(en)
|
2004-09-27 |
2009-07-21 |
Idc, Llc |
Photonic MEMS and structures
|
US7944599B2
(en)
|
2004-09-27 |
2011-05-17 |
Qualcomm Mems Technologies, Inc. |
Electromechanical device with optical function separated from mechanical and electrical function
|
US7302157B2
(en)
|
2004-09-27 |
2007-11-27 |
Idc, Llc |
System and method for multi-level brightness in interferometric modulation
|
US7424198B2
(en)
|
2004-09-27 |
2008-09-09 |
Idc, Llc |
Method and device for packaging a substrate
|
US7684104B2
(en)
*
|
2004-09-27 |
2010-03-23 |
Idc, Llc |
MEMS using filler material and method
|
US7532195B2
(en)
|
2004-09-27 |
2009-05-12 |
Idc, Llc |
Method and system for reducing power consumption in a display
|
US20060076634A1
(en)
|
2004-09-27 |
2006-04-13 |
Lauren Palmateer |
Method and system for packaging MEMS devices with incorporated getter
|
US8878825B2
(en)
|
2004-09-27 |
2014-11-04 |
Qualcomm Mems Technologies, Inc. |
System and method for providing a variable refresh rate of an interferometric modulator display
|
US7808703B2
(en)
|
2004-09-27 |
2010-10-05 |
Qualcomm Mems Technologies, Inc. |
System and method for implementation of interferometric modulator displays
|
US7420725B2
(en)
|
2004-09-27 |
2008-09-02 |
Idc, Llc |
Device having a conductive light absorbing mask and method for fabricating same
|
US8514169B2
(en)
|
2004-09-27 |
2013-08-20 |
Qualcomm Mems Technologies, Inc. |
Apparatus and system for writing data to electromechanical display elements
|
US7372613B2
(en)
|
2004-09-27 |
2008-05-13 |
Idc, Llc |
Method and device for multistate interferometric light modulation
|
US7321456B2
(en)
|
2004-09-27 |
2008-01-22 |
Idc, Llc |
Method and device for corner interferometric modulation
|
US7675669B2
(en)
|
2004-09-27 |
2010-03-09 |
Qualcomm Mems Technologies, Inc. |
Method and system for driving interferometric modulators
|
US7304784B2
(en)
|
2004-09-27 |
2007-12-04 |
Idc, Llc |
Reflective display device having viewable display on both sides
|
US7612932B2
(en)
*
|
2004-09-27 |
2009-11-03 |
Idc, Llc |
Microelectromechanical device with optical function separated from mechanical and electrical function
|
US7527995B2
(en)
|
2004-09-27 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of making prestructure for MEMS systems
|
AU2005289445A1
(en)
*
|
2004-09-27 |
2006-04-06 |
Idc, Llc |
Method and device for multistate interferometric light modulation
|
US7719500B2
(en)
|
2004-09-27 |
2010-05-18 |
Qualcomm Mems Technologies, Inc. |
Reflective display pixels arranged in non-rectangular arrays
|
US7916103B2
(en)
*
|
2004-09-27 |
2011-03-29 |
Qualcomm Mems Technologies, Inc. |
System and method for display device with end-of-life phenomena
|
US7843410B2
(en)
|
2004-09-27 |
2010-11-30 |
Qualcomm Mems Technologies, Inc. |
Method and device for electrically programmable display
|
US7630119B2
(en)
|
2004-09-27 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Apparatus and method for reducing slippage between structures in an interferometric modulator
|
US8310441B2
(en)
|
2004-09-27 |
2012-11-13 |
Qualcomm Mems Technologies, Inc. |
Method and system for writing data to MEMS display elements
|
US7289259B2
(en)
|
2004-09-27 |
2007-10-30 |
Idc, Llc |
Conductive bus structure for interferometric modulator array
|
US7184193B2
(en)
*
|
2004-10-05 |
2007-02-27 |
Hewlett-Packard Development Company, L.P. |
Systems and methods for amorphous flexures in micro-electro mechanical systems
|
US7920136B2
(en)
|
2005-05-05 |
2011-04-05 |
Qualcomm Mems Technologies, Inc. |
System and method of driving a MEMS display device
|
US7948457B2
(en)
|
2005-05-05 |
2011-05-24 |
Qualcomm Mems Technologies, Inc. |
Systems and methods of actuating MEMS display elements
|
KR20080027236A
(ko)
|
2005-05-05 |
2008-03-26 |
콸콤 인코포레이티드 |
다이나믹 드라이버 ic 및 디스플레이 패널 구성
|
US7884989B2
(en)
|
2005-05-27 |
2011-02-08 |
Qualcomm Mems Technologies, Inc. |
White interferometric modulators and methods for forming the same
|
KR101423321B1
(ko)
*
|
2005-07-22 |
2014-07-30 |
퀄컴 엠이엠에스 테크놀로지스, 인크. |
지지 구조물들을 가지는 전자기계 장치들 및 그 제조방법들
|
KR20080040715A
(ko)
*
|
2005-07-22 |
2008-05-08 |
콸콤 인코포레이티드 |
Mems 장치를 위한 지지 구조물 및 그 방법들
|
EP2495212A3
(de)
*
|
2005-07-22 |
2012-10-31 |
QUALCOMM MEMS Technologies, Inc. |
MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
|
EP1910216A1
(de)
*
|
2005-07-22 |
2008-04-16 |
QUALCOMM Incorporated |
Stützstruktur für eine mikroelektromechanische vorrichtung und verfahren dazu
|
US7675670B2
(en)
|
2005-10-28 |
2010-03-09 |
Miradia Inc. |
Fabrication of a high fill ratio silicon spatial light modulator
|
US7522330B2
(en)
*
|
2005-10-28 |
2009-04-21 |
Miradia Inc. |
High fill ratio silicon spatial light modulator
|
US8391630B2
(en)
|
2005-12-22 |
2013-03-05 |
Qualcomm Mems Technologies, Inc. |
System and method for power reduction when decompressing video streams for interferometric modulator displays
|
US7795061B2
(en)
|
2005-12-29 |
2010-09-14 |
Qualcomm Mems Technologies, Inc. |
Method of creating MEMS device cavities by a non-etching process
|
US7916980B2
(en)
|
2006-01-13 |
2011-03-29 |
Qualcomm Mems Technologies, Inc. |
Interconnect structure for MEMS device
|
US7382515B2
(en)
|
2006-01-18 |
2008-06-03 |
Qualcomm Mems Technologies, Inc. |
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
|
US8194056B2
(en)
|
2006-02-09 |
2012-06-05 |
Qualcomm Mems Technologies Inc. |
Method and system for writing data to MEMS display elements
|
US20070205507A1
(en)
*
|
2006-03-01 |
2007-09-06 |
Hui-Lin Chang |
Carbon and nitrogen based cap materials for metal hard mask scheme
|
US7450295B2
(en)
*
|
2006-03-02 |
2008-11-11 |
Qualcomm Mems Technologies, Inc. |
Methods for producing MEMS with protective coatings using multi-component sacrificial layers
|
US7903047B2
(en)
|
2006-04-17 |
2011-03-08 |
Qualcomm Mems Technologies, Inc. |
Mode indicator for interferometric modulator displays
|
US7711239B2
(en)
|
2006-04-19 |
2010-05-04 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device and method utilizing nanoparticles
|
US8049713B2
(en)
|
2006-04-24 |
2011-11-01 |
Qualcomm Mems Technologies, Inc. |
Power consumption optimized display update
|
US7761350B1
(en)
*
|
2006-04-26 |
2010-07-20 |
Aol Inc. |
Biasing of search result clustering to ensure more effective point of interest (POI) targeting
|
US7321457B2
(en)
|
2006-06-01 |
2008-01-22 |
Qualcomm Incorporated |
Process and structure for fabrication of MEMS device having isolated edge posts
|
US7649671B2
(en)
|
2006-06-01 |
2010-01-19 |
Qualcomm Mems Technologies, Inc. |
Analog interferometric modulator device with electrostatic actuation and release
|
US7702192B2
(en)
|
2006-06-21 |
2010-04-20 |
Qualcomm Mems Technologies, Inc. |
Systems and methods for driving MEMS display
|
US7835061B2
(en)
|
2006-06-28 |
2010-11-16 |
Qualcomm Mems Technologies, Inc. |
Support structures for free-standing electromechanical devices
|
US7777715B2
(en)
|
2006-06-29 |
2010-08-17 |
Qualcomm Mems Technologies, Inc. |
Passive circuits for de-multiplexing display inputs
|
US7527998B2
(en)
|
2006-06-30 |
2009-05-05 |
Qualcomm Mems Technologies, Inc. |
Method of manufacturing MEMS devices providing air gap control
|
JP4327183B2
(ja)
*
|
2006-07-31 |
2009-09-09 |
株式会社日立製作所 |
内燃機関の高圧燃料ポンプ制御装置
|
US7763546B2
(en)
|
2006-08-02 |
2010-07-27 |
Qualcomm Mems Technologies, Inc. |
Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
|
KR100729117B1
(ko)
|
2006-08-28 |
2007-06-14 |
동부일렉트로닉스 주식회사 |
디엘피 소자의 금속 배선 형성 방법
|
US8023172B2
(en)
*
|
2006-08-30 |
2011-09-20 |
Silicon Quest Kabushiki-Kaisha |
Mirror device
|
US7652813B2
(en)
*
|
2006-08-30 |
2010-01-26 |
Silicon Quest Kabushiki-Kaisha |
Mirror device
|
US7629197B2
(en)
|
2006-10-18 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Spatial light modulator
|
US7545552B2
(en)
*
|
2006-10-19 |
2009-06-09 |
Qualcomm Mems Technologies, Inc. |
Sacrificial spacer process and resultant structure for MEMS support structure
|
US7684106B2
(en)
|
2006-11-02 |
2010-03-23 |
Qualcomm Mems Technologies, Inc. |
Compatible MEMS switch architecture
|
US20080180783A1
(en)
*
|
2007-01-25 |
2008-07-31 |
Li-Ming Wang |
Critical dimension control for photolithography for microelectromechanical systems devices
|
US8115987B2
(en)
|
2007-02-01 |
2012-02-14 |
Qualcomm Mems Technologies, Inc. |
Modulating the intensity of light from an interferometric reflector
|
US7733552B2
(en)
|
2007-03-21 |
2010-06-08 |
Qualcomm Mems Technologies, Inc |
MEMS cavity-coating layers and methods
|
US7742220B2
(en)
|
2007-03-28 |
2010-06-22 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device and method utilizing conducting layers separated by stops
|
US7715085B2
(en)
*
|
2007-05-09 |
2010-05-11 |
Qualcomm Mems Technologies, Inc. |
Electromechanical system having a dielectric movable membrane and a mirror
|
US7643202B2
(en)
|
2007-05-09 |
2010-01-05 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical system having a dielectric movable membrane and a mirror
|
US7719752B2
(en)
|
2007-05-11 |
2010-05-18 |
Qualcomm Mems Technologies, Inc. |
MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
|
US7643199B2
(en)
|
2007-06-19 |
2010-01-05 |
Qualcomm Mems Technologies, Inc. |
High aperture-ratio top-reflective AM-iMod displays
|
US7782517B2
(en)
|
2007-06-21 |
2010-08-24 |
Qualcomm Mems Technologies, Inc. |
Infrared and dual mode displays
|
US7569488B2
(en)
*
|
2007-06-22 |
2009-08-04 |
Qualcomm Mems Technologies, Inc. |
Methods of making a MEMS device by monitoring a process parameter
|
US7630121B2
(en)
|
2007-07-02 |
2009-12-08 |
Qualcomm Mems Technologies, Inc. |
Electromechanical device with optical function separated from mechanical and electrical function
|
US8068268B2
(en)
|
2007-07-03 |
2011-11-29 |
Qualcomm Mems Technologies, Inc. |
MEMS devices having improved uniformity and methods for making them
|
EP2183623A1
(de)
|
2007-07-31 |
2010-05-12 |
Qualcomm Mems Technologies, Inc. |
Einrichtungen zur verstärkung der farbverschiebung interferometrischer modulatoren
|
US8072402B2
(en)
|
2007-08-29 |
2011-12-06 |
Qualcomm Mems Technologies, Inc. |
Interferometric optical modulator with broadband reflection characteristics
|
US7773286B2
(en)
|
2007-09-14 |
2010-08-10 |
Qualcomm Mems Technologies, Inc. |
Periodic dimple array
|
US7847999B2
(en)
|
2007-09-14 |
2010-12-07 |
Qualcomm Mems Technologies, Inc. |
Interferometric modulator display devices
|
JP5209727B2
(ja)
|
2007-10-19 |
2013-06-12 |
クォルコム・メムズ・テクノロジーズ・インコーポレーテッド |
一体型光起電力デバイスを有するディスプレイ
|
US8058549B2
(en)
|
2007-10-19 |
2011-11-15 |
Qualcomm Mems Technologies, Inc. |
Photovoltaic devices with integrated color interferometric film stacks
|
JP2011504243A
(ja)
|
2007-10-23 |
2011-02-03 |
クォルコム・メムズ・テクノロジーズ・インコーポレーテッド |
調節可能透過型memsベースの装置
|
US8941631B2
(en)
|
2007-11-16 |
2015-01-27 |
Qualcomm Mems Technologies, Inc. |
Simultaneous light collection and illumination on an active display
|
US7820063B2
(en)
*
|
2007-11-16 |
2010-10-26 |
Texas Instruments Incorporated |
Micromirror device and a method of making the same
|
US7715079B2
(en)
|
2007-12-07 |
2010-05-11 |
Qualcomm Mems Technologies, Inc. |
MEMS devices requiring no mechanical support
|
US8164821B2
(en)
|
2008-02-22 |
2012-04-24 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with thermal expansion balancing layer or stiffening layer
|
US7944604B2
(en)
|
2008-03-07 |
2011-05-17 |
Qualcomm Mems Technologies, Inc. |
Interferometric modulator in transmission mode
|
US7643305B2
(en)
*
|
2008-03-07 |
2010-01-05 |
Qualcomm Mems Technologies, Inc. |
System and method of preventing damage to metal traces of flexible printed circuits
|
US7612933B2
(en)
|
2008-03-27 |
2009-11-03 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical device with spacing layer
|
US7898723B2
(en)
|
2008-04-02 |
2011-03-01 |
Qualcomm Mems Technologies, Inc. |
Microelectromechanical systems display element with photovoltaic structure
|
US7969638B2
(en)
|
2008-04-10 |
2011-06-28 |
Qualcomm Mems Technologies, Inc. |
Device having thin black mask and method of fabricating the same
|
US7851239B2
(en)
*
|
2008-06-05 |
2010-12-14 |
Qualcomm Mems Technologies, Inc. |
Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
|
US7768690B2
(en)
|
2008-06-25 |
2010-08-03 |
Qualcomm Mems Technologies, Inc. |
Backlight displays
|
US8023167B2
(en)
|
2008-06-25 |
2011-09-20 |
Qualcomm Mems Technologies, Inc. |
Backlight displays
|
US7746539B2
(en)
|
2008-06-25 |
2010-06-29 |
Qualcomm Mems Technologies, Inc. |
Method for packing a display device and the device obtained thereof
|
US7859740B2
(en)
|
2008-07-11 |
2010-12-28 |
Qualcomm Mems Technologies, Inc. |
Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
|
US7782522B2
(en)
*
|
2008-07-17 |
2010-08-24 |
Qualcomm Mems Technologies, Inc. |
Encapsulation methods for interferometric modulator and MEMS devices
|
US7855826B2
(en)
|
2008-08-12 |
2010-12-21 |
Qualcomm Mems Technologies, Inc. |
Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
|
US8358266B2
(en)
|
2008-09-02 |
2013-01-22 |
Qualcomm Mems Technologies, Inc. |
Light turning device with prismatic light turning features
|
US8270056B2
(en)
|
2009-03-23 |
2012-09-18 |
Qualcomm Mems Technologies, Inc. |
Display device with openings between sub-pixels and method of making same
|
US8736590B2
(en)
|
2009-03-27 |
2014-05-27 |
Qualcomm Mems Technologies, Inc. |
Low voltage driver scheme for interferometric modulators
|
US7864403B2
(en)
|
2009-03-27 |
2011-01-04 |
Qualcomm Mems Technologies, Inc. |
Post-release adjustment of interferometric modulator reflectivity
|
WO2010138763A1
(en)
|
2009-05-29 |
2010-12-02 |
Qualcomm Mems Technologies, Inc. |
Illumination devices and methods of fabrication thereof
|
US8270062B2
(en)
|
2009-09-17 |
2012-09-18 |
Qualcomm Mems Technologies, Inc. |
Display device with at least one movable stop element
|
US8488228B2
(en)
|
2009-09-28 |
2013-07-16 |
Qualcomm Mems Technologies, Inc. |
Interferometric display with interferometric reflector
|
US8547626B2
(en)
*
|
2010-03-25 |
2013-10-01 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer and methods of shaping the same
|
US8368153B2
(en)
*
|
2010-04-08 |
2013-02-05 |
United Microelectronics Corp. |
Wafer level package of MEMS microphone and manufacturing method thereof
|
WO2011126953A1
(en)
|
2010-04-09 |
2011-10-13 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer of an electromechanical device and methods of forming the same
|
WO2012024238A1
(en)
|
2010-08-17 |
2012-02-23 |
Qualcomm Mems Technologies, Inc. |
Actuation and calibration of a charge neutral electrode in an interferometric display device
|
US9057872B2
(en)
|
2010-08-31 |
2015-06-16 |
Qualcomm Mems Technologies, Inc. |
Dielectric enhanced mirror for IMOD display
|
US9134527B2
(en)
|
2011-04-04 |
2015-09-15 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US8963159B2
(en)
|
2011-04-04 |
2015-02-24 |
Qualcomm Mems Technologies, Inc. |
Pixel via and methods of forming the same
|
US8659816B2
(en)
|
2011-04-25 |
2014-02-25 |
Qualcomm Mems Technologies, Inc. |
Mechanical layer and methods of making the same
|
US20130100145A1
(en)
*
|
2011-10-21 |
2013-04-25 |
Qualcomm Mems Technologies, Inc. |
Electromechanical systems device
|
US9423253B2
(en)
*
|
2011-10-31 |
2016-08-23 |
The Charles Stark Draper Laboratory, Inc. |
MEMS hemispherical resonator gyroscope
|
US8736939B2
(en)
|
2011-11-04 |
2014-05-27 |
Qualcomm Mems Technologies, Inc. |
Matching layer thin-films for an electromechanical systems reflective display device
|
EP2618201B1
(de)
*
|
2012-01-20 |
2015-11-04 |
Imec |
Kalibrierung von Mikrospiegelarrays
|
WO2015080057A1
(ja)
|
2013-11-27 |
2015-06-04 |
株式会社ニコン |
空間光変調器、光描画装置、露光装置およびデバイス製造方法
|
US11131796B2
(en)
|
2018-09-10 |
2021-09-28 |
Texas Instruments Incorporated |
Optical display with spatial light modulator
|
US20210111537A1
(en)
*
|
2019-10-15 |
2021-04-15 |
Texas Instruments Incorporated |
Mems-based phase spatial light modulating architecture
|