DE69503340T2 - Verfahren zur Herstellung micromechanischer Düsen oder Flüssigkeitsstrahlen - Google Patents

Verfahren zur Herstellung micromechanischer Düsen oder Flüssigkeitsstrahlen

Info

Publication number
DE69503340T2
DE69503340T2 DE69503340T DE69503340T DE69503340T2 DE 69503340 T2 DE69503340 T2 DE 69503340T2 DE 69503340 T DE69503340 T DE 69503340T DE 69503340 T DE69503340 T DE 69503340T DE 69503340 T2 DE69503340 T2 DE 69503340T2
Authority
DE
Germany
Prior art keywords
nozzles
liquid jets
producing micromechanical
micromechanical
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69503340T
Other languages
English (en)
Other versions
DE69503340D1 (de
Inventor
Yves Fouillet
Gilles Delapierre
Marie-Therese Delaye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE69503340D1 publication Critical patent/DE69503340D1/de
Publication of DE69503340T2 publication Critical patent/DE69503340T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
DE69503340T 1994-12-01 1995-11-29 Verfahren zur Herstellung micromechanischer Düsen oder Flüssigkeitsstrahlen Expired - Fee Related DE69503340T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9414461A FR2727648B1 (fr) 1994-12-01 1994-12-01 Procede de fabrication micromecanique de buses pour jets de liquide

Publications (2)

Publication Number Publication Date
DE69503340D1 DE69503340D1 (de) 1998-08-13
DE69503340T2 true DE69503340T2 (de) 1999-02-11

Family

ID=9469382

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69503340T Expired - Fee Related DE69503340T2 (de) 1994-12-01 1995-11-29 Verfahren zur Herstellung micromechanischer Düsen oder Flüssigkeitsstrahlen

Country Status (5)

Country Link
US (1) US5781994A (de)
EP (1) EP0714774B1 (de)
JP (1) JPH08216415A (de)
DE (1) DE69503340T2 (de)
FR (1) FR2727648B1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2845813B2 (ja) * 1996-06-17 1999-01-13 新潟日本電気株式会社 静電式インクジェット記録ヘッドの製造方法
FR2761199B1 (fr) 1997-03-21 1999-04-16 Commissariat Energie Atomique Procede de realisation de deux cavites communicantes dans un substrat en materiau monocristallin par gravure chimique anisotrope
CH694453A5 (de) * 1998-07-24 2005-01-31 Genspec Sa Mikromechanisch hergestellte Düse zur Erzeugung reproduzierbarer Tröpfchen.
FR2790092B1 (fr) 1999-02-24 2001-03-30 Commissariat Energie Atomique Procede de determination d'un analyte present dans une solution
US6150277A (en) * 1999-08-30 2000-11-21 Micron Technology, Inc. Method of making an oxide structure having a finely calibrated thickness
SE0004594D0 (sv) * 2000-12-12 2000-12-12 Gyros Ab Microscale nozzie
US7111401B2 (en) * 2003-02-04 2006-09-26 Eveready Battery Company, Inc. Razor head having skin controlling means
GB2410464A (en) 2004-01-29 2005-08-03 Hewlett Packard Development Co A method of making an inkjet printhead
JP4639718B2 (ja) * 2004-09-22 2011-02-23 セイコーエプソン株式会社 液体噴射ヘッドの圧力発生室形成板製造装置、液体噴射ヘッドの圧力発生室形成板製造方法及び液体噴射ヘッド
JP4636378B2 (ja) * 2005-09-16 2011-02-23 富士フイルム株式会社 液体吐出ヘッドおよびその製造方法
FR2930457B1 (fr) * 2008-04-24 2010-06-25 Commissariat Energie Atomique Procede de fabrication de microcanaux reconfigurables

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4106976A (en) * 1976-03-08 1978-08-15 International Business Machines Corporation Ink jet nozzle method of manufacture
EP0042932A3 (de) * 1980-06-30 1984-07-25 International Business Machines Corporation Verfahren zur Herstellung hohler rohrartiger Körper
JPS603267A (ja) * 1983-06-20 1985-01-09 Fujitsu Ltd フアクシミリのポ−リング方式
JPS6018352A (ja) * 1983-07-12 1985-01-30 Ricoh Co Ltd インクジエツトヘツドの製造方法
JPS6032673A (ja) * 1983-08-03 1985-02-19 Seiko Epson Corp インクジェットヘッドの製造方法
US4601777A (en) * 1985-04-03 1986-07-22 Xerox Corporation Thermal ink jet printhead and process therefor
US4612554A (en) * 1985-07-29 1986-09-16 Xerox Corporation High density thermal ink jet printhead
US4639748A (en) * 1985-09-30 1987-01-27 Xerox Corporation Ink jet printhead with integral ink filter
US4863560A (en) * 1988-08-22 1989-09-05 Xerox Corp Fabrication of silicon structures by single side, multiple step etching process
US4878992A (en) 1988-11-25 1989-11-07 Xerox Corporation Method of fabricating thermal ink jet printheads
US4899181A (en) * 1989-01-30 1990-02-06 Xerox Corporation Large monolithic thermal ink jet printhead
JPH037349A (ja) * 1989-06-05 1991-01-14 Canon Inc インクジェット記録ヘッドの吐出口形成方法
US4961821A (en) * 1989-11-22 1990-10-09 Xerox Corporation Ode through holes and butt edges without edge dicing
US5160577A (en) * 1991-07-30 1992-11-03 Deshpande Narayan V Method of fabricating an aperture plate for a roof-shooter type printhead
US5160403A (en) * 1991-08-09 1992-11-03 Xerox Corporation Precision diced aligning surfaces for devices such as ink jet printheads
JP2960608B2 (ja) * 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
US5387314A (en) * 1993-01-25 1995-02-07 Hewlett-Packard Company Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
US5308442A (en) * 1993-01-25 1994-05-03 Hewlett-Packard Company Anisotropically etched ink fill slots in silicon
JP3132291B2 (ja) * 1993-06-03 2001-02-05 ブラザー工業株式会社 インクジェットヘッドの製造方法
US5620614A (en) * 1995-01-03 1997-04-15 Xerox Corporation Printhead array and method of producing a printhead die assembly that minimizes end channel damage

Also Published As

Publication number Publication date
FR2727648A1 (fr) 1996-06-07
EP0714774B1 (de) 1998-07-08
DE69503340D1 (de) 1998-08-13
FR2727648B1 (fr) 1997-01-03
JPH08216415A (ja) 1996-08-27
EP0714774A1 (de) 1996-06-05
US5781994A (en) 1998-07-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee