DE69428928T2 - Einkanal-Gaskonzentrationsmessvorrichtung - Google Patents

Einkanal-Gaskonzentrationsmessvorrichtung

Info

Publication number
DE69428928T2
DE69428928T2 DE69428928T DE69428928T DE69428928T2 DE 69428928 T2 DE69428928 T2 DE 69428928T2 DE 69428928 T DE69428928 T DE 69428928T DE 69428928 T DE69428928 T DE 69428928T DE 69428928 T2 DE69428928 T2 DE 69428928T2
Authority
DE
Germany
Prior art keywords
measuring device
gas concentration
concentration measuring
gas
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69428928T
Other languages
English (en)
Other versions
DE69428928D1 (de
Inventor
Yrjoe Koskinen
Ari Lehto
Simo Tammela
Martti Blomberg
Markku Orpana
Altti Torkkeli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Application granted granted Critical
Publication of DE69428928D1 publication Critical patent/DE69428928D1/de
Publication of DE69428928T2 publication Critical patent/DE69428928T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1247—Tuning
DE69428928T 1993-01-13 1994-01-06 Einkanal-Gaskonzentrationsmessvorrichtung Expired - Lifetime DE69428928T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI930127A FI96450C (fi) 1993-01-13 1993-01-13 Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto

Publications (2)

Publication Number Publication Date
DE69428928D1 DE69428928D1 (de) 2001-12-13
DE69428928T2 true DE69428928T2 (de) 2002-06-27

Family

ID=8536701

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69428928T Expired - Lifetime DE69428928T2 (de) 1993-01-13 1994-01-06 Einkanal-Gaskonzentrationsmessvorrichtung

Country Status (5)

Country Link
US (1) US5646729A (de)
EP (1) EP0608049B1 (de)
JP (1) JP3457373B2 (de)
DE (1) DE69428928T2 (de)
FI (1) FI96450C (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019204207A1 (de) * 2019-03-27 2020-10-01 Robert Bosch Gmbh Mikromechanisches Bauteil und Verfahren zum Bilden einer Schichtstruktur

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* Cited by examiner, † Cited by third party
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FI96450B (fi) 1996-03-15
FI96450C (fi) 1996-06-25
US5646729A (en) 1997-07-08
EP0608049A2 (de) 1994-07-27
EP0608049A3 (de) 1995-01-18
FI930127A (fi) 1994-07-14
JP3457373B2 (ja) 2003-10-14
EP0608049B1 (de) 2001-11-07
FI930127A0 (fi) 1993-01-13
JPH06241993A (ja) 1994-09-02
DE69428928D1 (de) 2001-12-13

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