DE69423667T2 - Piezoelektrischer Vibrator und diesen verwendenden Beschleunigungssensor - Google Patents
Piezoelektrischer Vibrator und diesen verwendenden BeschleunigungssensorInfo
- Publication number
- DE69423667T2 DE69423667T2 DE69423667T DE69423667T DE69423667T2 DE 69423667 T2 DE69423667 T2 DE 69423667T2 DE 69423667 T DE69423667 T DE 69423667T DE 69423667 T DE69423667 T DE 69423667T DE 69423667 T2 DE69423667 T2 DE 69423667T2
- Authority
- DE
- Germany
- Prior art keywords
- acceleration sensor
- piezoelectric vibrator
- vibrator
- piezoelectric
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0907—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6623193A JP3139204B2 (ja) | 1993-03-01 | 1993-03-01 | 加速度センサ |
JP05066233A JP3139205B2 (ja) | 1993-03-01 | 1993-03-01 | 加速度センサ |
JP05085712A JP3129022B2 (ja) | 1993-03-19 | 1993-03-19 | 加速度センサ |
JP05123422A JP3139212B2 (ja) | 1993-04-26 | 1993-04-26 | 加速度センサ |
JP05123421A JP3139211B2 (ja) | 1993-04-26 | 1993-04-26 | 加速度センサ |
JP12548593A JPH06314948A (ja) | 1993-04-28 | 1993-04-28 | 圧電振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69423667D1 DE69423667D1 (de) | 2000-05-04 |
DE69423667T2 true DE69423667T2 (de) | 2000-11-23 |
Family
ID=27551035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69423667T Expired - Lifetime DE69423667T2 (de) | 1993-03-01 | 1994-02-28 | Piezoelektrischer Vibrator und diesen verwendenden Beschleunigungssensor |
Country Status (3)
Country | Link |
---|---|
US (8) | US5681994A (de) |
EP (1) | EP0614087B1 (de) |
DE (1) | DE69423667T2 (de) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0707212A3 (de) * | 1994-09-14 | 1996-06-12 | Murata Manufacturing Co | Beschleunigungsmessaufnehmer |
JP3129120B2 (ja) * | 1994-10-04 | 2001-01-29 | 株式会社村田製作所 | 加速度センサ |
JP3186975B2 (ja) * | 1995-04-12 | 2001-07-11 | センソノール・エイ・エス | 力センサー |
JP3119135B2 (ja) * | 1995-09-11 | 2000-12-18 | 株式会社村田製作所 | 加速度センサ |
FR2739190B1 (fr) * | 1995-09-26 | 1997-11-28 | Onera (Off Nat Aerospatiale) | Transducteur monolithique d'acceleration |
US5962786A (en) * | 1995-09-26 | 1999-10-05 | Onera (Office National D'eudes Et De Recheres Aerospatiales) | Monolithic accelerometric transducer |
JPH09229960A (ja) * | 1996-02-22 | 1997-09-05 | Murata Mfg Co Ltd | 振動子 |
WO1999013518A1 (en) | 1997-09-08 | 1999-03-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostriction device |
JPH11168246A (ja) * | 1997-09-30 | 1999-06-22 | Matsushita Electric Ind Co Ltd | 圧電アクチュエータ、赤外線センサおよび圧電光偏向器 |
US6336365B1 (en) * | 1999-08-24 | 2002-01-08 | Personal Electronic Devices, Inc. | Low-cost accelerometer |
EP0971214A4 (de) * | 1997-12-26 | 2001-04-25 | Ngk Insulators Ltd | Zweiköpfige gewichtssensor und verfahren zum bestimmung der masse |
JP2000002714A (ja) * | 1998-04-13 | 2000-01-07 | Matsushita Electric Ind Co Ltd | 圧電型加速度センサ、加速度検出方法、および圧電型加速度センサの製造方法 |
JP3545269B2 (ja) * | 1998-09-04 | 2004-07-21 | 日本碍子株式会社 | 質量センサ及び質量検出方法 |
JP2000180250A (ja) * | 1998-10-09 | 2000-06-30 | Ngk Insulators Ltd | 質量センサ及び質量検出方法 |
US6342749B1 (en) * | 1999-04-29 | 2002-01-29 | New Transducers Limited | Vibration exciter |
TW419839B (en) * | 1999-08-09 | 2001-01-21 | Nat Science Council | Device for measuring vibration and method thereof |
WO2001095329A1 (en) * | 2000-06-08 | 2001-12-13 | Sae Magnetics (H.K.) Ltd. | Dual stage actuator systems for high density hard disk drives using annular rotary piezoelectric actuators |
US6958156B2 (en) * | 2000-12-15 | 2005-10-25 | Vyrex Corporation | Isoflavone derivatives |
FR2824909B1 (fr) * | 2001-05-17 | 2003-09-05 | Sagem | Capteur de force a poutre vibrante et accelerometre en faisant application |
CN1419127A (zh) * | 2001-11-14 | 2003-05-21 | 欧姆龙株式会社 | 加速度传感器以及计步器 |
US6853315B2 (en) * | 2002-01-23 | 2005-02-08 | Triad Sensors, Inc. | Piezoelectric rate sensor system and method |
AU2003263065A1 (en) * | 2002-09-04 | 2004-03-29 | Triad Sensors, Inc. | Interface electronics for piezoelectric devices |
US20040159166A1 (en) * | 2003-02-13 | 2004-08-19 | Schiller Peter J. | Solid-state piezoelectric motion transducer |
WO2004088329A1 (de) * | 2003-04-01 | 2004-10-14 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschunge E.V. | Beschleunigungssensor und verfahren zum erfassen einer beschleunigung |
US20040221651A1 (en) * | 2003-05-08 | 2004-11-11 | Schiller Peter J. | Force balanced piezoelectric rate sensor |
KR100680307B1 (ko) * | 2005-05-20 | 2007-02-07 | 삼성전기주식회사 | 압전 진동자 및 이를 구비한 초음파 모터 |
JP4857437B2 (ja) * | 2005-06-13 | 2012-01-18 | 日本メディカルマテリアル株式会社 | 髄核用脊椎椎間板置換材料およびその製造方法 |
CN101313628B (zh) * | 2005-11-24 | 2012-06-20 | 株式会社村田制作所 | 电声变换器 |
JP4185946B2 (ja) * | 2006-07-20 | 2008-11-26 | ホシデン株式会社 | 圧電型電気音響変換器 |
JP2009198493A (ja) * | 2007-12-26 | 2009-09-03 | Rohm Co Ltd | 角速度検出装置 |
US8689426B2 (en) | 2008-12-17 | 2014-04-08 | Sand 9, Inc. | Method of manufacturing a resonating structure |
CN102439405B (zh) * | 2009-05-27 | 2013-10-16 | 松下电器产业株式会社 | 物理量传感器 |
JP5471303B2 (ja) * | 2009-10-27 | 2014-04-16 | セイコーエプソン株式会社 | 振動片及び振動子 |
US8661899B2 (en) | 2010-03-01 | 2014-03-04 | Sand9, Inc. | Microelectromechanical gyroscopes and related apparatus and methods |
US8833161B2 (en) | 2010-04-20 | 2014-09-16 | Sand 9, Inc. | Microelectromechanical gyroscopes and related apparatus and methods |
WO2012040043A1 (en) * | 2010-09-20 | 2012-03-29 | Sand9, Inc. | Resonant sensing using extensional modes of a plate |
KR20120036631A (ko) * | 2010-10-08 | 2012-04-18 | 삼성전자주식회사 | 압전형 마이크로 스피커 및 그 제조방법 |
JP2012255669A (ja) * | 2011-06-07 | 2012-12-27 | Nippon Dempa Kogyo Co Ltd | 加速度計測装置 |
US9383208B2 (en) | 2011-10-13 | 2016-07-05 | Analog Devices, Inc. | Electromechanical magnetometer and applications thereof |
JP6007541B2 (ja) * | 2012-03-28 | 2016-10-12 | セイコーエプソン株式会社 | 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体 |
EP2891164A4 (de) | 2012-08-30 | 2016-07-20 | Allison Transm Inc | Verfahren und system zur verringerung hörbaren und/oder elektrischen rauschens aus elektrisch oder mechanisch erregten kondensatoren |
US20150162523A1 (en) | 2013-12-06 | 2015-06-11 | Murata Manufacturing Co., Ltd. | Piezoelectric device |
CN205595376U (zh) * | 2015-04-30 | 2016-09-21 | 意法半导体股份有限公司 | 压电传感器 |
Family Cites Families (42)
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US1472583A (en) * | 1921-05-28 | 1923-10-30 | Cady Walter Guyton | Method of maintaining electric currents of constant frequency |
US1781680A (en) * | 1925-08-01 | 1930-11-18 | Rca Corp | Electromechanical system |
US1782117A (en) * | 1925-10-01 | 1930-11-18 | Rca Corp | Method of mounting piezo-electric resonators for the excitation of various overtones |
US3219850A (en) * | 1957-09-16 | 1965-11-23 | Clevite Corp | Electromechanical transducers |
US3018451A (en) * | 1958-12-04 | 1962-01-23 | Mattiat Oskar | Piezoelectric resonator with oppositely poled ring and spot |
US3110824A (en) * | 1960-10-31 | 1963-11-12 | Eastman Kodak Co | Piezoelectric actuating element |
NL294583A (de) * | 1962-06-27 | |||
US3325743A (en) * | 1965-12-23 | 1967-06-13 | Zenith Radio Corp | Bimorph flexural acoustic amplifier |
DE1591330B2 (de) * | 1966-09-30 | 1972-05-25 | Nippon Electric Co. Ltd., Tokio | Piezoelektrischer biegeschwinger |
US3544926A (en) * | 1968-10-22 | 1970-12-01 | Damon Eng Inc | Monolithic crystal filter having mass loading electrode pairs having at least one electrically nonconductive electrode |
US3909641A (en) * | 1971-03-13 | 1975-09-30 | Meidensha Electric Mfg Co Ltd | Holder device for a vibrator |
DE2328719A1 (de) * | 1973-06-06 | 1975-01-02 | Licentia Gmbh | Piezokeramischer, transversal erregter schwinger |
US3971250A (en) * | 1975-02-18 | 1976-07-27 | Minnesota Mining And Manufacturing Company | Electret sensing medium having plural sensing units |
JPS523649A (en) * | 1975-06-25 | 1977-01-12 | Mitsubishi Chem Ind Ltd | Improved method for sealing |
US4006437A (en) * | 1975-06-27 | 1977-02-01 | Bell Telephone Laboratories, Incorporated | Frequency filter |
SE436675B (sv) * | 1975-08-12 | 1985-01-14 | Ki Politekhnichsky I Im 50 Let | Elektrisk motor driven genom piezoelektriska krafter |
JPS5236490A (en) * | 1975-09-17 | 1977-03-19 | Citizen Watch Co Ltd | Piezo electric ring scillator |
JPS5410038A (en) * | 1977-06-24 | 1979-01-25 | Haruo Yasukouchi | Iron club head of club for golf |
GB1597207A (en) * | 1978-04-13 | 1981-09-03 | Itt Creed | Piezoelectric motor element |
DE2945243A1 (de) * | 1978-11-13 | 1980-05-14 | Fujitsu Ltd | Biegeschwingungswandler |
US4356424A (en) * | 1980-11-24 | 1982-10-26 | Eastman Kodak Company | Pseudo-AC method of nonuniformly poling a body of polymeric piezoelectric material and flexure elements produced thereby |
JPS586638A (ja) * | 1981-07-04 | 1983-01-14 | Omron Tateisi Electronics Co | デ−タ伝送装置 |
DE3240884A1 (de) * | 1982-11-05 | 1984-05-10 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Keramisches bistabiles biegeelement |
WO1984003998A1 (en) * | 1983-04-01 | 1984-10-11 | Nise Errol Peter Eer | Doubling resonating beam force transducer with reduced longitudinal pumping |
US4633204A (en) * | 1984-08-29 | 1986-12-30 | Fujitsu Limited | Mechanical filter |
US5166571A (en) * | 1987-08-28 | 1992-11-24 | Nec Home Electronics, Ltd. | Vibration gyro having an H-shaped vibrator |
US4754187A (en) * | 1987-09-08 | 1988-06-28 | The United States Of America As Represented By The Secretary Of The Army | High-Q stress-compensated crystal device |
US5140215A (en) * | 1988-09-19 | 1992-08-18 | Brother Kogyo Kabushiki Kaisha | Vibrator and ultrasonic motor employing the same |
JP3074389B2 (ja) * | 1990-05-21 | 2000-08-07 | 日本特殊陶業株式会社 | 高周波用ラダー型圧電フィルタ |
US5241861A (en) * | 1991-02-08 | 1993-09-07 | Sundstrand Corporation | Micromachined rate and acceleration sensor |
CA2066084A1 (en) * | 1991-05-31 | 1992-12-01 | Gordon Walter Culp | Twisting actuators |
JPH0552572A (ja) * | 1991-08-28 | 1993-03-02 | Akai Electric Co Ltd | 振動子の支持構造 |
JPH0670565A (ja) * | 1992-08-18 | 1994-03-11 | Olympus Optical Co Ltd | 超音波振動子及び超音波アクチュエータ |
JPH06147902A (ja) * | 1992-11-04 | 1994-05-27 | Murata Mfg Co Ltd | 振動ジャイロ |
JP3244238B2 (ja) * | 1993-02-25 | 2002-01-07 | 株式会社村田製作所 | 圧電共振装置 |
JP3139205B2 (ja) * | 1993-03-01 | 2001-02-26 | 株式会社村田製作所 | 加速度センサ |
JP3139204B2 (ja) * | 1993-03-01 | 2001-02-26 | 株式会社村田製作所 | 加速度センサ |
JPH06289046A (ja) * | 1993-04-01 | 1994-10-18 | Canon Inc | 力学センサ |
US5616980A (en) * | 1993-07-09 | 1997-04-01 | Nanomotion Ltd. | Ceramic motor |
JPH0783671A (ja) * | 1993-07-22 | 1995-03-28 | Yoshiro Tomikawa | 振動型ジャイロスコープ |
US5422332A (en) * | 1993-07-30 | 1995-06-06 | Intercat, Inc. | Processes for reacting bastnaesite with metal oxides |
US5389850A (en) * | 1994-02-04 | 1995-02-14 | Maxtor Corporation | Rotational shock sensor |
-
1994
- 1994-02-28 EP EP94102967A patent/EP0614087B1/de not_active Expired - Lifetime
- 1994-02-28 DE DE69423667T patent/DE69423667T2/de not_active Expired - Lifetime
-
1995
- 1995-08-30 US US08/521,443 patent/US5681994A/en not_active Expired - Lifetime
- 1995-08-30 US US08/521,444 patent/US5679896A/en not_active Expired - Lifetime
- 1995-08-30 US US08/521,421 patent/US5629483A/en not_active Expired - Lifetime
- 1995-08-30 US US08/521,426 patent/US5652385A/en not_active Expired - Lifetime
-
1996
- 1996-11-18 US US08/747,247 patent/US5824903A/en not_active Expired - Lifetime
-
1997
- 1997-02-06 US US08/796,496 patent/US5773916A/en not_active Expired - Lifetime
- 1997-04-04 US US08/833,088 patent/US5770799A/en not_active Expired - Lifetime
-
1998
- 1998-03-12 US US09/041,178 patent/US5900551A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5773916A (en) | 1998-06-30 |
US5770799A (en) | 1998-06-23 |
EP0614087B1 (de) | 2000-03-29 |
US5900551A (en) | 1999-05-04 |
US5629483A (en) | 1997-05-13 |
US5679896A (en) | 1997-10-21 |
US5824903A (en) | 1998-10-20 |
US5681994A (en) | 1997-10-28 |
US5652385A (en) | 1997-07-29 |
EP0614087A3 (de) | 1996-03-06 |
EP0614087A2 (de) | 1994-09-07 |
DE69423667D1 (de) | 2000-05-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |