DE69423394T2 - Tintenstrahlaufzeichnungskopf, Aufzeichnungsgerät und Herstellungsverfahren und Vorrichtung für die Herstellung des Kopfes - Google Patents

Tintenstrahlaufzeichnungskopf, Aufzeichnungsgerät und Herstellungsverfahren und Vorrichtung für die Herstellung des Kopfes

Info

Publication number
DE69423394T2
DE69423394T2 DE69423394T DE69423394T DE69423394T2 DE 69423394 T2 DE69423394 T2 DE 69423394T2 DE 69423394 T DE69423394 T DE 69423394T DE 69423394 T DE69423394 T DE 69423394T DE 69423394 T2 DE69423394 T2 DE 69423394T2
Authority
DE
Germany
Prior art keywords
substrate
ink
ink jet
wall member
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69423394T
Other languages
English (en)
Other versions
DE69423394D1 (de
Inventor
Hiroshi Sugitani
Masami Kasamoto
Tsuyoshi Orikasa
Masashi Miyagawa
Jun Kawai
Teruo Arashima
Masaaki Izumida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69423394D1 publication Critical patent/DE69423394D1/de
Publication of DE69423394T2 publication Critical patent/DE69423394T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14362—Assembling elements of heads
DE69423394T 1993-07-29 1994-07-28 Tintenstrahlaufzeichnungskopf, Aufzeichnungsgerät und Herstellungsverfahren und Vorrichtung für die Herstellung des Kopfes Expired - Lifetime DE69423394T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP18835493 1993-07-29
JP18835693 1993-07-29
JP16979194A JP3177100B2 (ja) 1993-07-29 1994-07-21 インクジェットヘッドおよびインクジェット装置ならびに前記ヘッドの製造方法および前記ヘッドの製造装置

Publications (2)

Publication Number Publication Date
DE69423394D1 DE69423394D1 (de) 2000-04-20
DE69423394T2 true DE69423394T2 (de) 2000-08-31

Family

ID=27323239

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69423394T Expired - Lifetime DE69423394T2 (de) 1993-07-29 1994-07-28 Tintenstrahlaufzeichnungskopf, Aufzeichnungsgerät und Herstellungsverfahren und Vorrichtung für die Herstellung des Kopfes

Country Status (5)

Country Link
US (1) US5992981A (de)
EP (1) EP0636480B1 (de)
JP (1) JP3177100B2 (de)
AT (1) ATE190560T1 (de)
DE (1) DE69423394T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
SG52140A1 (en) 1994-03-04 1998-09-28 Canon Kk Ink jet recording head and method of manufacture therefor and laser processing apparatus and ink jet recording apparatus
JPH08281960A (ja) * 1995-04-13 1996-10-29 Canon Inc インクジェット記録ヘッド
US6062675A (en) * 1996-01-09 2000-05-16 Canon Kabushiki Kaisha Recording head, recording apparatus and manufacturing method of recording head
EP0800921B1 (de) * 1996-04-12 2005-02-02 Canon Kabushiki Kaisha Tintenstrahldruckkopfherstellungsverfahren
US6516509B1 (en) 1996-06-07 2003-02-11 Canon Kabushiki Kaisha Method of manufacturing a liquid jet head having a plurality of movable members
JPH1178033A (ja) 1997-03-12 1999-03-23 Canon Inc 液体噴射記録ヘッドの製造方法
JP3559701B2 (ja) 1997-12-18 2004-09-02 キヤノン株式会社 インクジェット記録ヘッド用基板、該基板の製造方法及びインクジェット記録ヘッド及びインクジェット記録装置
JPH11348261A (ja) * 1998-06-10 1999-12-21 Canon Inc 液体噴射記録ヘッドにおける液体吐出状態検査方法および液体吐出状態検査装置
EP1000745A3 (de) 1998-10-27 2001-01-24 Canon Kabushiki Kaisha Platine zur elektrothermischen Umwandlung, Tintenstrahldruckkopf und Tintenstrahlaufzeichnungsgerät mit derselben, und Verfahren zur Herstellung eines Tintenstrahldruckkopfes
US6447984B1 (en) 1999-02-10 2002-09-10 Canon Kabushiki Kaisha Liquid discharge head, method of manufacture therefor and liquid discharge recording apparatus
JP2002001959A (ja) * 2000-04-17 2002-01-08 Canon Inc 液体吐出ヘッドおよびカートリッジおよび画像形成装置ならびに液体吐出ヘッドの製造方法
US8322834B2 (en) * 2010-03-31 2012-12-04 Eastman Kodak Company Snap-in die mount assembly for inkjet printhead
JP5724263B2 (ja) * 2010-09-16 2015-05-27 株式会社リコー インクジェットヘッド

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) * 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4520373A (en) * 1979-04-02 1985-05-28 Canon Kabushiki Kaisha Droplet generating method and apparatus therefor
US4313124A (en) * 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head
US4437100A (en) * 1981-06-18 1984-03-13 Canon Kabushiki Kaisha Ink-jet head and method for production thereof
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS58220754A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツド
JPS58220756A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
JPS59123670A (ja) * 1982-12-28 1984-07-17 Canon Inc インクジエツトヘツド
JPS59138461A (ja) * 1983-01-28 1984-08-08 Canon Inc 液体噴射記録装置
DE3446968A1 (de) * 1983-12-26 1985-07-04 Canon K.K., Tokio/Tokyo Fluessigkeitsstrahlaufzeichnungskopf
JPH064322B2 (ja) * 1984-03-31 1994-01-19 キヤノン株式会社 液体噴射記録装置
FR2574021A1 (fr) * 1984-08-06 1986-06-06 Canon Kk Tete d'enregistrement a jet de liquide et enregistreur a jet de liquide comportant cette tete
GB2176443B (en) * 1985-06-10 1990-11-14 Canon Kk Liquid jet recording head and recording system incorporating the same
JPH0698755B2 (ja) * 1986-04-28 1994-12-07 キヤノン株式会社 液体噴射記録ヘツドの製造方法
JPS63202455A (ja) * 1987-02-17 1988-08-22 Alps Electric Co Ltd インクジエツトヘツドおよびその製造方法
US4774530A (en) * 1987-11-02 1988-09-27 Xerox Corporation Ink jet printhead
US5175565A (en) * 1988-07-26 1992-12-29 Canon Kabushiki Kaisha Ink jet substrate including plural temperature sensors and heaters
JPH0267140A (ja) * 1988-09-01 1990-03-07 Ricoh Co Ltd 液体噴射記録ヘッド
EP0561482B1 (de) * 1988-10-31 1997-01-22 Canon Kabushiki Kaisha Flüssigkeitsstrahlaufzeichnungskopf und mit diesem Kopf ausgerüstetes Gerät
CA2009631C (en) * 1989-02-17 1994-09-20 Shigeo Nonoyama Pressure damper of an ink jet printer
US5098503A (en) * 1990-05-01 1992-03-24 Xerox Corporation Method of fabricating precision pagewidth assemblies of ink jet subunits
JP3402618B2 (ja) * 1991-11-12 2003-05-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法および記録装置

Also Published As

Publication number Publication date
JPH0789073A (ja) 1995-04-04
EP0636480B1 (de) 2000-03-15
JP3177100B2 (ja) 2001-06-18
EP0636480A2 (de) 1995-02-01
ATE190560T1 (de) 2000-04-15
EP0636480A3 (de) 1996-03-06
US5992981A (en) 1999-11-30
DE69423394D1 (de) 2000-04-20

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