DE69417814T2 - Optischer Schalter - Google Patents

Optischer Schalter

Info

Publication number
DE69417814T2
DE69417814T2 DE69417814T DE69417814T DE69417814T2 DE 69417814 T2 DE69417814 T2 DE 69417814T2 DE 69417814 T DE69417814 T DE 69417814T DE 69417814 T DE69417814 T DE 69417814T DE 69417814 T2 DE69417814 T2 DE 69417814T2
Authority
DE
Germany
Prior art keywords
optical switch
switch
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69417814T
Other languages
English (en)
Other versions
DE69417814D1 (de
Inventor
T Gus Mcdonald
R Mark Boysel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69417814D1 publication Critical patent/DE69417814D1/de
Application granted granted Critical
Publication of DE69417814T2 publication Critical patent/DE69417814T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
DE69417814T 1993-07-12 1994-07-12 Optischer Schalter Expired - Fee Related DE69417814T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/090,862 US5345521A (en) 1993-07-12 1993-07-12 Architecture for optical switch

Publications (2)

Publication Number Publication Date
DE69417814D1 DE69417814D1 (de) 1999-05-20
DE69417814T2 true DE69417814T2 (de) 1999-09-23

Family

ID=22224680

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69417814T Expired - Fee Related DE69417814T2 (de) 1993-07-12 1994-07-12 Optischer Schalter

Country Status (4)

Country Link
US (1) US5345521A (de)
EP (1) EP0634683B1 (de)
JP (1) JPH07151985A (de)
DE (1) DE69417814T2 (de)

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AU2001278039A1 (en) 2000-07-27 2002-02-13 Holl Technologies, Inc. Flexureless magnetic micromirror assembly
US7136547B2 (en) * 2001-03-30 2006-11-14 Gsi Group Corporation Method and apparatus for beam deflection
WO2002079852A1 (en) * 2001-03-30 2002-10-10 Yoon-Joong Yong Light modulating system using deformable mirror arrays
US20020181069A1 (en) * 2001-03-30 2002-12-05 Gsi Lumonics Corporation Free space optical switch
US7129601B2 (en) 2001-03-30 2006-10-31 Gsi Group Corporation Apparatus for controlled movement of an element
US6490384B2 (en) 2001-04-04 2002-12-03 Yoon-Joong Yong Light modulating system using deformable mirror arrays
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6529653B1 (en) 2001-04-11 2003-03-04 Optical Switch Corporation System and method for orienting and positioning optical fibers
WO2002086572A1 (en) * 2001-04-18 2002-10-31 L3 Optics, Inc. Collapse based integrated electrostatic active optical elements and method for manufacture thereof
GB2374680A (en) * 2001-04-21 2002-10-23 Marconi Caswell Ltd Optical signal transmitter module with MEMS shutter
US6801682B2 (en) 2001-05-18 2004-10-05 Adc Telecommunications, Inc. Latching apparatus for a MEMS optical switch
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US7054851B2 (en) * 2001-06-25 2006-05-30 Siemens Medical Solutions Health Services Corporation Communication data format for use in data storage and retrieval
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6556766B2 (en) * 2001-06-26 2003-04-29 Avanex Corporation MEMS see-saw array for dynamic gain equalization of DWDM systems
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US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
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US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
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US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
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US7203398B2 (en) * 2003-03-20 2007-04-10 Texas Instruments Incorporated Compact DMD-based optical module
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JP4688131B2 (ja) * 2004-10-21 2011-05-25 株式会社リコー 光偏向装置、光偏向アレー、光学システムおよび画像投影表示装置
JP4385938B2 (ja) 2004-12-15 2009-12-16 セイコーエプソン株式会社 アクチュエータ
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Also Published As

Publication number Publication date
EP0634683A1 (de) 1995-01-18
EP0634683B1 (de) 1999-04-14
JPH07151985A (ja) 1995-06-16
DE69417814D1 (de) 1999-05-20
US5345521A (en) 1994-09-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee