DE69416241T2 - Schleifmittel, Verfahren zu seiner Herstellung, und Verfahren zu seiner Anwendung - Google Patents
Schleifmittel, Verfahren zu seiner Herstellung, und Verfahren zu seiner AnwendungInfo
- Publication number
- DE69416241T2 DE69416241T2 DE69416241T DE69416241T DE69416241T2 DE 69416241 T2 DE69416241 T2 DE 69416241T2 DE 69416241 T DE69416241 T DE 69416241T DE 69416241 T DE69416241 T DE 69416241T DE 69416241 T2 DE69416241 T2 DE 69416241T2
- Authority
- DE
- Germany
- Prior art keywords
- abrasives
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
- 238000000034 method Methods 0.000 title 2
- 239000003082 abrasive agent Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/02—Backings, e.g. foils, webs, mesh fabrics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9265—Special properties
- Y10S428/932—Abrasive or cutting feature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
- Y10T428/24372—Particulate matter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/256—Heavy metal or aluminum or compound thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/256—Heavy metal or aluminum or compound thereof
- Y10T428/257—Iron oxide or aluminum oxide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/259—Silicic material
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/145,412 US5453312A (en) | 1993-10-29 | 1993-10-29 | Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69416241D1 DE69416241D1 (de) | 1999-03-11 |
DE69416241T2 true DE69416241T2 (de) | 1999-06-10 |
Family
ID=22512993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69416241T Revoked DE69416241T2 (de) | 1993-10-29 | 1994-09-28 | Schleifmittel, Verfahren zu seiner Herstellung, und Verfahren zu seiner Anwendung |
Country Status (9)
Country | Link |
---|---|
US (2) | US5453312A (de) |
EP (1) | EP0650807B1 (de) |
JP (1) | JPH07188429A (de) |
KR (1) | KR950011584A (de) |
CN (1) | CN1070754C (de) |
AU (1) | AU674612B2 (de) |
BR (1) | BR9404181A (de) |
CA (1) | CA2133264A1 (de) |
DE (1) | DE69416241T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10148532A1 (de) * | 2001-10-01 | 2003-04-17 | Storz Karl Gmbh & Co Kg | Linse und Verfahren zum Herstellen einer Linse |
Families Citing this family (114)
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US5437754A (en) | 1992-01-13 | 1995-08-01 | Minnesota Mining And Manufacturing Company | Abrasive article having precise lateral spacing between abrasive composite members |
AU684776B2 (en) | 1993-05-26 | 1998-01-08 | Minnesota Mining And Manufacturing Company | Method of providing a smooth surface on a substrate |
US5549962A (en) | 1993-06-30 | 1996-08-27 | Minnesota Mining And Manufacturing Company | Precisely shaped particles and method of making the same |
US5658184A (en) | 1993-09-13 | 1997-08-19 | Minnesota Mining And Manufacturing Company | Nail tool and method of using same to file, polish and/or buff a fingernail or a toenail |
ATE182502T1 (de) | 1993-09-13 | 1999-08-15 | Minnesota Mining & Mfg | Schleifartikel, verfahren zur herstellung desselben, verfahren zur verwendung desselben zum endbearbeiten, und herstellungswerkzeug |
US5632668A (en) * | 1993-10-29 | 1997-05-27 | Minnesota Mining And Manufacturing Company | Method for the polishing and finishing of optical lenses |
JP3874790B2 (ja) * | 1994-02-22 | 2007-01-31 | スリーエム カンパニー | 研磨物品、その製造方法および仕上げ用のその使用方法 |
DE4432998C1 (de) * | 1994-09-16 | 1996-04-04 | Mtu Muenchen Gmbh | Anstreifbelag für metallische Triebwerkskomponente und Herstellungsverfahren |
ATE187668T1 (de) * | 1995-03-21 | 2000-01-15 | Norton Co | Schleifscheibe für das fasen von flachglaskanten |
US5958794A (en) * | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
US5975987A (en) * | 1995-10-05 | 1999-11-02 | 3M Innovative Properties Company | Method and apparatus for knurling a workpiece, method of molding an article with such workpiece, and such molded article |
US5728637A (en) * | 1996-02-01 | 1998-03-17 | The Regents Of The University Of California | Nanocrystalline alumina-diamond composites |
US5700302A (en) * | 1996-03-15 | 1997-12-23 | Minnesota Mining And Manufacturing Company | Radiation curable abrasive article with tie coat and method |
US5692950A (en) * | 1996-08-08 | 1997-12-02 | Minnesota Mining And Manufacturing Company | Abrasive construction for semiconductor wafer modification |
US5972792A (en) * | 1996-10-18 | 1999-10-26 | Micron Technology, Inc. | Method for chemical-mechanical planarization of a substrate on a fixed-abrasive polishing pad |
US6524681B1 (en) | 1997-04-08 | 2003-02-25 | 3M Innovative Properties Company | Patterned surface friction materials, clutch plate members and methods of making and using same |
DE69809265T2 (de) * | 1997-04-18 | 2003-03-27 | Cabot Microelectronics Corp | Polierkissen fur einen halbleitersubstrat |
US6126532A (en) * | 1997-04-18 | 2000-10-03 | Cabot Corporation | Polishing pads for a semiconductor substrate |
JPH10296610A (ja) * | 1997-04-28 | 1998-11-10 | Sony Corp | 研磨方法 |
US6194317B1 (en) | 1998-04-30 | 2001-02-27 | 3M Innovative Properties Company | Method of planarizing the upper surface of a semiconductor wafer |
US8092707B2 (en) | 1997-04-30 | 2012-01-10 | 3M Innovative Properties Company | Compositions and methods for modifying a surface suited for semiconductor fabrication |
US5908477A (en) * | 1997-06-24 | 1999-06-01 | Minnesota Mining & Manufacturing Company | Abrasive articles including an antiloading composition |
US6224465B1 (en) | 1997-06-26 | 2001-05-01 | Stuart L. Meyer | Methods and apparatus for chemical mechanical planarization using a microreplicated surface |
US5919082A (en) | 1997-08-22 | 1999-07-06 | Micron Technology, Inc. | Fixed abrasive polishing pad |
US5946991A (en) | 1997-09-03 | 1999-09-07 | 3M Innovative Properties Company | Method for knurling a workpiece |
JP3918359B2 (ja) * | 1998-05-15 | 2007-05-23 | Jsr株式会社 | 研磨パッド用重合体組成物および研磨パッド |
US6217432B1 (en) | 1998-05-19 | 2001-04-17 | 3M Innovative Properties Company | Abrasive article comprising a barrier coating |
US6220934B1 (en) | 1998-07-23 | 2001-04-24 | Micron Technology, Inc. | Method for controlling pH during planarization and cleaning of microelectronic substrates |
US6276996B1 (en) | 1998-11-10 | 2001-08-21 | Micron Technology, Inc. | Copper chemical-mechanical polishing process using a fixed abrasive polishing pad and a copper layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad |
US6206756B1 (en) | 1998-11-10 | 2001-03-27 | Micron Technology, Inc. | Tungsten chemical-mechanical polishing process using a fixed abrasive polishing pad and a tungsten layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad |
EP1384553B1 (de) * | 1998-12-01 | 2009-03-11 | University College London | Poliervorrichtung mit Antriebsvorrichtungen zum Führen des Schleifwerkzeugs entlang einer Präzessionsbahn und Verfahren zu deren Verwendung |
US6238449B1 (en) | 1998-12-22 | 2001-05-29 | 3M Innovative Properties Company | Abrasive article having an abrasive coating containing a siloxane polymer |
US6312484B1 (en) | 1998-12-22 | 2001-11-06 | 3M Innovative Properties Company | Nonwoven abrasive articles and method of preparing same |
US6239049B1 (en) | 1998-12-22 | 2001-05-29 | 3M Innovative Properties Company | Aminoplast resin/thermoplastic polyamide presize coatings for abrasive article backings |
US6634929B1 (en) | 1999-04-23 | 2003-10-21 | 3M Innovative Properties Company | Method for grinding glass |
US6458018B1 (en) * | 1999-04-23 | 2002-10-01 | 3M Innovative Properties Company | Abrasive article suitable for abrading glass and glass ceramic workpieces |
US6322427B1 (en) | 1999-04-30 | 2001-11-27 | Applied Materials, Inc. | Conditioning fixed abrasive articles |
KR20010020807A (ko) | 1999-05-03 | 2001-03-15 | 조셉 제이. 스위니 | 고정 연마재 제품을 사전-조절하는 방법 |
US20020077037A1 (en) * | 1999-05-03 | 2002-06-20 | Tietz James V. | Fixed abrasive articles |
US6685539B1 (en) * | 1999-08-24 | 2004-02-03 | Ricoh Company, Ltd. | Processing tool, method of producing tool, processing method and processing apparatus |
US6656842B2 (en) | 1999-09-22 | 2003-12-02 | Applied Materials, Inc. | Barrier layer buffing after Cu CMP |
US6435944B1 (en) | 1999-10-27 | 2002-08-20 | Applied Materials, Inc. | CMP slurry for planarizing metals |
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US7041599B1 (en) | 1999-12-21 | 2006-05-09 | Applied Materials Inc. | High through-put Cu CMP with significantly reduced erosion and dishing |
US6746311B1 (en) * | 2000-01-24 | 2004-06-08 | 3M Innovative Properties Company | Polishing pad with release layer |
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KR20150039795A (ko) * | 2012-08-02 | 2015-04-13 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법 |
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TWI695752B (zh) * | 2015-10-16 | 2020-06-11 | 美商應用材料股份有限公司 | 用於以積層製程形成先進拋光墊的配方 |
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MX2018009428A (es) * | 2016-02-22 | 2018-11-09 | Almt Corp | Herramienta abrasiva. |
EP3532249A4 (de) | 2016-10-25 | 2020-06-17 | 3M Innovative Properties Company | Strukturierte schleifartikel und verfahren zur verwendung davon |
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JPS62290732A (ja) * | 1986-06-10 | 1987-12-17 | Sumitomo Chem Co Ltd | 低硬度ゴム研磨材の製造方法 |
US4751138A (en) * | 1986-08-11 | 1988-06-14 | Minnesota Mining And Manufacturing Company | Coated abrasive having radiation curable binder |
US4799939A (en) * | 1987-02-26 | 1989-01-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
US4735632A (en) * | 1987-04-02 | 1988-04-05 | Minnesota Mining And Manufacturing Company | Coated abrasive binder containing ternary photoinitiator system |
JP2707264B2 (ja) * | 1987-12-28 | 1998-01-28 | ハイ・コントロール・リミテッド | 研磨シートおよびその製造方法 |
US4930266A (en) * | 1988-02-26 | 1990-06-05 | Minnesota Mining And Manufacturing Company | Abrasive sheeting having individually positioned abrasive granules |
US4918874A (en) * | 1988-08-05 | 1990-04-24 | The Dow Chemical Company | Method of preparing abrasive articles |
AU605995B2 (en) * | 1988-08-31 | 1991-01-24 | De Beers Industrial Diamond Division (Proprietary) Limited | Manufacture of abrasive products |
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-
1993
- 1993-10-29 US US08/145,412 patent/US5453312A/en not_active Expired - Lifetime
-
1994
- 1994-09-28 DE DE69416241T patent/DE69416241T2/de not_active Revoked
- 1994-09-28 EP EP94115309A patent/EP0650807B1/de not_active Revoked
- 1994-09-29 CA CA002133264A patent/CA2133264A1/en not_active Abandoned
- 1994-10-18 AU AU75896/94A patent/AU674612B2/en not_active Ceased
- 1994-10-20 BR BR9404181A patent/BR9404181A/pt active Search and Examination
- 1994-10-22 KR KR1019940027065A patent/KR950011584A/ko not_active Application Discontinuation
- 1994-10-24 CN CN94117212A patent/CN1070754C/zh not_active Expired - Lifetime
- 1994-10-24 JP JP6284024A patent/JPH07188429A/ja active Pending
-
1995
- 1995-05-15 US US08/441,075 patent/US5549961A/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10148532A1 (de) * | 2001-10-01 | 2003-04-17 | Storz Karl Gmbh & Co Kg | Linse und Verfahren zum Herstellen einer Linse |
DE10148532B4 (de) * | 2001-10-01 | 2004-04-15 | Karl Storz Gmbh & Co. Kg | Stablinse und Verfahren zum Herstellen einer Stablinse |
Also Published As
Publication number | Publication date |
---|---|
CA2133264A1 (en) | 1995-04-20 |
EP0650807A1 (de) | 1995-05-03 |
CN1070754C (zh) | 2001-09-12 |
CN1102800A (zh) | 1995-05-24 |
EP0650807B1 (de) | 1999-01-27 |
JPH07188429A (ja) | 1995-07-25 |
KR950011584A (ko) | 1995-05-15 |
AU674612B2 (en) | 1997-01-02 |
BR9404181A (pt) | 1995-06-27 |
AU7589694A (en) | 1995-05-18 |
DE69416241D1 (de) | 1999-03-11 |
US5549961A (en) | 1996-08-27 |
US5453312A (en) | 1995-09-26 |
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Legal Events
Date | Code | Title | Description |
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8363 | Opposition against the patent | ||
8331 | Complete revocation |