DE69415517D1 - Handhabungseinrichtung mit gelenkarm - Google Patents

Handhabungseinrichtung mit gelenkarm

Info

Publication number
DE69415517D1
DE69415517D1 DE69415517T DE69415517T DE69415517D1 DE 69415517 D1 DE69415517 D1 DE 69415517D1 DE 69415517 T DE69415517 T DE 69415517T DE 69415517 T DE69415517 T DE 69415517T DE 69415517 D1 DE69415517 D1 DE 69415517D1
Authority
DE
Germany
Prior art keywords
handling device
joint arm
arm
joint
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69415517T
Other languages
English (en)
Other versions
DE69415517T2 (de
DE69415517T3 (de
Inventor
Christopher Hofmeister
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21956683&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69415517(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Application granted granted Critical
Publication of DE69415517D1 publication Critical patent/DE69415517D1/de
Publication of DE69415517T2 publication Critical patent/DE69415517T2/de
Publication of DE69415517T3 publication Critical patent/DE69415517T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J21/00—Chambers provided with manipulation devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manipulator (AREA)
DE69415517T 1993-04-16 1994-04-13 Handhabungseinrichtung mit gelenkarm Expired - Lifetime DE69415517T3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4883393A 1993-04-16 1993-04-16
US48833 1993-04-16
PCT/US1994/004040 WO1994023911A1 (en) 1993-04-16 1994-04-13 Articulated arm transfer device

Publications (3)

Publication Number Publication Date
DE69415517D1 true DE69415517D1 (de) 1999-02-04
DE69415517T2 DE69415517T2 (de) 1999-05-20
DE69415517T3 DE69415517T3 (de) 2005-03-17

Family

ID=21956683

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69415517T Expired - Lifetime DE69415517T3 (de) 1993-04-16 1994-04-13 Handhabungseinrichtung mit gelenkarm

Country Status (7)

Country Link
US (3) US5720590A (de)
EP (1) EP0696242B2 (de)
JP (1) JP2761438B2 (de)
KR (1) KR100303018B1 (de)
CN (1) CN1046654C (de)
DE (1) DE69415517T3 (de)
WO (1) WO1994023911A1 (de)

Families Citing this family (137)

* Cited by examiner, † Cited by third party
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CN1121331A (zh) 1996-04-24
KR960701729A (ko) 1996-03-28
DE69415517T2 (de) 1999-05-20
DE69415517T3 (de) 2005-03-17
KR100303018B1 (ko) 2001-11-22
JPH08506771A (ja) 1996-07-23
US5899658A (en) 1999-05-04
EP0696242A1 (de) 1996-02-14
WO1994023911A1 (en) 1994-10-27
EP0696242B1 (de) 1998-12-23
EP0696242A4 (de) 1996-06-26
CN1046654C (zh) 1999-11-24
US5813823A (en) 1998-09-29
EP0696242B2 (de) 2004-10-13
US5720590A (en) 1998-02-24
JP2761438B2 (ja) 1998-06-04

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