DE69332639D1 - Wagerechter diffusionsofen mit hoher leistung - Google Patents

Wagerechter diffusionsofen mit hoher leistung

Info

Publication number
DE69332639D1
DE69332639D1 DE69332639T DE69332639T DE69332639D1 DE 69332639 D1 DE69332639 D1 DE 69332639D1 DE 69332639 T DE69332639 T DE 69332639T DE 69332639 T DE69332639 T DE 69332639T DE 69332639 D1 DE69332639 D1 DE 69332639D1
Authority
DE
Germany
Prior art keywords
heating element
furnace
enhanced
improved
maintainability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69332639T
Other languages
English (en)
Other versions
DE69332639T2 (de
Inventor
B Peck
E Erickson
H Matthews
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermtec Inc
Original Assignee
Thermtec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermtec Inc filed Critical Thermtec Inc
Application granted granted Critical
Publication of DE69332639D1 publication Critical patent/DE69332639D1/de
Publication of DE69332639T2 publication Critical patent/DE69332639T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
DE69332639T 1992-06-15 1993-06-09 Wagerechter diffusionsofen mit hoher leistung Expired - Fee Related DE69332639T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/898,552 US5461214A (en) 1992-06-15 1992-06-15 High performance horizontal diffusion furnace system
PCT/US1993/005546 WO1993026137A1 (en) 1992-06-15 1993-06-09 High performance horizontal diffusion furnace system

Publications (2)

Publication Number Publication Date
DE69332639D1 true DE69332639D1 (de) 2003-02-20
DE69332639T2 DE69332639T2 (de) 2003-11-06

Family

ID=25409614

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69332639T Expired - Fee Related DE69332639T2 (de) 1992-06-15 1993-06-09 Wagerechter diffusionsofen mit hoher leistung

Country Status (8)

Country Link
US (5) US5461214A (de)
EP (1) EP0645072B1 (de)
JP (3) JPH07509345A (de)
KR (1) KR100316069B1 (de)
AT (1) ATE231318T1 (de)
DE (1) DE69332639T2 (de)
ES (1) ES2191665T3 (de)
WO (1) WO1993026137A1 (de)

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US5483041A (en) 1996-01-09
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DE69332639T2 (de) 2003-11-06
US5461214A (en) 1995-10-24
EP0645072A1 (de) 1995-03-29
WO1993026137A1 (en) 1993-12-23
ATE231318T1 (de) 2003-02-15
JPH07509345A (ja) 1995-10-12
US5517001A (en) 1996-05-14
JP2007295005A (ja) 2007-11-08
EP0645072B1 (de) 2003-01-15
ES2191665T3 (es) 2003-09-16
JP2004006848A (ja) 2004-01-08
US5481088A (en) 1996-01-02
EP0645072A4 (de) 1997-12-10
US5530222A (en) 1996-06-25

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