DE69332530T2 - Magneto-resistiver Sensor und Herstellungsverfahren dafür - Google Patents

Magneto-resistiver Sensor und Herstellungsverfahren dafür

Info

Publication number
DE69332530T2
DE69332530T2 DE69332530T DE69332530T DE69332530T2 DE 69332530 T2 DE69332530 T2 DE 69332530T2 DE 69332530 T DE69332530 T DE 69332530T DE 69332530 T DE69332530 T DE 69332530T DE 69332530 T2 DE69332530 T2 DE 69332530T2
Authority
DE
Germany
Prior art keywords
magneto
manufacturing process
resistive sensor
process therefor
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69332530T
Other languages
English (en)
Other versions
DE69332530D1 (de
Inventor
Peter K George
Garrett A Garretson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of DE69332530D1 publication Critical patent/DE69332530D1/de
Application granted granted Critical
Publication of DE69332530T2 publication Critical patent/DE69332530T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
    • G11B5/3932—Magnetic biasing films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/398—Specially shaped layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
DE69332530T 1992-08-25 1993-08-12 Magneto-resistiver Sensor und Herstellungsverfahren dafür Expired - Fee Related DE69332530T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US93618592A 1992-08-25 1992-08-25

Publications (2)

Publication Number Publication Date
DE69332530D1 DE69332530D1 (de) 2003-01-09
DE69332530T2 true DE69332530T2 (de) 2003-07-03

Family

ID=25468292

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69329669T Expired - Fee Related DE69329669D1 (de) 1992-08-25 1993-08-12 Magnetoresistiver Sensor und Herstellungsverfahren dafür
DE69332530T Expired - Fee Related DE69332530T2 (de) 1992-08-25 1993-08-12 Magneto-resistiver Sensor und Herstellungsverfahren dafür

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69329669T Expired - Fee Related DE69329669D1 (de) 1992-08-25 1993-08-12 Magnetoresistiver Sensor und Herstellungsverfahren dafür

Country Status (6)

Country Link
US (2) US5737155A (de)
EP (2) EP0585008B1 (de)
JP (1) JP3228608B2 (de)
DE (2) DE69329669D1 (de)
HK (1) HK1013729A1 (de)
SG (2) SG47479A1 (de)

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MY108956A (en) * 1992-11-12 1996-11-30 Quantum Peripherals Colorado Inc Magnetoresistive device and method having improved barkhausen noise suppression
US5483402A (en) * 1994-06-15 1996-01-09 Quantum Corporation Magneto resistive head having symmetric off-track performance profile
WO1995035508A1 (en) * 1994-06-22 1995-12-28 Seagate Technology, Inc. Single domain mr sensors using permanent magnet stabilization
US5712565A (en) * 1994-06-22 1998-01-27 Seagate Technology, Inc. MR sensor having thick active region between two thinner inactive MR regions topped with respective permanent magnets
EP0747886A3 (de) * 1995-06-05 1997-02-26 Quantum Peripherals Colorado Mit einer weichmagnetischen benachbarten Schicht vorgespannte magnetoresistive Anordnung, so aufgebaut, dass der Fluss sich natürlich schliesst, die mit einer koplanaren Permanent-Magnet-Dünnschicht stabilisiert wird, und Verfahren zu deren Herstellung
US5654854A (en) * 1995-11-30 1997-08-05 Quantum Corporation Longitudinally biased magnetoresistive sensor having a concave shaped active region to reduce Barkhausen noise by achieving a substantially single magnetic domain state
JPH09180936A (ja) * 1995-12-27 1997-07-11 Unitika Ltd 磁気素子
JPH09260742A (ja) * 1996-03-26 1997-10-03 Sony Corp 磁気抵抗効果素子
JP3471520B2 (ja) * 1996-04-30 2003-12-02 富士通株式会社 磁気抵抗効果型磁気ヘッドの製造方法及び磁気抵抗効果型磁気ヘッドの製造装置
JP3188232B2 (ja) * 1997-12-09 2001-07-16 アルプス電気株式会社 薄膜磁気ヘッドおよびその製造方法
JP2000222711A (ja) * 1999-01-28 2000-08-11 Alps Electric Co Ltd 薄膜磁気ヘッドの製造方法および製造装置
US6713237B2 (en) 2000-07-27 2004-03-30 Seagate Technology Llc Single layer lift-off method for making an electronic device
US6785101B2 (en) 2001-07-12 2004-08-31 Hitachi Global Storage Technologies Netherlands B.V. Overlaid lead giant magnetoresistive head with side reading reduction
US6930865B2 (en) * 2002-05-14 2005-08-16 Seagate Technology Llc Magnetoresistive read sensor with short permanent magnets
US7177122B2 (en) * 2003-10-27 2007-02-13 Seagate Technology Llc Biasing for tri-layer magnetoresistive sensors
US7580228B1 (en) * 2004-05-29 2009-08-25 Lauer Mark A Current perpendicular to plane sensor with non-rectangular sense layer stack
US7570461B2 (en) * 2005-02-28 2009-08-04 Seagate Technology Llc Magnetic sensor with in-stack biasing
US20110050211A1 (en) * 2009-08-26 2011-03-03 Seagate Technology Llc Trapezoidal reader for ultra high density magnetic recording
US8582251B2 (en) * 2009-08-26 2013-11-12 Seagate Technology Llc Magnetic sensor with non-rectangular geometry
US8537496B2 (en) 2010-07-27 2013-09-17 HGST Netherlands B.V. Perpendicular magnetic write head having a trailing wrap-around magnetic shield magnetically biased in a cross track direction
US8559140B2 (en) * 2011-04-26 2013-10-15 Seagate Technology Llc Magnetic element with varying stripe heights
DE102013104486A1 (de) * 2013-05-02 2014-11-20 Sensitec Gmbh Magnetfeldsensorvorrichtung
US9897667B2 (en) 2016-01-26 2018-02-20 Nxp Usa, Inc. Magnetic field sensor with permanent magnet biasing
US9841469B2 (en) 2016-01-26 2017-12-12 Nxp Usa, Inc. Magnetic field sensor with multiple sense layer magnetization orientations
US10545196B2 (en) * 2016-03-24 2020-01-28 Nxp Usa, Inc. Multiple axis magnetic sensor
US10145907B2 (en) 2016-04-07 2018-12-04 Nxp Usa, Inc. Magnetic field sensor with permanent magnet biasing
US9933496B2 (en) 2016-04-21 2018-04-03 Nxp Usa, Inc. Magnetic field sensor with multiple axis sense capability

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US3987485A (en) * 1973-02-20 1976-10-19 Matsushita Electric Industrial Co., Ltd. Magnetic head with thin film components
US4052748A (en) * 1974-04-01 1977-10-04 U.S. Philips Corporation Magnetoresistive magnetic head
JPS6020802B2 (ja) * 1976-04-26 1985-05-23 日本電気株式会社 磁気ヘツド
JPS56153523A (en) * 1980-04-23 1981-11-27 Hitachi Ltd Magnetic resistance head
JPS58216A (ja) * 1981-06-26 1983-01-05 Fuji Electric Co Ltd 空気清浄機の風速制御方式
JPS58100217A (ja) * 1981-12-11 1983-06-14 Hitachi Ltd 磁気抵抗効果ヘツド
JPS58100216A (ja) * 1981-12-11 1983-06-14 Hitachi Ltd 磁気抵抗効果ヘツド
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US4802043A (en) * 1985-03-25 1989-01-31 Hitachi, Ltd. Magneto-resistive head for protecting against output spike noises
JPS62137713A (ja) * 1985-12-10 1987-06-20 Victor Co Of Japan Ltd 磁気抵抗効果型磁気ヘツド
US4967298A (en) * 1987-02-17 1990-10-30 Mowry Greg S Magnetic head with magnetoresistive sensor, inductive write head, and shield
US4821133A (en) * 1987-02-17 1989-04-11 Magnetic Peripherals, Inc. Bottleneck magnetoresistive element
JPH077012B2 (ja) * 1987-08-18 1995-01-30 富士通株式会社 加速度センサ
US4843505A (en) * 1988-04-25 1989-06-27 Magnetic Peripherals Inc. Magnetoresistive sensing element with a projection for enhanced data reading
US4956736A (en) * 1988-12-16 1990-09-11 Eastman Kodak Company Thin film magnetic element having a rhombic shape
US4987508A (en) * 1988-12-23 1991-01-22 Eastman Kodak Company Permanent magnet shaped to provide uniform biasing of a magnetoresistive reproduce head
US4972284A (en) * 1989-01-03 1990-11-20 Eastman Kodak Company Deposited permanent magnet for hard and easy axes biasing of a magnetoresistive head
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US5079035A (en) * 1989-10-10 1992-01-07 International Business Machines Corporation Method of making a magnetoresistive read transducer having hard magnetic bias
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Also Published As

Publication number Publication date
HK1013729A1 (en) 1999-09-03
SG47479A1 (en) 1998-04-17
SG82628A1 (en) 2001-08-21
JPH06177455A (ja) 1994-06-24
US5737155A (en) 1998-04-07
DE69332530D1 (de) 2003-01-09
EP0896324B1 (de) 2002-11-27
EP0585008A2 (de) 1994-03-02
DE69329669D1 (de) 2000-12-21
EP0585008A3 (en) 1995-11-08
JP3228608B2 (ja) 2001-11-12
EP0896324A1 (de) 1999-02-10
US5736060A (en) 1998-04-07
EP0585008B1 (de) 2000-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee