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Publication numberDE69331416 D1
Publication typeGrant
Application numberDE1993631416
Publication date7 Feb 2002
Filing date12 Oct 1993
Priority date13 Oct 1992
Also published asDE69331416T2, EP0664925A1, EP0664925A4, EP0664925B1, US5323035, US5453404, WO1994009513A1
Publication number1993631416, 93631416, DE 69331416 D1, DE 69331416D1, DE-D1-69331416, DE1993631416, DE69331416 D1, DE69331416D1, DE93631416
InventorsGlenn J Leddy
ApplicantGlenn J Leddy
Export CitationBiBTeX, EndNote, RefMan
Verbindungsstruktur fur integrierte schaltung und verfahren zu deren herstellung Interconnect structure for an integrated circuit and methods for their preparation translated from German
DE 69331416 D1
Abstract  available in
Description  available in
Claims  available in
Legal Events
DateCodeEventDescription
6 Feb 20038364No opposition during term of opposition
14 Aug 20088339Ceased/non-payment of the annual fee