DE69329346T2 - Vorrichtung und verfahren zur detektion und diskrimination von oberflächenfehlern - Google Patents

Vorrichtung und verfahren zur detektion und diskrimination von oberflächenfehlern

Info

Publication number
DE69329346T2
DE69329346T2 DE69329346T DE69329346T DE69329346T2 DE 69329346 T2 DE69329346 T2 DE 69329346T2 DE 69329346 T DE69329346 T DE 69329346T DE 69329346 T DE69329346 T DE 69329346T DE 69329346 T2 DE69329346 T2 DE 69329346T2
Authority
DE
Germany
Prior art keywords
detecting
surface defects
discriminating surface
discriminating
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69329346T
Other languages
English (en)
Other versions
DE69329346D1 (de
Inventor
Christopher Allen
Vladimirovich Broude
Tobey Chase
Pascal Miller
Lionel Ormsby
Bruno Rostaing
Paxton Quackenbos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
QC Optics Inc
Original Assignee
QC Optics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by QC Optics Inc filed Critical QC Optics Inc
Publication of DE69329346D1 publication Critical patent/DE69329346D1/de
Application granted granted Critical
Publication of DE69329346T2 publication Critical patent/DE69329346T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N2021/8924—Dents; Relief flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs
DE69329346T 1992-11-25 1993-11-23 Vorrichtung und verfahren zur detektion und diskrimination von oberflächenfehlern Expired - Lifetime DE69329346T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/981,745 US5389794A (en) 1992-11-25 1992-11-25 Surface pit and mound detection and discrimination system and method
PCT/US1993/011448 WO1994012868A1 (en) 1992-11-25 1993-11-23 Surface pit and mound detection and discrimination system and method

Publications (2)

Publication Number Publication Date
DE69329346D1 DE69329346D1 (de) 2000-10-05
DE69329346T2 true DE69329346T2 (de) 2001-03-01

Family

ID=25528621

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69329346T Expired - Lifetime DE69329346T2 (de) 1992-11-25 1993-11-23 Vorrichtung und verfahren zur detektion und diskrimination von oberflächenfehlern

Country Status (5)

Country Link
US (1) US5389794A (de)
EP (1) EP0670997B1 (de)
JP (1) JPH07509785A (de)
DE (1) DE69329346T2 (de)
WO (1) WO1994012868A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005031490A1 (de) * 2005-07-04 2007-02-01 Massen Machine Vision Systems Gmbh Kostengünstige multi-sensorielle Oberflächeninspektion

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5471066A (en) * 1993-08-26 1995-11-28 Nikon Corporation Defect inspection apparatus of rotary type
US6271916B1 (en) * 1994-03-24 2001-08-07 Kla-Tencor Corporation Process and assembly for non-destructive surface inspections
US6118525A (en) 1995-03-06 2000-09-12 Ade Optical Systems Corporation Wafer inspection system for distinguishing pits and particles
US5625193A (en) * 1995-07-10 1997-04-29 Qc Optics, Inc. Optical inspection system and method for detecting flaws on a diffractive surface
WO1997026529A1 (en) * 1996-01-19 1997-07-24 Phase Metrics Surface inspection apparatus and method
US5898499A (en) * 1996-01-30 1999-04-27 Seagate Technology, Inc. Method and apparatus for detecting surface discontinuities based on changes in an optical path length during beam scanning
US6108093A (en) * 1997-06-04 2000-08-22 Lsi Logic Corporation Automated inspection system for residual metal after chemical-mechanical polishing
US5985679A (en) * 1997-06-12 1999-11-16 Lsi Logic Corporation Automated endpoint detection system during chemical-mechanical polishing
US6201601B1 (en) 1997-09-19 2001-03-13 Kla-Tencor Corporation Sample inspection system
US6956644B2 (en) * 1997-09-19 2005-10-18 Kla-Tencor Technologies Corporation Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
US20040057045A1 (en) * 2000-12-21 2004-03-25 Mehdi Vaez-Iravani Sample inspection system
US6614520B1 (en) 1997-12-18 2003-09-02 Kla-Tencor Corporation Method for inspecting a reticle
JPH11183394A (ja) * 1997-12-25 1999-07-09 Systemseiko Co Ltd ディスクの表面検査方法および装置
US6169601B1 (en) 1998-06-23 2001-01-02 Ade Optical Systems Method and apparatus for distinguishing particles from subsurface defects on a substrate using polarized light
US6081411A (en) * 1998-06-29 2000-06-27 International Business Machines Corporation Thin film disk media using optimum surface orientation to written data tracks
US20050134841A1 (en) * 1998-09-18 2005-06-23 Mehdi Vacz-Iravani Sample inspection system
US6867406B1 (en) * 1999-03-23 2005-03-15 Kla-Tencor Corporation Confocal wafer inspection method and apparatus using fly lens arrangement
US6486946B1 (en) 1999-06-15 2002-11-26 Ade Corporation Method for discriminating between holes in and particles on a film covering a substrate
US6548821B1 (en) * 1999-06-21 2003-04-15 Komag, Inc. Method and apparatus for inspecting substrates
US6566674B1 (en) * 1999-06-21 2003-05-20 Komag, Inc. Method and apparatus for inspecting substrates
US6266138B1 (en) 1999-10-12 2001-07-24 Perceptron, Inc. System and method for detecting defects in a surface of a workpiece
US6600556B2 (en) * 2001-01-10 2003-07-29 Hitachi Global Storage Technologies Netherlands, B.V. System and method for detecting manufacturing marks on sputtered disks
US6538730B2 (en) * 2001-04-06 2003-03-25 Kla-Tencor Technologies Corporation Defect detection system
US6710868B2 (en) * 2002-05-22 2004-03-23 Applied Materials, Inc. Optical inspection system with dual detection heads
US7116413B2 (en) * 2002-09-13 2006-10-03 Kla-Tencor Corporation Inspection system for integrated applications
US7110106B2 (en) * 2003-10-29 2006-09-19 Coretech Optical, Inc. Surface inspection system
US7433031B2 (en) * 2003-10-29 2008-10-07 Core Tech Optical, Inc. Defect review system with 2D scanning and a ring detector
US20050105791A1 (en) * 2003-10-29 2005-05-19 Lee Ken K. Surface inspection method
WO2006014152A1 (en) * 2004-07-01 2006-02-09 Midwest Research Institute Optic probe for semiconductor characterization
JP4283201B2 (ja) * 2004-10-14 2009-06-24 株式会社荏原製作所 情報記録媒体検査装置および方法
US7554656B2 (en) * 2005-10-06 2009-06-30 Kla-Tencor Technologies Corp. Methods and systems for inspection of a wafer
US9719356B2 (en) * 2013-06-21 2017-08-01 Rolls-Royce Plc Method of finishing a blade
US20150355099A1 (en) * 2014-06-06 2015-12-10 Hamilton Sundstrand Corporation Scratch verification apparatus and method
US11493454B2 (en) 2015-11-13 2022-11-08 Cognex Corporation System and method for detecting defects on a specular surface with a vision system
JP6559601B2 (ja) * 2016-03-23 2019-08-14 信越半導体株式会社 検出装置及び検出方法
CN113802618B (zh) * 2021-08-23 2022-10-11 浙江工业大学 一种坑底隆起监测系统
WO2023127152A1 (ja) * 2021-12-28 2023-07-06 株式会社ニコン 光学装置および検査方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4092068A (en) * 1976-05-05 1978-05-30 Domtar Inc. Surface sensor
US4395122A (en) * 1981-04-29 1983-07-26 Rca Corporation Defect detection system
US4412743A (en) * 1981-09-08 1983-11-01 Discovision Associates Off-axis light beam defect detector
US4920385A (en) * 1984-02-14 1990-04-24 Diffracto Ltd. Panel surface flaw inspection
US4794265A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface pit detection system and method
US4794264A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface defect detection and confirmation system and method
US4943734A (en) * 1989-06-30 1990-07-24 Qc Optics, Inc. Inspection apparatus and method for detecting flaws on a diffractive surface
DE3941725A1 (de) * 1989-12-18 1991-06-20 Krupp Atlas Elektronik Gmbh Vorrichtung zum erkennen von deformationen auf pressteilen
US5153844A (en) * 1990-01-23 1992-10-06 E. I. Du Pont De Nemours And Company Method and apparatus for measuring surface flatness
US5189481A (en) * 1991-07-26 1993-02-23 Tencor Instruments Particle detector for rough surfaces

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005031490A1 (de) * 2005-07-04 2007-02-01 Massen Machine Vision Systems Gmbh Kostengünstige multi-sensorielle Oberflächeninspektion

Also Published As

Publication number Publication date
DE69329346D1 (de) 2000-10-05
US5389794A (en) 1995-02-14
WO1994012868A1 (en) 1994-06-09
EP0670997B1 (de) 2000-08-30
EP0670997A4 (de) 1995-11-22
JPH07509785A (ja) 1995-10-26
EP0670997A1 (de) 1995-09-13

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Legal Events

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8364 No opposition during term of opposition