DE69329346D1 - Vorrichtung und verfahren zur detektion und diskrimination von oberflächenfehlern - Google Patents
Vorrichtung und verfahren zur detektion und diskrimination von oberflächenfehlernInfo
- Publication number
- DE69329346D1 DE69329346D1 DE69329346T DE69329346T DE69329346D1 DE 69329346 D1 DE69329346 D1 DE 69329346D1 DE 69329346 T DE69329346 T DE 69329346T DE 69329346 T DE69329346 T DE 69329346T DE 69329346 D1 DE69329346 D1 DE 69329346D1
- Authority
- DE
- Germany
- Prior art keywords
- detecting
- surface defects
- discriminating surface
- discriminating
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N2021/8924—Dents; Relief flaws
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/981,745 US5389794A (en) | 1992-11-25 | 1992-11-25 | Surface pit and mound detection and discrimination system and method |
PCT/US1993/011448 WO1994012868A1 (en) | 1992-11-25 | 1993-11-23 | Surface pit and mound detection and discrimination system and method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69329346D1 true DE69329346D1 (de) | 2000-10-05 |
DE69329346T2 DE69329346T2 (de) | 2001-03-01 |
Family
ID=25528621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69329346T Expired - Lifetime DE69329346T2 (de) | 1992-11-25 | 1993-11-23 | Vorrichtung und verfahren zur detektion und diskrimination von oberflächenfehlern |
Country Status (5)
Country | Link |
---|---|
US (1) | US5389794A (de) |
EP (1) | EP0670997B1 (de) |
JP (1) | JPH07509785A (de) |
DE (1) | DE69329346T2 (de) |
WO (1) | WO1994012868A1 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5471066A (en) * | 1993-08-26 | 1995-11-28 | Nikon Corporation | Defect inspection apparatus of rotary type |
US6271916B1 (en) | 1994-03-24 | 2001-08-07 | Kla-Tencor Corporation | Process and assembly for non-destructive surface inspections |
US6118525A (en) | 1995-03-06 | 2000-09-12 | Ade Optical Systems Corporation | Wafer inspection system for distinguishing pits and particles |
US5625193A (en) * | 1995-07-10 | 1997-04-29 | Qc Optics, Inc. | Optical inspection system and method for detecting flaws on a diffractive surface |
WO1997026529A1 (en) * | 1996-01-19 | 1997-07-24 | Phase Metrics | Surface inspection apparatus and method |
US5898499A (en) * | 1996-01-30 | 1999-04-27 | Seagate Technology, Inc. | Method and apparatus for detecting surface discontinuities based on changes in an optical path length during beam scanning |
US6108093A (en) * | 1997-06-04 | 2000-08-22 | Lsi Logic Corporation | Automated inspection system for residual metal after chemical-mechanical polishing |
US5985679A (en) * | 1997-06-12 | 1999-11-16 | Lsi Logic Corporation | Automated endpoint detection system during chemical-mechanical polishing |
US6201601B1 (en) | 1997-09-19 | 2001-03-13 | Kla-Tencor Corporation | Sample inspection system |
US20040057045A1 (en) * | 2000-12-21 | 2004-03-25 | Mehdi Vaez-Iravani | Sample inspection system |
US6956644B2 (en) | 1997-09-19 | 2005-10-18 | Kla-Tencor Technologies Corporation | Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination |
US6614520B1 (en) | 1997-12-18 | 2003-09-02 | Kla-Tencor Corporation | Method for inspecting a reticle |
JPH11183394A (ja) * | 1997-12-25 | 1999-07-09 | Systemseiko Co Ltd | ディスクの表面検査方法および装置 |
US6169601B1 (en) | 1998-06-23 | 2001-01-02 | Ade Optical Systems | Method and apparatus for distinguishing particles from subsurface defects on a substrate using polarized light |
US6081411A (en) * | 1998-06-29 | 2000-06-27 | International Business Machines Corporation | Thin film disk media using optimum surface orientation to written data tracks |
US20050134841A1 (en) * | 1998-09-18 | 2005-06-23 | Mehdi Vacz-Iravani | Sample inspection system |
US6867406B1 (en) * | 1999-03-23 | 2005-03-15 | Kla-Tencor Corporation | Confocal wafer inspection method and apparatus using fly lens arrangement |
US6486946B1 (en) | 1999-06-15 | 2002-11-26 | Ade Corporation | Method for discriminating between holes in and particles on a film covering a substrate |
US6548821B1 (en) * | 1999-06-21 | 2003-04-15 | Komag, Inc. | Method and apparatus for inspecting substrates |
US6566674B1 (en) * | 1999-06-21 | 2003-05-20 | Komag, Inc. | Method and apparatus for inspecting substrates |
US6266138B1 (en) | 1999-10-12 | 2001-07-24 | Perceptron, Inc. | System and method for detecting defects in a surface of a workpiece |
US6600556B2 (en) * | 2001-01-10 | 2003-07-29 | Hitachi Global Storage Technologies Netherlands, B.V. | System and method for detecting manufacturing marks on sputtered disks |
US6538730B2 (en) * | 2001-04-06 | 2003-03-25 | Kla-Tencor Technologies Corporation | Defect detection system |
US6710868B2 (en) * | 2002-05-22 | 2004-03-23 | Applied Materials, Inc. | Optical inspection system with dual detection heads |
US7116413B2 (en) * | 2002-09-13 | 2006-10-03 | Kla-Tencor Corporation | Inspection system for integrated applications |
US7433031B2 (en) * | 2003-10-29 | 2008-10-07 | Core Tech Optical, Inc. | Defect review system with 2D scanning and a ring detector |
US20050105791A1 (en) * | 2003-10-29 | 2005-05-19 | Lee Ken K. | Surface inspection method |
US7110106B2 (en) * | 2003-10-29 | 2006-09-19 | Coretech Optical, Inc. | Surface inspection system |
WO2006014152A1 (en) * | 2004-07-01 | 2006-02-09 | Midwest Research Institute | Optic probe for semiconductor characterization |
JP4283201B2 (ja) * | 2004-10-14 | 2009-06-24 | 株式会社荏原製作所 | 情報記録媒体検査装置および方法 |
DE102005031490A1 (de) * | 2005-07-04 | 2007-02-01 | Massen Machine Vision Systems Gmbh | Kostengünstige multi-sensorielle Oberflächeninspektion |
US7554656B2 (en) * | 2005-10-06 | 2009-06-30 | Kla-Tencor Technologies Corp. | Methods and systems for inspection of a wafer |
US9719356B2 (en) * | 2013-06-21 | 2017-08-01 | Rolls-Royce Plc | Method of finishing a blade |
US20150355099A1 (en) * | 2014-06-06 | 2015-12-10 | Hamilton Sundstrand Corporation | Scratch verification apparatus and method |
US11493454B2 (en) | 2015-11-13 | 2022-11-08 | Cognex Corporation | System and method for detecting defects on a specular surface with a vision system |
JP6559601B2 (ja) * | 2016-03-23 | 2019-08-14 | 信越半導体株式会社 | 検出装置及び検出方法 |
CN113802618B (zh) * | 2021-08-23 | 2022-10-11 | 浙江工业大学 | 一种坑底隆起监测系统 |
WO2023127152A1 (ja) * | 2021-12-28 | 2023-07-06 | 株式会社ニコン | 光学装置および検査方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4092068A (en) * | 1976-05-05 | 1978-05-30 | Domtar Inc. | Surface sensor |
US4395122A (en) * | 1981-04-29 | 1983-07-26 | Rca Corporation | Defect detection system |
US4412743A (en) * | 1981-09-08 | 1983-11-01 | Discovision Associates | Off-axis light beam defect detector |
US4920385A (en) * | 1984-02-14 | 1990-04-24 | Diffracto Ltd. | Panel surface flaw inspection |
US4794265A (en) * | 1987-05-08 | 1988-12-27 | Qc Optics, Inc. | Surface pit detection system and method |
US4794264A (en) * | 1987-05-08 | 1988-12-27 | Qc Optics, Inc. | Surface defect detection and confirmation system and method |
US4943734A (en) * | 1989-06-30 | 1990-07-24 | Qc Optics, Inc. | Inspection apparatus and method for detecting flaws on a diffractive surface |
DE3941725A1 (de) * | 1989-12-18 | 1991-06-20 | Krupp Atlas Elektronik Gmbh | Vorrichtung zum erkennen von deformationen auf pressteilen |
US5153844A (en) * | 1990-01-23 | 1992-10-06 | E. I. Du Pont De Nemours And Company | Method and apparatus for measuring surface flatness |
US5189481A (en) * | 1991-07-26 | 1993-02-23 | Tencor Instruments | Particle detector for rough surfaces |
-
1992
- 1992-11-25 US US07/981,745 patent/US5389794A/en not_active Expired - Lifetime
-
1993
- 1993-11-23 DE DE69329346T patent/DE69329346T2/de not_active Expired - Lifetime
- 1993-11-23 WO PCT/US1993/011448 patent/WO1994012868A1/en active IP Right Grant
- 1993-11-23 JP JP6513372A patent/JPH07509785A/ja active Pending
- 1993-11-23 EP EP94902393A patent/EP0670997B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5389794A (en) | 1995-02-14 |
JPH07509785A (ja) | 1995-10-26 |
WO1994012868A1 (en) | 1994-06-09 |
DE69329346T2 (de) | 2001-03-01 |
EP0670997A1 (de) | 1995-09-13 |
EP0670997A4 (de) | 1995-11-22 |
EP0670997B1 (de) | 2000-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |