DE69322025T2 - Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf - Google Patents
Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und TintenstrahlkopfInfo
- Publication number
- DE69322025T2 DE69322025T2 DE69322025T DE69322025T DE69322025T2 DE 69322025 T2 DE69322025 T2 DE 69322025T2 DE 69322025 T DE69322025 T DE 69322025T DE 69322025 T DE69322025 T DE 69322025T DE 69322025 T2 DE69322025 T2 DE 69322025T2
- Authority
- DE
- Germany
- Prior art keywords
- ink jet
- jet head
- manufacturing process
- ink
- ion processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 150000002500 ions Chemical class 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23205492A JPH0671891A (ja) | 1992-08-31 | 1992-08-31 | インクジェット記録ヘッド、その製造方法、及び記録装置 |
JP23205692A JPH0671886A (ja) | 1992-08-31 | 1992-08-31 | インクジェット記録ヘッド |
JP23205592A JP3037512B2 (ja) | 1992-08-31 | 1992-08-31 | インクジェット記録ヘッド、その製造方法、及び記録装置 |
JP23205792A JPH0671892A (ja) | 1992-08-31 | 1992-08-31 | インクジェット記録ヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69322025D1 DE69322025D1 (de) | 1998-12-17 |
DE69322025T2 true DE69322025T2 (de) | 1999-06-10 |
Family
ID=27477487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69322025T Expired - Fee Related DE69322025T2 (de) | 1992-08-31 | 1993-08-30 | Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf |
Country Status (4)
Country | Link |
---|---|
US (2) | US5649359A (de) |
EP (1) | EP0585854B1 (de) |
AT (1) | ATE173197T1 (de) |
DE (1) | DE69322025T2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6231165B1 (en) | 1996-05-13 | 2001-05-15 | Canon Kabushiki Kaisha | Inkjet recording head and inkjet apparatus provided with the same |
US6243112B1 (en) | 1996-07-01 | 2001-06-05 | Xerox Corporation | High density remote plasma deposited fluoropolymer films |
DE69725073T2 (de) | 1996-07-31 | 2004-07-08 | Canon K.K. | Aufzeichnungskopf und Aufzeichnungsverfahren |
JPH1044419A (ja) * | 1996-07-31 | 1998-02-17 | Canon Inc | 液体吐出ヘッド、液体吐出ヘッドの製造方法、液体吐出装置、および記録装置 |
US6084612A (en) * | 1996-07-31 | 2000-07-04 | Canon Kabushiki Kaisha | Liquid ejection head, liquid ejection head cartridge, printing apparatus, printing system and fabrication process of liquid ejection head |
JP3094933B2 (ja) * | 1997-01-17 | 2000-10-03 | キヤノン株式会社 | 光加工機及びそれを用いたオリフィスプレートの製造方法 |
US5976392A (en) * | 1997-03-07 | 1999-11-02 | Yageo Corporation | Method for fabrication of thin film resistor |
JP3480235B2 (ja) * | 1997-04-15 | 2003-12-15 | セイコーエプソン株式会社 | インクジェットプリンタヘッドおよびその製造方法 |
US6154234A (en) * | 1998-01-09 | 2000-11-28 | Hewlett-Packard Company | Monolithic ink jet nozzle formed from an oxide and nitride composition |
US6474780B1 (en) * | 1998-04-16 | 2002-11-05 | Canon Kabushiki Kaisha | Liquid discharge head, cartridge having such head, liquid discharge apparatus provided with such cartridge, and method for manufacturing liquid discharge heads |
US6039439A (en) * | 1998-06-19 | 2000-03-21 | Lexmark International, Inc. | Ink jet heater chip module |
US6449831B1 (en) | 1998-06-19 | 2002-09-17 | Lexmark International, Inc | Process for making a heater chip module |
US6513915B1 (en) * | 1998-10-27 | 2003-02-04 | Matsushita Electric Industrial Co., Ltd. | Variable dot ink-jet printer |
US6652069B2 (en) * | 2000-11-22 | 2003-11-25 | Konica Corporation | Method of surface treatment, device of surface treatment, and head for use in ink jet printer |
JP4669138B2 (ja) * | 2001-02-22 | 2011-04-13 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
US7273267B2 (en) * | 2003-09-30 | 2007-09-25 | Fujifilm Corporation | Bubble-eliminating liquid filling method, droplet discharging apparatus, and inkjet recording apparatus |
US7052122B2 (en) * | 2004-02-19 | 2006-05-30 | Dimatix, Inc. | Printhead |
EP1768848B1 (de) * | 2004-06-28 | 2010-07-21 | Canon Kabushiki Kaisha | Verfahren zur herstellung eines flüssigkeitsausgabekopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsausgabekopf |
JP2006142804A (ja) * | 2004-10-19 | 2006-06-08 | Ricoh Co Ltd | 除去部材及び画像記録装置 |
EP2013025B1 (de) * | 2006-04-24 | 2012-08-01 | Canon Kabushiki Kaisha | Tintenstrahlaufzeichnungskopf, tintenstrahlpatrone und herstellungsverfahren für den tintenstrahlaufzeichnungskopf |
JP5350205B2 (ja) * | 2009-12-16 | 2013-11-27 | キヤノン株式会社 | 液体吐出ヘッド用基板及び液体吐出ヘッド、およびその製造方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
US4047184A (en) * | 1976-01-28 | 1977-09-06 | International Business Machines Corporation | Charge electrode array and combination for ink jet printing and method of manufacture |
US4450455A (en) * | 1981-06-18 | 1984-05-22 | Canon Kabushiki Kaisha | Ink jet head |
JPS58220756A (ja) * | 1982-06-18 | 1983-12-22 | Canon Inc | インクジエツト記録ヘツドの製造方法 |
JPS58220754A (ja) * | 1982-06-18 | 1983-12-22 | Canon Inc | インクジエツト記録ヘツド |
US4609427A (en) * | 1982-06-25 | 1986-09-02 | Canon Kabushiki Kaisha | Method for producing ink jet recording head |
JPS5919168A (ja) * | 1982-07-26 | 1984-01-31 | Canon Inc | インクジエツト記録ヘツド |
JPS59123672A (ja) * | 1982-12-28 | 1984-07-17 | Canon Inc | 液体噴射ヘッド及び液体噴射記録装置 |
US4583690A (en) * | 1983-04-05 | 1986-04-22 | Hewlett-Packard Company | Anti-wetting in fluid nozzles |
JPH0643129B2 (ja) * | 1984-03-01 | 1994-06-08 | キヤノン株式会社 | インクジェット記録ヘッド |
US4881318A (en) * | 1984-06-11 | 1989-11-21 | Canon Kabushiki Kaisha | Method of manufacturing a liquid jet recording head |
US4737644A (en) * | 1985-10-30 | 1988-04-12 | International Business Machines Corporation | Conductive coated semiconductor electrostatic deflection plates |
EP0268213B1 (de) * | 1986-11-13 | 1993-09-01 | Canon Kabushiki Kaisha | Verfahren zur Oberflächenbehandlung eines Tintenstrahl-Aufzeichnungskopfes |
US4860033A (en) * | 1987-02-04 | 1989-08-22 | Canon Kabushiki Kaisha | Base plate having an oxidation film and an insulating film for ink jet recording head and ink jet recording head using said base plate |
JP2527774B2 (ja) * | 1987-12-29 | 1996-08-28 | キヤノン株式会社 | インクジェット記録装置 |
JPH02204048A (ja) * | 1989-02-03 | 1990-08-14 | Canon Inc | インクジェット記録ヘッドおよびその製造方法 |
EP0393855B1 (de) * | 1989-03-24 | 1996-06-12 | Canon Kabushiki Kaisha | Verfahren für die Herstellung von Tintenstrahl-Aufzeichnungsköpfen |
US4985710A (en) * | 1989-11-29 | 1991-01-15 | Xerox Corporation | Buttable subunits for pagewidth "Roofshooter" printheads |
US5073785A (en) * | 1990-04-30 | 1991-12-17 | Xerox Corporation | Coating processes for an ink jet printhead |
EP0463866A3 (en) * | 1990-06-27 | 1993-04-28 | Mitsubishi Kasei Corporation | A fiber-reinforced resin composition |
US5136310A (en) * | 1990-09-28 | 1992-08-04 | Xerox Corporation | Thermal ink jet nozzle treatment |
DE69221645T2 (de) * | 1991-01-18 | 1998-01-02 | Canon Kk | Verfahren zur Herstellung eines Farbstrahlaufzeichnungskopfes |
WO1992013719A1 (en) * | 1991-02-04 | 1992-08-20 | Seiko Epson Corporation | Ink flow passage of hydrophilic properties |
JP3264971B2 (ja) * | 1991-03-28 | 2002-03-11 | セイコーエプソン株式会社 | インクジェット記録ヘッドの製造方法 |
-
1993
- 1993-08-30 EP EP93113841A patent/EP0585854B1/de not_active Expired - Lifetime
- 1993-08-30 DE DE69322025T patent/DE69322025T2/de not_active Expired - Fee Related
- 1993-08-30 AT AT93113841T patent/ATE173197T1/de not_active IP Right Cessation
-
1995
- 1995-09-21 US US08/531,903 patent/US5649359A/en not_active Expired - Fee Related
-
1996
- 1996-12-02 US US08/758,466 patent/US5703630A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0585854B1 (de) | 1998-11-11 |
DE69322025D1 (de) | 1998-12-17 |
US5703630A (en) | 1997-12-30 |
ATE173197T1 (de) | 1998-11-15 |
EP0585854A1 (de) | 1994-03-09 |
US5649359A (en) | 1997-07-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |