DE69322025T2 - Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf - Google Patents

Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf

Info

Publication number
DE69322025T2
DE69322025T2 DE69322025T DE69322025T DE69322025T2 DE 69322025 T2 DE69322025 T2 DE 69322025T2 DE 69322025 T DE69322025 T DE 69322025T DE 69322025 T DE69322025 T DE 69322025T DE 69322025 T2 DE69322025 T2 DE 69322025T2
Authority
DE
Germany
Prior art keywords
ink jet
jet head
manufacturing process
ink
ion processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69322025T
Other languages
English (en)
Other versions
DE69322025D1 (de
Inventor
Keiichi Murakami
Tadayoshi Inamoto
Hirokazu Komuro
Hideaki Mashio
Toshio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP23205492A external-priority patent/JPH0671891A/ja
Priority claimed from JP23205692A external-priority patent/JPH0671886A/ja
Priority claimed from JP23205792A external-priority patent/JPH0671892A/ja
Priority claimed from JP23205592A external-priority patent/JP3037512B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69322025D1 publication Critical patent/DE69322025D1/de
Publication of DE69322025T2 publication Critical patent/DE69322025T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
DE69322025T 1992-08-31 1993-08-30 Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf Expired - Fee Related DE69322025T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP23205492A JPH0671891A (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド、その製造方法、及び記録装置
JP23205692A JPH0671886A (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド
JP23205792A JPH0671892A (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド
JP23205592A JP3037512B2 (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド、その製造方法、及び記録装置

Publications (2)

Publication Number Publication Date
DE69322025D1 DE69322025D1 (de) 1998-12-17
DE69322025T2 true DE69322025T2 (de) 1999-06-10

Family

ID=27477487

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69322025T Expired - Fee Related DE69322025T2 (de) 1992-08-31 1993-08-30 Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf

Country Status (4)

Country Link
US (2) US5649359A (de)
EP (1) EP0585854B1 (de)
AT (1) ATE173197T1 (de)
DE (1) DE69322025T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0807522B1 (de) 1996-05-13 2003-07-30 Canon Kabushiki Kaisha Tintenstrahldruckkopf und damit versehene Tintenstrahlvorrichtung
US6243112B1 (en) 1996-07-01 2001-06-05 Xerox Corporation High density remote plasma deposited fluoropolymer films
DE69725073T2 (de) 1996-07-31 2004-07-08 Canon K.K. Aufzeichnungskopf und Aufzeichnungsverfahren
US6084612A (en) * 1996-07-31 2000-07-04 Canon Kabushiki Kaisha Liquid ejection head, liquid ejection head cartridge, printing apparatus, printing system and fabrication process of liquid ejection head
JPH1044419A (ja) * 1996-07-31 1998-02-17 Canon Inc 液体吐出ヘッド、液体吐出ヘッドの製造方法、液体吐出装置、および記録装置
JP3094933B2 (ja) * 1997-01-17 2000-10-03 キヤノン株式会社 光加工機及びそれを用いたオリフィスプレートの製造方法
US5976392A (en) * 1997-03-07 1999-11-02 Yageo Corporation Method for fabrication of thin film resistor
JP3480235B2 (ja) * 1997-04-15 2003-12-15 セイコーエプソン株式会社 インクジェットプリンタヘッドおよびその製造方法
US6154234A (en) * 1998-01-09 2000-11-28 Hewlett-Packard Company Monolithic ink jet nozzle formed from an oxide and nitride composition
US6474780B1 (en) * 1998-04-16 2002-11-05 Canon Kabushiki Kaisha Liquid discharge head, cartridge having such head, liquid discharge apparatus provided with such cartridge, and method for manufacturing liquid discharge heads
US6039439A (en) * 1998-06-19 2000-03-21 Lexmark International, Inc. Ink jet heater chip module
US6449831B1 (en) 1998-06-19 2002-09-17 Lexmark International, Inc Process for making a heater chip module
US6513915B1 (en) * 1998-10-27 2003-02-04 Matsushita Electric Industrial Co., Ltd. Variable dot ink-jet printer
US6652069B2 (en) * 2000-11-22 2003-11-25 Konica Corporation Method of surface treatment, device of surface treatment, and head for use in ink jet printer
JP4669138B2 (ja) * 2001-02-22 2011-04-13 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US7273267B2 (en) * 2003-09-30 2007-09-25 Fujifilm Corporation Bubble-eliminating liquid filling method, droplet discharging apparatus, and inkjet recording apparatus
US7052122B2 (en) * 2004-02-19 2006-05-30 Dimatix, Inc. Printhead
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
JP2006142804A (ja) * 2004-10-19 2006-06-08 Ricoh Co Ltd 除去部材及び画像記録装置
RU2385232C1 (ru) * 2006-04-24 2010-03-27 Кэнон Кабусики Кайся Печатающая головка для струйной печати, картридж для струйной печати и способ изготовления печатающей головки для струйной печати
JP5350205B2 (ja) * 2009-12-16 2013-11-27 キヤノン株式会社 液体吐出ヘッド用基板及び液体吐出ヘッド、およびその製造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921916A (en) * 1974-12-31 1975-11-25 Ibm Nozzles formed in monocrystalline silicon
US4047184A (en) * 1976-01-28 1977-09-06 International Business Machines Corporation Charge electrode array and combination for ink jet printing and method of manufacture
US4450455A (en) * 1981-06-18 1984-05-22 Canon Kabushiki Kaisha Ink jet head
JPS58220754A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツド
JPS58220756A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
JPS5919168A (ja) * 1982-07-26 1984-01-31 Canon Inc インクジエツト記録ヘツド
JPS59123672A (ja) * 1982-12-28 1984-07-17 Canon Inc 液体噴射ヘッド及び液体噴射記録装置
US4583690A (en) * 1983-04-05 1986-04-22 Hewlett-Packard Company Anti-wetting in fluid nozzles
JPH0643129B2 (ja) * 1984-03-01 1994-06-08 キヤノン株式会社 インクジェット記録ヘッド
US4881318A (en) * 1984-06-11 1989-11-21 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording head
US4737644A (en) * 1985-10-30 1988-04-12 International Business Machines Corporation Conductive coated semiconductor electrostatic deflection plates
DE3787254T2 (de) * 1986-11-13 1994-01-05 Canon Kk Verfahren zur Oberflächenbehandlung eines Tintenstrahl-Aufzeichnungskopfes.
US4860033A (en) * 1987-02-04 1989-08-22 Canon Kabushiki Kaisha Base plate having an oxidation film and an insulating film for ink jet recording head and ink jet recording head using said base plate
JP2527774B2 (ja) * 1987-12-29 1996-08-28 キヤノン株式会社 インクジェット記録装置
JPH02204048A (ja) * 1989-02-03 1990-08-14 Canon Inc インクジェット記録ヘッドおよびその製造方法
ES2087890T3 (es) * 1989-03-24 1996-08-01 Canon Kk Proceso para la fabricacion de un cabezal para la impresion por chorros de tinta.
US4985710A (en) * 1989-11-29 1991-01-15 Xerox Corporation Buttable subunits for pagewidth "Roofshooter" printheads
US5073785A (en) * 1990-04-30 1991-12-17 Xerox Corporation Coating processes for an ink jet printhead
EP0463866A3 (en) * 1990-06-27 1993-04-28 Mitsubishi Kasei Corporation A fiber-reinforced resin composition
US5136310A (en) * 1990-09-28 1992-08-04 Xerox Corporation Thermal ink jet nozzle treatment
DE69221645T2 (de) * 1991-01-18 1998-01-02 Canon Kk Verfahren zur Herstellung eines Farbstrahlaufzeichnungskopfes
DE69225440T2 (de) * 1991-02-04 1998-10-01 Seiko Epson Corp Tintenflusskanal mit hydrophilen eigenschaften
JP3264971B2 (ja) * 1991-03-28 2002-03-11 セイコーエプソン株式会社 インクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
US5703630A (en) 1997-12-30
ATE173197T1 (de) 1998-11-15
EP0585854A1 (de) 1994-03-09
EP0585854B1 (de) 1998-11-11
US5649359A (en) 1997-07-22
DE69322025D1 (de) 1998-12-17

Similar Documents

Publication Publication Date Title
DE69322025T2 (de) Tintenstrahlkopfherstellungsverfahren mittels Bearbeitung durch Ionen und Tintenstrahlkopf
CA2025535A1 (en) Ink jet recording head, cartridge and apparatus
CA2079727A1 (en) Ink jet apparatus capable of practicing and improved recovery operation
DE69322812D1 (de) Verfahren zur Herstellung von Flüssigkeitsstrahlaufzeichnungsköpfer
ATE240212T1 (de) Verfahren und vorrichtung für farbstrahldrucker
EP0500068A3 (en) Ink jet recording head, recording apparatus using same and method for manufacturing same
CA2025538A1 (en) Ink jet recording head, cartridge and apparatus
DE3885904D1 (de) Anordnung zur überwachung des tröpfchenausstosses aus austrittsdüsen eines tintenschreibkopfes.
EP0366021A3 (de) Verfahren und Vorrichtung zur Reinigung eines elektrostatischen Sprühkopfes
US4825229A (en) Method and apparatus for ink jet printing
EP0553975A3 (en) Cleaning member used in an ink jet apparatus
DE69004309D1 (de) Düsenanordnung für Farbstrahldrucker und Arbeitsverfahren.
DE69011943D1 (de) Verfahren zur Steuerung des Kopfes in einem Bildaufzeichnungsapparat.
JPS5747669A (en) Ink jet recorder
JPS59220377A (ja) インクジエツト記録装置
JPS57140169A (en) Pressure pulse type ink jet recorder
JPS5787962A (en) Ink jet head
JPS5590371A (en) Ink jet recording head
JPS56146768A (en) Ink jet recording system
JPS5571570A (en) Multinozzle ink jet head
JPS56118870A (en) Plastic head for ink jet printer
JPS57138956A (en) Printing head for ink jet printer

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee