DE69320170D1 - Mikromechanische, verformbare Spiegelvorrichtungen (-DMD-) - Google Patents

Mikromechanische, verformbare Spiegelvorrichtungen (-DMD-)

Info

Publication number
DE69320170D1
DE69320170D1 DE69320170T DE69320170T DE69320170D1 DE 69320170 D1 DE69320170 D1 DE 69320170D1 DE 69320170 T DE69320170 T DE 69320170T DE 69320170 T DE69320170 T DE 69320170T DE 69320170 D1 DE69320170 D1 DE 69320170D1
Authority
DE
Germany
Prior art keywords
micromechanical
dmd
deformable mirror
mirror devices
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69320170T
Other languages
English (en)
Other versions
DE69320170T2 (de
Inventor
Larry J Van Hornbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Priority claimed from EP93103749A external-priority patent/EP0615147B1/de
Application granted granted Critical
Publication of DE69320170D1 publication Critical patent/DE69320170D1/de
Publication of DE69320170T2 publication Critical patent/DE69320170T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/112—Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
DE69320170T 1993-03-09 1993-03-09 Mikromechanische, verformbare Spiegelvorrichtungen (-DMD-) Expired - Fee Related DE69320170T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP93103749A EP0615147B1 (de) 1992-01-16 1993-03-09 Mikromechanische, verformbare Spiegelvorrichtungen (-DMD-)

Publications (2)

Publication Number Publication Date
DE69320170D1 true DE69320170D1 (de) 1998-09-10
DE69320170T2 DE69320170T2 (de) 1999-03-18

Family

ID=8212674

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320170T Expired - Fee Related DE69320170T2 (de) 1993-03-09 1993-03-09 Mikromechanische, verformbare Spiegelvorrichtungen (-DMD-)

Country Status (2)

Country Link
US (2) US5331454A (de)
DE (1) DE69320170T2 (de)

Families Citing this family (289)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5602671A (en) * 1990-11-13 1997-02-11 Texas Instruments Incorporated Low surface energy passivation layer for micromechanical devices
GB9113350D0 (en) * 1991-06-20 1991-08-07 Thomas Thomas Ronald Asymmetric/anisotropic fluoropolymer membrane manufacture
US5773098A (en) * 1991-06-20 1998-06-30 British Technology Group, Ltd. Applying a fluoropolymer film to a body
US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5412186A (en) * 1994-02-23 1995-05-02 Texas Instruments Incorporated Elimination of sticking of micro-mechanical devices
US5444566A (en) * 1994-03-07 1995-08-22 Texas Instruments Incorporated Optimized electronic operation of digital micromirror devices
US5576878A (en) * 1994-03-30 1996-11-19 Texas Instruments Incorporated Use of incompatible materials to eliminate sticking of micro-mechanical devices
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7138984B1 (en) 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US6680792B2 (en) 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US5512374A (en) * 1994-05-09 1996-04-30 Texas Instruments Incorporated PFPE coatings for micro-mechanical devices
US5523878A (en) * 1994-06-30 1996-06-04 Texas Instruments Incorporated Self-assembled monolayer coating for micro-mechanical devices
US5597767A (en) * 1995-01-06 1997-01-28 Texas Instruments Incorporated Separation of wafer into die with wafer-level processing
US5579151A (en) * 1995-02-17 1996-11-26 Texas Instruments Incorporated Spatial light modulator
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
JPH08330266A (ja) * 1995-05-31 1996-12-13 Texas Instr Inc <Ti> 半導体装置等の表面を浄化し、処理する方法
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US5757536A (en) * 1995-08-30 1998-05-26 Sandia Corporation Electrically-programmable diffraction grating
JP3512963B2 (ja) * 1995-12-15 2004-03-31 テキサス インスツルメンツ インコーポレイテツド マイクロメカニカルデバイス
US6011631A (en) * 1996-01-31 2000-01-04 Texas Instruments Incorporated Uniform exposure of photosensitive medium by square intensity profiles for printing
US6624944B1 (en) 1996-03-29 2003-09-23 Texas Instruments Incorporated Fluorinated coating for an optical element
US5939785A (en) * 1996-04-12 1999-08-17 Texas Instruments Incorporated Micromechanical device including time-release passivant
US6686291B1 (en) 1996-05-24 2004-02-03 Texas Instruments Incorporated Undercut process with isotropic plasma etching at package level
US5945898A (en) * 1996-05-31 1999-08-31 The Regents Of The University Of California Magnetic microactuator
US6055091A (en) * 1996-06-27 2000-04-25 Xerox Corporation Twisting-cylinder display
US5754332A (en) * 1996-06-27 1998-05-19 Xerox Corporation Monolayer gyricon display
US5825529A (en) * 1996-06-27 1998-10-20 Xerox Corporation Gyricon display with no elastomer substrate
US6044056A (en) 1996-07-30 2000-03-28 Seagate Technology, Inc. Flying optical head with dynamic mirror
US6061323A (en) * 1996-07-30 2000-05-09 Seagate Technology, Inc. Data storage system having an improved surface micro-machined mirror
US6850475B1 (en) 1996-07-30 2005-02-01 Seagate Technology, Llc Single frequency laser source for optical data storage system
US5922268A (en) * 1997-10-30 1999-07-13 Xerox Corporation Method of manufacturing a twisting cylinder display using multiple chromatic values
US5894367A (en) * 1996-09-13 1999-04-13 Xerox Corporation Twisting cylinder display using multiple chromatic values
US5904790A (en) * 1997-10-30 1999-05-18 Xerox Corporation Method of manufacturing a twisting cylinder display using multiple chromatic values
US6025951A (en) * 1996-11-27 2000-02-15 National Optics Institute Light modulating microdevice and method
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
KR100505514B1 (ko) * 1996-12-20 2005-10-19 세이코 엡슨 가부시키가이샤 정전형액추에이터및그제조방법
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US6076256A (en) * 1997-04-18 2000-06-20 Seagate Technology, Inc. Method for manufacturing magneto-optical data storage system
US6114044A (en) * 1997-05-30 2000-09-05 Regents Of The University Of California Method of drying passivated micromachines by dewetting from a liquid-based process
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
JPH11144401A (ja) 1997-11-13 1999-05-28 Teac Corp 記録媒体記録再生装置
US6072545A (en) * 1998-01-07 2000-06-06 Gribschaw; Franklin C. Video image rotating apparatus
US5976428A (en) * 1998-01-09 1999-11-02 Xerox Corporation Method and apparatus for controlling formation of two-color balls for a twisting ball display
US5900192A (en) * 1998-01-09 1999-05-04 Xerox Corporation Method and apparatus for fabricating very small two-color balls for a twisting ball display
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US5910856A (en) * 1998-04-16 1999-06-08 Eastman Kodak Company Integrated hybrid silicon-based micro-reflector
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6004912A (en) * 1998-06-05 1999-12-21 Silicon Light Machines Vapor phase low molecular weight lubricants
US6200882B1 (en) 1998-06-10 2001-03-13 Seagate Technology, Inc. Method for processing a plurality of micro-machined mirror assemblies
US6046966A (en) * 1998-06-10 2000-04-04 Seagate Technology, Inc. Magneto-optical data storage system
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6358771B1 (en) * 1998-07-02 2002-03-19 Analog Devices, Inc. Low oxygen assembly of glass sealed packages
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6348908B1 (en) 1998-09-15 2002-02-19 Xerox Corporation Ambient energy powered display
US6365229B1 (en) * 1998-09-30 2002-04-02 Texas Instruments Incorporated Surface treatment material deposition and recapture
US6259551B1 (en) 1998-09-30 2001-07-10 Texas Instruments Incorporated Passivation for micromechanical devices
US6843936B1 (en) 1998-10-22 2005-01-18 Texas Instruments Incorporated Getter for enhanced micromechanical device performance
US6300294B1 (en) 1998-11-16 2001-10-09 Texas Instruments Incorporated Lubricant delivery for micromechanical devices
US6266178B1 (en) 1998-12-28 2001-07-24 Texas Instruments Incorporated Guardring DRAM cell
US6195301B1 (en) 1998-12-30 2001-02-27 Texas Instruments Incorporated Feedback driver for memory array bitline
US6191883B1 (en) 1998-12-30 2001-02-20 Texas Instruments Incorporated Five transistor SRAM cell for small micromirror elements
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6440252B1 (en) 1999-12-17 2002-08-27 Xerox Corporation Method for rotatable element assembly
US7026710B2 (en) 2000-01-21 2006-04-11 Texas Instruments Incorporated Molded package for micromechanical devices and method of fabrication
US6489178B2 (en) 2000-01-26 2002-12-03 Texas Instruments Incorporated Method of fabricating a molded package for micromechanical devices
WO2001057920A1 (en) * 2000-02-01 2001-08-09 Analog Devices, Inc. Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
AU2001236992A1 (en) * 2000-02-11 2001-08-20 Zygo Corporation Stiction release mechanism
US6545671B1 (en) 2000-03-02 2003-04-08 Xerox Corporation Rotating element sheet material with reversible highlighting
US6498674B1 (en) 2000-04-14 2002-12-24 Xerox Corporation Rotating element sheet material with generalized containment structure
US6504525B1 (en) 2000-05-03 2003-01-07 Xerox Corporation Rotating element sheet material with microstructured substrate and method of use
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
US6664779B2 (en) 2000-11-16 2003-12-16 Texas Instruments Incorporated Package with environmental control material carrier
US6524500B2 (en) 2000-12-28 2003-02-25 Xerox Corporation Method for making microencapsulated gyricon beads
US6690350B2 (en) 2001-01-11 2004-02-10 Xerox Corporation Rotating element sheet material with dual vector field addressing
US6387723B1 (en) 2001-01-19 2002-05-14 Silicon Light Machines Reduced surface charging in silicon-based devices
US6859577B2 (en) * 2001-06-25 2005-02-22 Analog Devices Inc. Self assembled micro anti-stiction structure
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6646778B2 (en) 2001-08-01 2003-11-11 Silicon Light Machines Grating light valve with encapsulated dampening gas
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
JP3750574B2 (ja) * 2001-08-16 2006-03-01 株式会社デンソー 薄膜電磁石およびこれを用いたスイッチング素子
JP2003090969A (ja) * 2001-09-17 2003-03-28 Olympus Optical Co Ltd 可変形状シリンダミラー
US20030064149A1 (en) * 2001-09-28 2003-04-03 Miller Seth A. Methods of applying coatings to micro electromechanical devices using a carbon dioxide carrier solvent
US6699570B2 (en) 2001-11-06 2004-03-02 Xerox Corporation Colored cyber toner using multicolored gyricon spheres
DE10163506A1 (de) * 2001-12-21 2003-07-10 Infineon Technologies Ag Verfahren und Vorrichtung zur Herstellung eines Bauelements mit einer beweglichen Struktur
US6921680B2 (en) 2001-12-31 2005-07-26 Texas Instruments Incorporated Method and apparatus for MEMS device nebulizer lubrication system
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
JP4025990B2 (ja) * 2002-09-26 2007-12-26 セイコーエプソン株式会社 ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
US7638167B2 (en) 2004-06-04 2009-12-29 Applied Microstructures, Inc. Controlled deposition of silicon-containing coatings adhered by an oxide layer
US20050271893A1 (en) * 2004-06-04 2005-12-08 Applied Microstructures, Inc. Controlled vapor deposition of multilayered coatings adhered by an oxide layer
TWI251712B (en) * 2003-08-15 2006-03-21 Prime View Int Corp Ltd Interference display plate
TW593127B (en) * 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US7307777B2 (en) * 2003-10-23 2007-12-11 Spatial Photonics, Inc. High-resolution spatial light modulation
EP1704424B1 (de) * 2003-10-27 2016-12-07 Spatial Photonics, Inc. Kontraststarker räumlicher lichtmodulator und verfahren
US7471440B2 (en) * 2003-10-27 2008-12-30 Spatial Photonics, Inc. Fabricating micro devices using sacrificial materials
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US20050106774A1 (en) * 2003-11-13 2005-05-19 Dmitri Simonian Surface processes in fabrications of microstructures
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7514012B2 (en) * 2004-01-27 2009-04-07 Texas Instruments Incorporated Pre-oxidization of deformable elements of microstructures
US7532194B2 (en) 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
US6979893B2 (en) * 2004-03-26 2005-12-27 Reflectivity, Inc Packaged microelectromechanical device with lubricant
US20050212067A1 (en) * 2004-03-26 2005-09-29 Robert Duboc Microelectromechanical devices with lubricants and getters formed thereon
US7034982B2 (en) * 2004-04-13 2006-04-25 Reflectivity, Inc Method of improving the performance of microstructures
CA2464207C (en) * 2004-04-14 2011-03-29 Institut National D'optique Light modulating microdevice
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7060895B2 (en) 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
EP1751325A4 (de) * 2004-06-04 2009-05-13 Applied Microstructures Inc Kontrollierte dampfabscheidung von mehrschichtigen überzügen, die über eine oxidschicht haften
US7695775B2 (en) * 2004-06-04 2010-04-13 Applied Microstructures, Inc. Controlled vapor deposition of biocompatible coatings over surface-treated substrates
US7879396B2 (en) * 2004-06-04 2011-02-01 Applied Microstructures, Inc. High aspect ratio performance coatings for biological microfluidics
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
EP2246726B1 (de) 2004-07-29 2013-04-03 QUALCOMM MEMS Technologies, Inc. System und Verfahren zum mikroelektromechanischen Betrieb eines interferometrischen Modulators
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7623142B2 (en) * 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
US7602375B2 (en) 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7299681B2 (en) 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7184202B2 (en) * 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7916103B2 (en) * 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
TW200628833A (en) 2004-09-27 2006-08-16 Idc Llc Method and device for multistate interferometric light modulation
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7369294B2 (en) 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7573547B2 (en) * 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US7460246B2 (en) 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7420728B2 (en) 2004-09-27 2008-09-02 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7446926B2 (en) * 2004-09-27 2008-11-04 Idc, Llc System and method of providing a regenerating protective coating in a MEMS device
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7259449B2 (en) 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7368803B2 (en) 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7415186B2 (en) 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
TW200628877A (en) 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
KR20080027236A (ko) 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
CA2507177C (en) * 2005-05-13 2012-04-24 Institut National D'optique Image projector with flexible reflective analog modulator
US7927423B1 (en) 2005-05-25 2011-04-19 Abbott Kenneth A Vapor deposition of anti-stiction layer for micromechanical devices
JP2009503564A (ja) 2005-07-22 2009-01-29 クアルコム，インコーポレイテッド Ｍｅｍｓデバイスのための支持構造、およびその方法
US7423798B2 (en) * 2005-08-16 2008-09-09 Spatial Photonics, Inc. Addressing circuit and method for bi-directional micro-mirror array
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US7471439B2 (en) * 2005-11-23 2008-12-30 Miradia, Inc. Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
US7580174B2 (en) * 2005-11-23 2009-08-25 Miradia, Inc. Anti-stiction gas-phase lubricant for micromechanical systems
US7463404B2 (en) * 2005-11-23 2008-12-09 Miradia, Inc. Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7723812B2 (en) * 2005-11-23 2010-05-25 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US7616370B2 (en) * 2005-11-23 2009-11-10 Miradia, Inc. Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7636151B2 (en) 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
WO2007120887A2 (en) * 2006-04-13 2007-10-25 Qualcomm Mems Technologies, Inc Packaging a mems device using a frame
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7527996B2 (en) 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7417784B2 (en) * 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7405863B2 (en) 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7385744B2 (en) 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7388704B2 (en) 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US8096665B2 (en) * 2006-10-11 2012-01-17 Miradia, Inc. Spatially offset multi-imager-panel architecture for projecting an image
US7508569B2 (en) * 2006-11-08 2009-03-24 Spatial Photonics, Inc. Low voltage micro mechanical device
US20080116554A1 (en) * 2006-11-21 2008-05-22 Spatial Photonics, Inc. Packaging micro devices
US7791708B2 (en) * 2006-12-27 2010-09-07 Asml Netherlands B.V. Lithographic apparatus, substrate table, and method for enhancing substrate release properties
US8436453B2 (en) * 2006-12-28 2013-05-07 Texas Instruments Incorporated Micromechanical device lubrication
US20100068489A1 (en) * 2007-02-23 2010-03-18 Applied Microstructures, Inc. Wear-resistant, carbon-doped metal oxide coatings for MEMS and nanoimprint lithography
US8900695B2 (en) * 2007-02-23 2014-12-02 Applied Microstructures, Inc. Durable conformal wear-resistant carbon-doped metal oxide-comprising coating
EP2129619A2 (de) * 2007-04-04 2009-12-09 Qualcomm Mems Technologies, Inc. Beseitigung von freisetzungsätzangriffen durch schnittstellenmodifikation in opferschichten
US8134772B2 (en) * 2007-05-03 2012-03-13 Silicon Quest Kabushiki-Kaisha Mirror device with an anti-stiction layer
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7738158B2 (en) * 2007-06-29 2010-06-15 Qualcomm Mems Technologies, Inc. Electromechanical device treatment with water vapor
US20090109515A1 (en) * 2007-10-30 2009-04-30 Spatial Photonics, Inc. Encapsulated spatial light modulator having large active area
US7851239B2 (en) * 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US20090323170A1 (en) * 2008-06-30 2009-12-31 Qualcomm Mems Technologies, Inc. Groove on cover plate or substrate
US8120155B2 (en) * 2008-07-31 2012-02-21 Texas Instruments Incorporated Reduced stiction and mechanical memory in MEMS devices
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US20100291410A1 (en) * 2009-05-13 2010-11-18 Spatial Photonics, Inc. Corrosion Protection and Lubrication of MEMS Devices
US8379392B2 (en) 2009-10-23 2013-02-19 Qualcomm Mems Technologies, Inc. Light-based sealing and device packaging
JP2013524287A (ja) 2010-04-09 2013-06-17 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 電気機械デバイスの機械層及びその形成方法
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
GB201622220D0 (en) 2016-12-23 2017-02-08 Barco Nv Cooling system for spatial light modulating devices
CN111108438B (zh) 2017-07-28 2022-02-08 巴科股份有限公司 具有冷却部的空间光调制装置
EP4332052A1 (de) * 2022-08-31 2024-03-06 Infineon Technologies AG Verkapselte mems-vorrichtung und verfahren zum herstellen der mems-vorrichtung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method

Also Published As

Publication number Publication date
US5331454A (en) 1994-07-19
DE69320170T2 (de) 1999-03-18
US5411769A (en) 1995-05-02

Similar Documents

Publication Publication Date Title
DE69320170T2 (de) Mikromechanische, verformbare Spiegelvorrichtungen (-DMD-)
DE69720663T2 (de) Mikromechanische Geräte
DE69508160D1 (de) Verbesserte mikromechanische Geräte
DE69524816T2 (de) Verbesserte mikromechanische Geräte
DE69633682D1 (de) Mikromechanischer Kondensator
DE59607318D1 (de) Mikromechanisches bauelement
FI931278A0 (fi) Polymerer, som innehaoller sulfogrupper
FI933022A0 (fi) Radiosystem som bildar en traodloes lokalslinga
FR2688321B1 (fr) Miroir deformable.
FR2684191B1 (fr) Miroir deformable.
FI934715A0 (fi) Optiskt strukturelement, som baserar sig pao langmuir-blodgett-folier
DE4497055D2 (de) Hohlspiegel
ITMI940440A0 (it) Specchio deformabile
FR2736165B1 (fr) Telescope satellise
DK33393D0 (da) Laserapparat
DE9308365U1 (de) Kosmetikspiegel
FI933315A0 (fi) Anordning som underlaettar plockning av jordgubbar
FI932312A0 (fi) Anordning som underlaettar borstning av taender
FI810U1 (fi) Staell som underlaettar mattvaett
FI934401A0 (fi) Lufttillfoerselsystem som hindrar milfoerbraenning
FI931598A0 (fi) Spelbraede foer som bokstavplattor formade spelbrickor
NO951071D0 (no) Speil
FIU950183U0 (fi) Faerdiggraeddad matsporation avsedd att foertaeras som engaongsportion
FI933314A0 (fi) Foerfarande foer framstaellning av fiberspaon som raomaterial till en starkpapperssort
KR950021997U (ko) 미러고정장치

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee