DE69318932T2 - Verfahren zur selektiven Überwachung von Spurenbestandteilen in Plattierungsbädern - Google Patents
Verfahren zur selektiven Überwachung von Spurenbestandteilen in PlattierungsbädernInfo
- Publication number
- DE69318932T2 DE69318932T2 DE69318932T DE69318932T DE69318932T2 DE 69318932 T2 DE69318932 T2 DE 69318932T2 DE 69318932 T DE69318932 T DE 69318932T DE 69318932 T DE69318932 T DE 69318932T DE 69318932 T2 DE69318932 T2 DE 69318932T2
- Authority
- DE
- Germany
- Prior art keywords
- plating baths
- trace components
- selective monitoring
- selective
- monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/42—Measuring deposition or liberation of materials from an electrolyte; Coulometry, i.e. measuring coulomb-equivalent of material in an electrolyte
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/976,118 US5298129A (en) | 1992-11-13 | 1992-11-13 | Method of selectively monitoring trace constituents in plating baths |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69318932D1 DE69318932D1 (de) | 1998-07-09 |
DE69318932T2 true DE69318932T2 (de) | 1999-02-11 |
Family
ID=25523738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69318932T Expired - Fee Related DE69318932T2 (de) | 1992-11-13 | 1993-11-11 | Verfahren zur selektiven Überwachung von Spurenbestandteilen in Plattierungsbädern |
Country Status (4)
Country | Link |
---|---|
US (1) | US5298129A (de) |
EP (1) | EP0597474B1 (de) |
JP (1) | JP2935947B2 (de) |
DE (1) | DE69318932T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2087801C (en) * | 1993-01-21 | 1996-08-13 | Noranda Ipco Inc. | Method and apparatus for on-line monitoring the quality of a purified metal sulphate solution |
GB9318677D0 (en) * | 1993-09-09 | 1993-10-27 | Kodak Ltd | Method and apparatus for measuring silver ion activity |
US5676820A (en) * | 1995-02-03 | 1997-10-14 | New Mexico State University Technology Transfer Corp. | Remote electrochemical sensor |
US5942103A (en) * | 1995-02-03 | 1999-08-24 | New Mexico State University Technology Transfer Corporation | Renewable-reagent electrochemical sensor |
US6063259A (en) * | 1996-06-11 | 2000-05-16 | New Mexico State University Technology Transfer Corporation | Microfabricated thick-film electrochemical sensor for nucleic acid determination |
US6269533B2 (en) * | 1999-02-23 | 2001-08-07 | Advanced Research Corporation | Method of making a patterned magnetic recording head |
US6264806B1 (en) | 1999-10-07 | 2001-07-24 | Technic Inc. | Plating fluid replenishment system and method |
US6496328B1 (en) | 1999-12-30 | 2002-12-17 | Advanced Research Corporation | Low inductance, ferrite sub-gap substrate structure for surface film magnetic recording heads |
EP1203950B1 (de) * | 2000-11-02 | 2005-09-07 | Shipley Company LLC | Plattierungsbadanalyse |
DE10102019A1 (de) | 2001-01-18 | 2002-07-25 | Clariant Gmbh | Pulverförmige Pigmentpräparationen zur Einfärbung von Folien |
US20030127334A1 (en) * | 2002-01-08 | 2003-07-10 | Applied Materials, Inc. | Method for determining a concentration of conductive species in an aqueous system |
EP1540046A4 (de) * | 2002-07-19 | 2007-04-04 | Technic | Verfahren und vorrichtung zur echtzeit berwachung von technischen elektrolyten |
US6986835B2 (en) * | 2002-11-04 | 2006-01-17 | Applied Materials Inc. | Apparatus for plating solution analysis |
JP2004323971A (ja) | 2003-04-25 | 2004-11-18 | Rohm & Haas Electronic Materials Llc | 改良された浴分析 |
US7851222B2 (en) * | 2005-07-26 | 2010-12-14 | Applied Materials, Inc. | System and methods for measuring chemical concentrations of a plating solution |
US9783908B2 (en) | 2012-10-23 | 2017-10-10 | Moses Lake Industries, Inc. | Plating bath metrology |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH659327A5 (en) * | 1982-11-23 | 1987-01-15 | Inst Elektrokhimii Akademii Na | Method and apparatus for determining the organic carbon content of water or of an aqueous solution |
FI70648C (fi) * | 1983-12-29 | 1986-09-24 | Outokumpu Oy | Voltametriskt maetningsfoerfarande och anordning foer dess tillaempning |
FR2566535B1 (fr) * | 1984-06-22 | 1986-09-12 | Elf Aquitaine | Procede pour la determination et l'ajustement de la concentration des brillanteurs dans les bains de cuivrage, ainsi que dispositif pour la mise en oeuvre de ce procede, notamment pour application a l'industrie des circuits imprimes |
-
1992
- 1992-11-13 US US07/976,118 patent/US5298129A/en not_active Expired - Fee Related
-
1993
- 1993-11-11 DE DE69318932T patent/DE69318932T2/de not_active Expired - Fee Related
- 1993-11-11 EP EP93118295A patent/EP0597474B1/de not_active Expired - Lifetime
- 1993-11-15 JP JP5285278A patent/JP2935947B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5298129A (en) | 1994-03-29 |
JPH06213868A (ja) | 1994-08-05 |
DE69318932D1 (de) | 1998-07-09 |
EP0597474A1 (de) | 1994-05-18 |
EP0597474B1 (de) | 1998-06-03 |
JP2935947B2 (ja) | 1999-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |