DE69318577D1 - Kompositionen und verfahren zum polieren und egalisieren von oberflächen - Google Patents

Kompositionen und verfahren zum polieren und egalisieren von oberflächen

Info

Publication number
DE69318577D1
DE69318577D1 DE69318577T DE69318577T DE69318577D1 DE 69318577 D1 DE69318577 D1 DE 69318577D1 DE 69318577 T DE69318577 T DE 69318577T DE 69318577 T DE69318577 T DE 69318577T DE 69318577 D1 DE69318577 D1 DE 69318577D1
Authority
DE
Germany
Prior art keywords
methods
polishing
compositions
percent
equalizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69318577T
Other languages
English (en)
Other versions
DE69318577T2 (de
Inventor
Gregory Brancaleoni
Elmer Jensen
John Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rodel Inc
Original Assignee
Rodel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25364263&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69318577(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rodel Inc filed Critical Rodel Inc
Publication of DE69318577D1 publication Critical patent/DE69318577D1/de
Application granted granted Critical
Publication of DE69318577T2 publication Critical patent/DE69318577T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09GPOLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00Polishing compositions
    • C09G1/02Polishing compositions containing abrasives or grinding agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/346Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised during polishing, or grinding operation
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
DE69318577T 1992-04-27 1993-01-05 Kompositionen und verfahren zum polieren und egalisieren von oberflächen Expired - Fee Related DE69318577T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/874,654 US5264010A (en) 1992-04-27 1992-04-27 Compositions and methods for polishing and planarizing surfaces
PCT/US1993/000046 WO1993022103A1 (en) 1992-04-27 1993-01-05 Compositions and methods for polishing and planarizing surfaces

Publications (2)

Publication Number Publication Date
DE69318577D1 true DE69318577D1 (de) 1998-06-18
DE69318577T2 DE69318577T2 (de) 1998-11-12

Family

ID=25364263

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318577T Expired - Fee Related DE69318577T2 (de) 1992-04-27 1993-01-05 Kompositionen und verfahren zum polieren und egalisieren von oberflächen

Country Status (12)

Country Link
US (1) US5264010A (de)
EP (1) EP0690772B1 (de)
JP (1) JP2592401B2 (de)
KR (1) KR950701264A (de)
CN (2) CN1052502C (de)
AT (1) ATE166018T1 (de)
AU (1) AU3432693A (de)
DE (1) DE69318577T2 (de)
MY (1) MY108954A (de)
SG (1) SG43334A1 (de)
TW (1) TW226403B (de)
WO (1) WO1993022103A1 (de)

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US4588421A (en) * 1984-10-15 1986-05-13 Nalco Chemical Company Aqueous silica compositions for polishing silicon wafers
DD241083B1 (de) * 1985-09-17 1989-02-22 Univ Schiller Jena Poliermittelmischungen mit ceroxid zum polieren von werkstoffen
JPH0643600B2 (ja) * 1986-01-24 1994-06-08 ダイセル化学工業株式会社 分散安定性の優れた液状クレンザ−組成物
FR2604443A1 (fr) * 1986-09-26 1988-04-01 Rhone Poulenc Chimie Composition de polissage a base de cerium destinee au polissage des verres organiques
JPS63114866A (ja) * 1986-10-31 1988-05-19 Hoya Corp ガラスの加工方法
FR2624519A1 (fr) * 1987-12-09 1989-06-16 Rhone Poulenc Chimie Composition de polissage perfectionnee a base de cerium et son procede de preparation
US4954142A (en) * 1989-03-07 1990-09-04 International Business Machines Corporation Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
US4959113C1 (en) * 1989-07-31 2001-03-13 Rodel Inc Method and composition for polishing metal surfaces

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EP0690772B1 (de) 1998-05-13
WO1993022103A1 (en) 1993-11-11
ATE166018T1 (de) 1998-05-15
JPH07502778A (ja) 1995-03-23
KR950701264A (ko) 1995-03-23
CN1243857A (zh) 2000-02-09
SG43334A1 (en) 1997-10-17
US5264010A (en) 1993-11-23
CN1077974A (zh) 1993-11-03
TW226403B (de) 1994-07-11
JP2592401B2 (ja) 1997-03-19
AU3432693A (en) 1993-11-29
CN1052502C (zh) 2000-05-17
EP0690772A1 (de) 1996-01-10
EP0690772A4 (de) 1995-06-01
MY108954A (en) 1996-11-30
DE69318577T2 (de) 1998-11-12

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