DE69317857D1 - Linearisierungs- und Eichungssystem für einen Abtastungsapparat - Google Patents

Linearisierungs- und Eichungssystem für einen Abtastungsapparat

Info

Publication number
DE69317857D1
DE69317857D1 DE69317857T DE69317857T DE69317857D1 DE 69317857 D1 DE69317857 D1 DE 69317857D1 DE 69317857 T DE69317857 T DE 69317857T DE 69317857 T DE69317857 T DE 69317857T DE 69317857 D1 DE69317857 D1 DE 69317857D1
Authority
DE
Germany
Prior art keywords
linearization
scanning device
calibration system
calibration
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69317857T
Other languages
English (en)
Other versions
DE69317857T2 (de
Inventor
Marc Robert Schuman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topometrix
Original Assignee
Topometrix
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topometrix filed Critical Topometrix
Publication of DE69317857D1 publication Critical patent/DE69317857D1/de
Application granted granted Critical
Publication of DE69317857T2 publication Critical patent/DE69317857T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
DE69317857T 1992-11-20 1993-11-22 Linearisierungs- und Eichungssystem für einen Abtastungsapparat Expired - Fee Related DE69317857T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97976292A 1992-11-20 1992-11-20

Publications (2)

Publication Number Publication Date
DE69317857D1 true DE69317857D1 (de) 1998-05-14
DE69317857T2 DE69317857T2 (de) 1998-08-06

Family

ID=25527141

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69317857T Expired - Fee Related DE69317857T2 (de) 1992-11-20 1993-11-22 Linearisierungs- und Eichungssystem für einen Abtastungsapparat

Country Status (3)

Country Link
US (2) US5469734A (de)
EP (1) EP0599582B1 (de)
DE (1) DE69317857T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5448399A (en) 1992-03-13 1995-09-05 Park Scientific Instruments Optical system for scanning microscope
US5729015A (en) * 1995-01-30 1998-03-17 Olympus Optical Co., Ltd. Position control system for scanning probe microscope
US5861549A (en) * 1996-12-10 1999-01-19 Xros, Inc. Integrated Silicon profilometer and AFM head
US5627371A (en) * 1996-02-09 1997-05-06 Lucent Technologies Inc. Tilting positioner for a micropositioning device
US5825670A (en) * 1996-03-04 1998-10-20 Advanced Surface Microscopy High precison calibration and feature measurement system for a scanning probe microscope
US5644512A (en) * 1996-03-04 1997-07-01 Advanced Surface Microscopy, Inc. High precision calibration and feature measurement system for a scanning probe microscope
US5909323A (en) * 1996-07-29 1999-06-01 Agfa Corporation Beam alignment correction element assembly
US6200022B1 (en) * 1997-04-21 2001-03-13 Ta Instruments, Inc. Method and apparatus for localized dynamic mechano-thermal analysis with scanning probe microscopy
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
US6461040B1 (en) * 1998-11-12 2002-10-08 Koninklijke Philips Electronics N.V. Apparatus and method to correct for position errors in diagnostic imaging
DE19902413C1 (de) * 1999-01-22 2000-05-31 Daimler Chrysler Ag Verfahren zur Kalibrierung eines piezoelektrischen Stellantriebes
SE520097C2 (sv) * 2000-12-05 2003-05-27 Nanofactory Instruments Ab Mikropositioneringsanordning
US6955078B2 (en) * 2001-03-30 2005-10-18 Xidex Corporation Caliper method, system, and apparatus
JP4551071B2 (ja) * 2003-09-19 2010-09-22 オリンパス株式会社 顕微鏡用電動ステージ制御システム、該制御装置、及び該制御方法
US7041963B2 (en) * 2003-11-26 2006-05-09 Massachusetts Institute Of Technology Height calibration of scanning probe microscope actuators
JP4546108B2 (ja) * 2004-02-13 2010-09-15 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡用微動機構ならびに走査型プローブ顕微鏡
GB2415761B (en) * 2004-07-01 2006-08-30 Pll Ltd A sensor finger module for a pipeline inspection tool
JP5662464B2 (ja) * 2009-10-29 2015-01-28 ブルカー ナノ インコーポレイテッドＢｒｕｋｅｒ Ｎａｎｏ，Ｉｎｃ． 動的撓曲部配列を組み込んだ支持台を有する走査型プローブ顕微鏡
US9833596B2 (en) * 2013-08-30 2017-12-05 Novasentis, Inc. Catheter having a steerable tip
CN107990859B (zh) * 2016-10-27 2021-04-13 中国科学院长春光学精密机械与物理研究所 一种微位移传感器标定装置及其应用

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2950627A1 (de) * 1979-12-15 1981-06-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Anordnung zur messung von oberflaechenprofilen
JPS57166506A (en) * 1981-04-08 1982-10-14 Mitsubishi Heavy Ind Ltd Strain measuring method
JPH01287403A (ja) * 1988-05-16 1989-11-20 Nippon Telegr & Teleph Corp <Ntt> 走査型トンネル顕微鏡
JPH0238904A (ja) * 1988-07-29 1990-02-08 Hitachi Ltd 微小変位機構及びこれを用いた走査型トンネル顕微鏡
US4952857A (en) * 1989-03-24 1990-08-28 Quanscan, Inc. Scanning micromechanical probe control system
US5051646A (en) * 1989-04-28 1991-09-24 Digital Instruments, Inc. Method of driving a piezoelectric scanner linearly with time
JPH036405A (ja) * 1989-06-05 1991-01-11 Canon Inc 走査型トンネル顕微鏡
EP0457317B1 (de) * 1990-05-18 1997-11-05 Hitachi, Ltd. Elektronenmikroskop, Probenstellglied für ein Elektronenmikroskop und Verfahren zum Beobachten von mikroskopischen Bildern
US5148026A (en) * 1990-11-20 1992-09-15 Kabushiki Kaisha Toshiba Scanning probe microscopy
JPH04235302A (ja) * 1991-01-11 1992-08-24 Jeol Ltd トンネル顕微鏡の探針微動機構

Also Published As

Publication number Publication date
US5641897A (en) 1997-06-24
EP0599582B1 (de) 1998-04-08
US5469734A (en) 1995-11-28
EP0599582A3 (de) 1995-05-10
EP0599582A2 (de) 1994-06-01
DE69317857T2 (de) 1998-08-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee