DE69317833T2 - Intergrierter kapazitiver Wandler - Google Patents

Intergrierter kapazitiver Wandler

Info

Publication number
DE69317833T2
DE69317833T2 DE69317833T DE69317833T DE69317833T2 DE 69317833 T2 DE69317833 T2 DE 69317833T2 DE 69317833 T DE69317833 T DE 69317833T DE 69317833 T DE69317833 T DE 69317833T DE 69317833 T2 DE69317833 T2 DE 69317833T2
Authority
DE
Germany
Prior art keywords
integrated capacitive
capacitive converter
converter
integrated
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69317833T
Other languages
English (en)
Other versions
DE69317833D1 (de
Inventor
Jean-Marc Moret
Johan Wilhelm Bergqvist
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Colibrys SA
Original Assignee
Centre Suisse D'electronique Et De Microtechnique Sa Neuenburg/neuchatel Ch
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse D'electronique Et De Microtechnique Sa Neuenburg/neuchatel Ch, Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse D'electronique Et De Microtechnique Sa Neuenburg/neuchatel Ch
Publication of DE69317833D1 publication Critical patent/DE69317833D1/de
Application granted granted Critical
Publication of DE69317833T2 publication Critical patent/DE69317833T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
    • H04R25/604—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers
DE69317833T 1992-09-11 1993-09-01 Intergrierter kapazitiver Wandler Expired - Lifetime DE69317833T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9210947A FR2695787B1 (fr) 1992-09-11 1992-09-11 Transducteur capacitif intégré.

Publications (2)

Publication Number Publication Date
DE69317833D1 DE69317833D1 (de) 1998-05-14
DE69317833T2 true DE69317833T2 (de) 1998-11-12

Family

ID=9433486

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69317833T Expired - Lifetime DE69317833T2 (de) 1992-09-11 1993-09-01 Intergrierter kapazitiver Wandler

Country Status (6)

Country Link
US (1) US5677965A (de)
EP (1) EP0587032B1 (de)
JP (1) JPH06217397A (de)
DE (1) DE69317833T2 (de)
DK (1) DK0587032T3 (de)
FR (1) FR2695787B1 (de)

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JP3604243B2 (ja) * 1996-11-27 2004-12-22 長野計器株式会社 静電容量型トランスデューサ
FI105880B (fi) 1998-06-18 2000-10-13 Nokia Mobile Phones Ltd Mikromekaanisen mikrofonin kiinnitys
US6088463A (en) 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
AU5030100A (en) * 1999-05-19 2000-12-05 California Institute Of Technology High performance mems thin-film teflon electret microphone
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US6661897B2 (en) * 1999-10-28 2003-12-09 Clive Smith Transducer for sensing body sounds
US6499348B1 (en) * 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
JP3611779B2 (ja) * 1999-12-09 2005-01-19 シャープ株式会社 電気信号−音響信号変換器及びその製造方法並びに電気信号−音響変換装置
FI115500B (fi) 2000-03-21 2005-05-13 Nokia Oyj Menetelmä kalvoanturin valmistamiseksi
US6842964B1 (en) 2000-09-29 2005-01-18 Tucker Davis Technologies, Inc. Process of manufacturing of electrostatic speakers
GB2386031B (en) 2000-12-22 2004-08-18 Bruel & Kjaer Sound & Vibratio A highly stable micromachined capacitive transducer
US6847090B2 (en) * 2001-01-24 2005-01-25 Knowles Electronics, Llc Silicon capacitive microphone
JP2002345088A (ja) * 2001-05-18 2002-11-29 Mitsubishi Electric Corp 圧力感応装置及びこれに用いられる半導体基板の製造方法
KR100409273B1 (ko) * 2001-07-07 2003-12-11 주식회사 비에스이 칩 마이크로폰
KR100409272B1 (ko) * 2001-07-07 2003-12-11 주식회사 비에스이 칩 마이크로폰
US7298856B2 (en) * 2001-09-05 2007-11-20 Nippon Hoso Kyokai Chip microphone and method of making same
WO2003037212A2 (en) 2001-10-30 2003-05-08 Lesinski George S Implantation method for a hearing aid microactuator implanted into the cochlea
WO2003047307A2 (en) * 2001-11-27 2003-06-05 Corporation For National Research Initiatives A miniature condenser microphone and fabrication method therefor
AU2003238880A1 (en) * 2002-06-07 2003-12-22 California Institute Of Technology Electret generator apparatus and method
AU2003238881A1 (en) * 2002-06-07 2003-12-22 California Institute Of Technology Method and resulting device for fabricating electret materials on bulk substrates
JP3492673B1 (ja) * 2002-06-21 2004-02-03 沖電気工業株式会社 静電容量型加速度センサの製造方法
US6667189B1 (en) 2002-09-13 2003-12-23 Institute Of Microelectronics High performance silicon condenser microphone with perforated single crystal silicon backplate
US7142682B2 (en) * 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
DE10300063A1 (de) * 2003-01-03 2004-07-22 W.L. Gore & Associates Gmbh Membran für akustische Wandler
JP4181580B2 (ja) 2003-11-20 2008-11-19 松下電器産業株式会社 エレクトレット及びエレクトレットコンデンサー
US7706554B2 (en) * 2004-03-03 2010-04-27 Panasonic Corporation Electret condenser
US7853027B2 (en) * 2004-03-05 2010-12-14 Panasonic Corporation Electret condenser
DE102004011149B3 (de) * 2004-03-08 2005-11-10 Infineon Technologies Ag Mikrophon und Verfahren zur Herstellung eines Mikrophons
US7415121B2 (en) 2004-10-29 2008-08-19 Sonion Nederland B.V. Microphone with internal damping
FR2884101B1 (fr) * 2005-03-30 2007-06-29 Merry Electronics Co Ltd Condensateur de microphone au silicium avec effort minimal du diaphragme
JP4737719B2 (ja) * 2006-02-24 2011-08-03 ヤマハ株式会社 コンデンサマイクロホン
TW200738028A (en) * 2006-02-24 2007-10-01 Yamaha Corp Condenser microphone
JP2007267049A (ja) * 2006-03-29 2007-10-11 Yamaha Corp コンデンサマイクロホン
JP4737721B2 (ja) * 2006-03-10 2011-08-03 ヤマハ株式会社 コンデンサマイクロホン
TW200746868A (en) * 2006-02-24 2007-12-16 Yamaha Corp Condenser microphone
JP4605470B2 (ja) * 2006-03-31 2011-01-05 ヤマハ株式会社 コンデンサマイクロホン
JP2007228345A (ja) * 2006-02-24 2007-09-06 Yamaha Corp コンデンサマイクロホン
JP4609363B2 (ja) * 2006-03-29 2011-01-12 ヤマハ株式会社 コンデンサ型マイクロホン及びその製造方法
JP4770687B2 (ja) * 2006-03-29 2011-09-14 ヤマハ株式会社 コンデンサマイクロホン
JP4770692B2 (ja) * 2006-03-29 2011-09-14 ヤマハ株式会社 コンデンサマイクロホン
TW200746869A (en) * 2006-03-29 2007-12-16 Yamaha Corp Condenser microphone
ATE471635T1 (de) * 2006-03-30 2010-07-15 Sonion Mems As Akustischer einchip-mems-wandler und herstellungsverfahren
CN101141832B (zh) * 2006-09-06 2011-04-20 歌尔声学股份有限公司 单膜电容式传声器芯片
US20090136064A1 (en) * 2007-09-28 2009-05-28 Yamaha Corporation Vibration transducer and manufacturing method therefor
EP2297976B1 (de) * 2008-06-30 2020-09-30 The Regents of the University of Michigan Piezoelektrisches mems-mikrofon
FR2936351B1 (fr) * 2008-09-25 2010-10-15 Commissariat Energie Atomique Systeme a capacite variable a dielectrique souple.
US8134215B2 (en) 2008-10-09 2012-03-13 United Microelectronics Corp. MEMS diaphragm
TWI484834B (zh) * 2008-10-15 2015-05-11 Htc Corp 驅動一電容式電聲轉換器之方法及電子裝置
DE102009028177A1 (de) * 2009-07-31 2011-02-10 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zur Herstellung eines solchen Bauelements
TWI444052B (zh) * 2009-12-17 2014-07-01 Ind Tech Res Inst 電容式傳感器及其製造方法
US8304846B2 (en) * 2009-12-31 2012-11-06 Texas Instruments Incorporated Silicon microphone with integrated back side cavity
US8617960B2 (en) * 2009-12-31 2013-12-31 Texas Instruments Incorporated Silicon microphone transducer
US8994128B2 (en) * 2010-01-11 2015-03-31 Elmos Semiconductor Ag Micro-electromechanical semiconductor comprising stress measuring element and stiffening braces separating wall depressions
US9409763B2 (en) * 2012-04-04 2016-08-09 Infineon Technologies Ag MEMS device and method of making a MEMS device
FR3009907B1 (fr) * 2013-08-20 2015-09-18 Commissariat Energie Atomique Dispositif de conversion d'energie thermique en energie electrique
DE102013224718A1 (de) * 2013-12-03 2015-06-03 Robert Bosch Gmbh MEMS-Mikrofonbauelement und Vorrichtung mit einem solchen MEMS-Mikrofonbauelement
CN204046818U (zh) 2014-07-28 2014-12-24 瑞声声学科技(深圳)有限公司 电容mems麦克风
US10277988B2 (en) * 2016-03-09 2019-04-30 Robert Bosch Gmbh Controlling mechanical properties of a MEMS microphone with capacitive and piezoelectric electrodes
CN207911008U (zh) * 2018-02-06 2018-09-25 瑞声声学科技(深圳)有限公司 Mems麦克风
JP7240289B2 (ja) * 2019-08-13 2023-03-15 株式会社東芝 Ｍｅｍｓ素子

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SE428081B (sv) * 1981-10-07 1983-05-30 Ericsson Telefon Ab L M Tilledningsram for en elektretmikrofon
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
NL8702589A (nl) * 1987-10-30 1989-05-16 Microtel Bv Elektro-akoestische transducent van de als elektreet aangeduide soort, en een werkwijze voor het vervaardigen van een dergelijke transducent.
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
US4993072A (en) * 1989-02-24 1991-02-12 Lectret S.A. Shielded electret transducer and method of making the same
US5208789A (en) * 1992-04-13 1993-05-04 Lectret S. A. Condenser microphones based on silicon with humidity resistant surface treatment

Also Published As

Publication number Publication date
FR2695787B1 (fr) 1994-11-10
DE69317833D1 (de) 1998-05-14
EP0587032B1 (de) 1998-04-08
FR2695787A1 (fr) 1994-03-18
DK0587032T3 (da) 1999-02-08
JPH06217397A (ja) 1994-08-05
EP0587032A1 (de) 1994-03-16
US5677965A (en) 1997-10-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: COLIBRYS S.A., NEUCHATEL, CH