DE69315088D1 - Aufschlaemmungen mit reduzierter viskositaet, daraus hergestellte schleifgegenstaende und verfahren zur herstellung der gegenstaende - Google Patents

Aufschlaemmungen mit reduzierter viskositaet, daraus hergestellte schleifgegenstaende und verfahren zur herstellung der gegenstaende

Info

Publication number
DE69315088D1
DE69315088D1 DE69315088T DE69315088T DE69315088D1 DE 69315088 D1 DE69315088 D1 DE 69315088D1 DE 69315088 T DE69315088 T DE 69315088T DE 69315088 T DE69315088 T DE 69315088T DE 69315088 D1 DE69315088 D1 DE 69315088D1
Authority
DE
Germany
Prior art keywords
objects
abrasive
particles
slurches
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69315088T
Other languages
English (en)
Other versions
DE69315088T2 (de
Inventor
Scott Culler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69315088D1 publication Critical patent/DE69315088D1/de
Application granted granted Critical
Publication of DE69315088T2 publication Critical patent/DE69315088T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds
    • B24D3/285Reaction products obtained from aldehydes or ketones
DE69315088T 1992-12-17 1993-08-30 Aufschlaemmungen mit reduzierter viskositaet, daraus hergestellte schleifgegenstaende und verfahren zur herstellung der gegenstaende Expired - Lifetime DE69315088T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US99213792A 1992-12-17 1992-12-17
PCT/US1993/008183 WO1994013434A1 (en) 1992-12-17 1993-08-30 Reduced viscosity slurries, abrasive articles made therefrom, and methods of making said articles

Publications (2)

Publication Number Publication Date
DE69315088D1 true DE69315088D1 (de) 1997-12-11
DE69315088T2 DE69315088T2 (de) 1998-03-26

Family

ID=25537947

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315088T Expired - Lifetime DE69315088T2 (de) 1992-12-17 1993-08-30 Aufschlaemmungen mit reduzierter viskositaet, daraus hergestellte schleifgegenstaende und verfahren zur herstellung der gegenstaende

Country Status (11)

Country Link
US (4) US5368619A (de)
EP (1) EP0674565B1 (de)
JP (1) JP3649442B2 (de)
KR (1) KR100295335B1 (de)
AT (1) ATE159883T1 (de)
AU (1) AU679005B2 (de)
BR (1) BR9307667A (de)
CA (1) CA2151932A1 (de)
DE (1) DE69315088T2 (de)
ES (1) ES2108879T3 (de)
WO (1) WO1994013434A1 (de)

Families Citing this family (91)

* Cited by examiner, † Cited by third party
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BR9307667A (pt) * 1992-12-17 1999-08-31 Minnesota Mining & Mfg Suspensão apropriada para uso na produção de artigos abrasivos, abrasivo revestido, e, processo para fabricar um abrasivo revestido
JPH08510693A (ja) * 1993-05-26 1996-11-12 ミネソタ マイニング アンド マニュファクチャリング カンパニー 下地に平滑表面を与える方法
US5549962A (en) * 1993-06-30 1996-08-27 Minnesota Mining And Manufacturing Company Precisely shaped particles and method of making the same
US5658184A (en) 1993-09-13 1997-08-19 Minnesota Mining And Manufacturing Company Nail tool and method of using same to file, polish and/or buff a fingernail or a toenail
SG64333A1 (en) * 1993-09-13 1999-04-27 Minnesota Mining & Mfg Abrasive article method of manufacture of same method of using same for finishing and a production tool
US5632668A (en) * 1993-10-29 1997-05-27 Minnesota Mining And Manufacturing Company Method for the polishing and finishing of optical lenses
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WO1995022436A1 (en) * 1994-02-22 1995-08-24 Minnesota Mining And Manufacturing Company Abrasive article, a method of making same, and a method of using same for finishing
DE69530976D1 (de) * 1994-03-16 2003-07-10 Minnesota Mining & Mfg Schleifgegenstände und verfahren zu ihrer herstellung
DE9411326U1 (de) * 1994-07-13 1994-09-15 Zahnradpraezision Horst Reinek Verzahntes Honschleifwerkzeug
US5658360A (en) * 1995-08-02 1997-08-19 Norton Company Compression molding of abrasive articles using water as a temporary binder
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5700302A (en) * 1996-03-15 1997-12-23 Minnesota Mining And Manufacturing Company Radiation curable abrasive article with tie coat and method
US5891421A (en) * 1996-03-22 1999-04-06 J.M. Huber Corporation Precipitated silicas having improved dentifrice performance characteristics and methods of preparation
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US6475253B2 (en) 1996-09-11 2002-11-05 3M Innovative Properties Company Abrasive article and method of making
US5876268A (en) * 1997-01-03 1999-03-02 Minnesota Mining And Manufacturing Company Method and article for the production of optical quality surfaces on glass
US5851247A (en) * 1997-02-24 1998-12-22 Minnesota Mining & Manufacturing Company Structured abrasive article adapted to abrade a mild steel workpiece
US5910471A (en) * 1997-03-07 1999-06-08 Minnesota Mining And Manufacturing Company Abrasive article for providing a clear surface finish on glass
US6231629B1 (en) 1997-03-07 2001-05-15 3M Innovative Properties Company Abrasive article for providing a clear surface finish on glass
US5888119A (en) * 1997-03-07 1999-03-30 Minnesota Mining And Manufacturing Company Method for providing a clear surface finish on glass
US6524681B1 (en) 1997-04-08 2003-02-25 3M Innovative Properties Company Patterned surface friction materials, clutch plate members and methods of making and using same
US8092707B2 (en) 1997-04-30 2012-01-10 3M Innovative Properties Company Compositions and methods for modifying a surface suited for semiconductor fabrication
US6194317B1 (en) 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
KR20010021845A (ko) 1997-07-21 2001-03-15 베르너 훽스트, 지크프리트 포트호프 침전 안정화된 방사선 경화성 충전 조성물
US5782939A (en) * 1997-08-08 1998-07-21 Norton Company Low cost coated abrasives
US5942015A (en) * 1997-09-16 1999-08-24 3M Innovative Properties Company Abrasive slurries and abrasive articles comprising multiple abrasive particle grades
US5928394A (en) * 1997-10-30 1999-07-27 Minnesota Mining And Manufacturing Company Durable abrasive articles with thick abrasive coatings
US6354929B1 (en) 1998-02-19 2002-03-12 3M Innovative Properties Company Abrasive article and method of grinding glass
WO1999055493A1 (fr) * 1998-04-28 1999-11-04 Ebara Corporation Disque a polir et meuler et procede de polissage d'un substrat avec ce disque a meuler
US6217432B1 (en) 1998-05-19 2001-04-17 3M Innovative Properties Company Abrasive article comprising a barrier coating
US6179887B1 (en) 1999-02-17 2001-01-30 3M Innovative Properties Company Method for making an abrasive article and abrasive articles thereof
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US6541383B1 (en) * 2000-06-29 2003-04-01 Lsi Logic Corporation Apparatus and method for planarizing the surface of a semiconductor wafer
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US6521004B1 (en) 2000-10-16 2003-02-18 3M Innovative Properties Company Method of making an abrasive agglomerate particle
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US6582487B2 (en) 2001-03-20 2003-06-24 3M Innovative Properties Company Discrete particles that include a polymeric material and articles formed therefrom
US6605128B2 (en) 2001-03-20 2003-08-12 3M Innovative Properties Company Abrasive article having projections attached to a major surface thereof
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EP1245627B1 (de) * 2001-03-30 2007-07-04 Degussa GmbH Siliciumorganische Nano-Mikrohybridsysteme oder Mikrohybridsysteme enthaltende Zusammensetzung für kratz- und abriebfeste Beschichtungen
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US6677239B2 (en) 2001-08-24 2004-01-13 Applied Materials Inc. Methods and compositions for chemical mechanical polishing
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US6846232B2 (en) * 2001-12-28 2005-01-25 3M Innovative Properties Company Backing and abrasive product made with the backing and method of making and using the backing and abrasive product
US6949128B2 (en) * 2001-12-28 2005-09-27 3M Innovative Properties Company Method of making an abrasive product
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US7199056B2 (en) * 2002-02-08 2007-04-03 Applied Materials, Inc. Low cost and low dishing slurry for polysilicon CMP
US7235296B2 (en) 2002-03-05 2007-06-26 3M Innovative Properties Co. Formulations for coated diamond abrasive slurries
JP3463999B1 (ja) * 2002-05-16 2003-11-05 三井金属鉱業株式会社 セリウム系研摩材の製造方法
US7063597B2 (en) 2002-10-25 2006-06-20 Applied Materials Polishing processes for shallow trench isolation substrates
EP1563952B1 (de) * 2002-11-06 2013-06-26 Nomura Plating Co., Ltd Oberflächenbehandlungsverfahren für vakuumbeälter oder -rohr
GB0225913D0 (en) * 2002-11-06 2002-12-11 3M Innovative Properties Co Abrasive articles
AT500083B1 (de) 2003-09-08 2009-12-15 Kaindl Decor Gmbh Dekorlaminat und verfahren zu dessen herstellung
US7195658B2 (en) * 2003-10-17 2007-03-27 Saint-Gobain Abrasives, Inc. Antiloading compositions and methods of selecting same
CN1886232A (zh) * 2003-11-26 2006-12-27 3M创新有限公司 研磨工件的方法
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US7591865B2 (en) * 2005-01-28 2009-09-22 Saint-Gobain Abrasives, Inc. Method of forming structured abrasive article
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US8323072B1 (en) 2007-03-21 2012-12-04 3M Innovative Properties Company Method of polishing transparent armor
KR101659078B1 (ko) * 2009-09-02 2016-09-22 쓰리엠 이노베이티브 프로퍼티즈 캄파니 절삭 휠용 조성물 및 이를 이용한 절삭 휠
PL2512402T3 (pl) * 2009-12-15 2015-07-31 Corticalis As Pasta oczyszczająca
CN103109140A (zh) * 2010-04-28 2013-05-15 克禄美科技股份有限公司 热信号或标记装置
CN103087676B (zh) * 2013-01-29 2014-07-30 淄博理研泰山涂附磨具有限公司 一种耐磨磨粒的烧结方法
US10315289B2 (en) 2013-12-09 2019-06-11 3M Innovative Properties Company Conglomerate abrasive particles, abrasive articles including the same, and methods of making the same
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US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
KR20240015167A (ko) 2014-10-17 2024-02-02 어플라이드 머티어리얼스, 인코포레이티드 애디티브 제조 프로세스들을 이용한 복합 재료 특성들을 갖는 cmp 패드 구성
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Also Published As

Publication number Publication date
ES2108879T3 (es) 1998-01-01
CA2151932A1 (en) 1994-06-23
US5470368A (en) 1995-11-28
WO1994013434A1 (en) 1994-06-23
EP0674565B1 (de) 1997-11-05
JPH08504371A (ja) 1996-05-14
ATE159883T1 (de) 1997-11-15
USRE35709E (en) 1998-01-06
BR9307667A (pt) 1999-08-31
EP0674565A1 (de) 1995-10-04
US5496387A (en) 1996-03-05
KR950704090A (ko) 1995-11-17
JP3649442B2 (ja) 2005-05-18
DE69315088T2 (de) 1998-03-26
KR100295335B1 (ko) 2001-09-17
US5368619A (en) 1994-11-29
AU679005B2 (en) 1997-06-19
AU5097693A (en) 1994-07-04

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