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Publication numberDE69225908 D1
Publication typeGrant
Application numberDE1992625908
Publication date16 Jul 1998
Filing date30 Dec 1992
Priority date18 Apr 1991
Also published asDE631535T1, DE69225908T2, EP0631535A1, EP0631535A4, EP0631535B1, US5180276, WO1994015760A1
Publication number1992625908, 92625908, DE 69225908 D1, DE 69225908D1, DE-D1-69225908, DE1992625908, DE69225908 D1, DE69225908D1, DE92625908
InventorsRuth Hendrickson
ApplicantBrooks Automation Inc
Export CitationBiBTeX, EndNote, RefMan
Gelenkarm mit übergabevorrichtung Articulated arm with transfer device translated from German
DE 69225908 D1
Abstract  available in
Description  available in
Claims  available in
Classifications
International ClassificationB25J18/00, B25J18/02, B25J9/06, H01L21/67, B25J9/10
Cooperative ClassificationY10T74/1888, B25J9/107, Y10T74/20594, H01L21/67, Y10T74/18952
European ClassificationH01L21/67, B25J9/10L2F
Legal Events
DateCodeEventDescription
8 Jul 19998364No opposition during term of opposition
22 Oct 20098339Ceased/non-payment of the annual fee