DE69224917T2 - Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberfläche - Google Patents
Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberflächeInfo
- Publication number
- DE69224917T2 DE69224917T2 DE69224917T DE69224917T DE69224917T2 DE 69224917 T2 DE69224917 T2 DE 69224917T2 DE 69224917 T DE69224917 T DE 69224917T DE 69224917 T DE69224917 T DE 69224917T DE 69224917 T2 DE69224917 T2 DE 69224917T2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- preventing contamination
- substrate surface
- contamination
- preventing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
- F24F3/1411—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by absorbing or adsorbing water, e.g. using an hygroscopic desiccant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
- B01D2253/108—Zeolites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/10—Nitrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/11—Noble gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
- B01D2257/702—Hydrocarbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/80—Water
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2267/00—Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
- B01D2267/40—Different types of filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0462—Temperature swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/047—Pressure swing adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
- F24F2003/144—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by dehumidification only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
- F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
- F24F8/158—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means using active carbon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Separation Of Gases By Adsorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Treating Waste Gases (AREA)
- Drying Of Gases (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1992/001579 WO1994012265A1 (en) | 1992-12-02 | 1992-12-02 | Method and apparatus for preventing contamination of substrate or substrate surface |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69224917D1 DE69224917D1 (de) | 1998-04-30 |
DE69224917T2 true DE69224917T2 (de) | 1998-10-22 |
Family
ID=14042686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69224917T Expired - Fee Related DE69224917T2 (de) | 1992-12-02 | 1992-12-02 | Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberfläche |
Country Status (5)
Country | Link |
---|---|
US (3) | US6733570B2 (de) |
EP (1) | EP0672445B1 (de) |
JP (1) | JP3320730B2 (de) |
DE (1) | DE69224917T2 (de) |
WO (1) | WO1994012265A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0672445B1 (de) * | 1992-12-02 | 1998-03-25 | Ebara Corporation | Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberfläche |
JP3519212B2 (ja) * | 1995-06-13 | 2004-04-12 | 高砂熱学工業株式会社 | 清浄な資材用保管庫 |
US6620385B2 (en) * | 1996-08-20 | 2003-09-16 | Ebara Corporation | Method and apparatus for purifying a gas containing contaminants |
US7361206B1 (en) * | 2004-09-07 | 2008-04-22 | United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for water vapor removal in an ion mobility spectrometer |
JP3879762B2 (ja) * | 2005-03-29 | 2007-02-14 | ダイキン工業株式会社 | 調湿装置 |
JP4753102B2 (ja) * | 2008-11-12 | 2011-08-24 | 独立行政法人産業技術総合研究所 | 小型デシカント空調装置 |
US8783099B2 (en) | 2011-07-01 | 2014-07-22 | Baker Hughes Incorporated | Downhole sensors impregnated with hydrophobic material, tools including same, and related methods |
WO2016058525A1 (en) * | 2014-10-17 | 2016-04-21 | The Hong Kong University Of Science And Technology | Materials for moisture removal and water harvesting from air |
CN105381694B (zh) * | 2015-12-07 | 2018-01-12 | 兴边富民(北京)清洁能源技术有限公司 | 一种煤矿乏风及抽放瓦斯的掺混处理系统 |
WO2018065175A1 (en) | 2016-10-07 | 2018-04-12 | Haldor Topsøe A/S | A process for low temperature gas cleaning with ozone and a catalytic bag filter for use in the process |
KR102539338B1 (ko) * | 2017-09-14 | 2023-06-02 | 가부시키가이샤 세이부 기켄 | 가스 치환용 드라이룸 |
CN113967393A (zh) * | 2020-07-24 | 2022-01-25 | 惠亚科技(东台)有限公司 | 改良型隔离病房结构 |
Family Cites Families (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4000990A (en) | 1975-04-16 | 1977-01-04 | Nrg Nufuel Company | Adsorption process |
US4153429A (en) | 1975-05-21 | 1979-05-08 | Union Carbide Corporation | Selective adsorption of NOx from gas streams |
US4164901A (en) * | 1978-01-16 | 1979-08-21 | American Air Filter Company, Inc. | Indoor gun firing range enclosure having a ventilation system |
JPS5524525A (en) * | 1978-08-08 | 1980-02-21 | Matsushita Electric Ind Co Ltd | Fabrication of filter |
JPS5524561A (en) * | 1978-08-09 | 1980-02-21 | Matsushita Electric Ind Co Ltd | Fabrication of filter |
DE3103137A1 (de) | 1981-01-30 | 1982-08-26 | Bayer Ag, 5090 Leverkusen | Verfahren zur herstellung aliphatischer cyclischer kohlensaeureester |
JPS5939019A (ja) * | 1982-08-27 | 1984-03-03 | Hitachi Ltd | クリ−ン保管箱 |
IT1179369B (it) | 1984-05-15 | 1987-09-16 | Ital Idee Srl | Gruppo filtrante multiplo, particolarmente per impianti di aerazione e condizionamento per autoveicoli e ambienti chiusi, munito di mezzi di controllo dell'efficienza |
CH663906A5 (de) * | 1984-08-13 | 1988-01-29 | Sulzer Ag | Adsorptionsvorrichtung zum reinigen von gasen. |
GB8422444D0 (en) | 1984-09-05 | 1984-10-10 | Dowty Fuel Syst Ltd | Pure-air generator |
DE3511320C1 (de) | 1985-03-28 | 1986-10-09 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Vorrichtung zur Reinigung der Gasatmosphaeren mehrerer Arbeitsraeume |
JPH0622654B2 (ja) | 1985-12-06 | 1994-03-30 | 東洋紡績株式会社 | ハロゲン化炭化水素系ガスの吸着除去方法 |
JPS6312315A (ja) | 1986-07-01 | 1988-01-19 | Ebara Res Co Ltd | 気体浄化装置用フイルタ |
JPS6397246A (ja) * | 1986-10-15 | 1988-04-27 | Ebara Res Co Ltd | 気体の清浄方法及びその装置 |
DE3703137A1 (de) * | 1987-02-03 | 1988-08-18 | Hoelter Heinz | Mehrfach aktiver bakterizider-fungizider chemisorptionsfilter zur behandlung von atemluft insbesondere fuer allergiekranke menschen |
US5743940A (en) * | 1988-04-07 | 1998-04-28 | Japan Atomic Energy Research Institute | Process for producing gas adsorbent |
JPH01262953A (ja) * | 1988-04-13 | 1989-10-19 | Ebara Res Co Ltd | 空気中の微生物を殺菌除去する方法及びその装置 |
JPH0257844A (ja) | 1988-08-22 | 1990-02-27 | Hitachi Plant Eng & Constr Co Ltd | クリーンルームの湿度制御方法 |
US4881953A (en) * | 1988-09-15 | 1989-11-21 | Union Carbide Corporation | Prevention of membrane degradation |
JPH0526423Y2 (de) * | 1988-09-27 | 1993-07-05 | ||
JP2640513B2 (ja) * | 1988-10-31 | 1997-08-13 | 日本パイオニクス株式会社 | 不活性ガスの精製装置 |
JPH02126912A (ja) * | 1988-11-04 | 1990-05-15 | Shimizu Corp | 空気清浄装置及びこれを用いたクリーンルーム |
JP2736662B2 (ja) | 1988-11-04 | 1998-04-02 | 東芝セラミックス株式会社 | 半導体ウェーハの曇防止装置 |
DE3916511A1 (de) * | 1989-05-20 | 1990-12-13 | Seitz Filter Werke | Membranfiltervorrichtung zur mikro- und ultrafiltration von fluiden im crossflow-verfahren |
GB8916510D0 (en) * | 1989-07-19 | 1989-09-06 | Boc Group Plc | Separation of gas mixtures |
US5069692A (en) * | 1989-12-11 | 1991-12-03 | Sundstrand Corporation | Fully integrated inert gas and oxidizer replenishment system |
JP2536564Y2 (ja) * | 1990-02-13 | 1997-05-21 | 株式会社リコー | 画像形成装置 |
US5042997A (en) | 1990-07-27 | 1991-08-27 | Rhodes James A | Air control system providing healthful enclosed environment |
US5080699A (en) | 1990-11-20 | 1992-01-14 | Trion, Inc. | Filter apparatus |
JP2930702B2 (ja) | 1990-11-28 | 1999-08-03 | 株式会社テクノ菱和 | 空気イオン化システム |
US5221520A (en) | 1991-09-27 | 1993-06-22 | North Carolina Center For Scientific Research, Inc. | Apparatus for treating indoor air |
US6340381B1 (en) * | 1991-12-02 | 2002-01-22 | Ebara Research Co., Ltd. | Method and apparatus for the preparation of clean gases |
JPH06410A (ja) * | 1992-02-12 | 1994-01-11 | Takeda Chem Ind Ltd | ガス処理装置 |
EP0672445B1 (de) * | 1992-12-02 | 1998-03-25 | Ebara Corporation | Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberfläche |
US5922105A (en) * | 1992-12-02 | 1999-07-13 | Ebara Research Co., Ltd. | Method and apparatus for the preparation of clean gases |
US5700436A (en) * | 1993-01-21 | 1997-12-23 | Calgon Carbon Corporation | Purification of air in enclosed spaces |
US5350443B2 (en) * | 1993-04-19 | 1999-08-10 | Von Hasso Bluecher | Filter sheet material for passenger cabins in motor vehicles |
US5399319A (en) | 1993-08-02 | 1995-03-21 | Vector Technologies Ltd. | Apparatus for filtering air and for creating a positive/negative pressure |
US5451249A (en) * | 1994-06-14 | 1995-09-19 | International Fuel Cells | Landfill gas treatment system |
FR2730790B1 (fr) * | 1995-02-17 | 1997-05-23 | Air Liquide | Procede d'introduction d'un gaz de remplissage dans une enceinte et installation de mise en oeuvre |
-
1992
- 1992-12-02 EP EP92924872A patent/EP0672445B1/de not_active Expired - Lifetime
- 1992-12-02 WO PCT/JP1992/001579 patent/WO1994012265A1/ja active IP Right Grant
- 1992-12-02 JP JP51296194A patent/JP3320730B2/ja not_active Expired - Lifetime
- 1992-12-02 DE DE69224917T patent/DE69224917T2/de not_active Expired - Fee Related
- 1992-12-02 US US08/424,545 patent/US6733570B2/en not_active Expired - Fee Related
-
2003
- 2003-12-29 US US10/746,278 patent/US6911064B2/en not_active Expired - Fee Related
-
2005
- 2005-03-15 US US11/079,252 patent/US7029518B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7029518B2 (en) | 2006-04-18 |
EP0672445B1 (de) | 1998-03-25 |
JP3320730B2 (ja) | 2002-09-03 |
US20040149128A1 (en) | 2004-08-05 |
WO1994012265A1 (en) | 1994-06-09 |
EP0672445A1 (de) | 1995-09-20 |
EP0672445A4 (de) | 1996-09-11 |
US6911064B2 (en) | 2005-06-28 |
US20050178267A1 (en) | 2005-08-18 |
US6733570B2 (en) | 2004-05-11 |
US20030089231A1 (en) | 2003-05-15 |
DE69224917D1 (de) | 1998-04-30 |
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