DE69224917D1 - Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberfläche - Google Patents
Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberflächeInfo
- Publication number
- DE69224917D1 DE69224917D1 DE69224917T DE69224917T DE69224917D1 DE 69224917 D1 DE69224917 D1 DE 69224917D1 DE 69224917 T DE69224917 T DE 69224917T DE 69224917 T DE69224917 T DE 69224917T DE 69224917 D1 DE69224917 D1 DE 69224917D1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- preventing contamination
- substrate surface
- contamination
- preventing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
- F24F3/1411—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by absorbing or adsorbing water, e.g. using an hygroscopic desiccant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
- B01D2253/108—Zeolites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/10—Nitrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/10—Single element gases other than halogens
- B01D2257/11—Noble gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
- B01D2257/702—Hydrocarbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/80—Water
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/40—Further details for adsorption processes and devices
- B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2267/00—Multiple filter elements specially adapted for separating dispersed particles from gases or vapours
- B01D2267/40—Different types of filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2279/00—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
- B01D2279/50—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning
- B01D2279/51—Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for air conditioning in clean rooms, e.g. production facilities for electronic devices, laboratories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0462—Temperature swing adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/047—Pressure swing adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
- F24F2003/144—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by dehumidification only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
- F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
- F24F8/158—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means using active carbon
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1992/001579 WO1994012265A1 (en) | 1992-12-02 | 1992-12-02 | Method and apparatus for preventing contamination of substrate or substrate surface |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69224917D1 true DE69224917D1 (de) | 1998-04-30 |
DE69224917T2 DE69224917T2 (de) | 1998-10-22 |
Family
ID=14042686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69224917T Expired - Fee Related DE69224917T2 (de) | 1992-12-02 | 1992-12-02 | Methode und vorrichtung zur verhinderung von kontamination eines substrates oder einer substratoberfläche |
Country Status (5)
Country | Link |
---|---|
US (3) | US6733570B2 (de) |
EP (1) | EP0672445B1 (de) |
JP (1) | JP3320730B2 (de) |
DE (1) | DE69224917T2 (de) |
WO (1) | WO1994012265A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994012265A1 (en) * | 1992-12-02 | 1994-06-09 | Ebara-Infilco Co., Ltd. | Method and apparatus for preventing contamination of substrate or substrate surface |
JP3519212B2 (ja) * | 1995-06-13 | 2004-04-12 | 高砂熱学工業株式会社 | 清浄な資材用保管庫 |
US6620385B2 (en) * | 1996-08-20 | 2003-09-16 | Ebara Corporation | Method and apparatus for purifying a gas containing contaminants |
US7361206B1 (en) * | 2004-09-07 | 2008-04-22 | United States Of America As Represented By The Secretary Of The Navy | Apparatus and method for water vapor removal in an ion mobility spectrometer |
JP3879762B2 (ja) * | 2005-03-29 | 2007-02-14 | ダイキン工業株式会社 | 調湿装置 |
JP4753102B2 (ja) * | 2008-11-12 | 2011-08-24 | 独立行政法人産業技術総合研究所 | 小型デシカント空調装置 |
US8783099B2 (en) * | 2011-07-01 | 2014-07-22 | Baker Hughes Incorporated | Downhole sensors impregnated with hydrophobic material, tools including same, and related methods |
CN106794441B (zh) * | 2014-10-17 | 2022-06-21 | 香港科技大学 | 用于从空气中湿气去除和水富集的材料 |
CN105381694B (zh) * | 2015-12-07 | 2018-01-12 | 兴边富民(北京)清洁能源技术有限公司 | 一种煤矿乏风及抽放瓦斯的掺混处理系统 |
CN109803746A (zh) | 2016-10-07 | 2019-05-24 | 托普索公司 | 用臭氧进行低温气体清洁的方法和用于该方法的催化袋式过滤器 |
KR102539338B1 (ko) * | 2017-09-14 | 2023-06-02 | 가부시키가이샤 세이부 기켄 | 가스 치환용 드라이룸 |
CN113967393A (zh) * | 2020-07-24 | 2022-01-25 | 惠亚科技(东台)有限公司 | 改良型隔离病房结构 |
Family Cites Families (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4000990A (en) | 1975-04-16 | 1977-01-04 | Nrg Nufuel Company | Adsorption process |
US4153429A (en) | 1975-05-21 | 1979-05-08 | Union Carbide Corporation | Selective adsorption of NOx from gas streams |
US4164901A (en) * | 1978-01-16 | 1979-08-21 | American Air Filter Company, Inc. | Indoor gun firing range enclosure having a ventilation system |
JPS5524525A (en) * | 1978-08-08 | 1980-02-21 | Matsushita Electric Ind Co Ltd | Fabrication of filter |
JPS5524561A (en) * | 1978-08-09 | 1980-02-21 | Matsushita Electric Ind Co Ltd | Fabrication of filter |
DE3103137A1 (de) | 1981-01-30 | 1982-08-26 | Bayer Ag, 5090 Leverkusen | Verfahren zur herstellung aliphatischer cyclischer kohlensaeureester |
JPS5939019A (ja) * | 1982-08-27 | 1984-03-03 | Hitachi Ltd | クリ−ン保管箱 |
IT1179369B (it) | 1984-05-15 | 1987-09-16 | Ital Idee Srl | Gruppo filtrante multiplo, particolarmente per impianti di aerazione e condizionamento per autoveicoli e ambienti chiusi, munito di mezzi di controllo dell'efficienza |
CH663906A5 (de) * | 1984-08-13 | 1988-01-29 | Sulzer Ag | Adsorptionsvorrichtung zum reinigen von gasen. |
GB8422444D0 (en) | 1984-09-05 | 1984-10-10 | Dowty Fuel Syst Ltd | Pure-air generator |
DE3511320C1 (de) | 1985-03-28 | 1986-10-09 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Vorrichtung zur Reinigung der Gasatmosphaeren mehrerer Arbeitsraeume |
JPH0622654B2 (ja) | 1985-12-06 | 1994-03-30 | 東洋紡績株式会社 | ハロゲン化炭化水素系ガスの吸着除去方法 |
JPS6312315A (ja) | 1986-07-01 | 1988-01-19 | Ebara Res Co Ltd | 気体浄化装置用フイルタ |
JPS6397246A (ja) * | 1986-10-15 | 1988-04-27 | Ebara Res Co Ltd | 気体の清浄方法及びその装置 |
DE3703137A1 (de) | 1987-02-03 | 1988-08-18 | Hoelter Heinz | Mehrfach aktiver bakterizider-fungizider chemisorptionsfilter zur behandlung von atemluft insbesondere fuer allergiekranke menschen |
US5743940A (en) * | 1988-04-07 | 1998-04-28 | Japan Atomic Energy Research Institute | Process for producing gas adsorbent |
JPH01262953A (ja) * | 1988-04-13 | 1989-10-19 | Ebara Res Co Ltd | 空気中の微生物を殺菌除去する方法及びその装置 |
JPH0257844A (ja) | 1988-08-22 | 1990-02-27 | Hitachi Plant Eng & Constr Co Ltd | クリーンルームの湿度制御方法 |
US4881953A (en) * | 1988-09-15 | 1989-11-21 | Union Carbide Corporation | Prevention of membrane degradation |
JPH0526423Y2 (de) * | 1988-09-27 | 1993-07-05 | ||
JP2640513B2 (ja) * | 1988-10-31 | 1997-08-13 | 日本パイオニクス株式会社 | 不活性ガスの精製装置 |
JPH02126912A (ja) * | 1988-11-04 | 1990-05-15 | Shimizu Corp | 空気清浄装置及びこれを用いたクリーンルーム |
JP2736662B2 (ja) | 1988-11-04 | 1998-04-02 | 東芝セラミックス株式会社 | 半導体ウェーハの曇防止装置 |
DE3916511A1 (de) * | 1989-05-20 | 1990-12-13 | Seitz Filter Werke | Membranfiltervorrichtung zur mikro- und ultrafiltration von fluiden im crossflow-verfahren |
GB8916510D0 (en) * | 1989-07-19 | 1989-09-06 | Boc Group Plc | Separation of gas mixtures |
US5069692A (en) * | 1989-12-11 | 1991-12-03 | Sundstrand Corporation | Fully integrated inert gas and oxidizer replenishment system |
JP2536564Y2 (ja) * | 1990-02-13 | 1997-05-21 | 株式会社リコー | 画像形成装置 |
US5042997A (en) | 1990-07-27 | 1991-08-27 | Rhodes James A | Air control system providing healthful enclosed environment |
US5080699A (en) | 1990-11-20 | 1992-01-14 | Trion, Inc. | Filter apparatus |
JP2930702B2 (ja) | 1990-11-28 | 1999-08-03 | 株式会社テクノ菱和 | 空気イオン化システム |
US5221520A (en) | 1991-09-27 | 1993-06-22 | North Carolina Center For Scientific Research, Inc. | Apparatus for treating indoor air |
US6340381B1 (en) * | 1991-12-02 | 2002-01-22 | Ebara Research Co., Ltd. | Method and apparatus for the preparation of clean gases |
WO1994012265A1 (en) * | 1992-12-02 | 1994-06-09 | Ebara-Infilco Co., Ltd. | Method and apparatus for preventing contamination of substrate or substrate surface |
JPH06410A (ja) * | 1992-02-12 | 1994-01-11 | Takeda Chem Ind Ltd | ガス処理装置 |
US5922105A (en) * | 1992-12-02 | 1999-07-13 | Ebara Research Co., Ltd. | Method and apparatus for the preparation of clean gases |
US5700436A (en) * | 1993-01-21 | 1997-12-23 | Calgon Carbon Corporation | Purification of air in enclosed spaces |
US5350443B2 (en) * | 1993-04-19 | 1999-08-10 | Von Hasso Bluecher | Filter sheet material for passenger cabins in motor vehicles |
US5399319A (en) | 1993-08-02 | 1995-03-21 | Vector Technologies Ltd. | Apparatus for filtering air and for creating a positive/negative pressure |
US5451249A (en) * | 1994-06-14 | 1995-09-19 | International Fuel Cells | Landfill gas treatment system |
FR2730790B1 (fr) * | 1995-02-17 | 1997-05-23 | Air Liquide | Procede d'introduction d'un gaz de remplissage dans une enceinte et installation de mise en oeuvre |
-
1992
- 1992-12-02 WO PCT/JP1992/001579 patent/WO1994012265A1/ja active IP Right Grant
- 1992-12-02 US US08/424,545 patent/US6733570B2/en not_active Expired - Fee Related
- 1992-12-02 DE DE69224917T patent/DE69224917T2/de not_active Expired - Fee Related
- 1992-12-02 JP JP51296194A patent/JP3320730B2/ja not_active Expired - Lifetime
- 1992-12-02 EP EP92924872A patent/EP0672445B1/de not_active Expired - Lifetime
-
2003
- 2003-12-29 US US10/746,278 patent/US6911064B2/en not_active Expired - Fee Related
-
2005
- 2005-03-15 US US11/079,252 patent/US7029518B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0672445A1 (de) | 1995-09-20 |
EP0672445B1 (de) | 1998-03-25 |
US6911064B2 (en) | 2005-06-28 |
US7029518B2 (en) | 2006-04-18 |
EP0672445A4 (de) | 1996-09-11 |
US20040149128A1 (en) | 2004-08-05 |
US6733570B2 (en) | 2004-05-11 |
US20030089231A1 (en) | 2003-05-15 |
WO1994012265A1 (en) | 1994-06-09 |
DE69224917T2 (de) | 1998-10-22 |
JP3320730B2 (ja) | 2002-09-03 |
US20050178267A1 (en) | 2005-08-18 |
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