DE69222742T2 - Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten - Google Patents

Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten

Info

Publication number
DE69222742T2
DE69222742T2 DE69222742T DE69222742T DE69222742T2 DE 69222742 T2 DE69222742 T2 DE 69222742T2 DE 69222742 T DE69222742 T DE 69222742T DE 69222742 T DE69222742 T DE 69222742T DE 69222742 T2 DE69222742 T2 DE 69222742T2
Authority
DE
Germany
Prior art keywords
measuring
thickness
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69222742T
Other languages
English (en)
Other versions
DE69222742D1 (de
Inventor
Jeffrey T Fanton
Allan Rosencwaig
Jon Opsal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Wave Inc
Original Assignee
Therma Wave Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Wave Inc filed Critical Therma Wave Inc
Application granted granted Critical
Publication of DE69222742D1 publication Critical patent/DE69222742D1/de
Publication of DE69222742T2 publication Critical patent/DE69222742T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
DE69222742T 1991-12-23 1992-12-04 Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten Expired - Lifetime DE69222742T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/813,900 US5181080A (en) 1991-12-23 1991-12-23 Method and apparatus for evaluating the thickness of thin films

Publications (2)

Publication Number Publication Date
DE69222742D1 DE69222742D1 (de) 1997-11-20
DE69222742T2 true DE69222742T2 (de) 1998-05-20

Family

ID=25213703

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69222742T Expired - Lifetime DE69222742T2 (de) 1991-12-23 1992-12-04 Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten

Country Status (4)

Country Link
US (1) US5181080A (de)
EP (1) EP0549166B1 (de)
JP (1) JP3337252B2 (de)
DE (1) DE69222742T2 (de)

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Also Published As

Publication number Publication date
EP0549166A3 (en) 1993-10-27
EP0549166A2 (de) 1993-06-30
US5181080A (en) 1993-01-19
DE69222742D1 (de) 1997-11-20
EP0549166B1 (de) 1997-10-15
JPH05248826A (ja) 1993-09-28
JP3337252B2 (ja) 2002-10-21

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