DE69221196T2 - Mikromechanischer Shutter - Google Patents

Mikromechanischer Shutter

Info

Publication number
DE69221196T2
DE69221196T2 DE69221196T DE69221196T DE69221196T2 DE 69221196 T2 DE69221196 T2 DE 69221196T2 DE 69221196 T DE69221196 T DE 69221196T DE 69221196 T DE69221196 T DE 69221196T DE 69221196 T2 DE69221196 T2 DE 69221196T2
Authority
DE
Germany
Prior art keywords
micromechanical shutter
micromechanical
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69221196T
Other languages
English (en)
Other versions
DE69221196D1 (de
Inventor
Michael A Mignardi
Jeffrey B Sampsell
Mark Boysel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69221196D1 publication Critical patent/DE69221196D1/de
Application granted granted Critical
Publication of DE69221196T2 publication Critical patent/DE69221196T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
DE69221196T 1991-04-26 1992-04-23 Mikromechanischer Shutter Expired - Fee Related DE69221196T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/691,920 US5226099A (en) 1991-04-26 1991-04-26 Digital micromirror shutter device

Publications (2)

Publication Number Publication Date
DE69221196D1 DE69221196D1 (de) 1997-09-04
DE69221196T2 true DE69221196T2 (de) 1998-01-08

Family

ID=24778505

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69221196T Expired - Fee Related DE69221196T2 (de) 1991-04-26 1992-04-23 Mikromechanischer Shutter

Country Status (7)

Country Link
US (1) US5226099A (de)
EP (1) EP0510629B1 (de)
JP (1) JP3213048B2 (de)
KR (1) KR100261400B1 (de)
CN (1) CN1041020C (de)
DE (1) DE69221196T2 (de)
TW (1) TW295636B (de)

Families Citing this family (322)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0615147B1 (de) * 1992-01-16 1998-08-05 Texas Instruments Incorporated Mikromechanische, verformbare Spiegelvorrichtungen (-DMD-)
US5602671A (en) * 1990-11-13 1997-02-11 Texas Instruments Incorporated Low surface energy passivation layer for micromechanical devices
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5345521A (en) * 1993-07-12 1994-09-06 Texas Instrument Incorporated Architecture for optical switch
US5389182A (en) * 1993-08-02 1995-02-14 Texas Instruments Incorporated Use of a saw frame with tape as a substrate carrier for wafer level backend processing
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US7297471B1 (en) 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US7550794B2 (en) 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7776631B2 (en) 1994-05-05 2010-08-17 Qualcomm Mems Technologies, Inc. MEMS device and method of forming a MEMS device
US7460291B2 (en) 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US6680792B2 (en) 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US7138984B1 (en) 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US6360424B1 (en) 1994-06-06 2002-03-26 Case Western Reserve University Method of making micromotors with utilitarian features
US6029337A (en) * 1994-06-06 2000-02-29 Case Western Reserve University Methods of fabricating micromotors with utilitarian features
US5705318A (en) * 1994-06-06 1998-01-06 Case Western Reserve University Micromotors and methods of fabrication
WO1995034943A1 (en) * 1994-06-10 1995-12-21 Case Western Reserve University Micromotors with utilitarian features and methods of their fabrication
US5788468A (en) * 1994-11-03 1998-08-04 Memstek Products, Llc Microfabricated fluidic devices
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US7907319B2 (en) 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US5825529A (en) * 1996-06-27 1998-10-20 Xerox Corporation Gyricon display with no elastomer substrate
US5914805A (en) * 1996-06-27 1999-06-22 Xerox Corporation Gyricon display with interstitially packed particles
US5754332A (en) * 1996-06-27 1998-05-19 Xerox Corporation Monolayer gyricon display
US6055091A (en) * 1996-06-27 2000-04-25 Xerox Corporation Twisting-cylinder display
US5904790A (en) * 1997-10-30 1999-05-18 Xerox Corporation Method of manufacturing a twisting cylinder display using multiple chromatic values
US5894367A (en) * 1996-09-13 1999-04-13 Xerox Corporation Twisting cylinder display using multiple chromatic values
US5922268A (en) * 1997-10-30 1999-07-13 Xerox Corporation Method of manufacturing a twisting cylinder display using multiple chromatic values
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
US6097859A (en) 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US5923798A (en) * 1997-05-15 1999-07-13 Lucent Technologies, Inc. Micro machined optical switch
US5961767A (en) * 1997-05-15 1999-10-05 Lucent Technologies, Inc. Method for forming micron-sized and smaller liquid droplets
KR100270813B1 (ko) * 1997-07-11 2000-11-01 윤종용 화상표시장치용가동형마이크로미러
US5959375A (en) * 1997-09-30 1999-09-28 Garcia; Ernest J. Device and method for redirecting electromagnetic signals
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US5974207A (en) * 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
US5900192A (en) * 1998-01-09 1999-05-04 Xerox Corporation Method and apparatus for fabricating very small two-color balls for a twisting ball display
US5976428A (en) * 1998-01-09 1999-11-02 Xerox Corporation Method and apparatus for controlling formation of two-color balls for a twisting ball display
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6498870B1 (en) 1998-04-20 2002-12-24 Omm, Inc. Micromachined optomechanical switches
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6404942B1 (en) 1998-10-23 2002-06-11 Corning Incorporated Fluid-encapsulated MEMS optical switch
US6389189B1 (en) 1998-10-23 2002-05-14 Corning Incorporated Fluid-encapsulated MEMS optical switch
US6205267B1 (en) * 1998-11-20 2001-03-20 Lucent Technologies Optical switch
US6173105B1 (en) * 1998-11-20 2001-01-09 Lucent Technologies Optical attenuator
US6445840B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
US6453083B1 (en) 1999-05-28 2002-09-17 Anis Husain Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
US6445841B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
US6449406B1 (en) 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6201633B1 (en) 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
DE19941045A1 (de) * 1999-08-28 2001-04-12 Bosch Gmbh Robert Mikroschwingvorrichtung
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
EP1094355A1 (de) 1999-10-19 2001-04-25 Corning Incorporated Elektrischer Anschluss von planaren Lichtwellenschaltungen
US6643426B1 (en) 1999-10-19 2003-11-04 Corning Incorporated Mechanically assisted release for MEMS optical switch
US6440252B1 (en) 1999-12-17 2002-08-27 Xerox Corporation Method for rotatable element assembly
US6360036B1 (en) 2000-01-14 2002-03-19 Corning Incorporated MEMS optical switch and method of manufacture
EP1128201A1 (de) * 2000-02-25 2001-08-29 C.S.E.M. Centre Suisse D'electronique Et De Microtechnique Sa Schaltvorrichtung, insbesondere zum optischen Schalten
US6545671B1 (en) 2000-03-02 2003-04-08 Xerox Corporation Rotating element sheet material with reversible highlighting
US6351580B1 (en) * 2000-03-27 2002-02-26 Jds Uniphase Corporation Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements
US6360539B1 (en) * 2000-04-05 2002-03-26 Jds Uniphase Corporation Microelectromechanical actuators including driven arched beams for mechanical advantage
US6498674B1 (en) 2000-04-14 2002-12-24 Xerox Corporation Rotating element sheet material with generalized containment structure
US6709886B2 (en) 2000-04-25 2004-03-23 Umachines, Inc. Method of fabricating micromachined devices
US6639713B2 (en) * 2000-04-25 2003-10-28 Umachines, Inc. Silicon micromachined optical device
US6504525B1 (en) 2000-05-03 2003-01-07 Xerox Corporation Rotating element sheet material with microstructured substrate and method of use
US6539143B1 (en) 2000-07-31 2003-03-25 Sarcon Microsystems, Inc. Optical switching system
US6411754B1 (en) * 2000-08-25 2002-06-25 Corning Incorporated Micromechanical optical switch and method of manufacture
TW531669B (en) * 2000-09-15 2003-05-11 Ibm Optical devices
US6567574B1 (en) 2000-10-06 2003-05-20 Omm, Inc. Modular three-dimensional optical switch
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
US6556741B1 (en) 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
US6524500B2 (en) 2000-12-28 2003-02-25 Xerox Corporation Method for making microencapsulated gyricon beads
US6690350B2 (en) 2001-01-11 2004-02-10 Xerox Corporation Rotating element sheet material with dual vector field addressing
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
WO2002086572A1 (en) * 2001-04-18 2002-10-31 L3 Optics, Inc. Collapse based integrated electrostatic active optical elements and method for manufacture thereof
JP2003057569A (ja) * 2001-06-07 2003-02-26 Sumitomo Electric Ind Ltd 光スイッチ及び光スイッチアレイ
US20050025412A1 (en) * 2001-06-13 2005-02-03 Yoshihiro Hirata Optical switch
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
EP1456699B1 (de) * 2001-07-05 2008-12-31 International Business Machines Corporation Mikrosystemschalter
KR100452112B1 (ko) * 2001-07-18 2004-10-12 한국과학기술원 정전 구동기
US6589625B1 (en) 2001-08-01 2003-07-08 Iridigm Display Corporation Hermetic seal and method to create the same
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
KR20040044965A (ko) * 2001-09-21 2004-05-31 스미토모 덴키 고교 가부시키가이샤 광 스위치 및 광 스위치 어레이
KR100393193B1 (ko) * 2001-09-29 2003-07-31 삼성전자주식회사 광 도파로와 ｍｅｍｓ 액추에이터를 구비한 가변 광 감쇠기
US6699570B2 (en) 2001-11-06 2004-03-02 Xerox Corporation Colored cyber toner using multicolored gyricon spheres
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US20030227035A1 (en) * 2002-06-05 2003-12-11 Hiromu Ishii Micromachine and manufacturing method therefor
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
TW200413810A (en) 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
JP2004264787A (ja) * 2003-03-04 2004-09-24 Ntt Electornics Corp 光減衰量制御方法および光減衰量制御装置
JP2004294890A (ja) * 2003-03-27 2004-10-21 Ntt Electornics Corp 可変光減衰器
TW594360B (en) 2003-04-21 2004-06-21 Prime View Int Corp Ltd A method for fabricating an interference display cell
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7221495B2 (en) 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
JP2005099678A (ja) * 2003-08-20 2005-04-14 Olympus Corp 光遮断装置および光スイッチ装置
TWI231865B (en) 2003-08-26 2005-05-01 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TW593126B (en) 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US20070009899A1 (en) * 2003-10-02 2007-01-11 Mounts William M Nucleic acid arrays for detecting gene expression in animal models of inflammatory diseases
US7012726B1 (en) 2003-11-03 2006-03-14 Idc, Llc MEMS devices with unreleased thin film components
US7161728B2 (en) 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7532194B2 (en) 2004-02-03 2009-05-12 Idc, Llc Driver voltage adjuster
US7119945B2 (en) 2004-03-03 2006-10-10 Idc, Llc Altering temporal response of microelectromechanical elements
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7060895B2 (en) 2004-05-04 2006-06-13 Idc, Llc Modifying the electro-mechanical behavior of devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7256922B2 (en) 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
KR101255691B1 (ko) 2004-07-29 2013-04-17 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7551159B2 (en) 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7602375B2 (en) 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7368803B2 (en) 2004-09-27 2008-05-06 Idc, Llc System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7369294B2 (en) 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7586484B2 (en) 2004-09-27 2009-09-08 Idc, Llc Controller and driver features for bi-stable display
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7460246B2 (en) * 2004-09-27 2008-12-02 Idc, Llc Method and system for sensing light using interferometric elements
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7750886B2 (en) 2004-09-27 2010-07-06 Qualcomm Mems Technologies, Inc. Methods and devices for lighting displays
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7405924B2 (en) 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7343080B2 (en) 2004-09-27 2008-03-11 Idc, Llc System and method of testing humidity in a sealed MEMS device
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7553684B2 (en) 2004-09-27 2009-06-30 Idc, Llc Method of fabricating interferometric devices using lift-off processing techniques
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
US7916103B2 (en) 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7161730B2 (en) 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7429334B2 (en) 2004-09-27 2008-09-30 Idc, Llc Methods of fabricating interferometric modulators by selectively removing a material
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7453579B2 (en) 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7657242B2 (en) * 2004-09-27 2010-02-02 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7259449B2 (en) 2004-09-27 2007-08-21 Idc, Llc Method and system for sealing a substrate
US7299681B2 (en) 2004-09-27 2007-11-27 Idc, Llc Method and system for detecting leak in electronic devices
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7920135B2 (en) * 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
BRPI0509575A (pt) 2004-09-27 2007-10-09 Idc Llc método e dispositivo para modulação de luz interferométrica de multi-estados
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7554714B2 (en) 2004-09-27 2009-06-30 Idc, Llc Device and method for manipulation of thermal response in a modulator
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7373026B2 (en) * 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7535466B2 (en) 2004-09-27 2009-05-19 Idc, Llc System with server based control of client device display features
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7679627B2 (en) * 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7349136B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and device for a display having transparent components integrated therein
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7415186B2 (en) 2004-09-27 2008-08-19 Idc, Llc Methods for visually inspecting interferometric modulators for defects
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
TW200628877A (en) 2005-02-04 2006-08-16 Prime View Int Co Ltd Method of manufacturing optical interference type color display
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
EP1878001A1 (de) 2005-05-05 2008-01-16 QUALCOMM Incorporated, Inc. Dynamische treiber-ic und anzeigetafelkonfiguration
EP1910216A1 (de) 2005-07-22 2008-04-16 QUALCOMM Incorporated Stützstruktur für eine mikroelektromechanische vorrichtung und verfahren dazu
EP2495212A3 (de) 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. MEMS-Vorrichtungen mit Stützstrukturen und Herstellungsverfahren dafür
KR101423321B1 (ko) 2005-07-22 2014-07-30 퀄컴 엠이엠에스 테크놀로지스, 인크. 지지 구조물들을 가지는 전자기계 장치들 및 그 제조방법들
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
KR20080068821A (ko) 2005-09-30 2008-07-24 퀄컴 엠이엠스 테크놀로지스, 인크. Ｍｅｍｓ 장치 및 해당 장치용의 접속부
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7762463B2 (en) * 2006-01-05 2010-07-27 Lockheed Martin Corporation MEMS-based security system
US7636151B2 (en) 2006-01-06 2009-12-22 Qualcomm Mems Technologies, Inc. System and method for providing residual stress test structures
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7652814B2 (en) 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
EP1979890A1 (de) 2006-02-10 2008-10-15 Qualcomm Mems Technologies, Inc. Verfahren und system zur aktualisierung von anzeigen mit einem deterministischen inhalt
US7603001B2 (en) 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US7582952B2 (en) 2006-02-21 2009-09-01 Qualcomm Mems Technologies, Inc. Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof
US7547568B2 (en) 2006-02-22 2009-06-16 Qualcomm Mems Technologies, Inc. Electrical conditioning of MEMS device and insulating layer thereof
US7550810B2 (en) 2006-02-23 2009-06-23 Qualcomm Mems Technologies, Inc. MEMS device having a layer movable at asymmetric rates
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7643203B2 (en) * 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7903047B2 (en) * 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7527996B2 (en) 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US7623287B2 (en) 2006-04-19 2009-11-24 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) * 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7405863B2 (en) 2006-06-01 2008-07-29 Qualcomm Mems Technologies, Inc. Patterning of mechanical layer in MEMS to reduce stresses at supports
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7471442B2 (en) 2006-06-15 2008-12-30 Qualcomm Mems Technologies, Inc. Method and apparatus for low range bit depth enhancements for MEMS display architectures
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7766498B2 (en) * 2006-06-21 2010-08-03 Qualcomm Mems Technologies, Inc. Linear solid state illuminator
US7385744B2 (en) 2006-06-28 2008-06-10 Qualcomm Mems Technologies, Inc. Support structure for free-standing MEMS device and methods for forming the same
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7388704B2 (en) 2006-06-30 2008-06-17 Qualcomm Mems Technologies, Inc. Determination of interferometric modulator mirror curvature and airgap variation using digital photographs
US7586602B2 (en) 2006-07-24 2009-09-08 General Electric Company Method and apparatus for improved signal to noise ratio in Raman signal detection for MEMS based spectrometers
US7566664B2 (en) 2006-08-02 2009-07-28 Qualcomm Mems Technologies, Inc. Selective etching of MEMS using gaseous halides and reactive co-etchants
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
US7845841B2 (en) 2006-08-28 2010-12-07 Qualcomm Mems Technologies, Inc. Angle sweeping holographic illuminator
US8107155B2 (en) 2006-10-06 2012-01-31 Qualcomm Mems Technologies, Inc. System and method for reducing visual artifacts in displays
KR20090094241A (ko) * 2006-10-06 2009-09-04 퀄컴 엠이엠스 테크놀로지스, 인크. 박형 라이트 바 및 그 제조방법
EP1943555B1 (de) 2006-10-06 2012-05-02 QUALCOMM MEMS Technologies, Inc. Optische verluststruktur in einer beleuchtungsvorrichtung
US7855827B2 (en) 2006-10-06 2010-12-21 Qualcomm Mems Technologies, Inc. Internal optical isolation structure for integrated front or back lighting
EP1943551A2 (de) 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Lichtführung
EP2069838A2 (de) 2006-10-06 2009-06-17 Qualcomm Mems Technologies, Inc. Beleuchtungsvorrichtung mit eingebautem lichtkoppler
WO2008045462A2 (en) 2006-10-10 2008-04-17 Qualcomm Mems Technologies, Inc. Display device with diffractive optics
US7545552B2 (en) 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7864395B2 (en) 2006-10-27 2011-01-04 Qualcomm Mems Technologies, Inc. Light guide including optical scattering elements and a method of manufacture
US7769255B2 (en) * 2006-11-07 2010-08-03 Olympus Corporation High port count instantiated wavelength selective switch
US7702194B2 (en) * 2006-11-07 2010-04-20 Olympus Corporation Beam steering element and associated methods for manifold fiberoptic switches
US8000568B2 (en) * 2006-11-07 2011-08-16 Olympus Corporation Beam steering element and associated methods for mixed manifold fiberoptic switches
US7720329B2 (en) * 2006-11-07 2010-05-18 Olympus Corporation Segmented prism element and associated methods for manifold fiberoptic switches
US8131123B2 (en) 2006-11-07 2012-03-06 Olympus Corporation Beam steering element and associated methods for manifold fiberoptic switches and monitoring
US7873246B2 (en) * 2006-11-07 2011-01-18 Olympus Corporation Beam steering element and associated methods for manifold fiberoptic switches and monitoring
US7724417B2 (en) * 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7535621B2 (en) 2006-12-27 2009-05-19 Qualcomm Mems Technologies, Inc. Aluminum fluoride films for microelectromechanical system applications
US7777954B2 (en) 2007-01-30 2010-08-17 Qualcomm Mems Technologies, Inc. Systems and methods of providing a light guiding layer
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7733439B2 (en) 2007-04-30 2010-06-08 Qualcomm Mems Technologies, Inc. Dual film light guide for illuminating displays
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7625825B2 (en) 2007-06-14 2009-12-01 Qualcomm Mems Technologies, Inc. Method of patterning mechanical layer for MEMS structures
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7595926B2 (en) 2007-07-05 2009-09-29 Qualcomm Mems Technologies, Inc. Integrated IMODS and solar cells on a substrate
US7570415B2 (en) 2007-08-07 2009-08-04 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US8022896B2 (en) * 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US7949213B2 (en) 2007-12-07 2011-05-24 Qualcomm Mems Technologies, Inc. Light illumination of displays with front light guide and coupling elements
KR101458904B1 (ko) * 2008-01-18 2014-11-07 삼성디스플레이 주식회사 표시 장치
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
WO2009102733A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Integrated front light diffuser for reflective displays
WO2009102731A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Devices and methods for enhancing brightness of displays using angle conversion layers
US8654061B2 (en) 2008-02-12 2014-02-18 Qualcomm Mems Technologies, Inc. Integrated front light solution
RU2010133952A (ru) 2008-02-14 2012-03-20 Квалкомм Мемс Текнолоджис, Инк. (Us) Устройство, имеющее генерирующую черную маску, и способ ее изготовления
US8190025B2 (en) * 2008-02-28 2012-05-29 Olympus Corporation Wavelength selective switch having distinct planes of operation
US8094358B2 (en) * 2008-03-27 2012-01-10 Qualcomm Mems Technologies, Inc. Dimming mirror
US7660028B2 (en) * 2008-03-28 2010-02-09 Qualcomm Mems Technologies, Inc. Apparatus and method of dual-mode display
US7852491B2 (en) 2008-03-31 2010-12-14 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US7787130B2 (en) 2008-03-31 2010-08-31 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US8077326B1 (en) 2008-03-31 2011-12-13 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US7787171B2 (en) * 2008-03-31 2010-08-31 Qualcomm Mems Technologies, Inc. Human-readable, bi-state environmental sensors based on micro-mechanical membranes
US8049951B2 (en) 2008-04-15 2011-11-01 Qualcomm Mems Technologies, Inc. Light with bi-directional propagation
US8118468B2 (en) * 2008-05-16 2012-02-21 Qualcomm Mems Technologies, Inc. Illumination apparatus and methods
JP5451754B2 (ja) * 2008-05-28 2014-03-26 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド ターニング微細構造を有する光導波路パネル及びその製造方法、並びにディスプレイ装置
WO2009149118A2 (en) * 2008-06-04 2009-12-10 Qualcomm Mems Technologies, Inc. Edge shadow reducing methods for prismatic front light
US7860668B2 (en) * 2008-06-18 2010-12-28 Qualcomm Mems Technologies, Inc. Pressure measurement using a MEMS device
US8172417B2 (en) 2009-03-06 2012-05-08 Qualcomm Mems Technologies, Inc. Shaped frontlight reflector for use with display
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
WO2010138765A1 (en) 2009-05-29 2010-12-02 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
WO2011017204A1 (en) * 2009-08-03 2011-02-10 Qualcomm Mems Technologies, Inc. Microstructures for light guide illumination
US8711361B2 (en) * 2009-11-05 2014-04-29 Qualcomm, Incorporated Methods and devices for detecting and measuring environmental conditions in high performance device packages
US20110169428A1 (en) * 2010-01-08 2011-07-14 Qualcomm Mems Technologies, Inc. Edge bar designs to mitigate edge shadow artifact
US20110176196A1 (en) * 2010-01-15 2011-07-21 Qualcomm Mems Technologies, Inc. Methods and devices for pressure detection
KR20130100232A (ko) 2010-04-09 2013-09-10 퀄컴 엠이엠에스 테크놀로지스, 인크. 전기 기계 디바이스의 기계층 및 그 형성 방법
US8390916B2 (en) 2010-06-29 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for false-color sensing and display
US8904867B2 (en) 2010-11-04 2014-12-09 Qualcomm Mems Technologies, Inc. Display-integrated optical accelerometer
US8902484B2 (en) 2010-12-15 2014-12-02 Qualcomm Mems Technologies, Inc. Holographic brightness enhancement film
US8714023B2 (en) 2011-03-10 2014-05-06 Qualcomm Mems Technologies, Inc. System and method for detecting surface perturbations
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
CN107678098B (zh) * 2016-08-01 2019-09-03 华为技术有限公司 光开关和光交换系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580873A (en) * 1983-12-30 1986-04-08 At&T Bell Laboratories Optical matrix switch
US4844577A (en) * 1986-12-19 1989-07-04 Sportsoft Systems, Inc. Bimorph electro optic light modulator
JPS6431211A (en) * 1987-07-28 1989-02-01 Toshiba Corp Position control device
FR2618914B1 (fr) * 1987-07-31 1991-12-06 Alain Souloumiac Perfectionnements apportes aux interrupteurs optomagnetiques
DE3817035C1 (en) * 1988-05-19 1989-08-17 Messerschmitt-Boelkow-Blohm Gmbh, 8012 Ottobrunn, De Micromechanical switch for optical fibres
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
US5046806A (en) * 1990-02-22 1991-09-10 Cst Coldswitch Holdings Inc. Single fibre control switches
US5042889A (en) * 1990-04-09 1991-08-27 At&T Bell Laboratories Magnetic activation mechanism for an optical switch

Also Published As

Publication number Publication date
TW295636B (de) 1997-01-11
JP3213048B2 (ja) 2001-09-25
EP0510629B1 (de) 1997-07-30
JPH06148540A (ja) 1994-05-27
US5226099A (en) 1993-07-06
CN1068198A (zh) 1993-01-20
EP0510629A1 (de) 1992-10-28
KR920020776A (ko) 1992-11-21
DE69221196D1 (de) 1997-09-04
KR100261400B1 (ko) 2000-07-01
CN1041020C (zh) 1998-12-02

Similar Documents

Publication Publication Date Title
DE69221196D1 (de) Mikromechanischer Shutter
DE69215436T2 (de) Projektor
DE69131357D1 (de) Projektor
FI942090A (fi) Sulfonamidiherbisidit
DK26790D0 (da) Skaarlaegger
DE69211269D1 (de) Beschleunigungsmessaufnehmer
DE69210179T2 (de) Beschleunigungsmesser
DK0650418T3 (da) Skydeskodde
DE69226465D1 (de) Stehbildkamera
DE69125873T2 (de) Kamera
DE69211225D1 (de) Projektor
FI923238A (fi) Cysteinamid innehaollande permanent
FI912993A0 (fi) Teline
NO920220D0 (no) Sulfonamid-derivater
DE69221471D1 (de) Photographisches bleichmittel
DE69133486D1 (de) Kamera
DK283390D0 (da) Skaarlaegger
DE69133038T2 (de) Kamera
DE69118424T2 (de) Kamera
KR930004108U (ko) 온 실
DK162990D0 (da) Mikroorganismer
KR930004983U (ko) 플라이가 일체로 형성된 렌즈
KR920015846U (ko) 클리어 다이랙트 디래치
KR950009193U (ko) 셧터 부재
KR950004024U (ko) 셔터용 연결부재

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee