DE69220120D1 - Integrierte optische Wellenleitervorrichtungen und Herstellungsverfahren - Google Patents

Integrierte optische Wellenleitervorrichtungen und Herstellungsverfahren

Info

Publication number
DE69220120D1
DE69220120D1 DE69220120T DE69220120T DE69220120D1 DE 69220120 D1 DE69220120 D1 DE 69220120D1 DE 69220120 T DE69220120 T DE 69220120T DE 69220120 T DE69220120 T DE 69220120T DE 69220120 D1 DE69220120 D1 DE 69220120D1
Authority
DE
Germany
Prior art keywords
optical waveguide
manufacturing processes
integrated optical
waveguide devices
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69220120T
Other languages
English (en)
Other versions
DE69220120T2 (de
Inventor
Robert M Boysel
Gregory A Magel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69220120D1 publication Critical patent/DE69220120D1/de
Publication of DE69220120T2 publication Critical patent/DE69220120T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  in optical waveguides, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • G02F1/0142—TE-TM mode conversion
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/31—Digital deflection, i.e. optical switching
    • G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
    • G02F1/3132—Digital deflection, i.e. optical switching in an optical waveguide structure of directional coupler type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/07—Polarisation dependent
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/22—Function characteristic diffractive
DE69220120T 1991-03-28 1992-03-12 Integrierte optische Wellenleitervorrichtungen und Herstellungsverfahren Expired - Fee Related DE69220120T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/676,688 US5178728A (en) 1991-03-28 1991-03-28 Integrated-optic waveguide devices and method

Publications (2)

Publication Number Publication Date
DE69220120D1 true DE69220120D1 (de) 1997-07-10
DE69220120T2 DE69220120T2 (de) 1997-11-06

Family

ID=24715553

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69220120T Expired - Fee Related DE69220120T2 (de) 1991-03-28 1992-03-12 Integrierte optische Wellenleitervorrichtungen und Herstellungsverfahren

Country Status (6)

Country Link
US (2) US5178728A (de)
EP (1) EP0505844B1 (de)
JP (1) JP3145771B2 (de)
KR (1) KR100261399B1 (de)
DE (1) DE69220120T2 (de)
TW (2) TW240340B (de)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5178728A (en) * 1991-03-28 1993-01-12 Texas Instruments Incorporated Integrated-optic waveguide devices and method
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US5345521A (en) * 1993-07-12 1994-09-06 Texas Instrument Incorporated Architecture for optical switch
US5774252A (en) * 1994-01-07 1998-06-30 Texas Instruments Incorporated Membrane device with recessed electrodes and method of making
US5506919A (en) * 1995-03-27 1996-04-09 Eastman Kodak Company Conductive membrane optical modulator
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US5771321A (en) * 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
US5701372A (en) * 1996-10-22 1997-12-23 Texas Instruments Incorporated Hybrid architecture for integrated optic switchable time delay lines and method of fabricating same
US5721801A (en) * 1996-12-17 1998-02-24 Texas Instruments Incorporated Membrane optical waveguide device and method of fabrication
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6434294B1 (en) * 1998-09-02 2002-08-13 Bae Systems Aerospace Electronics Inc. Photonic local oscillator signal generator and method for generating a local oscillator signal
GB2359898A (en) * 2000-03-04 2001-09-05 Bookham Technology Ltd An integrated optical waveguide
US6836494B1 (en) * 2000-05-31 2004-12-28 Lucent Technologies Inc. Structure and method for processing optical energy
US7003187B2 (en) 2000-08-07 2006-02-21 Rosemount Inc. Optical switch with moveable holographic optical element
US6810176B2 (en) 2000-08-07 2004-10-26 Rosemount Inc. Integrated transparent substrate and diffractive optical element
US6522800B2 (en) * 2000-12-21 2003-02-18 Bernardo F. Lucero Microstructure switches
US6785458B2 (en) * 2001-02-11 2004-08-31 Georgia Tech Research Corporation Guided-wave optical interconnections embedded within a microelectronic wafer-level batch package
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
JP4032216B2 (ja) * 2001-07-12 2008-01-16 ソニー株式会社 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置
US6954561B1 (en) * 2001-07-16 2005-10-11 Applied Materials Inc Methods for forming thermo-optic switches, routers and attenuators
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6785001B2 (en) * 2001-08-21 2004-08-31 Silicon Light Machines, Inc. Method and apparatus for measuring wavelength jitter of light signal
KR20030050798A (ko) * 2001-12-19 2003-06-25 주식회사 엘지이아이 자기구동 마이크로미러 및 그 제조방법과, 그를 이용한광스위치
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6987901B2 (en) * 2002-03-01 2006-01-17 Rosemount, Inc. Optical switch with 3D waveguides
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US7057795B2 (en) * 2002-08-20 2006-06-06 Silicon Light Machines Corporation Micro-structures with individually addressable ribbon pairs
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
KR100624415B1 (ko) * 2003-12-17 2006-09-18 삼성전자주식회사 광디바이스 및 그 제조방법
SE0401011L (sv) * 2004-04-19 2005-10-20 Phoxtal Comm Ab Optisk omkopplare
GB0516561D0 (en) * 2005-08-12 2005-09-21 Technetix Group Ltd Signal splitter
US9791623B2 (en) * 2009-11-30 2017-10-17 Board Of Regents, The University Of Texas System Multilevel leaky-mode resonant optical devices
US10042091B2 (en) * 2012-09-29 2018-08-07 Purdue Research Foundation Holey optical device
US11422305B2 (en) * 2020-12-02 2022-08-23 Globalfoundries U.S. Inc. Structures for filtering light polarization states on a photonics chip

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2626563A1 (de) * 1976-06-14 1977-12-29 Siemens Ag Verfahren zum herstellen von lichtleiterstrukturen mit dazwischenliegenden elektroden
US4575919A (en) * 1984-05-24 1986-03-18 At&T Bell Laboratories Method of making heteroepitaxial ridge overgrown laser
CA1255382A (en) * 1984-08-10 1989-06-06 Masao Kawachi Hybrid optical integrated circuit with alignment guides
US4749245A (en) * 1985-03-11 1988-06-07 Kuraray Co., Ltd. Thin film waveguide device and manufacturing method for making same
US5091983A (en) * 1987-06-04 1992-02-25 Walter Lukosz Optical modulation apparatus and measurement method
EP0397895A1 (de) * 1989-05-13 1990-11-22 SELENIA INDUSTRIE ELETTRONICHE ASSOCIATE S.p.A. Verfahren zur Herstellung von Linsen in flachen optischen Monomodeleitern aus LiNbO3
US5178728A (en) * 1991-03-28 1993-01-12 Texas Instruments Incorporated Integrated-optic waveguide devices and method

Also Published As

Publication number Publication date
JPH06130235A (ja) 1994-05-13
EP0505844B1 (de) 1997-06-04
TW320785B (de) 1997-11-21
EP0505844A3 (en) 1993-01-20
DE69220120T2 (de) 1997-11-06
TW240340B (de) 1995-02-11
US5278925A (en) 1994-01-11
EP0505844A2 (de) 1992-09-30
KR920019002A (ko) 1992-10-22
US5178728A (en) 1993-01-12
JP3145771B2 (ja) 2001-03-12
KR100261399B1 (ko) 2000-07-01

Similar Documents

Publication Publication Date Title
DE69220120T2 (de) Integrierte optische Wellenleitervorrichtungen und Herstellungsverfahren
DE69223463D1 (de) Optische Halbleiter-Wellenleitervorrichtung und ihr Herstellungsverfahren
DE69303654T2 (de) Optische Wellenleitervorrichtung und Herstellungsverfahren
DE69323958T2 (de) Optische Wellenleiter-Anordnung und Herstellungsmethode
DE69431318D1 (de) Optische Verrichtungen, integrierte optische Vorrichtungen und Herstellungsverfahren derselben
DE69407312D1 (de) Integrierte optische Halbleiteranordnung und Herstellungsverfahren
DE69313365D1 (de) Optische Halbleitervorrichtung und ihr Herstellungsverfahren
DE69430361D1 (de) Verlustarme optische und optoelektronische integrierte schaltungen
DE69332664T2 (de) Ein optisches Wellenleiterbauelement und Herstellungsverfahren dafür
DE69511810T2 (de) Optische Halbleitervorrichtung und Herstellungsverfahren
DE69117647T2 (de) Passiver optischer Wellenleiter
DE69123066D1 (de) Optische Wellenleitervorrichtung
DE69311344T2 (de) Optische strahlungsvorrichtungen
DE69408743D1 (de) Optische Kopplungsvorrichtung und zugehörige Herstellungsmethode
DE69524794T2 (de) Optische Halbleitervorrichtung und Herstellungsverfahren
DE69415238D1 (de) Optische Wellenleiter-Vorrichtung
DE69405818T2 (de) Integrierte lineare optische Kupplung und Herstellungsverfahren
DE69118113T2 (de) Optische Halbleiteranordnung und ihr Herstellungsverfahren
DE69025564D1 (de) Nichtlineare optische Vorrichtungen und Herstellungsverfahren
DE69421477D1 (de) Optische Wellenleiter-Vorrichtung
DE69731176D1 (de) Optische Wellenleitervorrichtung und Herstellungsverfahren
DE69405224D1 (de) Optische vorrichtungen
DE69207943D1 (de) Optische Wellenleitervorrichtung
DE59207015D1 (de) Integriert optische schaltung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee