DE69219907D1 - Homogenisieranordnung für Laserstrahlung und dieselbe enthaltendes abbildendes Lidarsystem - Google Patents

Homogenisieranordnung für Laserstrahlung und dieselbe enthaltendes abbildendes Lidarsystem

Info

Publication number
DE69219907D1
DE69219907D1 DE69219907T DE69219907T DE69219907D1 DE 69219907 D1 DE69219907 D1 DE 69219907D1 DE 69219907 T DE69219907 T DE 69219907T DE 69219907 T DE69219907 T DE 69219907T DE 69219907 D1 DE69219907 D1 DE 69219907D1
Authority
DE
Germany
Prior art keywords
lidar system
uniform
imaging lidar
same
laser radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69219907T
Other languages
English (en)
Inventor
Kent P Pflibsen
Albert N Stuppi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaman Aerospace Corp
Original Assignee
Kaman Aerospace Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaman Aerospace Corp filed Critical Kaman Aerospace Corp
Application granted granted Critical
Publication of DE69219907D1 publication Critical patent/DE69219907D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0994Fibers, light pipes
DE69219907T 1991-08-27 1992-03-06 Homogenisieranordnung für Laserstrahlung und dieselbe enthaltendes abbildendes Lidarsystem Expired - Lifetime DE69219907D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/750,572 US5303084A (en) 1991-08-27 1991-08-27 Laser light beam homogenizer and imaging lidar system incorporating same

Publications (1)

Publication Number Publication Date
DE69219907D1 true DE69219907D1 (de) 1997-07-03

Family

ID=25018400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69219907T Expired - Lifetime DE69219907D1 (de) 1991-08-27 1992-03-06 Homogenisieranordnung für Laserstrahlung und dieselbe enthaltendes abbildendes Lidarsystem

Country Status (4)

Country Link
US (2) US5303084A (de)
EP (1) EP0493365B1 (de)
AT (1) ATE153778T1 (de)
DE (1) DE69219907D1 (de)

Families Citing this family (83)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6392689B1 (en) * 1991-02-21 2002-05-21 Eugene Dolgoff System for displaying moving images pseudostereoscopically
JP3151581B2 (ja) * 1992-12-21 2001-04-03 株式会社トプコン 光波距離計
DE4341553C1 (de) * 1993-12-07 1995-04-27 Fraunhofer Ges Forschung Vorrichtung zum Homogenisieren der Lichtverteilung eines Laserstrahles
US5625738A (en) * 1994-06-28 1997-04-29 Corning Incorporated Apparatus for uniformly illuminating a light valve
JPH09234579A (ja) * 1996-02-28 1997-09-09 Semiconductor Energy Lab Co Ltd レーザー照射装置
US6053615A (en) * 1996-08-02 2000-04-25 In Focus Systems, Inc. Image projector with polarization conversion system
US5825464A (en) * 1997-01-03 1998-10-20 Lockheed Corp Calibration system and method for lidar systems
WO1998037448A1 (en) 1997-02-19 1998-08-27 Digital Projection Limited Illumination system
KR19980068378A (ko) * 1997-02-19 1998-10-15 김광호 액정 프로젝터의 광학장치
DE69826950T2 (de) * 1997-09-05 2006-02-23 Sharp K.K. Dunkelfeld-Projektionsanzeigegerät
GB2329036A (en) * 1997-09-05 1999-03-10 Sharp Kk Optical system for redistributing optical extent and illumination source
CA2348386A1 (en) * 1998-10-30 2000-05-11 Helen Gourley Projector system with light pipe optics
US6203952B1 (en) * 1999-01-14 2001-03-20 3M Innovative Properties Company Imaged article on polymeric substrate
DE19940305C2 (de) * 1999-08-25 2003-06-18 Zeiss Carl Jena Gmbh Herstellverfahren für einen Lichtintegrator, einen Lichtintegrator sowie eine Verwendung desselben
EP1102041A1 (de) * 1999-11-20 2001-05-23 Reto T. Meili Messverfahren und Messsystem zum Ausführen des Messverfahrens
US6419365B1 (en) 2000-04-21 2002-07-16 Infocus Corporation Asymmetrical tunnel for spatially integrating light
US6517210B2 (en) 2000-04-21 2003-02-11 Infocus Corporation Shortened asymmetrical tunnel for spatially integrating light
US6560397B1 (en) * 2000-10-30 2003-05-06 Fraunhofer, Usa Optical system for varying the beam width using non-imaging optics
US6719429B2 (en) 2001-03-30 2004-04-13 Infocus Corporation Anamorphic illumination of micro-electromechanical display devices employed in multimedia projectors
WO2002086558A2 (en) 2001-04-23 2002-10-31 Willden Dee E Wedge-shaped lensless laser focusing device
DE10136611C1 (de) * 2001-07-23 2002-11-21 Jenoptik Laserdiode Gmbh Optische Anordnung zur Formung und Homogenisierung eines von einer Laserdiodenanordnung ausgehenden Laserstrahls
US6903859B2 (en) * 2001-12-07 2005-06-07 Micronic Laser Systems Ab Homogenizer
JPWO2003049175A1 (ja) * 2001-12-07 2005-04-21 ソニー株式会社 光照射装置及びレーザアニール装置
EP1400832B1 (de) * 2002-09-19 2014-10-22 Semiconductor Energy Laboratory Co., Ltd. Strahlhomogenisierer, Laserbestrahlungsvorrichtung, und Verfahren zur Herstellung einer Halbleiteranordnung
GB2395289A (en) * 2002-11-11 2004-05-19 Qinetiq Ltd Structured light generator
JP3767544B2 (ja) * 2002-11-25 2006-04-19 セイコーエプソン株式会社 光学装置、照明装置及びプロジェクタ
IL154479A0 (en) * 2003-02-16 2003-09-17 Elbit Systems Ltd Laser gated intensified ccd
US7327916B2 (en) * 2003-03-11 2008-02-05 Semiconductor Energy Laboratory Co., Ltd. Beam Homogenizer, laser irradiation apparatus, and method of manufacturing a semiconductor device
SG137674A1 (en) * 2003-04-24 2007-12-28 Semiconductor Energy Lab Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device
US7245802B2 (en) * 2003-08-04 2007-07-17 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus and method for manufacturing semiconductor device
US7169630B2 (en) 2003-09-30 2007-01-30 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device
DE102004046373A1 (de) * 2004-09-24 2006-03-30 Carl Zeiss Jena Gmbh Lichtintegrator
DE102004049964A1 (de) * 2004-10-14 2006-04-20 Carl Zeiss Jena Gmbh Verfahren zur Herstellung eines optischen Kunststoff-Hohlintegrators und Kunststoff-Hohlintegrator
US20060082888A1 (en) * 2004-10-19 2006-04-20 Andrew Huibers Optically reconfigurable light integrator in display systems using spatial light modulators
WO2006046495A1 (en) * 2004-10-27 2006-05-04 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, and laser irradiation method, laser irradiation apparatus, and laser annealing method of non-single crystalline semiconductor film using the same
US20070153392A1 (en) * 2005-01-21 2007-07-05 Meritt Reynolds Apparatus and method for illumination of light valves
DE102005005355B4 (de) * 2005-02-05 2018-05-09 Adc Automotive Distance Control Systems Gmbh Vorrichtung zur Formung eines Lichtstrahls
US7434946B2 (en) * 2005-06-17 2008-10-14 Texas Instruments Incorporated Illumination system with integrated heat dissipation device for use in display systems employing spatial light modulators
US7777955B2 (en) * 2005-07-29 2010-08-17 Optical Research Associates Rippled mixers for uniformity and color mixing
US7657147B2 (en) * 2006-03-02 2010-02-02 Solar Light Company, Inc. Sunlight simulator apparatus
US8558993B2 (en) 2010-05-21 2013-10-15 The National Institute of Standards and Technology, as Presented by the Secretary of Commerce Optical frequency comb-based coherent LIDAR
CN102650738A (zh) * 2011-02-25 2012-08-29 中强光电股份有限公司 照明系统及投射装置
US20120249781A1 (en) * 2011-04-04 2012-10-04 Richard Vollmerhausen Method consisting of pulsing a laser communicating with a gated-sensor so as to reduce speckle, reduce scintillation, improve laser beam uniformity and improve eye safety in laser range gated imagery
TWI529020B (zh) * 2013-12-02 2016-04-11 財團法人工業技術研究院 光束擴散模組以及光束產生系統
JP2017503352A (ja) 2014-01-06 2017-01-26 コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. カメラのための薄いledフラッシュ
US9720415B2 (en) 2015-11-04 2017-08-01 Zoox, Inc. Sensor-based object-detection optimization for autonomous vehicles
US11255951B1 (en) 2016-12-30 2022-02-22 Zoox, Inc. Aligning optical components in LIDAR systems
US10830878B2 (en) 2016-12-30 2020-11-10 Panosense Inc. LIDAR system
US10591740B2 (en) 2016-12-30 2020-03-17 Panosense Inc. Lens assembly for a LIDAR system
US10109183B1 (en) 2016-12-30 2018-10-23 Panosense Inc. Interface for transferring data between a non-rotating body and a rotating body
US10359507B2 (en) 2016-12-30 2019-07-23 Panosense Inc. Lidar sensor assembly calibration based on reference surface
US10048358B2 (en) 2016-12-30 2018-08-14 Panosense Inc. Laser power calibration and correction
US10742088B2 (en) 2016-12-30 2020-08-11 Panosense Inc. Support assembly for rotating body
US10122416B2 (en) 2016-12-30 2018-11-06 Panosense Inc. Interface for transferring power and data between a non-rotating body and a rotating body
US10942257B2 (en) 2016-12-31 2021-03-09 Innovusion Ireland Limited 2D scanning high precision LiDAR using combination of rotating concave mirror and beam steering devices
US11009605B2 (en) 2017-01-05 2021-05-18 Innovusion Ireland Limited MEMS beam steering and fisheye receiving lens for LiDAR system
WO2018148153A1 (en) * 2017-02-08 2018-08-16 Giant Leap Holdings, Llc Light steering and focusing by dielectrophoresis
DE102017213462A1 (de) * 2017-08-03 2019-02-07 Zumtobel Lighting Gmbh Lichtmischleiter
DE102017213466A1 (de) * 2017-08-03 2019-02-07 Zumtobel Lighting Gmbh Lichtmischleiter
US10338594B2 (en) * 2017-03-13 2019-07-02 Nio Usa, Inc. Navigation of autonomous vehicles to enhance safety under one or more fault conditions
US11487128B2 (en) 2017-03-16 2022-11-01 Fastree3D Sa Apparatus for beam shaping the pulsed laser emission of a remote sensing operating at wavelengths in the retinal hazard region
US10556585B1 (en) 2017-04-13 2020-02-11 Panosense Inc. Surface normal determination for LIDAR range samples by detecting probe pulse stretching
US10423162B2 (en) 2017-05-08 2019-09-24 Nio Usa, Inc. Autonomous vehicle logic to identify permissioned parking relative to multiple classes of restricted parking
US10710633B2 (en) 2017-07-14 2020-07-14 Nio Usa, Inc. Control of complex parking maneuvers and autonomous fuel replenishment of driverless vehicles
US10369974B2 (en) 2017-07-14 2019-08-06 Nio Usa, Inc. Control and coordination of driverless fuel replenishment for autonomous vehicles
US11493601B2 (en) 2017-12-22 2022-11-08 Innovusion, Inc. High density LIDAR scanning
US11675050B2 (en) 2018-01-09 2023-06-13 Innovusion, Inc. LiDAR detection systems and methods
US11022971B2 (en) 2018-01-16 2021-06-01 Nio Usa, Inc. Event data recordation to identify and resolve anomalies associated with control of driverless vehicles
US11808888B2 (en) 2018-02-23 2023-11-07 Innovusion, Inc. Multi-wavelength pulse steering in LiDAR systems
US11675053B2 (en) 2018-06-15 2023-06-13 Innovusion, Inc. LiDAR systems and methods for focusing on ranges of interest
CN114114606A (zh) 2018-11-14 2022-03-01 图达通爱尔兰有限公司 使用多面镜的lidar系统和方法
US11543528B2 (en) 2018-11-30 2023-01-03 University Of South Florida System and method of dynamic light source control
DE112020000407B4 (de) 2019-01-10 2024-02-15 Innovusion, Inc. Lidar-systeme und -verfahren mit strahllenkung und weitwinkelsignaldetektion
US11486970B1 (en) 2019-02-11 2022-11-01 Innovusion, Inc. Multiple beam generation from a single source beam for use with a LiDAR system
CN110058335A (zh) * 2019-04-30 2019-07-26 西安炬光科技股份有限公司 光学元件、治疗仪和光斑变换的实现方法
US11556000B1 (en) 2019-08-22 2023-01-17 Red Creamery Llc Distally-actuated scanning mirror
DE102020117789A1 (de) 2020-07-06 2022-01-13 Bartenbach Holding Gmbh Leuchte
DE102020214473A1 (de) 2020-11-18 2022-05-19 Robert Bosch Gesellschaft mit beschränkter Haftung LiDAR-System
US11789128B2 (en) 2021-03-01 2023-10-17 Innovusion, Inc. Fiber-based transmitter and receiver channels of light detection and ranging systems
US11555895B2 (en) 2021-04-20 2023-01-17 Innovusion, Inc. Dynamic compensation to polygon and motor tolerance using galvo control profile
US11614521B2 (en) 2021-04-21 2023-03-28 Innovusion, Inc. LiDAR scanner with pivot prism and mirror
US11662439B2 (en) 2021-04-22 2023-05-30 Innovusion, Inc. Compact LiDAR design with high resolution and ultra-wide field of view
CN117413199A (zh) 2021-05-21 2024-01-16 图达通智能美国有限公司 使用lidar扫描仪内部的检流计镜进行智能扫描的移动配置文件

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3076377A (en) * 1958-10-06 1963-02-05 Dietzgen Co Eugene Optical projector system
US3170980A (en) * 1962-05-09 1965-02-23 Rca Corp Optical tunnel system
US3476463A (en) * 1965-05-11 1969-11-04 Perkin Elmer Corp Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface
US4195913A (en) * 1977-11-09 1980-04-01 Spawr Optical Research, Inc. Optical integration with screw supports
US4327972A (en) * 1979-10-22 1982-05-04 Coulter Electronics, Inc. Redirecting surface for desired intensity profile
US4547044A (en) * 1983-03-31 1985-10-15 International Business Machines Corporation Beam-folding wedge tunnel
JPS60150025A (ja) * 1984-01-18 1985-08-07 Nec Corp レ−ザビ−ム重ね合わせ光学系
IT1208674B (it) * 1984-03-16 1989-07-10 Vitali Gianfranco Perfezionamento nei dispositivi per la omogeneizzazione e diffusione di fasci laser
FR2578691B1 (fr) * 1985-03-06 1987-03-20 Bouchlaghem Daniel Generateur laser a puissance ajustable
US4744615A (en) * 1986-01-29 1988-05-17 International Business Machines Corporation Laser beam homogenizer
WO1990000138A1 (en) * 1988-06-27 1990-01-11 Toyo Seikan Kaisha, Ltd. Label sticking apparatus for rotary blow molding machines
US4862257A (en) * 1988-07-07 1989-08-29 Kaman Aerospace Corporation Imaging lidar system
DE4004423C2 (de) * 1989-02-17 1998-05-14 Mezotraslevoj Nt Kompleks Mikr Vorrichtung zur chirurgischen Behandlung der Ametropie
NL8902485A (nl) * 1989-10-06 1991-05-01 Optische Ind De Oude Delft Nv Inrichting voor het verschaffen van een bundel laserstraling met een homogene energieverdeling.
US5109465A (en) * 1990-01-16 1992-04-28 Summit Technology, Inc. Beam homogenizer
US5054869A (en) * 1990-03-02 1991-10-08 Axiom Analytical, Inc. Light pipe system having maximum radiation throughput
US5231401A (en) * 1990-08-10 1993-07-27 Kaman Aerospace Corporation Imaging lidar system

Also Published As

Publication number Publication date
ATE153778T1 (de) 1997-06-15
US5303084A (en) 1994-04-12
EP0493365A3 (en) 1993-09-29
EP0493365A2 (de) 1992-07-01
EP0493365B1 (de) 1997-05-28
US5335070A (en) 1994-08-02

Similar Documents

Publication Publication Date Title
ATE153778T1 (de) Homogenisieranordnung für laserstrahlung und dieselbe enthaltendes abbildendes lidarsystem
US5440423A (en) Optical illumination instrument
FI935738A (fi) Valaisu- ja kuvantamisalijärjestelmiä linssitarkastusjärjestelmää varten
KR900008299A (ko) 조명방법 및 그 장치와 투영식 노출방법 및 그 장치
BR9502751A (pt) Sistema e método para a inspeção de lentes
ATE176416T1 (de) Laserbearbeitungsgerät
HK1062709A1 (en) Apparatus and a method for pulse detection and characterization
DE69924358D1 (de) Laserlichtquelle mit diffraktiver optischer strahlintegration
KR950024024A (ko) 투영노광장치 및 이를 이용한 디바이스 제조방법
JPS59216118A (ja) 弓形の発光を生じる装置
DE50001951D1 (de) Ophthalmologisches gerät mit einem beleuchtungs- und/oder strahlenbehandlungsstrahl, dessen flächige intensitätsverteilung einstellbar ist, sowie anordnung mit diesem gerät zur augenbehandlung
KR970007502A (ko) 조명장치 및 그 장치를 구비한 투영 노광장치
DE60332545D1 (de) Optisches beleuchtungssystem, belichtungssystem und belichtungsverfahren
ATE310258T1 (de) Schmalbandiger uv laser mit justierlaser im sichtbaren bereich
DE69207787T2 (de) Augenbeobachtungsgerät
KR950001868A (ko) 조명장치 및 동장치를 사용하는 노광장치
JPS6470774A (en) Image forming device
JPS57204425A (en) Artificial light source device with variable intensity
JPS6476720A (en) Illumination optical system for semiconductor exposure device
SE8801704D0 (sv) Anordning vid metanordningar utnyttjande laserstralar
JPH0721585B2 (ja) 照明光学系
KR910020477A (ko) 임의 형상의 균일 방사 가열 방법
IT1278236B1 (it) Dispositivo centrafari

Legal Events

Date Code Title Description
8332 No legal effect for de