DE69218698D1 - Führungsvorrichtung für vibrationsangetriebenen Motor - Google Patents

Führungsvorrichtung für vibrationsangetriebenen Motor

Info

Publication number
DE69218698D1
DE69218698D1 DE69218698T DE69218698T DE69218698D1 DE 69218698 D1 DE69218698 D1 DE 69218698D1 DE 69218698 T DE69218698 T DE 69218698T DE 69218698 T DE69218698 T DE 69218698T DE 69218698 D1 DE69218698 D1 DE 69218698D1
Authority
DE
Germany
Prior art keywords
guide device
driven motor
vibration driven
vibration
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69218698T
Other languages
English (en)
Other versions
DE69218698T2 (de
Inventor
Hiroyuki Seki
Atsushi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69218698D1 publication Critical patent/DE69218698D1/de
Publication of DE69218698T2 publication Critical patent/DE69218698T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
DE69218698T 1991-09-05 1992-09-04 Führungsvorrichtung für vibrationsangetriebenen Motor Expired - Fee Related DE69218698T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3226047A JPH0564467A (ja) 1991-09-05 1991-09-05 振動波リニアモーター

Publications (2)

Publication Number Publication Date
DE69218698D1 true DE69218698D1 (de) 1997-05-07
DE69218698T2 DE69218698T2 (de) 1997-09-11

Family

ID=16838958

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69218698T Expired - Fee Related DE69218698T2 (de) 1991-09-05 1992-09-04 Führungsvorrichtung für vibrationsangetriebenen Motor

Country Status (4)

Country Link
US (1) US5596242A (de)
EP (1) EP0530822B1 (de)
JP (1) JPH0564467A (de)
DE (1) DE69218698T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066986A (ja) * 1992-06-17 1994-01-14 Canon Inc 振動波モーター及びその製造方法
JP3155109B2 (ja) * 1993-01-22 2001-04-09 キヤノン株式会社 振動波駆動装置およびプリンタ装置
JP2990476B2 (ja) * 1993-05-11 1999-12-13 セイコーインスツルメンツ株式会社 プリンタ装置
US5589723A (en) * 1994-03-29 1996-12-31 Minolta Co., Ltd. Driving apparatus using transducer
US6628046B2 (en) 1997-05-27 2003-09-30 Canon Kabushiki Kaisha Vibration type actuator
JP4731723B2 (ja) * 2001-05-24 2011-07-27 キヤノン株式会社 振動波駆動装置の製造方法
JP4027090B2 (ja) * 2001-12-27 2007-12-26 キヤノン株式会社 振動体および振動波駆動装置
JP5849662B2 (ja) * 2011-12-06 2016-02-03 セイコーエプソン株式会社 圧電モーター、駆動装置、電子部品検査装置、電子部品搬送装置、印刷装置、ロボットハンド、およびロボット
JP5969976B2 (ja) * 2013-12-27 2016-08-17 キヤノン株式会社 振動波モータ

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3246608A (en) * 1964-01-13 1966-04-19 Richard C Cooper Conveyor system
US4786836A (en) * 1984-03-01 1988-11-22 Matsushita Electric Industrail Co., Ltd. Piezoelectric motor
US4613782A (en) * 1984-03-23 1986-09-23 Hitachi, Ltd. Actuator
JPS61154487A (ja) * 1984-12-26 1986-07-14 Canon Inc リニア振動波モ−タ
US4752711A (en) * 1985-03-29 1988-06-21 Canon Kabushiki Kaisha Vibration wave motor
JPS61224881A (ja) * 1985-03-29 1986-10-06 Canon Inc 振動波モ−タ
JPS6277969A (ja) * 1985-10-02 1987-04-10 Nec Corp プリンタ装置
JPS62107685A (ja) * 1985-11-05 1987-05-19 Matsushita Electric Ind Co Ltd 2方向微小変位装置
JPS63244205A (ja) * 1987-03-31 1988-10-11 Toshiba Corp 位置決め装置
US5134335A (en) * 1987-11-25 1992-07-28 Matsushita Electric Industrial Co., Ltd. Linear actuator
JPH01303361A (ja) * 1988-05-30 1989-12-07 Komatsu Ltd 移動体の送り装置
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
JP2506170B2 (ja) * 1988-10-18 1996-06-12 アルプス電気株式会社 X−yステ―ジ
JP2839543B2 (ja) * 1989-04-12 1998-12-16 株式会社東芝 変位発生装置
JPH0389875A (ja) * 1989-08-31 1991-04-15 Brother Ind Ltd リニア超音波モータ
US5140214A (en) * 1989-09-06 1992-08-18 Canon Kabushiki Kaisha Vibration wave driven apparatus
JPH03155375A (ja) * 1989-11-10 1991-07-03 Canon Inc リニアモータ装置
JPH03183376A (ja) * 1989-12-08 1991-08-09 Canon Inc 振動波モータ
JPH03183381A (ja) * 1989-12-12 1991-08-09 Canon Inc 振動波モータ
JP2993702B2 (ja) * 1990-04-02 1999-12-27 キヤノン株式会社 振動波駆動装置

Also Published As

Publication number Publication date
EP0530822B1 (de) 1997-04-02
EP0530822A2 (de) 1993-03-10
JPH0564467A (ja) 1993-03-12
DE69218698T2 (de) 1997-09-11
EP0530822A3 (en) 1993-10-06
US5596242A (en) 1997-01-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee