DE69213858T2 - Einrichtung und Verfahren zum optischen Schalten - Google Patents

Einrichtung und Verfahren zum optischen Schalten

Info

Publication number
DE69213858T2
DE69213858T2 DE69213858T DE69213858T DE69213858T2 DE 69213858 T2 DE69213858 T2 DE 69213858T2 DE 69213858 T DE69213858 T DE 69213858T DE 69213858 T DE69213858 T DE 69213858T DE 69213858 T2 DE69213858 T2 DE 69213858T2
Authority
DE
Germany
Prior art keywords
optical switching
switching
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69213858T
Other languages
English (en)
Other versions
DE69213858D1 (de
Inventor
Gregory A Magel
T Gus Mcdonald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE69213858D1 publication Critical patent/DE69213858D1/de
Application granted granted Critical
Publication of DE69213858T2 publication Critical patent/DE69213858T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
DE69213858T 1991-06-28 1992-06-26 Einrichtung und Verfahren zum optischen Schalten Expired - Fee Related DE69213858T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/723,105 US5155778A (en) 1991-06-28 1991-06-28 Optical switch using spatial light modulators

Publications (2)

Publication Number Publication Date
DE69213858D1 DE69213858D1 (de) 1996-10-24
DE69213858T2 true DE69213858T2 (de) 1997-02-13

Family

ID=24904867

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69213858T Expired - Fee Related DE69213858T2 (de) 1991-06-28 1992-06-26 Einrichtung und Verfahren zum optischen Schalten

Country Status (7)

Country Link
US (1) US5155778A (de)
EP (1) EP0525395B1 (de)
JP (1) JP3236350B2 (de)
KR (1) KR100285697B1 (de)
CN (1) CN1031531C (de)
DE (1) DE69213858T2 (de)
TW (1) TW258792B (de)

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US5774604A (en) * 1996-10-23 1998-06-30 Texas Instruments Incorporated Using an asymmetric element to create a 1XN optical switch
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
US6191882B1 (en) * 1997-09-22 2001-02-20 Creo Srl Micromachined linear light valve
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US6187515B1 (en) * 1998-05-07 2001-02-13 Trw Inc. Optical integrated circuit microbench system
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
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US6242363B1 (en) 1999-08-11 2001-06-05 Adc Telecommunications, Inc. Method of etching a wafer layer using a sacrificial wall to form vertical sidewall
US6316282B1 (en) 1999-08-11 2001-11-13 Adc Telecommunications, Inc. Method of etching a wafer layer using multiple layers of the same photoresistant material
GB9923428D0 (en) * 1999-10-04 1999-12-08 Thomas Swan & Company Limited Optical switch
US6483969B1 (en) * 1999-12-01 2002-11-19 The United States Of America As Represented By The Secretary Of The Army Apparatus, assembly, and method for making micro-fixtured lensed assembly for optoelectronic devices and optical fibers
US6430330B1 (en) 2000-04-14 2002-08-06 C Speed Corporation Modular approach to substrate population in a fiber optic cross connect
US6374007B1 (en) 2000-04-14 2002-04-16 C Speed Corporation Double hermetic package for fiber optic cross connect
US6556740B1 (en) 2000-04-14 2003-04-29 Nanogear Fiber optic cross connect with folding of light beams
US6347167B1 (en) 2000-04-14 2002-02-12 C Speed Corporation Fiber optic cross connect with uniform redirection length and folding of light beams
US6396973B1 (en) 2000-04-14 2002-05-28 C Speed Corporation Fiber optic cross connect with transparent substrate
US6430331B1 (en) * 2000-04-14 2002-08-06 C Speed Corporation Double hermetic package for fiber optic cross connect
SE517550C2 (sv) * 2000-04-17 2002-06-18 Micronic Laser Systems Ab Mönstergenereringssystem användande en spatialljusmodulator
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6810176B2 (en) 2000-08-07 2004-10-26 Rosemount Inc. Integrated transparent substrate and diffractive optical element
US7003187B2 (en) 2000-08-07 2006-02-21 Rosemount Inc. Optical switch with moveable holographic optical element
KR100294052B1 (ko) * 2000-08-21 2001-06-15 김춘호 마이크로 집적 렌즈를 채용한 스캐닝 리니어 어레이표시장치
KR100359942B1 (ko) * 2000-09-26 2002-11-07 엘지전자 주식회사 광 스위치
KR100349941B1 (ko) * 2000-09-29 2002-08-24 삼성전자 주식회사 광 스위칭을 위한 마이크로 액추에이터 및 그 제조방법
DE10061259A1 (de) * 2000-12-01 2002-06-27 Fraunhofer Ges Forschung Schaltungsanordnung
KR20020065799A (ko) * 2001-02-07 2002-08-14 엘지전자 주식회사 광 스위치
WO2002079852A1 (en) * 2001-03-30 2002-10-10 Yoon-Joong Yong Light modulating system using deformable mirror arrays
US6490384B2 (en) 2001-04-04 2002-12-03 Yoon-Joong Yong Light modulating system using deformable mirror arrays
US6801682B2 (en) 2001-05-18 2004-10-05 Adc Telecommunications, Inc. Latching apparatus for a MEMS optical switch
US6859578B2 (en) * 2001-05-18 2005-02-22 Nuonics, Inc. Fault-tolerant fiber-optical multiwavelength processor
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
AU2003220012A1 (en) * 2002-03-01 2003-09-16 Rosemount Inc. Optical switch with 3d waveguides
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
KR100492488B1 (ko) * 2002-09-27 2005-06-02 (주)세협테크닉스 다층구조의 웨이퍼를 이용한 광 스위치
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US7203398B2 (en) * 2003-03-20 2007-04-10 Texas Instruments Incorporated Compact DMD-based optical module
CN100368841C (zh) * 2005-09-08 2008-02-13 中国科学院半导体研究所 热光开关阵列或热光调制器的封装结构及其封装方法
US7428092B2 (en) * 2005-11-30 2008-09-23 Spatial Photonics, Inc. Fast-response micro-mechanical devices
CN103842889A (zh) 2011-09-30 2014-06-04 惠普发展公司，有限责任合伙企业 包括z形部的光功率分路器
JP6183479B2 (ja) * 2016-01-28 2017-08-23 住友大阪セメント株式会社 光変調器及びそれを用いた光送信装置

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JPS6183515A (ja) * 1984-09-18 1986-04-28 Honda Motor Co Ltd 導光回路ユニツト
EP0226296B1 (de) * 1985-10-16 1992-11-04 BRITISH TELECOMMUNICATIONS public limited company Optische Komponente mit Wellenleiter
US4811210A (en) * 1985-11-27 1989-03-07 Texas Instruments Incorporated A plurality of optical crossbar switches and exchange switches for parallel processor computer
US4838637A (en) * 1987-05-04 1989-06-13 Unisys Corporation Integrated solid state non-volatile fiber optic switchboard
US4859012A (en) * 1987-08-14 1989-08-22 Texas Instruments Incorporated Optical interconnection networks
US4856863A (en) * 1988-06-22 1989-08-15 Texas Instruments Incorporated Optical fiber interconnection network including spatial light modulator
US5071232A (en) * 1989-08-01 1991-12-10 Ricoh Company, Ltd. Optical deflection element and space optical matrix switching device

Also Published As

Publication number Publication date
TW258792B (de) 1995-10-01
CN1031531C (zh) 1996-04-10
EP0525395B1 (de) 1996-09-18
KR930000981A (ko) 1993-01-16
CN1069127A (zh) 1993-02-17
DE69213858D1 (de) 1996-10-24
JP3236350B2 (ja) 2001-12-10
JPH06175049A (ja) 1994-06-24
EP0525395A1 (de) 1993-02-03
US5155778A (en) 1992-10-13
KR100285697B1 (ko) 2001-04-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee